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    Optical circulator
    1.
    发明授权
    Optical circulator 有权
    光循环器

    公开(公告)号：US06895129B2

    公开(公告)日：2005-05-17

    申请号：US10135862

    申请日：2002-04-29

    申请人： Zhimin Liu ,  Mark S. Wang ,  Shifang Li ,  Wenhui Wang ,  Yanbin Shao

    发明人： Zhimin Liu ,  Mark S. Wang ,  Shifang Li ,  Wenhui Wang ,  Yanbin Shao

    IPC分类号： G02F1/09 ,  G02F1/31 ,  G02B6/27 ,  G02B5/30

    CPC分类号： G02F1/093 ,  G02F1/31

    摘要： An optical circulator has a first collimator; a first block of birefringent material; a first compound polarization rotator; a light angle deflector (e.g., Wollaston prism); a second compound polarization rotator; a second block of birefringent material; and a second collimator. Light from the first fiber exits the first collimator along a first path into a first collimated beam that first hits the central plane on a crossing line between the interface and the central plane such that the first collimated beam exits the light angle deflector along a second path substantially parallel to the longitudinal direction and is received by the second fiber. Light from the second fiber exits the second collimator along the second path into a second collimated beam that exits the light angle deflector along a third path and is received by the third fiber.

    摘要翻译： 光循环器具有第一准直器; 第一块双折射材料; 第一复合偏振旋转器; 光角偏转器（例如，Wollaston棱镜）; 第二复合偏振旋转器; 第二块双折射材料; 和第二个准直器。 来自第一光纤的光沿着第一路径离开第一准直器进入第一准直光束，该第一准直光束首先在界面和中心平面之间的交叉线上撞击中心平面，使得第一准直光束沿着第二光路离开光角偏转器 基本上平行于纵向并由第二纤维接收。 来自第二光纤的光沿着第二路径离开第二准直仪，进入沿着第三路径离开光角偏转器的第二准直光束，并被第三光纤接收。

    Loop optical circulator
    2.
    发明授权
    Loop optical circulator 失效
    环路循环器

    公开(公告)号：US06747797B2

    公开(公告)日：2004-06-08

    申请号：US09899481

    申请日：2001-07-05

    申请人： Zhimin Liu ,  Mark S. Wang ,  Jingyu Xu

    发明人： Zhimin Liu ,  Mark S. Wang ,  Jingyu Xu

    IPC分类号： G02B2728

    CPC分类号： G02F1/31 ,  G02F1/093

    摘要： A four-port loop optical circulator includes a first, a second, a third and a fourth optical ports for receiving optical beam therein. The circulator further includes a plurality of optical components. The optical components include a walk-off crystal for generating a vertical optical path displacement for a vertical polarized optical beam and for passing a horizontally polarized optical beam therethrough maintaining a same optical path. The optical components also include a vertical displacement device for shifting an optical path along a vertical direction with a predefined vertical displacement for an optical beam transmitted with a particular polarization. The vertical displacement device is coupled to the walk-off crystal for guiding a beam received from the fourth port to project from the first port.

    摘要翻译： 四端口环路光环行器包括用于在其中接收光束的第一，第二，第三和第四光端口。 循环器还包括多个光学部件。 光学部件包括用于产生用于垂直偏振光束的垂直光路位移并用于使水平偏振光束通过的走行晶体，其保持相同的光路。 光学部件还包括用于沿着垂直方向移动光路的垂直位移装置，其具有用于以特定偏振传输的光束的预定垂直位移。 垂直位移装置耦合到离散晶体，用于引导从第四端口接收的光束从第一端口突出。

    Serrated Fourier filters and inspection systems
    4.
    发明授权
    Serrated Fourier filters and inspection systems 有权
    锯齿傅立叶滤波器和检查系统

    公开(公告)号：US07397557B2

    公开(公告)日：2008-07-08

    申请号：US11145873

    申请日：2005-06-06

    申请人： Hwan J. Jeong ,  Andrew V. Hill ,  Mark S. Wang

    发明人： Hwan J. Jeong ,  Andrew V. Hill ,  Mark S. Wang

    IPC分类号： G01N21/00 ,  G02B27/46

    CPC分类号： G01N21/95623

    摘要： Serrated Fourier filters and inspection systems are provided. One Fourier filter includes one or more blocking elements configured to block a portion of light from a wafer. The Fourier filter also includes periodic serrations formed on edges of the one or more blocking elements. The periodic serrations define a transition region of the one or more blocking elements. The periodic serrations are configured to vary transmission across the transition region such that variations in the transmission across the transition region are substantially smooth. One inspection system includes a Fourier filter configured as described above and a detector that is configured to detect light transmitted by the Fourier filter. Signals generated by the detector can be used to detect the defects on the wafer.

    摘要翻译： 提供锯齿傅立叶滤波器和检测系统。 一个傅立叶滤波器包括被配置为阻挡来自晶片的一部分光的一个或多个阻挡元件。 傅立叶滤波器还包括形成在一个或多个阻挡元件的边缘上的周期性锯齿。 周期性锯齿限定了一个或多个阻挡元件的过渡区域。 周期性锯齿被配置为改变穿过过渡区域的传输，使得跨越过渡区域的透射率的变化基本上是平滑的。 一个检查系统包括如上所述构造的傅里叶滤波器和被配置为检测由傅里叶滤波器发送的光的检测器。 由检测器产生的信号可用于检测晶片上的缺陷。

    Optical interleavers with minimized dispersion
    5.
    发明授权
    Optical interleavers with minimized dispersion 有权
    具有最小化色散的光交织器

    公开(公告)号：US06441960B1

    公开(公告)日：2002-08-27

    申请号：US09653759

    申请日：2000-09-01

    申请人： Mark S. Wang ,  Wei-Zhong Li

    发明人： Mark S. Wang ,  Wei-Zhong Li

    IPC分类号： G02B530

    CPC分类号： G02B6/272 ,  G02B6/2766 ,  G02B6/29302 ,  G02B6/29361 ,  G02B6/29386 ,  G02B6/29394 ,  G02B27/283 ,  H04J14/02 ,  H04J14/06

    摘要： The present invention provides a line of optical interleavers in which a novel beam-swapping element is utilized. The beam-swapping element of the present invention provides an effective and inexpensive alternative to polarization rotators and birefrigent elements employed in the prior art optical interleavers, hence rendering a simple and low-cost assembly to the optical interleavers of the present invention. The optical interleavers of the present invention further advantageously exploit a combination of two wavelength filters to cancel out wavelength-filter-induced-dispersion. Efforts are also painstakingly made in the optical interleavers of the present invention to substantially minimize other dispersion effects. As such, the optical interleavers of the present invention constitute the first kind in the art in which various dispersion effects are substantially minimized. Such characteristics would be highly desirable in fiber-optic networks. The optical interleavers of the present invention can be advantageously configured as multiplexers, de-multiplexers, or routers.

    摘要翻译： 本发明提供了一种光交错器，其中使用了一种新的光束交换元件。 本发明的光束交换元件为现有技术的光学交织器中使用的偏振旋转器和双折射元件提供了有效且便宜的替代方案，因此为本发明的光交错器提供简单且低成本的组件。 本发明的光交织器进一步有利地利用两个波长滤波器的组合来抵消波长滤波器诱导的色散。 在本发明的光学交织器中也努力地进行了努力，以使其它分散效果基本上最小化。 因此，本发明的光学交织器构成了本领域的第一种，其中各种色散效应基本上最小化。 这种特性在光纤网络中将是非常需要的。 本发明的光交织器可以有利地配置为多路复用器，解复用器或路由器。

    Oblique illuminator for inspecting manufactured substrates
    6.
    发明授权
    Oblique illuminator for inspecting manufactured substrates 有权
    用于检查制造的基板的倾斜照明器

    公开(公告)号：US08794801B2

    公开(公告)日：2014-08-05

    申请号：US13257441

    申请日：2011-07-26

    申请人： Shiyu Zhang ,  Charles N. Wang ,  Yevgeniy Churin ,  Yong-Mo Moon ,  Hyoseok Daniel Yang ,  Mark S. Wang

    发明人： Shiyu Zhang ,  Charles N. Wang ,  Yevgeniy Churin ,  Yong-Mo Moon ,  Hyoseok Daniel Yang ,  Mark S. Wang

    IPC分类号： F21V7/09

    CPC分类号： G01N21/8806 ,  G01N21/9501

    摘要： One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.

    摘要翻译： 一个实施例涉及一种倾斜照明器。 倾斜照明器包括发射光束的光源，第一反射表面和第二反射表面。 第一反射表面具有凸起的圆柱形形状，具有沿着非供电方向的投影抛物线轮廓，其被配置为反射来自光源的光束并且限定焦线。 第二反射表面具有凹入的圆柱形形状，其具有突出的椭圆形轮廓，其被配置为反射来自第一反射表面的光束并且限定第一和第二焦线。 第一反射面的焦线与第二反射面的第一焦线重合。 第二反射表面的第一和第二焦线可以是相同的线，在这种情况下，椭圆曲率是投影的球形轮廓。 还公开了其它实施例，方面和特征。

    OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES
    7.
    发明申请
    OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES 有权
    用于检查制造基板的OBLIQUE照明器

    公开(公告)号：US20120218545A1

    公开(公告)日：2012-08-30

    申请号：US13257441

    申请日：2011-07-26

    申请人： Shiyu Zhang ,  Charles N. Wang ,  Yevgeniy Churin ,  Yong-Mo Moon ,  Hyoseok Daniel Yang ,  Mark S. Wang

    发明人： Shiyu Zhang ,  Charles N. Wang ,  Yevgeniy Churin ,  Yong-Mo Moon ,  Hyoseok Daniel Yang ,  Mark S. Wang

    IPC分类号： G01N21/88 ,  F21V13/04 ,  G21K5/04 ,  F21V7/06

    CPC分类号： G01N21/8806 ,  G01N21/9501

    摘要： One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.

    摘要翻译： 一个实施例涉及一种倾斜照明器。 倾斜照明器包括发射光束的光源，第一反射表面和第二反射表面。 第一反射表面具有凸起的圆柱形形状，具有沿着非供电方向的投影抛物线轮廓，其被配置为反射来自光源的光束并且限定焦线。 第二反射表面具有凹入的圆柱形形状，其具有突出的椭圆形轮廓，其被配置为反射来自第一反射表面的光束并且限定第一和第二焦线。 第一反射面的焦线与第二反射面的第一焦线重合。 第二反射表面的第一和第二焦线可以是相同的线，在这种情况下，椭圆曲率是投影的球形轮廓。 还公开了其它实施例，方面和特征。