公开(公告)号：US20100203323A1

公开(公告)日：2010-08-12

申请号：US12677405

申请日：2008-08-26

申请人： Yoshio Terada ,  Shozo Kawazoe ,  Yoshinori Yoshida

发明人： Yoshio Terada ,  Shozo Kawazoe ,  Yoshinori Yoshida

IPC分类号： B32B7/10 ,  B05D5/10

CPC分类号： B08B7/0028 ,  C09J7/00 ,  C09J2201/626 ,  H01L21/6836 ,  Y10T428/26

摘要： Provided are a pressure-sensitive adhesive tape, which has a needed pressure-sensitive adhesive force for an adherend, can remove even foreign matter at a submicron level without contaminating a cleaning site, is excellent in heat resistance, exerts a sufficient pressure-sensitive adhesive force and a sufficient cohesive force even at a high temperature, and can be easily peeled without generating any adhesive residue on the adherend upon peeling from the adherend after its use, and a method of producing the tape. The pressure-sensitive adhesive tape of the present invention includes, on a surface of a support, an assembly layer of oblique columnar structures each protruding at an elevation angle of less than 90° from the surface of the support, the oblique columnar structures each having an aspect ratio of 1 or more. The method of producing a pressure-sensitive adhesive tape of the present invention is a method of producing, on a surface of a support, a pressure-sensitive adhesive tape including an assembly layer of oblique columnar structures each protruding at an elevation angle of less than 90° from the surface of the support, the oblique columnar structures each having an aspect ratio of 1 or more, the method including forming the oblique columnar structures on the surface of the support by an oblique deposition process.

摘要翻译： 提供一种对被粘物具有必要的压敏粘合力的压敏粘合带，能够在不污染清洁部位的情况下除去亚微米级的异物，耐热性优异，施加足够的压敏粘合剂 并且即使在高温下也具有足够的内聚力，并且在使用后剥离被粘附体时，可以容易地剥离被粘物而不会在被粘物上产生粘合残留物，以及该带的制造方法。 本发明的压敏粘合带在支撑体的表面上包括倾斜柱状结构的组装层，每个倾斜柱状结构从支撑体的表面以低于90°的仰角突出，倾斜柱状结构各自具有 长宽比为1以上。 本发明的粘合带的制造方法是在支撑体的表面上制造压敏粘合带的方法，所述粘合带包括倾斜柱状结构的组装层，每个倾斜柱状结构以小于 从支撑体的表面90°，倾斜柱状结构各自具有1以上的纵横比，该方法包括通过倾斜沉积工艺在支撑体的表面上形成倾斜柱状结构。

公开(公告)号：US20100175716A1

公开(公告)日：2010-07-15

申请号：US12377063

申请日：2007-06-28

申请人： Yuki Sugo ,  Yoshio Terada ,  Daisuke Uenda ,  Makoto Namikawa ,  Yoshinori Yoshida ,  Youhei Maeno

发明人： Yuki Sugo ,  Yoshio Terada ,  Daisuke Uenda ,  Makoto Namikawa ,  Yoshinori Yoshida ,  Youhei Maeno

IPC分类号： B08B7/02 ,  A46D1/00

CPC分类号： H01L21/67046 ,  B08B1/00 ,  B08B7/0028 ,  C23C16/4407

摘要： Provided is a cleaning member, which is capable of removing minute foreign matter, preferably foreign matter of a submicron level simply, exactly, and sufficiently, without contaminating a cleaning site. Further provided is a delivery member with a cleaning function having the cleaning member and a method of cleaning a substrate processing apparatus using the delivery member with a cleaning function. The cleaning member of the present invention includes a cleaning layer having a plurality of protrusions of a columnar structure on the surface, in which an aspect ratio of the protrusions of a columnar structure is 5 or more.

摘要翻译： 本发明提供一种清洁部件，其能够简单，准确且充分地除去微小的异物，优选亚微米级的异物，而不会污染清洁部位。 还提供具有清洁功能的传送部件，其具有清洁部件，以及使用具有清洁功能的传送部件清洁基板处理设备的方法。 本发明的清洁部件具有在柱面结构的突起长宽比为5以上的表面上具有多个柱状结构的突起的清洗层。

公开(公告)号：US20100170533A1

公开(公告)日：2010-07-08

申请号：US12377052

申请日：2007-06-26

申请人： Yoshio Terada ,  Yuki Sugo ,  Yoshinori Yoshida ,  Youhei Maeno

发明人： Yoshio Terada ,  Yuki Sugo ,  Yoshinori Yoshida ,  Youhei Maeno

IPC分类号： B08B7/00 ,  A46B5/00

CPC分类号： B08B1/00 ,  B08B7/0028 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/16 ,  C01B2202/08 ,  C01B2202/34 ,  C01B2202/36

摘要： Provided is a cleaning member capable of removing minute foreign matter, in particular foreign matter of a submicron level simply, exactly, and sufficiently without contaminating a cleaning site. Further provided is a carrying member provided with a cleaning function having the cleaning member and a method of cleaning a substrate processing equipment with the use of the cleaning member or the carrying member provided with a cleaning function. The cleaning member includes a layer member having a plurality of protrusions of a columnar structure on a surface, in which each of the protrusions of a columnar structure has a carbon-based nanostructure.

摘要翻译： 本发明提供一种清洁部件，其能够简单，准确，充分地除去微小的异物，特别是亚微米级的异物，而不污染清洁部位。 还提供了具有清洁功能的承载构件，其具有清洁构件，以及使用具有清洁功能的清洁构件或承载构件来清洁衬底处理设备的方法。 清洁部件包括在表面上具有多个柱状结构的突起的层部件，其中柱状结构的每个突起具有碳基纳米结构。

公开(公告)号：US08822058B2

公开(公告)日：2014-09-02

申请号：US13944591

申请日：2013-07-17

申请人： Yoshio Terada ,  Akira Shouji ,  Kouki Tomioka ,  Kenji Furuta ,  Midori Tojo ,  Kazunori Hayashi ,  Shoujirou Moriki

发明人： Yoshio Terada ,  Akira Shouji ,  Kouki Tomioka ,  Kenji Furuta ,  Midori Tojo ,  Kazunori Hayashi ,  Shoujirou Moriki

IPC分类号： H01M10/50 ,  H01M10/04

摘要： An object is to, in a battery pack device in which battery cells are lined up, provide a thermally conductive member that can reduce the risk of heat being conducted to an adjacent battery cell in order to make the cooling property of each battery cell uniform, and a battery pack device using this thermally conductive member. Provided is a thermally conductive member arranged between battery cells when assembling the battery cells into a battery pack, wherein the thermally conductive member includes thermally conductive layers each having a thermal conductivity of 0.5 W/mK or more provided respectively on both sides of a backing layer having a thermal conductivity of less than 0.5 W/mK. Especially, it is preferred that a resin member forming the backing layer has a flexural modulus of 1 GPa or more.

公开(公告)号：US20140037924A1

公开(公告)日：2014-02-06

申请号：US14110479

申请日：2012-02-21

申请人： Kenji Furuta ,  Yoshio Terada ,  Midori Tojo ,  Koichi Nakamura

发明人： Kenji Furuta ,  Yoshio Terada ,  Midori Tojo ,  Koichi Nakamura

IPC分类号： C09J7/02

CPC分类号： C09J7/38 ,  C08K3/016 ,  C08K3/10 ,  C09J7/22 ,  C09J133/08 ,  C09J133/14 ,  C09J2201/622 ,  C09J2203/33 ,  C09J2205/102 ,  C09J2433/00 ,  C09J2467/006 ,  H01M2/08 ,  H01M10/0525 ,  Y10T428/24959 ,  Y10T428/256 ,  Y10T428/266 ,  C08F2220/1858 ,  C08F2220/281 ,  C08F226/08 ,  C08F220/58

摘要： A flame-retardant thermally-conductive pressure-sensitive adhesive sheet includes a substrate and a flame-retardant thermally-conductive pressure-sensitive adhesive layer provided on at least one surface of the substrate. The substrate includes a polyester film and the thickness of the polyester film is 10 to 40 μm, and the thermal resistance of the flame-retardant thermally-conductive pressure-sensitive adhesive sheet is 10 cm2·K/W or less.

摘要翻译： 阻燃性导热性粘合片包括基材和设置在基材的至少一个表面上的阻燃性导热性粘合剂层。 基材包括聚酯膜，聚酯膜的厚度为10〜40μm，阻燃性导热性粘合片的耐热性为10cm 2·K / W以下。

公开(公告)号：US08541099B2

公开(公告)日：2013-09-24

申请号：US12350764

申请日：2009-01-08

申请人： Hirofumi Fujii ,  Yoshio Terada ,  Kazumasa Igarashi

发明人： Hirofumi Fujii ,  Yoshio Terada ,  Kazumasa Igarashi

IPC分类号： B32B27/06

CPC分类号： C08G73/1025 ,  C08G73/10 ,  C08K3/04 ,  C08K5/3432 ,  C08L79/08 ,  G03F7/0387 ,  Y10T428/254 ,  Y10T428/2822 ,  Y10T428/31663

摘要： The present invention provides a low-modulus low-stress resin which has such heat resistance that cohesive force and reliability can be retained even at high temperatures and which is applicable as various functional materials. The resin is a thermoplastic resin having a modulus of elasticity at room temperature, 25° C., of 1 GPa or lower and a modulus of elasticity at 250° C. of 1 MPa or higher, or a precursor resin thereof.

摘要翻译： 本发明提供一种低模量低应力树脂，其具有这样的耐热性，即使在高温下也可以保持内聚力和可靠性，并且可用作各种功能材料。 树脂是在室温，25℃，1GPa以下的弹性模量和250℃下的弹性模量为1MPa以上的热塑性树脂或其前体树脂。

公开(公告)号：US08524007B2

公开(公告)日：2013-09-03

申请号：US12977762

申请日：2010-12-23

申请人： Daisuke Uenda ,  Yukio Arimitsu ,  Yoshio Terada ,  Yasuhiro Amano ,  Akihisa Murata

发明人： Daisuke Uenda ,  Yukio Arimitsu ,  Yoshio Terada ,  Yasuhiro Amano ,  Akihisa Murata

IPC分类号： B08B7/00 ,  B32B3/30 ,  B32B17/10

CPC分类号： B08B1/00 ,  B08B7/0028 ,  H01L21/02096 ,  Y10T428/24355 ,  Y10T428/2457 ,  Y10T428/24612 ,  Y10T428/31

摘要： A cleaning sheet including a cleaning layer which has a microasperity shape having an arithmetic average roughness Ra of 0.05 μm or less and a maximum height Rz of 1.0 μm or less. Preferably, a substantial surface area of the cleaning layer per a flat surface of 1 mm2 is 150% or more of a substantial surface area of a silicon wafer mirror surface per a flat area of 1 mm2. The cleaning sheet may be provided on at least one surface of a transfer member so that the transfer member has a cleaning function. When the cleaning sheet or the transfer member having a cleaning function is transferred in a substrate processing apparatus in place of a substrate to be processed therein, the cleaning sheet contacts and cleans a site of the substrate processing apparatus.

摘要翻译： 一种清洁片，包括具有0.05微米以下的算术平均粗糙度Ra和1.0mum以下的最大高度Rz的微细度形状的清洁层。 优选地，每1mm平坦表面的清洁层的基本表面积为1mm 2的平坦区域的硅晶片镜表面的基本表面积的150％或更多。 清洁片可以设置在转印构件的至少一个表面上，使得转印构件具有清洁功能。 当清洁片或具有清洁功能的转印元件在衬底处理设备中转移以代替待处理衬底时，清洁片接触并清洁衬底处理设备的位置。

公开(公告)号：US20130041093A1

公开(公告)日：2013-02-14

申请号：US13642918

申请日：2011-05-13

申请人： Junichi Nakayama ,  Tatsuya Tsukagoshi ,  Yoshio Terada ,  Akira Shouji ,  Kenji Furuta ,  Midori Tojo

发明人： Junichi Nakayama ,  Tatsuya Tsukagoshi ,  Yoshio Terada ,  Akira Shouji ,  Kenji Furuta ,  Midori Tojo

IPC分类号： C09J133/08

CPC分类号： C09J133/00 ,  C08K3/38 ,  C08K2201/001 ,  C09J9/00

摘要： An object is to provide a thermally conductive adhesive sheet capable of making a heat generating body and a heat radiating body adhere to each other easily and with a sufficient adhesive force. Provided is a thermally conductive adhesive sheet including an adhesive agent layer formed by molding a thermally conductive adhesive agent composition including an acrylic polymer component into a sheet-like shape, wherein the adhesive force at the time of 180° peeling is 1 N/20 mm or more and the contact thermal resistance is 0.6 cm2·K/W or less when the adhesive sheet is pressure bonded to an adherend with a pressure of 200 kPa.

摘要翻译： 本发明的目的是提供一种能够使发热体和散热体容易地并且以足够的粘合力彼此附着的导热性粘合片。 提供了一种导热性粘合片，其包括通过将包含丙烯酸类聚合物组分的导热性粘合剂组合物成型为片状形成的粘合剂层，其中180°剥离时的粘合力为1N / 20mm 以上，粘合片在压力为200kPa的被粘物上粘合时，接触热阻为0.6cm 2·K / W以下。

公开(公告)号：US20120309879A1

公开(公告)日：2012-12-06

申请号：US13578318

申请日：2011-01-27

申请人： Kenji Furuta ,  Junichi Nakayama ,  Yoshio Terada ,  Takashi Wano

发明人： Kenji Furuta ,  Junichi Nakayama ,  Yoshio Terada ,  Takashi Wano

IPC分类号： C09J133/14 ,  C08K5/101 ,  C08K3/38 ,  C08K5/05

CPC分类号： C08K3/38 ,  C08K5/05 ,  C08K5/29 ,  C09J133/08

摘要： Provided is a method for producing a thermally-conductive adhesive sheet including a thermally-conductive adhesive agent layer by performing: a composition preparation step of preparing a thermally-conductive adhesive agent composition including a thermally-conductive particle and an acrylic polymer component; and an adhesive agent layer formation step of forming a sheet-shaped thermally-conductive adhesive agent layer with the thermally-conductive adhesive agent composition, wherein in the composition preparation step, a cyclic organic compound of 8 or less carbon atoms, or an organic compound of 3 or less carbon atoms having a hydroxy, ketone, aldehyde, carboxyl or nitrile group is mixed as a constitutional component of the thermally-conductive adhesive agent composition.

摘要翻译： 本发明提供一种制造导热性粘合剂片的方法，该导热性粘合片包括导热性粘合剂层，其通过以下步骤：制备包含导热颗粒和丙烯酸类聚合物组分的导热粘合剂组合物的组合物制备步骤; 以及粘合剂层形成步骤，用导热粘合剂组合物形成片状导热粘合剂层，其中在组合物制备步骤中，将碳原子数为8以下的环状有机化合物或有机化合物 具有羟基，酮，醛，羧基或腈基的3个以下碳原子作为导热性粘合剂组合物的构成成分混合。

公开(公告)号：US07793668B2

公开(公告)日：2010-09-14

申请号：US11014779

申请日：2004-12-20

申请人： Makoto Namikawa ,  Yoshio Terada ,  Jirou Nukaga ,  Eiji Toyoda ,  Hirofumi Fujii ,  Daisuke Uenda ,  Asami Funatsu ,  Nobuaki Maruoka ,  Hitoshi Ishizaka ,  Yasuhiro Amano

发明人： Makoto Namikawa ,  Yoshio Terada ,  Jirou Nukaga ,  Eiji Toyoda ,  Hirofumi Fujii ,  Daisuke Uenda ,  Asami Funatsu ,  Nobuaki Maruoka ,  Hitoshi Ishizaka ,  Yasuhiro Amano

IPC分类号： B08B3/00

CPC分类号： B08B1/00 ,  B08B7/00 ,  B08B7/0028 ,  Y10T428/2848 ,  Y10T428/31721

摘要： A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.

摘要翻译： 提供了一种用于清除离开基板处理设备内部的异物的清洁片。 清洁片包括基本上没有粘性并且根据JIS K7127测定的拉伸模量不低于0.98N / mm 2的清洁层。 或者，清洁片包括维氏硬度不低于10MPa的清洁层。