SUBSTRATE PROCESSING APPARATUS INCLUDING EXHAUST DUCT WITH A BEVEL MASK WITH A PLANAR INNER EDGE

    公开(公告)号:US20230338914A1

    公开(公告)日:2023-10-26

    申请号:US18137800

    申请日:2023-04-21

    Inventor: Ping Ren

    CPC classification number: B01J19/0053 B01J19/247 B01J2219/029

    Abstract: A substrate processing apparatus is disclosed. Exemplary substrate processing apparatus includes a reaction chamber provided with a chamber wall; a susceptor disposed within the reaction chamber to support a substrate; a gas supply unit to supply a gas to the substrate; and an exhaust duct disposed within the reaction chamber, comprising: an inner ring comprising a first inner end and a second inner end; wherein the first inner end is configured to contact a bottom of the chamber wall; and an outer ring provided with a plurality of holes, the outer ring comprising a first outer end and a second outer end; wherein the first outer end is configured to contact a side of the chamber wall and the second outer end is configured to be engaged with the second inner end.

    Process for producing polycondensation polymer, and polymerizer
    4.
    发明授权
    Process for producing polycondensation polymer, and polymerizer 有权
    制备缩聚聚合物的方法和聚合反应器

    公开(公告)号:US09321884B2

    公开(公告)日:2016-04-26

    申请号:US13879279

    申请日:2011-10-14

    Abstract: A method for producing a condensation polymerization reaction polymer, comprising a guide polymerization step in which a molten prepolymer is supplied to the top edge of a wire guide to obtain the condensation polymerization reaction polymer, the wire guide comprising a vertical wire group consisting of a plurality of vertical wires extending in the vertical direction, which are mutually spaced in alignment at an arrangement pitch L1 (mm). In the guide polymerization step, the molten prepolymer aggregates so that a molten prepolymer mass is formed on the vertical wire, and a molten prepolymer mass is formed wherein, the width of the molten prepolymer mass measured in an alignment direction of the vertical wires at a position 200 mm below the top edge being represented as L2 (mm), the width L2 of at least a portion of the molten prepolymer mass satisfies the inequality (1). L1

    Abstract translation: 一种制备缩聚反应聚合物的方法,其包括引导聚合步骤,其中将熔融预聚物供给到导线引导件的顶部边缘以获得缩聚反应聚合物,所述导线器包括由多个组成的垂直导线组 垂直线在垂直方向上延伸,并以排列间距L1(mm)相互间隔开。 在引导聚合步骤中,熔融预聚物聚集,使得在垂直导线上形成熔融预聚物物质,形成熔融预聚物物质,其中熔融预聚物物质的宽度在垂直丝线的排列方向上测量为a 顶部边缘以下200mm的位置表示为L2(mm),熔融预聚物物质的至少一部分的宽度L2满足不等式(1)。 L1

Patent Agency Ranking