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公开(公告)号：US5117111A
公开(公告)日：1992-05-26
申请号：US717500
申请日：1991-06-19
IPC分类号： G01B15/00 , H01J37/04 , H01J37/153 , H01J37/28
CPC分类号： H01J37/28
摘要： An electron beam measuring apparatus for measuring size of pattern on surface of a specimen comprising, an electron gun, an electron lens for focusing the electron beam from the electron gun on the specimen surface, a deflector for deflecting the electron beam, a spot control means for forming a flat edge portion in the electron beam spot, a rotation coil for rotating the electron beam so that the flat portion of the electron beam spot becomes to be perpendicular to the scanning direction of the electron beam, a detecting means for detecting secondary electrons reflected from the specimen surface, and a computer for calculating the size of the pattern based on the secondary electrons from the detecting means. As the flat portion of the electron beam spot is perpendicular to the scanning direction, the size of pattern is measured with high accuracy.
摘要翻译： 一种电子束测量装置，用于测量试样表面上的图案尺寸，包括：电子枪，用于将来自电子枪的电子束聚焦在试样表面上的电子透镜，用于偏转电子束的偏转器，点控制装置 用于在电子束点形成平坦的边缘部分，用于旋转电子束的旋转线圈使得电子束点的平坦部分垂直于电子束的扫描方向，用于检测二次电子的检测装置 从样本表面反射的计算机，以及用于基于来自检测装置的二次电子计算图案的尺寸的计算机。 随着电子束斑点的平坦部分垂直于扫描方向，以高精度测量图案的尺寸。
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公开(公告)号：US4520421A
公开(公告)日：1985-05-28
申请号：US521610
申请日：1983-08-09
IPC分类号： H01J37/317 , H01L21/265 , H01L21/683 , H02N13/00 , H01T20/00
CPC分类号： H01L21/6831 , H02N13/00 , Y10S269/903 , Y10T279/23
摘要： A specimen support comprises a pair of specimen attracting portions each having an electrode on the lower side thereof through an electrically insulating member. The pair of specimen attracting portions is arranged in opposed relation to one side of the specimen to be attracted thereto and is made of semiconductive dielectric material. A voltage is applied between the pair of specimen attracting portions thereby to attract the specimen to the portions electrostatically.
摘要翻译： 试样支架包括一对试样吸附部分，每个试样吸附部分通过电绝缘部件在其下侧具有电极。 一对检体吸引部与被检体的一侧相对配置，由半导体介电材料构成。 在一对检体吸引部之间施加电压，从而将试样吸引到静电部。
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公开(公告)号：US4020353A
公开(公告)日：1977-04-26
申请号：US609943
申请日：1975-09-03
申请人： Syobu Saito , Yoshio Sakitani
发明人： Syobu Saito , Yoshio Sakitani
摘要： In a sample analysis apparatus, a sample to be analyzed is irradiated by the electron beam from an electron gun, and the information obtained from the sample and characteristic of the sample is detected for the analysis of the sample. The electron gun and the sample are placed respectively in an electron gun chamber and in a sample chamber. An intermediate chamber is located between the electron gun chamber and the sample chamber. That portion of the sample chamber which contains the sample is protuberant into the intermediate chamber. The intermediate chamber is evacuated to a degree of vacuum higher than the sample chamber but lower than the electron gun chamber.
摘要翻译： 在样品分析装置中，通过来自电子枪的电子束照射待分析的样品，并且从样品获得的信息和样品的特性被检测用于样品的分析。 电子枪和样品分别放置在电子枪室和样品室中。 中间室位于电子枪室和样品室之间。 包含样品的样品室的那部分突出到中间室中。 中间室抽真空至比样品室高的真空度，但低于电子枪室。
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公开(公告)号：US4274035A
公开(公告)日：1981-06-16
申请号：US056527
申请日：1979-07-11
申请人： Satoru Fukuhara , Hideo Todokoro , Yoshio Sakitani
发明人： Satoru Fukuhara , Hideo Todokoro , Yoshio Sakitani
IPC分类号： G01Q90/00 , H01J37/073 , G21K7/00
CPC分类号： H01J37/073
摘要： A field emission electron gun including a cathode, a control electrode which is disposed in the vicinity of the cathode, an anode which is disposed for accelerating electrons emitted from the cathode, and a source of a D.C. voltage to be applied between the cathode and the anode. Also, there is provided a switching arrangement capable of changing-over a potential of the control electrode between ground potential and a potential of the cathode, and an arrangement capable of varying relative positions of the cathode and the control electrode.
摘要翻译： 一种场发射电子枪，包括阴极，设置在阴极附近的控制电极，设置用于加速从阴极发射的电子的阳极和施加在阴极和阴极之间的直流电压源 阳极。 此外，提供了一种切换装置，其能够切换控制电极的接地电位和阴极的电位之间的电位，以及能够改变阴极和控制电极的相对位置的装置。
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公开(公告)号：US4090106A
公开(公告)日：1978-05-16
申请号：US751987
申请日：1976-12-20
申请人： Masahide Okumura , Yoshio Sakitani , Yukichi Ueno
发明人： Masahide Okumura , Yoshio Sakitani , Yukichi Ueno
CPC分类号： G05F1/46
摘要： A field emission electron gun according to this invention comprises a cathode for emitting electrons, an anode, a high voltage source which applies a high voltage between the cathode and the anode in order to cause emission of electrons from the cathode, a reference voltage source, voltage control means for controlling and stabilizing the output voltage of the high voltage source in response to an output voltage of the reference voltage source, means for detecting the value of an emission current from the cathode, means for delivering as an output a signal corresponding to the difference between the detected value and a desired value, and means for applying the output signal to the reference voltage source through a switch. The reference voltage source includes means which, when the switch is in the closed state, controls the output voltage of the reference voltage source in response to the difference output signal, and means which, when the switch is in the open state, continues to hold the output voltage value of the reference voltage source immediately before the opening of the switch as it is. The electron gun of this invention accordingly conducts when the switch is in the closed state, a constant current operation which makes constant the emission current from the cathode, and conducts when the switch is in the open state, a constant voltage operation which makes constant the voltage applied between the cathode and the anode.
摘要翻译： 根据本发明的场发射电子枪包括用于发射电子的阴极，阳极，在阴极和阳极之间施加高电压以从阴极发射电子的高电压源，参考电压源， 用于响应于参考电压源的输出电压控制和稳定高电压源的输出电压的电压控制装置，用于检测来自阴极的发射电流的值的装置，用于将作为输出的信号传送到对应于 检测值和期望值之间的差异，以及用于通过开关将输出信号施加到参考电压源的装置。 参考电压源包括当开关处于闭合状态时响应于差分输出信号控制参考电压源的输出电压的装置，以及当开关处于打开状态时继续保持的装置 直接在开关断开之前的参考电压源的输出电压值。 因此，当开关处于闭合状态时，本发明的电子枪导通，使来自阴极的发射电流恒定的恒定电流操作，并且当开关处于断开状态时导通，使恒定电压 施加在阴极和阳极之间的电压。
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公开(公告)号：US4019077A
公开(公告)日：1977-04-19
申请号：US642611
申请日：1975-12-19
申请人： Yoshio Sakitani
发明人： Yoshio Sakitani
CPC分类号： H01J37/073 , H01J1/304 , H01J7/18
摘要： A field emission electron gun capable of generating a highly stabilized electron beam, comprises a cathode tip for emitting electrons, an anode for attracting and accelerating the electrons, and means for heating the anode. A surface layer of the anode, which is to be bombarded by the electrons, consists essentially of getter material such as Zr-Al alloy. The anode heating means serves for heating the surface layer, so as to remove the absorbed gas molecules and to elevate the gettering effect of the getter material, whereby the absorbed gas molecules in the anode are hardly released therefrom, even if the anode surface is bombarded by the electrons. Therefore, the number of ions impinging on the cathode tip is remarkably reduced, and a stable electron beam can be obtained from the cathode tip.
摘要翻译： 能够产生高度稳定的电子束的场发射电子枪包括用于发射电子的阴极尖端，用于吸引和加速电子的阳极，以及用于加热阳极的装置。 要被电子轰击的阳极的表面层基本上由诸如Zr-Al合金的吸气材料组成。 阳极加热装置用于加热表面层，以便去除吸收的气体分子并提高吸气剂材料的吸气效果，由此阳极中吸收的气体分子几乎不从其中释放，即使阳极表面被轰击 由电子。 因此，阴极尖端的离子数显着减少，从阴极尖端可以得到稳定的电子束。
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公开(公告)号：US4099704A
公开(公告)日：1978-07-11
申请号：US752098
申请日：1976-12-20
摘要： Disclosed is a vacuum valve apparatus comprising a valve head, a motor for driving the valve head, means for checking the position of the valve adapted to issue a first signal upon detecting that the valve head is moved to be within a predetermined valve-closed range, means for checking electric current adapted to issue a second signal when the driving current for the motor is increased to a predetermined value, switching means adapted to cut the driving current supply to the motor upon detecting said second signal, and means for issueing a third signal for confirming the complete closure of the valve when both of the first and the second signals are simultaneously obtained.
摘要翻译： 公开了一种真空阀装置，其包括阀头，用于驱动阀头的电动机，用于在检测到阀头被移动到预定阀关闭范围内时检查适于发出第一信号的阀的位置的装置 用于当电动机的驱动电流增加到预定值时，用于检查适于发出第二信号的电流的装置，适于在检测到所述第二信号时切断对电动机的驱动电流供应的开关装置，以及用于发出第三信号的装置 当同时获得第一和第二信号两者时，确认阀完全关闭的信号。
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公开(公告)号：US3952215A
公开(公告)日：1976-04-20
申请号：US245077
申请日：1972-04-18
申请人： Yoshio Sakitani
发明人： Yoshio Sakitani
摘要： A variable d.c. source is connected to electrodes provided on the inner and outer surfaces of a hollow cylindrical body formed of piezoelectric ceramic through a switch to achieve dilations of the body by a variable applied voltage.Leg members are fixed at both ends of said body member. Sliding members are further fixed on the lower surfaces of said leg members and are slidable on a base plate. Between said leg members and said base plate, d.c. sources are connected through switches to electrostatically fix the structure. The structure can be moved finely and stepwise in a predetermined direction by operating said switches.
摘要翻译： 一个变量d.c. 源极通过开关连接到设置在由压电陶瓷形成的中空圆柱体的内表面和外表面上的电极，以通过可变的施加电压实现身体的扩张。
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公开(公告)号：US4589773A
公开(公告)日：1986-05-20
申请号：US333295
申请日：1981-12-22
申请人： Satoshi Ido , Minpei Fujinami , Yasuo Kato , Yoshio Sakitani , Susumu Ozasa
发明人： Satoshi Ido , Minpei Fujinami , Yasuo Kato , Yoshio Sakitani , Susumu Ozasa
CPC分类号： G01B11/026
摘要： A position detecting system suitable for the position control of the surface of a workpiece mounted in an electron beam exposure system is disclosed which includes an electrically-driven light source, a first optical system for focusing a light beam from the light source on a workpiece, a position-controlling table for mounting thereon the workpiece, a second optical system for focusing light reflected from the workpiece on a predetermined image surface, a photodetector having a light receiving surface arranged on the image surface, and a negative feedback amplifier for controlling the light source by the output of the photodetector.
摘要翻译： 公开了适用于安装在电子束曝光系统中的工件的表面的位置控制的位置检测系统，其包括电驱动光源，用于将来自光源的光束聚焦在工件上的第一光学系统， 用于在其上安装工件的位置控制台，用于将从工件反射的光聚焦在预定图像表面上的第二光学系统，具有布置在图像表面上的光接收表面的光电检测器，以及用于控制光的负反馈放大器 通过光电检测器的输出源。
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公开(公告)号：US4355232A
公开(公告)日：1982-10-19
申请号：US152843
申请日：1980-05-23
申请人： Hideo Todokoro , Satoru Fukuhara , Yoshio Sakitani
发明人： Hideo Todokoro , Satoru Fukuhara , Yoshio Sakitani
IPC分类号： G01R19/00 , G01N23/225 , G01R31/302 , G01R31/305 , H01J37/22 , H01J37/244 , H01J37/28 , H01J49/06 , G01N23/00 , H01J37/00
CPC分类号： H01J37/244 , G01R31/305 , H01J2237/2443 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507
摘要： An apparatus for measuring the specimen potential in an electron microscope includes a first grid arranged to enclose a specimen which is to be irradiated with a primary charged particle beam emitted from the electron source of the electron microscope and to which is supplied a voltage sufficient to attract the secondary electrons emitted from the specimen. A second grid supplied with a voltage sufficient to analyze the energy of the secondary electrons which have passed through the first grid is disposed outside the first grid, and a secondary electron detecting arrangement for detecting the secondary electrons which have passed through the second grid is disposed adjacent the second grid. A current detecting arrangement partly for impressing the voltage upon the first grid and partly for detecting the current flowing through the first grid is provided along with a dividing and amplifying arrangement for dividing the output of the secondary electron detecting arrangement by the output of the current detecting arrangement, whereby the potential at said specimen of the electron microscope is measured with increased sensitivity.
摘要翻译： 用于在电子显微镜中测量样本电位的装置包括：第一栅格，其布置成围绕从电子显微镜的电子源发射的被照射的初级带电粒子束的样本，并且被提供足以吸引的电压 从样品发射的二次电子。 提供有足以分析已经通过第一栅极的二次电子的能量的电压的第二栅极设置在第一栅极的外部，并且设置用于检测已经通过第二栅极的二次电子的二次电子检测装置 毗邻第二格。 电流检测装置部分地用于将电压施加在第一栅极上并且部分地用于检测流过第一栅极的电流，以及用于将二次电子检测装置的输出除以电流检测的输出的分频和放大装置 排列，由此以增加的灵敏度测量电子显微镜的所述样本的电位。
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