公开(公告)号：US5106764A

公开(公告)日：1992-04-21

申请号：US444579

申请日：1989-11-30

Applicant: Lloyd R. Harriott ,  Morton B. Panish ,  Henryk Temkin ,  Yuh-Lin Wang

Inventor： Lloyd R. Harriott ,  Morton B. Panish ,  Henryk Temkin ,  Yuh-Lin Wang

IPC: H01L21/302 ,  H01L21/20 ,  H01L21/304 ,  H01L21/306 ,  H01L21/308 ,  H01L21/311

CPC classification number: H01L21/3086 ,  H01L21/02381 ,  H01L21/02392 ,  H01L21/02395 ,  H01L21/02461 ,  H01L21/02463 ,  H01L21/02507 ,  H01L21/02543 ,  H01L21/02546 ,  H01L21/02631 ,  H01L21/30621 ,  H01L21/3081 ,  H01L21/31116 ,  H01L21/31144 ,  Y10S148/026 ,  Y10S148/111

Abstract: Fine featured devices are produced by a series of fabrication steps including exposing selective surface regions to irradiation, e.g. to an ion beam, generally to result in removal of masking material within irradiated regions. In most instances, subsequent etching is under conditions such that bared material is preferentially removed. Etch-removal and irradiation are such that overgrown material is of device quality at least in etched regions. The inventive process is of particular value in the fabrication of integrated circuits, e.g. circuits performing electronic and/or optical functions. The inventive process is expediently used in the fabrication of structures having minimum feature size of 1 micrometer and smaller. Patterning is dependent upon masking material of a maximum thickness of 100 .ANG..

公开(公告)号：US07453565B2

公开(公告)日：2008-11-18

申请号：US11423818

申请日：2006-06-13

Applicant: Yuh-Lin Wang ,  Huai-Hsien Wang ,  Chih-Yi Liu ,  Juen-Kai Wang

Inventor： Yuh-Lin Wang ,  Huai-Hsien Wang ,  Chih-Yi Liu ,  Juen-Kai Wang

IPC: G01J3/44 ,  G01N21/65

CPC classification number: G01N21/658

Abstract: This invention relates to methods of preparing substrates that enhance the Raman signal of analytes in surface-enhanced Raman spectroscopy (SERS). The SERS-active substrate comprises an array of metal nanoparticles at least partially embedded in a template. The substrate's uniform and readily reproducible SERS-active properties with a wide range of analyte concentrations substantially enhance the power and utility of SERS. This invention also provides sensors, as well as Raman instruments, comprising the SERS-active substrates.

Abstract translation: 本发明涉及在表面增强拉曼光谱（SERS）中制备增强分析物拉曼信号的底物的方法。 SERS活性基底包括至少部分地嵌入模板中的金属纳米颗粒阵列。 底物均匀且易于重现的具有广泛分析物浓度的SERS-活性特性显着增强了SERS的功效和效用。 本发明还提供了包括SERS活性基底的传感器以及拉曼仪器。

公开(公告)号：US20120129707A1

公开(公告)日：2012-05-24

申请号：US12949052

申请日：2010-11-18

Applicant: Yuh-Lin Wang ,  Ting-Yu Liu ,  Huai-Hsien Wang

Inventor： Yuh-Lin Wang ,  Ting-Yu Liu ,  Huai-Hsien Wang

IPC: C40B30/04 ,  C40B60/12

CPC classification number: G01N33/54353 ,  C40B30/06 ,  G01N21/658 ,  G01N33/553 ,  G01N33/56911 ,  G01N33/587

Abstract: A surface-enhanced Raman spectroscopic (SERS) system for detecting a biomolecule. The system includes a substrate, an array of nanoparticles disposed on the substrate, each being partially embedded in the substrate and having a non-embedded surface, and a linking agent disposed on the non-embedded surface of each of the nanoparticles. The array of nanoparticles has a uniform interparticle gap of 1-50 nm and the linking agent is capable of binding to the biomolecule.

Abstract translation: 用于检测生物分子的表面增强拉曼光谱（SERS）系统。 该系统包括衬底，布置在衬底上的纳米颗粒阵列，每个纳米颗粒部分地嵌入衬底中并具有非嵌入表面，以及设置在每个纳米颗粒的非嵌入表面上的连接剂。 纳米颗粒阵列具有1-50nm的均匀颗粒间隙，并且连接剂能够结合生物分子。

公开(公告)号：US5288657A

公开(公告)日：1994-02-22

申请号：US608093

申请日：1990-11-01

Applicant: Anatoly Feygenson ,  Henryk Temkin ,  Yuh-Lin Wang

Inventor： Anatoly Feygenson ,  Henryk Temkin ,  Yuh-Lin Wang

IPC: H01L21/20 ,  H01L21/205 ,  H01L21/302 ,  H01L21/306 ,  H01L21/3065 ,  H01L21/308

CPC classification number: H01L21/3081 ,  H01L21/02392 ,  H01L21/02543 ,  H01L21/02546 ,  H01L21/02639 ,  H01L21/30621 ,  Y10S148/05 ,  Y10S148/11 ,  Y10S438/974

Abstract: Expedient fabrication of fine-featured integrated circuits entails aperture pattern delineation to produce a masking layer atop a semiconductor body followed by insertion within a controlled atmosphere chamber within which device-functional layered material is epitaxially grown within apertures. Critical, device-consequential properties of epitaxial material is assured by removal of a thin surface layer of material revealed during delineation. Such removal, sufficient to eliminate meaningful contamination and/or crystalline damage introduced during delineation, is of sufficiently small quantity as to be accommodated within the chamber. Under most circumstances, the controlled atmosphere is at reduced pressure as required for e.g. MOMBE epitaxial growth.

Abstract translation: 精细特征集成电路的有利制造需要孔径图案描绘，以在半导体主体顶部产生掩蔽层，然后插入受控气氛室内，其中器件功能分层材料在孔内外延生长。 通过去除在描绘过程中显露的材料的薄表面层来确保外延材料的关键的器件结果性质。 足以消除在描绘期间引入的有意义的污染和/或结晶损伤的这种去除足够小以容纳在室内。 在大多数情况下，受控气氛处于如下所需的减压下。 MOMBE外延生长。

公开(公告)号：US09329176B2

公开(公告)日：2016-05-03

申请号：US12949052

申请日：2010-11-18

Applicant: Yuh-Lin Wang ,  Ting-Yu Liu ,  Huai-Hsien Wang

Inventor： Yuh-Lin Wang ,  Ting-Yu Liu ,  Huai-Hsien Wang

IPC: G01N21/65 ,  G01N33/569 ,  G01N33/58 ,  G01N33/553 ,  G01N33/543

CPC classification number: G01N33/54353 ,  C40B30/06 ,  G01N21/658 ,  G01N33/553 ,  G01N33/56911 ,  G01N33/587

Abstract: A surface-enhanced Raman spectroscopic (SERS) system for detecting a biomolecule. The system includes a substrate, an array of nanoparticles disposed on the substrate, each being partially embedded in the substrate and having a non-embedded surface, and a linking agent disposed on the non-embedded surface of each of the nanoparticles. The array of nanoparticles has a uniform interparticle gap of 1-50 nm and the linking agent is capable of binding to the biomolecule.

Abstract translation: 用于检测生物分子的表面增强拉曼光谱（SERS）系统。 该系统包括衬底，布置在衬底上的纳米颗粒阵列，每个纳米颗粒部分地嵌入衬底中并具有非嵌入表面，以及设置在每个纳米颗粒的非嵌入表面上的连接剂。 纳米颗粒阵列具有1-50nm的均匀颗粒间隙，并且连接剂能够结合生物分子。

公开(公告)号：US5977549A

公开(公告)日：1999-11-02

申请号：US74866

申请日：1998-05-08

Applicant: Yuh-Lin Wang ,  Lung-Wen Chen

Inventor： Yuh-Lin Wang ,  Lung-Wen Chen

IPC: H01J37/06 ,  H01J37/08 ,  H01J37/26

CPC classification number: H01J37/08 ,  H01J37/06 ,  H01J2237/2817 ,  H01J2237/31742

Abstract: An apparatus and a method of producing a dual ion/electron source. The ion beam and the electron beam are produced by a charged particle optical system. Using an ion source metal to emit an ion beam or an electron beam. The direction of the ion beam and the electron beam is identical. Neither the particle source nor the sample need to be rotated or shifted.

Abstract translation: 一种制造双离子/电子源的装置和方法。 离子束和电子束由带电粒子光学系统产生。 使用离子源金属发射离子束或电子束。 离子束和电子束的方向是相同的。 粒子源和样品都不需要旋转或移动。

公开(公告)号：US20060144821A1

公开(公告)日：2006-07-06

申请号：US11029191

申请日：2005-01-04

Applicant: Yuh-Lin Wang

Inventor： Yuh-Lin Wang

IPC: C23F1/00

CPC classification number: A44C17/005 ,  A44C27/00 ,  H01J2237/31737

Abstract: The present invention provides a method for engraving desired irreproducible patterns on the surface of gemstones including diamond by the use of an energetic ion beam. The pattern has a characteristic topological texture, which is irreproducible even using the same ion beam to engrave onto the same location of the same diamond.

Abstract translation: 本发明提供了一种通过使用能量离子束在包括金刚石的宝石表面上雕刻期望的不可再现图案的方法。 该图案具有特征拓扑结构，即使使用相同的离子束雕刻到相同钻石的相同位置上也是不可再现的。