公开(公告)号：US20090294664A1

公开(公告)日：2009-12-03

申请号：US12130879

申请日：2008-05-30

申请人： Zhong-Wei Chen ,  Xuedong Liu ,  Xu Zhang ,  Weiming Ren ,  Juying Dou

发明人： Zhong-Wei Chen ,  Xuedong Liu ,  Xu Zhang ,  Weiming Ren ,  Juying Dou

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J37/141 ,  H01J2237/0475 ,  H01J2237/1035

摘要： The present invention includes an electron beam device for examining defects on semiconductor devices. The device includes an electron source for generating a primary electron beam, wherein the total acceleration potential is divided and is provided across the ground potential. Also included is at least one condenser lens for pre-focusing the primary electron beam, an aperture for confining the primary electron beam to ameliorate electron-electron interaction, wherein the aperture is positioned right underneath the last condenser lens, and a SORIL objective lens system for forming immersion magnetic field and electrostatic field to focus the primary beam onto the specimen in the electron beam path. A pair of grounding rings for providing virtual ground voltage potential to those components within the electron beam apparatus installed below a source anode and above a last polepiece of the SORIL objective lens.

摘要翻译： 本发明包括用于检查半导体器件上的缺陷的电子束装置。 该装置包括用于产生一次电子束的电子源，其中总加速电位被分开并提供在地电位之间。 还包括至少一个用于预聚焦一次电子束的聚光透镜，用于限制一次电子束以改善电子 - 电子相互作用的孔，其中孔位于最后的聚光透镜的正下方，以及SORIL物镜系统 用于形成浸没磁场和静电场，以将主光束聚焦在电子束路径中的样本上。 一对接地环，用于为安装在源极阳极和SORIL物镜的最后一个极点之上的电子束装置内的那些部件提供虚拟接地电压电位。

公开(公告)号：US07759653B2

公开(公告)日：2010-07-20

申请号：US12130879

申请日：2008-05-30

申请人： Zhong-Wei Chen ,  Xuedong Liu ,  Xu Zhang ,  Weiming Ren ,  Juying Dou

发明人： Zhong-Wei Chen ,  Xuedong Liu ,  Xu Zhang ,  Weiming Ren ,  Juying Dou

IPC分类号： H01J37/00 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/141 ,  H01J2237/0475 ,  H01J2237/1035

摘要： The present invention includes an electron beam device for examining defects on semiconductor devices. The device includes an electron source for generating a primary electron beam, wherein the total acceleration potential is divided and is provided across the ground potential. Also included is at least one condenser lens for pre-focusing the primary electron beam, an aperture for confining the primary electron beam to ameliorate electron-electron interaction, wherein the aperture is positioned right underneath the last condenser lens, and a SORIL objective lens system for forming immersion magnetic field and electrostatic field to focus the primary beam onto the specimen in the electron beam path. A pair of grounding rings for providing virtual ground voltage potential to those components within the electron beam apparatus installed below a source anode and above a last polepiece of the SORIL objective lens.

摘要翻译： 本发明包括用于检查半导体器件上的缺陷的电子束装置。 该装置包括用于产生一次电子束的电子源，其中总加速电位被分开并提供在地电位之间。 还包括至少一个用于预聚焦一次电子束的聚光透镜，用于限制一次电子束以改善电子 - 电子相互作用的孔，其中孔位于最后的聚光透镜的正下方，以及SORIL物镜系统 用于形成浸没磁场和静电场，以将主光束聚焦在电子束路径中的样本上。 一对接地环，用于为安装在源极阳极和SORIL物镜的最后一个极点之上的电子束装置内的那些部件提供虚拟接地电压电位。

公开(公告)号：US20090315444A1

公开(公告)日：2009-12-24

申请号：US12145036

申请日：2008-06-24

申请人： Zhong-Wei Chen ,  Juying Dou

发明人： Zhong-Wei Chen ,  Juying Dou

IPC分类号： H01J19/24

CPC分类号： H01J37/063 ,  H01J1/16 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/06375

摘要： A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.

摘要翻译： 公开了一种在电子显微镜中使用的热场发射阴极，临界尺寸检查工具，电子束光刻机，电子束测试仪和其他电子束相关系统作为电子源。 实施例公开了改变涂层形状，涂层位置和缩短发射极长度以延长场致发射阴极的寿命。

公开(公告)号：US08218284B2

公开(公告)日：2012-07-10

申请号：US12179560

申请日：2008-07-24

申请人： Zhong-Wei Chen ,  Yi Xiang Wang ,  Juying Dou

发明人： Zhong-Wei Chen ,  Yi Xiang Wang ,  Juying Dou

IPC分类号： H01L21/683 ,  B23B31/28

CPC分类号： H01J37/026 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J37/3174 ,  H01J2237/0044 ,  H01J2237/2817 ,  Y10T279/17923 ,  Y10T279/23

摘要： An apparatus for increasing electric conductivity to a wafer substrate when exposures to electron beam irradiation is disclosed. More specifically, a more free mechanical contact between a wafer and electric contact pins (within an electrostatic chuck) is provided to significantly reduce the scratch and damage on the wafer backside.

摘要翻译： 公开了当暴露于电子束照射时增加晶片衬底的导电性的装置。 更具体地，提供晶片和电接触销（在静电卡盘内）之间更自由的机械接触，以显着减少晶片背面的划痕和损伤。

公开(公告)号：US08022609B2

公开(公告)日：2011-09-20

申请号：US12145036

申请日：2008-06-24

申请人： Zhong-Wei Chen ,  Juying Dou

发明人： Zhong-Wei Chen ,  Juying Dou

IPC分类号： H01J1/14 ,  H01J19/08

CPC分类号： H01J37/063 ,  H01J1/16 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/06375

摘要： A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.

摘要翻译： 公开了一种在电子显微镜中使用的热场发射阴极，临界尺寸检查工具，电子束光刻机，电子束测试仪和其他电子束相关系统作为电子源。 实施例公开了改变涂层形状，涂层位置和缩短发射极长度以延长场致发射阴极的寿命。

公开(公告)号：US20080006771A1

公开(公告)日：2008-01-10

申请号：US11755705

申请日：2007-05-30

申请人： Chi-Hua Tseng ,  Zhong-Wei Chen ,  Xuedong Liu

发明人： Chi-Hua Tseng ,  Zhong-Wei Chen ,  Xuedong Liu

IPC分类号： G01N23/00

CPC分类号： G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/2449

摘要： An electron beam apparatus and method are presented for collecting side-view and plane-view SEM imagery. The electron beam apparatus includes an electron source, some intermediate lenses if needed, an objective lens and an in-lens sectional detector. The electron source will provide an electron beam. The intermediate lenses focus the electron beam further. The objective lens is a combination of an immersion magnetic lens and a retarding electrostatic lens focuses the electron beam onto the specimen surface. The in-lens detector will be divided into two or more sections to collect secondary electrons emanating from the specimen with different azimuth and polar angle so that side-view SEM imagery can be obtained.

摘要翻译： 提出了一种用于收集侧视图和平面视图SEM图像的电子束装置和方法。 电子束装置包括电子源，如果需要的话，一些中间透镜，物镜和透镜内部分检测器。 电子源将提供电子束。 中间透镜进一步聚焦电子束。 物镜是浸没式磁透镜和阻滞静电透镜的组合，将电子束聚焦在样品表面上。 镜片内检测器将被分为两个或多个部分，以收集具有不同方位角和极角的样品发出的二次电子，从而可以获得侧视SEM图像。

公开(公告)号：US07705298B2

公开(公告)日：2010-04-27

申请号：US11939530

申请日：2007-11-13

申请人： Xuedong Liu ,  Zhonghua Dong ,  Wei Fang ,  Zhong-Wei Chen

发明人： Xuedong Liu ,  Zhonghua Dong ,  Wei Fang ,  Zhong-Wei Chen

IPC分类号： H01J37/28 ,  H01J37/21 ,  H01J3/14

CPC分类号： H01J37/28 ,  H01J37/21 ,  H01J2237/14 ,  H01J2237/216 ,  H01J2237/2817

摘要： This invention relates to apparatus and method to fast determine focus parameters in one pre-scan during an e-beam inspection practice. More specifically, embodiments of the present invention provide an apparatus and method that provide accurate focus tuning after primary focusing has been done.

摘要翻译： 本发明涉及在电子束检查实践期间快速确定一次预扫描中的焦点参数的装置和方法。 更具体地，本发明的实施例提供了一种在进行主要聚焦之后提供精确聚焦调谐的装置和方法。

公开(公告)号：US07705301B2

公开(公告)日：2010-04-27

申请号：US11755705

申请日：2007-05-30

申请人： Chi-Hua Tseng ,  Zhong-Wei Chen ,  Xuedong Liu

发明人： Chi-Hua Tseng ,  Zhong-Wei Chen ,  Xuedong Liu

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/2449

摘要： An electron beam apparatus and method are presented for collecting side-view and plane-view SEM imagery. The electron beam apparatus includes an electron source, some intermediate lenses if needed, an objective lens and an in-lens sectional detector. The electron source will provide an electron beam. The intermediate lenses focus the electron beam further. The objective lens is a combination of an immersion magnetic lens and a retarding electrostatic lens focuses the electron beam onto the specimen surface. The in-lens detector will be divided into two or more sections to collect secondary electrons emanating from the specimen with different azimuth and polar angle so that side-view SEM imagery can be obtained.

摘要翻译： 提出了一种用于收集侧视图和平面视图SEM图像的电子束装置和方法。 电子束装置包括电子源，如果需要的话，一些中间透镜，物镜和透镜内部分检测器。 电子源将提供电子束。 中间透镜进一步聚焦电子束。 物镜是浸没式磁透镜和阻滞静电透镜的组合，将电子束聚焦在样品表面上。 镜片内检测器将被分为两个或多个部分，以收集具有不同方位角和极角的样品发出的二次电子，从而可以获得侧视SEM图像。

公开(公告)号：US20080315094A1

公开(公告)日：2008-12-25

申请号：US12204282

申请日：2008-09-04

申请人： Joe WANG ,  Xu Zhang ,  Zhong-Wei Chen

发明人： Joe WANG ,  Xu Zhang ,  Zhong-Wei Chen

IPC分类号： G01N23/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/24435 ,  H01J2237/2445 ,  H01J2237/24465

摘要： A charged particle detector consists of a plurality independent light guide modules assembled together to form a segmented in-lens on-axis annular detector, with a center hole for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.

摘要翻译： 带电粒子检测器由多个独立的光导模块组成，组合在一起以形成分段的透镜内轴环形探测器，其中心孔用于允许初级带电粒子束通过。 面向样品的组件的一侧作为带电粒子检测表面涂覆或结合到闪烁体材料。 每个光导模块耦合到光电倍增管，以允许通过每个光导模块传输的光信号被单独放大和处理。 带电粒子检测器由一块光导材料制成，被处理成具有从一个面的锥形圆形切口，终止在与开口相对的面上以允许初级带电粒子束通过。 相反的面被涂覆或与闪烁体材料结合，作为带电粒子检测表面。 导光块的外部区域被成形为四个分开的光导输出通道，并且每个光导输出通道耦合到光电倍增管，以允许来自每个通道的光信号输出被单独放大和处理。

公开(公告)号：US07893406B1

公开(公告)日：2011-02-22

申请号：US11476411

申请日：2006-06-27

申请人： Xu Zhang ,  Zhong-Wei Chen

发明人： Xu Zhang ,  Zhong-Wei Chen

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  H01J37/063 ,  H01J2237/065 ,  H01J2237/083 ,  H01J2237/1035 ,  H01J2237/1405

摘要： An electron gun comprises an electron emitter, an electrode surrounding the electron emitter, an extraction electrode, and a double condenser lens assembly, the double condenser lens assembly comprising a magnetic immersion pre-condenser lens and a condenser lens. In combination with a probe forming objective lens, the electron gun apparatus can provide an electron beam of independently adjustable probe size and probe current, as is desirable in electron beam applications. The electron emitter is immersed in the magnetic field generated by a magnetic type pre-condenser lens. When activated, the pre-condenser lens collimates the beam effectively to increase its angular intensity while at the same time enlarging the virtual source as compared with non-immersion case, due to geometric magnification and aberrations of its lens action. The pre-condenser lens is followed by a condenser lens. If the condenser lens is of the magnetic type, its peak magnetic field is far enough away and thus its action does not significantly affect the size of the virtual source. Independent adjustment of the lenses, combined with suitable selection of final probe forming objective aperture size, allows various combination of the final probe size and probe current to be obtained in a range sufficient for most electron beam applications.

摘要翻译： 电子枪包括电子发射器，围绕电子发射体的电极，引出电极和双重聚光透镜组件，双重聚光透镜组件包括磁性浸入式预聚光透镜和聚光透镜。 与形成物镜的探针组合，如在电子束应用中所希望的那样，电子枪装置可以提供独立可调的探针尺寸和探针电流的电子束。 将电子发射器浸入由磁式预聚光透镜产生的磁场中。 当激活时，由于几何放大和其透镜作用的像差，预聚焦透镜有效地准直光束以增加其角度强度，同时与非浸没情况相比放大虚拟光源。 预聚光透镜之后是聚光透镜。 如果聚光透镜是磁性的，则其峰值磁场足够远，因此其作用不会显着影响虚拟源的尺寸。 透镜的独立调整结合适当选择最终探针形成物镜孔径的尺寸允许在足以满足大多数电子束应用的范围内获得最终探针尺寸和探针电流的各种组合。