公开(公告)号：US06617097B2

公开(公告)日：2003-09-09

申请号：US09747910

申请日：2000-12-22

申请人： Yasunori Nishimura ,  Taimi Oketani ,  Tsuyoshi Naraki

发明人： Yasunori Nishimura ,  Taimi Oketani ,  Tsuyoshi Naraki

IPC分类号： G03C556

CPC分类号： G03F9/7084 ,  G03F7/70275 ,  G03F7/70358 ,  G03F7/70433

摘要： The present invention aims at reducing the number of scanning exposure and at enhancing throughput. the above-mentioned objective is achieved by allowing a substrate 14 to be placed in sideways with respect to a substrate holder 15a (placing the longer sides of the substrate in parallel to the shorter sides of the substrate holder) depending on the size of the apparatus and the size of the substrate 14. It is acceptable even when areas other than an effective exposure area of the substrate 14 should project out from the substrate holder.

摘要翻译： 本发明的目的在于减少扫描曝光次数和提高生产量。上述目的是通过使基板14相对于基板保持器15a侧向放置（将基板的长边平行放置 到基板保持器的短边），这取决于装置的尺寸和基板14的尺寸。即使基板14的有效曝光区域以外的区域从基板支架突出出来也是可以接受的。

公开(公告)号：US06496249B2

公开(公告)日：2002-12-17

申请号：US09766337

申请日：2001-01-19

申请人： Yasunori Nishimura ,  Taimi Oketani ,  Tsuyoshi Naraki

发明人： Yasunori Nishimura ,  Taimi Oketani ,  Tsuyoshi Naraki

IPC分类号： G03B2760

CPC分类号： G03F7/707 ,  G03F7/70275 ,  G03F7/70358 ,  G03F7/70425 ,  G03F7/70433 ,  G03F7/70916

摘要： The present invention aims at preventing deterioration of flatness of a substrate and contamination of a substrate-holding surface of a substrate holder, which are caused by a resist leaking into the back surface of the substrate. A substrate-holding surface of a substrate holder is provided with a first pair of grooves 31 and 32 extending from one end to the other along a scanning direction and a second pair of grooves 33 and 34 extending from one end to the other along a direction generally perpendicular to the scanning direction. The first and second grooves are positioned such that they make contact with the periphery of the substrate when the substrate is vertically or horizontally placed on the substrate holder. Even when a resist on a substrate leaks into the periphery of the back surface, the resist escapes into the grooves, thereby preventing deterioration of the flatness of the substrate or contamination of the substrate-holding surface.

摘要翻译： 本发明的目的在于防止由于抗蚀剂渗透到基板的后表面而导致的基板的平坦度的劣化和基板保持件的基板保持表面的污染。基板保持器的基板保持表面是 设置有沿着扫描方向从一端延伸到另一端的第一对槽31和32以及沿着与扫描方向大致垂直的方向从一端延伸到另一端的第二对槽33和34。 第一和第二槽定位成使得当衬底垂直或水平放置在衬底保持器上时，它们与衬底的周边接触。 即使当基板上的抗蚀剂泄漏到背面的周边时，抗蚀剂也可以逸出到槽中，从而防止基板的平坦度的劣化或基板保持面的污染。

公开(公告)号：US20050141543A1

公开(公告)日：2005-06-30

申请号：US11019158

申请日：2004-12-23

申请人： Yasunori Nishimura

发明人： Yasunori Nishimura

IPC分类号： H04B7/24 ,  H04L12/28 ,  H04W52/02 ,  H04W74/04 ,  H04W74/08 ,  H04W84/12 ,  H04B7/212

CPC分类号： H04W74/06 ,  H04W60/04 ,  Y02D70/142 ,  Y02D70/23

摘要： A competition avoidance control method for a data transmission-reception system, a data transmission-reception system and a terminal for a data transmission-reception system for reducing electricity consumption by the terminal in wait state to send a PS-POLL. Each terminal sends a PS-POLL to an access point after a designated time has passed. Therefore, the terminals hardly send the PS-POLLs simultaneously to the access point. Thus, the terminals can avoid wasteful standby state, thus consuming lower amount of electricity while waiting to send PS-POLL.

摘要翻译： 用于数据发送接收系统的竞争回避控制方法，数据发送接收系统和数据发送接收系统的终端，用于减少终端在等待状态下的电力消耗以发送PS-POLL。 每个终端在指定的时间过去之后将PS-POLL发送到接入点。 因此，终端几乎不会将PS-POLL同时发送到接入点。 因此，终端可以避免浪费待机状态，从而在等待发送PS-POLL时消耗较少的电量。

公开(公告)号：US06801553B2

公开(公告)日：2004-10-05

申请号：US09988662

申请日：2001-11-20

申请人： Masao Imaki ,  Yoshihito Hirano ,  Makoto Sato ,  Kenji Masuda ,  Akihiro Adachi ,  Yasunori Nishimura ,  Shinichi Takagi

发明人： Masao Imaki ,  Yoshihito Hirano ,  Makoto Sato ,  Kenji Masuda ,  Akihiro Adachi ,  Yasunori Nishimura ,  Shinichi Takagi

IPC分类号： H01S313

CPC分类号： H01S5/0687 ,  H01S5/005 ,  H01S5/02248

摘要： A wavelength monitor comprises a cylindrical lens configured to allow a laser beam emitted from a semiconductor laser to pass therethrough, first and second photodetectors configured to receive the laser beam through the cylindrical lens, and a wavelength filter disposed in an optical path between the semiconductor laser and the first photodetector.

摘要翻译： 波长监视器包括被配置为允许从半导体激光器发射的激光束通过的柱面透镜，被配置为接收通过柱面透镜的激光束的第一和第二光电检测器，以及设置在半导体激光器之间的光路中的波长滤光器 和第一光电检测器。

公开(公告)号：US6104449A

公开(公告)日：2000-08-15

申请号：US190711

申请日：1998-11-12

申请人： Eiichi Takahashi ,  Yasunori Nishimura ,  Tadanori Hishida

发明人： Eiichi Takahashi ,  Yasunori Nishimura ,  Tadanori Hishida

IPC分类号： G02F1/1345 ,  G02F1/136 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/30 ,  G02F3/1333

CPC分类号： G02F1/136204

摘要： A liquid crystal display device includes: an array substrate; a counter substrate facing the array substrate; and a liquid crystal layer interposed between the array substrate and the counter substrate, wherein the array substrate includes: a plurality of pixel electrodes arranged in a matrix in a display region; a plurality of gate lines; a plurality of source lines which cross the plurality of gate lines; an insulating layer provided between the plurality of gate lines and the plurality of source lines; a plurality of switching elements respectively connected to respective ones of the plurality of the gate lines, the plurality of source lines, and the plurality of pixel electrodes; and a short ring, a plurality of first inspection signal voltage input terminals and a plurality of depletion-type thin film transistors (DTFT) provided in a peripheral region adjacent the display region, and wherein each of the plurality of gate lines and the plurality of source lines is connected to the short ring via respective ones of the plurality of first inspection signal voltage input terminals and respective ones of the plurality of depletion-type thin film transistors, and the plurality of depletion-type thin film transistors is located between the short ring and the plurality of first inspection signal voltage input terminals, the plurality of depletion-type thin film transistors control electrical conduction between the short ring and the plurality of gate lines and source lines.

摘要翻译： 液晶显示装置包括：阵列基板; 面对阵列基板的对置基板; 以及插入在所述阵列基板和所述对置基板之间的液晶层，其中，所述阵列基板包括：在显示区域中以矩阵状排列的多个像素电极; 多条栅极线; 跨越多条栅极线的多条源极线; 绝缘层，设置在所述多个栅极线与所述多个源极线之间; 多个开关元件，分别连接到多个栅极线，多个源极线和多个像素电极中的相应的栅极线， 以及设置在与显示区域相邻的周边区域中的短环，多个第一检查信号电压输入端子和多个耗尽型薄膜晶体管（DTFT），并且其中，多条栅极线和多条栅线 源极线通过多个第一检测信号电压输入端子和多个耗尽型薄膜晶体管中的相应的第一检测信号电压输入端子和相应的多个耗尽型薄膜晶体管中的相应的一个连接到短环，并且多个耗尽型薄膜晶体管位于短路 多个第一检查信号电压输入端子，多个耗尽型薄膜晶体管控制短环与多条栅极线和源极线之间的导通。

公开(公告)号：US20090059717A1

公开(公告)日：2009-03-05

申请号：US12219917

申请日：2008-07-30

申请人： Kazutoshi Itoh ,  Yasunori Nishimura

发明人： Kazutoshi Itoh ,  Yasunori Nishimura

IPC分类号： G05D11/02

CPC分类号： G05D11/132 ,  Y10T137/86461 ,  Y10T137/87885

摘要： A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.

摘要翻译： 布置能够快速稳定要混合的多种流体的流速的流体混合系统，以混合流体并将其混合物输送到容器中。 该系统包括用于各流体的多个开关阀并将流体输送到容器。 使开关阀按照各自的占空比顺序打开和关闭，每个占空比表示循环中的开/关比。

公开(公告)号：US20070295405A1

公开(公告)日：2007-12-27

申请号：US11812051

申请日：2007-06-14

申请人： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

发明人： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

IPC分类号： F16K3/36

CPC分类号： F16K27/003 ,  F16K7/14 ,  F16K31/06 ,  H01L21/31691 ,  Y10T137/4259 ,  Y10T137/87885

摘要： A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material. The unit comprises: a manifold internally formed with a flow passage; and a plurality of fluid control valves mounted on the manifold, wherein the plurality of fluid control valves includes: a liquid raw material control valve for controlling supply of the liquid raw material to the flow passage; a cleaning solution control valve for controlling supply of a cleaning solution to the flow passage; a purge gas control valve for controlling supply of a purge gas to the flow passage; and a first introducing control valve connectable to the vaporizer for controlling supply of a fluid from the flow passage to the vaporizer, the purge gas control valve, the cleaning solution control valve, the liquid raw material control valve, and the first introducing control valve being mounted on the manifold in this order from an upstream side of the manifold, wherein the flow passage is connected to valve ports of the plurality of control valves respectively, the valve ports communicating with valve openings of the respective control valves, and the flow passage is configured to allow the purge gas supplied from the purge gas control valve to directly flow in the valve ports of the cleaning solution control valve and the liquid raw material control valve placed downstream from the purge gas control valve.

摘要翻译： 用于蒸发器的液体原料供应单元适于将液体原料供应到蒸发液体原料的蒸发器。 该单元包括：内部形成有流动通道的歧管; 以及安装在所述歧管上的多个流体控制阀，其中，所述多个流体控制阀包括：液体原料控制阀，用于控制所述液体原料供给所述流路; 清洗液控制阀，用于控制向所述流路供给清洗液; 吹扫气体控制阀，用于控制向所述流动通道供应净化气体; 以及可连接到蒸发器的第一引入控制阀，用于控制从流动通道到蒸发器的流体供应，吹扫气体控制阀，清洗溶液控制阀，液体原料控制阀和第一引入控制阀是 从歧管的上游侧依次安装在歧管上，其中流路分别连接到多个控制阀的阀口，与各个控制阀的阀口连通的阀口，流路是 被配置为允许从净化气体控制阀提供的净化气体直接流入清洗液控制阀的阀口和设置在净化气体控制阀下游的液体原料控制阀。

公开(公告)号：US07301974B2

公开(公告)日：2007-11-27

申请号：US10477018

申请日：2001-05-08

申请人： Masao Imaki ,  Yoshihito Hirano ,  Makoto Satou ,  Kenji Masuda ,  Akihiro Adachi ,  Shinichi Takagi ,  Yasunori Nishimura

发明人： Masao Imaki ,  Yoshihito Hirano ,  Makoto Satou ,  Kenji Masuda ,  Akihiro Adachi ,  Shinichi Takagi ,  Yasunori Nishimura

IPC分类号： H01S3/13

CPC分类号： G01J9/00 ,  G01J4/04 ,  H01S5/02252 ,  H01S5/0687

摘要： An optical signal emitted from a semiconductor laser is converged by a lens and then received by a single uniaxial birefringent crystal having a C axis that is inclined at an angle other than 90 degrees against a laser optical axis to output an optical signal having a polarized wave component of constant intensity corresponding to the wavelength of the optical signal regardless of temperature changes. The optical signal has an ordinary ray vibrating in a direction perpendicular to a plane including both the C axis and the laser optical axis, and an extraordinary ray vibrating in a direction perpendicular to both the ordinary ray and the laser optical axis. A first main photo detector detects the intensity of a p-polarized component of the optical signal that has passed through a polarizer and a second photo detector directly receives the optical signal converged by the lens.

摘要翻译： 从半导体激光器发射的光信号由透镜会聚，然后由具有相对于激光光轴倾斜成90度以外的角度的C轴的单个单轴双折射晶体接收，以输出具有偏振波的光信号 对应于光信号的波长的恒定强度的分量，不管温度变化如何。 光信号具有在垂直于包括C轴和激光光轴的平面的方向振动的普通光线，以及在垂直于普通光线和激光光轴的方向上振动的异常光线。 第一主光电检测器检测已经通过偏振器的光信号的p偏振分量的强度，第二光检测器直接接收由透镜会聚的光信号。

公开(公告)号：US07148965B2

公开(公告)日：2006-12-12

申请号：US10477113

申请日：2002-12-12

申请人： Yasunori Nishimura ,  Shinichi Takagi

发明人： Yasunori Nishimura ,  Shinichi Takagi

IPC分类号： H01S5/22 ,  H01S5/687 ,  G01N21/27 ,  G01J3/51

CPC分类号： H01S5/0687 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01S5/005 ,  H01S5/02216 ,  H01S5/02252 ,  H01S5/02284 ,  H01S5/02415 ,  H01S5/02438 ,  H01L2924/00014

摘要： A wavelength filter is disposed between a laser diode and a photodiode that receives the rear-facet output light of the laser diode. Either a part on one side of an input or an output surface of the wavelength filter is bounded to a protrusion provided in a metal holder for holding the wavelength filter. As a result, a support structure is obtained that does not bring a damage on the wavelength filter caused by degradation of optical characteristics or temperature variation of the wavelength filter when support-fixing a wavelength filter having a complex refractive index crystal.

摘要翻译： 波长滤波器设置在激光二极管和接收激光二极管的后面输出光的光电二极管之间。 波长滤波器的输入或输出表面的一侧的一部分与设置在用于保持波长滤波器的金属保持器中的突起接合。 结果，获得了支撑结构，当支撑固定具有复合折射率晶体的波长滤光器时，不会由于波长滤光器的光学特性的劣化或温度变化而对波长滤波器造成损害。

公开(公告)号：US20120281687A1

公开(公告)日：2012-11-08

申请号：US13521136

申请日：2011-01-11

申请人： Yasunori Nishimura

发明人： Yasunori Nishimura

IPC分类号： H04W88/00

CPC分类号： H04B15/02

摘要： The present invention is applied to a base station for periodically transmitting a transmission signal to a terminal. The base station includes: a transmitter/receiver that receives a reception signal; a noise verifier that outputs information regarding a generation time and a generation period of the noise that is periodically generated if the reception signal includes the noise; and a transmission timing determiner that determines setting a transmission period of the transmission signal to the same period as the generation period of the noise based on the information regarding the generation time and the generation period of the noise that is output from the noise verifier and shifting a start position of the transmission period by a predetermined time from an arbitrary generation time of the noise, wherein the transmitter/receiver transmits the transmission signal to the terminal at transmission timing of the transmission signal determined by the transmission timing determiner.

摘要翻译： 本发明适用于向终端周期性地发送发送信号的基站。 基站包括：接收接收信号的发射机/接收机; 噪声检验器，如果接收信号包括噪声，则输出关于周期性产生的噪声的生成时间和生成周期的信息; 以及发送定时确定器，其基于关于从噪声校验器输出的噪声的生成时间和生成周期的信息和移位来确定将发送信号的发送周期设置为与噪声的生成周期相同的周期 从发送定时确定器确定的发送信号的发送定时将发送时间的开始位置设定为从噪声的任意生成时间起的预定时间，发送接收器向终端发送发送信号。