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公开(公告)号:US20070278427A1
公开(公告)日:2007-12-06
申请号:US11543346
申请日:2006-10-04
申请人: Yongzhang Huang , Brian S. Freer , John Ye , Christopher Godfrey , Michael A. Graf , Patrick Splinter
发明人: Yongzhang Huang , Brian S. Freer , John Ye , Christopher Godfrey , Michael A. Graf , Patrick Splinter
IPC分类号: H01J37/317
CPC分类号: H01J37/304 , H01J37/3171 , H01J2237/24507 , H01J2237/24535 , H01J2237/31703
摘要: A method derives a terminal return current or upstream current to adjust and/or compensate for variations in beam current during ion implantation. One or more individual upstream current measurements are obtained from a region of an ion implantation system. A terminal return current, or composite upstream current, is derived from the one or more current measurements. The terminal return current is then employed to adjust scanning or dose of an ion beam in order to facilitate beam current uniformity at a target wafer.
摘要翻译: 一种方法导出终端返回电流或上游电流,以调整和/或补偿离子注入期间束电流的变化。 从离子注入系统的区域获得一个或多个单独的上游电流测量。 从一个或多个电流测量导出终端返回电流或复合上游电流。 然后使用端子返回电流来调整离子束的扫描或剂量,以便于目标晶片处的束电流均匀性。
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公开(公告)号:US07557363B2
公开(公告)日:2009-07-07
申请号:US11543346
申请日:2006-10-04
申请人: Yongzhang Huang , Brian S. Freer , John Ye , Christopher Godfrey , Michael A. Graf , Patrick Splinter
发明人: Yongzhang Huang , Brian S. Freer , John Ye , Christopher Godfrey , Michael A. Graf , Patrick Splinter
IPC分类号: H01J37/317
CPC分类号: H01J37/304 , H01J37/3171 , H01J2237/24507 , H01J2237/24535 , H01J2237/31703
摘要: A method derives a terminal return current or upstream current to adjust and/or compensate for variations in beam current during ion implantation. One or more individual upstream current measurements are obtained from a region of an ion implantation system. A terminal return current, or composite upstream current, is derived from the one or more current measurements. The terminal return current is then employed to adjust scanning or dose of an ion beam in order to facilitate beam current uniformity at a target wafer.
摘要翻译: 一种方法导出终端返回电流或上游电流,以调整和/或补偿离子注入期间束电流的变化。 从离子注入系统的区域获得一个或多个单独的上游电流测量。 从一个或多个电流测量导出终端返回电流或复合上游电流。 然后使用端子返回电流来调整离子束的扫描或剂量,以便于目标晶片处的束电流均匀性。
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3.
公开(公告)号:US20080067433A1
公开(公告)日:2008-03-20
申请号:US11441609
申请日:2006-05-26
申请人: Que Weiguo , Yongzhang Huang , John Ye , David Tao , Patrick Splinter
发明人: Que Weiguo , Yongzhang Huang , John Ye , David Tao , Patrick Splinter
IPC分类号: H01J37/317
CPC分类号: H01J37/3171 , H01J37/026 , H01J37/241 , H01J37/304 , H01J37/3045 , H01J2237/0206 , H01J2237/24564 , H01J2237/2485 , H01J2237/30455 , H01J2237/31703 , Y10T307/937 , Y10T307/951 , Y10T307/957
摘要: The present invention is directed to a switch circuit and method to quickly enable or disable the ion beam to a wafer within an ion implantation system. The beam control technique may be applied to wafer doping repaint and duty factor reduction. The circuit and method may be used to quench an arc that may form between high voltage electrodes associated with an ion source to shorten the duration of the arc and mitigate non-uniform ion implantations. The circuit and method facilitates repainting the ion beam over areas where an arc was detected to recover dose loss during such arcing. A high voltage high speed switching circuit is added between each high voltage supply and its respective electrode to quickly extinguish the arc to minimize disruption of the ion beam. The high voltage switch is controlled by a trigger circuit which detects voltage or current changes to each electrode. Protection circuits for the HV switch absorb energy from reactive components and clamp any overvoltages.
摘要翻译: 本发明涉及一种用于在离子注入系统内快速启用或禁用离子束到晶片的开关电路和方法。 光束控制技术可以应用于晶片掺杂重绘和占空因数降低。 电路和方法可以用于淬灭可以在与离子源相关联的高压电极之间形成的电弧,以缩短电弧的持续时间并减轻非均匀的离子注入。 电路和方法有助于在检测到电弧的区域上重新分离离子束,以在这种电弧过程中恢复剂量损失。 在每个高压电源和其各自的电极之间增加高压高速开关电路,以快速熄灭电弧,以最小化离子束的破坏。 高压开关由触发电路控制,该触发电路检测每个电极的电压或电流变化。 HV开关的保护电路从反应部件吸收能量并夹紧任何过电压。
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4.
公开(公告)号:US07507977B2
公开(公告)日:2009-03-24
申请号:US11441609
申请日:2006-05-26
申请人: Que Weiguo , Yongzhang Huang , John Ye , David Tao , Patrick Splinter
发明人: Que Weiguo , Yongzhang Huang , John Ye , David Tao , Patrick Splinter
IPC分类号: G21K5/10
CPC分类号: H01J37/3171 , H01J37/026 , H01J37/241 , H01J37/304 , H01J37/3045 , H01J2237/0206 , H01J2237/24564 , H01J2237/2485 , H01J2237/30455 , H01J2237/31703 , Y10T307/937 , Y10T307/951 , Y10T307/957
摘要: The present invention is directed to a switch circuit and method to quickly enable or disable the ion beam to a wafer within an ion implantation system. The beam control technique may be applied to wafer doping repaint and duty factor reduction. The circuit and method may be used to quench an arc that may form between high voltage electrodes associated with an ion source to shorten the duration of the arc and mitigate non-uniform ion implantations. The circuit and method facilitates repainting the ion beam over areas where an arc was detected to recover dose loss during such arcing. A high voltage high speed switching circuit is added between each high voltage supply and its respective electrode to quickly extinguish the arc to minimize disruption of the ion beam. The high voltage switch is controlled by a trigger circuit which detects voltage or current changes to each electrode. Protection circuits for the HV switch absorb energy from reactive components and clamp any overvoltages.
摘要翻译: 本发明涉及一种用于在离子注入系统内快速启用或禁用离子束到晶片的开关电路和方法。 光束控制技术可以应用于晶片掺杂重绘和占空因数降低。 电路和方法可以用于淬灭可以在与离子源相关联的高压电极之间形成的电弧,以缩短电弧的持续时间并减轻非均匀的离子注入。 电路和方法有助于在检测到电弧的区域上重新分离离子束,以在这种电弧过程中恢复剂量损失。 在每个高压电源和其各自的电极之间增加高压高速开关电路,以快速熄灭电弧,以最小化离子束的破坏。 高压开关由触发电路控制,该触发电路检测每个电极的电压或电流变化。 HV开关的保护电路从反应部件吸收能量并夹紧任何过电压。
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公开(公告)号:US07701230B2
公开(公告)日:2010-04-20
申请号:US11742178
申请日:2007-04-30
CPC分类号: H01J37/3171 , H01J37/244 , H01J37/304 , H01J2237/24405 , H01J2237/2446 , H01J2237/24507 , H01J2237/24542 , H01J2237/24578 , H01J2237/30477
摘要: One embodiment of the invention relates to an apparatus for profiling an ion beam. The apparatus includes a current measuring device having a measurement region, wherein a cross-sectional area of the ion beam enters the measurement region. The apparatus also includes a controller configured to periodically take beam current measurements of the ion beam and to determine a two dimensional profile of the ion beam by relating the beam current measurements to sub-regions within the current measuring device. Other apparatus and methods are also disclosed.
摘要翻译: 本发明的一个实施例涉及一种用于对离子束进行成像的装置。 该装置包括具有测量区域的电流测量装置,其中离子束的横截面积进入测量区域。 该装置还包括控制器,其被配置为周期性地对离子束进行束电流测量,并且通过将束电流测量值与当前测量装置内的子区域相关联来确定离子束的二维轮廓。 还公开了其它装置和方法。
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公开(公告)号:US20080265866A1
公开(公告)日:2008-10-30
申请号:US11742178
申请日:2007-04-30
IPC分类号: G01T1/34
CPC分类号: H01J37/3171 , H01J37/244 , H01J37/304 , H01J2237/24405 , H01J2237/2446 , H01J2237/24507 , H01J2237/24542 , H01J2237/24578 , H01J2237/30477
摘要: One embodiment of the invention relates to an apparatus for profiling an ion beam. The apparatus includes a current measuring device having a measurement region, wherein a cross-sectional area of the ion beam enters the measurement region. The apparatus also includes a controller configured to periodically take beam current measurements of the ion beam and to determine a two dimensional profile of the ion beam by relating the beam current measurements to sub-regions within the current measuring device. Other apparatus and methods are also disclosed.
摘要翻译: 本发明的一个实施例涉及一种用于对离子束进行成像的装置。 该装置包括具有测量区域的电流测量装置,其中离子束的横截面积进入测量区域。 该装置还包括控制器,其被配置为周期性地对离子束进行束电流测量,并且通过将束电流测量值与当前测量装置内的子区域相关联来确定离子束的二维轮廓。 还公开了其它装置和方法。
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7.
公开(公告)号:US07476855B2
公开(公告)日:2009-01-13
申请号:US11523144
申请日:2006-09-19
申请人: Yongzhang Huang
发明人: Yongzhang Huang
IPC分类号: H01J37/137 , H01J37/30 , H01J49/20 , H01J49/30 , H01J37/304
CPC分类号: H01J49/30 , H01J37/026 , H01J37/05 , H01J37/21 , H01J37/304 , H01J37/3171 , H01J2237/024 , H01J2237/055 , H01J2237/057 , H01J2237/1502 , H01J2237/152 , H01J2237/2485 , H01J2237/3045 , H01J2237/30455 , H01J2237/31701
摘要: An ion implantation apparatus, system, and method for controlling an ion beam, wherein a mass analyzer generally positioned between an ion source and an end station is configured to selectively control a path of a desired ion beam. The mass analyzer comprises one or more of an entrance pole mechanism positionable proximate to an entrance of the mass analyzer and an exit pole mechanism positionable proximate to an exit of the mass analyzer, wherein the position of the entrance pole mechanism and exit pole mechanism generally determines the path and focal point of the desired ion beam. A controller is configured to selectively position one or more of the entrance pole mechanism and exit pole mechanism, therein generally controlling the path of the desired ion beam at the exit of the mass analyzer, wherein the control may be based on one or more detected characteristics of the desired ion beam.
摘要翻译: 用于控制离子束的离子注入装置,系统和方法,其中通常定位在离子源和终端站之间的质量分析器被配置为选择性地控制期望的离子束的路径。 质量分析器包括一个或多个可靠近质量分析器的入口定位的入口极机构和靠近质量分析器的出口定位的出口极机构,其中入口极机构和出口极机构的位置通常确定 所需离子束的路径和焦点。 控制器被配置为选择性地定位入口极机构和出口极机构中的一个或多个,其中通常控制质量分析器出口处的期望离子束的路径,其中控制可以基于一个或多个检测到的特性 的所需离子束。
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8.
公开(公告)号:US20080067435A1
公开(公告)日:2008-03-20
申请号:US11523144
申请日:2006-09-19
申请人: Yongzhang Huang
发明人: Yongzhang Huang
IPC分类号: H01J37/317 , H01J49/20 , H01J49/30
CPC分类号: H01J49/30 , H01J37/026 , H01J37/05 , H01J37/21 , H01J37/304 , H01J37/3171 , H01J2237/024 , H01J2237/055 , H01J2237/057 , H01J2237/1502 , H01J2237/152 , H01J2237/2485 , H01J2237/3045 , H01J2237/30455 , H01J2237/31701
摘要: An ion implantation apparatus, system, and method for controlling an ion beam, wherein a mass analyzer generally positioned between an ion source and an end station is configured to selectively control a path of a desired ion beam. The mass analyzer comprises one or more of an entrance pole mechanism positionable proximate to an entrance of the mass analyzer and an exit pole mechanism positionable proximate to an exit of the mass analyzer, wherein the position of the entrance pole mechanism and exit pole mechanism generally determines the path and focal point of the desired ion beam. A controller is configured to selectively position one or more of the entrance pole mechanism and exit pole mechanism, therein generally controlling the path of the desired ion beam at the exit of the mass analyzer, wherein the control may be based on one or more detected characteristics of the desired ion beam.
摘要翻译: 用于控制离子束的离子注入装置,系统和方法,其中通常定位在离子源和终端站之间的质量分析器被配置为选择性地控制期望的离子束的路径。 质量分析器包括一个或多个可靠近质量分析器的入口定位的入口极机构和靠近质量分析器的出口定位的出口极机构,其中入口极机构和出口极机构的位置通常确定 所需离子束的路径和焦点。 控制器被配置为选择性地定位入口极机构和出口极机构中的一个或多个,其中通常控制质量分析器出口处的期望离子束的路径,其中控制可以基于一个或多个检测到的特性 的所需离子束。
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公开(公告)号:US20060284117A1
公开(公告)日:2006-12-21
申请号:US11445677
申请日:2006-06-02
申请人: John Vanderpot , Yongzhang Huang
发明人: John Vanderpot , Yongzhang Huang
IPC分类号: H01J37/08
CPC分类号: H01J37/244 , H01J37/045 , H01J37/09 , H01J37/302 , H01J37/3171 , H01J2237/022 , H01J2237/026 , H01J2237/028 , H01J2237/30433 , H01J2237/31705
摘要: A system, method, and apparatus for mitigating contamination during ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the end station are provided, wherein an ion beam is formed from the ion source and travels through the mass analyzer to the end station. An ion beam dump assembly comprising a particle collector, particle attractor, and shield are associated with the mass analyzer, wherein an electrical potential of the particle attractor is operable to attract and constrain contamination particles within the particle collector, and wherein the shield is operable to shield the electrical potential of the particle attractor from an electrical potential of an ion beam within the mass analyzer.
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公开(公告)号:US20060284071A1
公开(公告)日:2006-12-21
申请号:US11445722
申请日:2006-06-02
申请人: John Vanderpot , Yongzhang Huang
发明人: John Vanderpot , Yongzhang Huang
IPC分类号: B01D59/44
CPC分类号: H01J37/244 , H01J37/045 , H01J37/09 , H01J37/302 , H01J37/3171 , H01J2237/022 , H01J2237/026 , H01J2237/028 , H01J2237/30433 , H01J2237/31705
摘要: A system, method, and apparatus for mitigating contamination associated with ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the end station are provided, wherein an ion beam is formed from the ion source and selectively travels through the mass analyzer to the end station, based on a position of a beam stop assembly. The beam stop assembly selectively prevents the ion beam from entering and/or exiting the mass analyzer, therein minimizing contamination associated with an unstable ion source during transition periods such as a start-up of the ion implantation system.
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