Abstract:
This invention uses large surface to volume ratio materials for separation, release layer, and sacrificial material applications. The invention outlines the material concept, application designs, and fabrication methodologies. The invention is demonstrated using deposited column/void network materials as examples of large surface to volume ratio materials. In a number of the specific applications discussed, it is shown that it is advantageous to create structures on a laminate on a mother substrate and then, using the separation layer material approach, to separate this laminate from the mother substrate using the present separation scheme. It is also shown that the present materials have excellent release layer utility. In a number of applications it is also shown how the approach can be used to uniquely form cavities, channels, air-gaps, and related structures in or on various substrates. Further, it is demonstrated that it also can be possible and advantageous to combine the schemes for cavity formation with the scheme for laminate separation.
Abstract:
Disclosed herein is an apparatus and method for searching for 3-dimensional shapes. The apparatus includes, an input means, an acquisition module, a storage means, a comparison and search module, an output means, and control means. The input means receives 3-dimensional image data. The acquisition module acquires a 2-dimensional image data group about the shape of an object represented by the 3-dimensional image data. The comparison and search module compares the respective data of the acquired 2-dimensional image data group with the respective data of the 2-dimensional image data groups that are previously stored in the storage means, and searches for 3-dimensional image data. The control means controls the modules and the means.
Abstract:
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.
Abstract:
Disclosed herein is an apparatus and method for searching for 3-dimensional shapes. The apparatus includes, an input means, an acquisition module, a storage means, a comparison and search module, an output means, and control means. The input means receives 3-dimensional image data. The acquisition module acquires a 2-dimensional image data group about the shape of an object represented by the 3-dimensional image data. The comparison and search module compares the respective data of the acquired 2-dimensional image data group with the respective data of the 2-dimensional image data groups that are previously stored in the storage means, and searches for 3-dimensional image data. The control means controls the modules and the means.
Abstract:
A method of patterning a layer of e-beam sensitive dielectric material, such as bisbenzocyclobutene monomers, using electron beam lithography.
Abstract:
Disclosed is a reactor for separating an aluminum layer from multi-layer film wastes to reuse a multi-layer film waste without burying or incinerating the multi-layer film waste including the aluminum. The reactor comprises a cylindrical casing which is filled with a solution to dissolve aluminum layers of the multi-layer film wastes pulverized into a predetermined size, a partition dividing an inner portion of the casing into a reactor tub in which the solution reacts with the aluminum layer and a separator tub which is provided at a portion of the reactor tub to decompose the pulverized multi-layer film wastes in which the aluminum is completely dissolved by the solution, and a stirrer which is installed at an upper portion of the reactor and stirs the solution in the reactor to activate the reaction between the solution and the aluminum in the reactor tub and to transfer the multi-layer film wastes to the separator tub. The partition is spaced apart from a bottom of the casing to form a passage between the bottom of the casing and the partition, and the reactor tub communicates with the separator tub through the passage.
Abstract:
The invention relates to methods for preparing a removable system on a mother substrate. The method deposits a high surface to volume sacrificial layer on a mother substrate and stabilizes the sacrificial layer by a) removing volatile chemical species in and on the sacrificial layer and/or b) modifying the surface of the layer. The method coats over the sacrificial layer with a capping medium. A system is the fabricated on the capping medium. The method provides through holes to access the sacrificial layer. The method may also apply a top layer onto the system to form a covered system. The invention also includes the step of removing the sacrificial layer to release the system from the mother substrate. Methods of the invention also include selectively removing a portion of the system and capping layers to form void regions defining an array of islands composed of device, structure, or system and capping layer regions, and optionally filling the island-defining void region with a sacrificial material. In such methods the sacrificial material and the high surface to volume sacrificial layer are removed to release the system from the mother substrate. Methods of the invention also include applying a layer to the capping material side of the released system to form a configuration wherein the system is substantially within a bending-stress reduced neutral plane. The systems fabricated according to the invention may be placed on a wide variety of suitable substrates, including flexible substrates.
Abstract:
Disclosed herein is an apparatus and method for searching for 3-dimensional shapes. The apparatus includes, an input means, an acquisition module, a storage means, a comparison and search module, an output means, and control means. The input means receives 3-dimensional image data. The acquisition module acquires a 2-dimensional image data group about the shape of an object represented by the 3-dimensional image data. The comparison and search module compares the respective data of the acquired 2-dimensional image data group with the respective data of the 2-dimensional image data groups that are previously stored in the storage means, and searches for 3-dimensional image data. The control means controls the modules and the means.
Abstract:
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.
Abstract:
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.