APPARATUS AND METHOD TO CONFIRM CLEANING AND MEASURE CLEANING EFFECTIVENESS WITH NEAR-INFRARED SPECTROPHOTOMETER
    2.
    发明申请
    APPARATUS AND METHOD TO CONFIRM CLEANING AND MEASURE CLEANING EFFECTIVENESS WITH NEAR-INFRARED SPECTROPHOTOMETER 审中-公开
    确保清洁和测量清洁效果的装置和方法与近红外分光光度计

    公开(公告)号:US20160231234A1

    公开(公告)日:2016-08-11

    申请号:US15016793

    申请日:2016-02-05

    发明人: Paul F. Hensley

    IPC分类号: G01N21/359 B08B13/00

    摘要: An apparatus and method to clean a substrate and to verify an effectiveness of the cleaning is disclosed. The method includes scanning substrate to generate a pre-cleaning data by using a first mechanism; cleaning substrate by using a second mechanism; scanning substrate to generate a post-cleaning data by using the first mechanism; and generating at least one contamination characteristic based on a comparison between the pre-cleaning data and the post-cleaning data. The contamination characteristic is analyzed for evidence of a contaminant in order to verify effectiveness of the cleaning. Process parameters may be adjusted based upon feedback from the effectiveness of the cleaning.

    摘要翻译: 公开了一种清洁基板并验证清洁效果的装置和方法。 该方法包括通过使用第一机构扫描基板以产生预清洗数据; 通过使用第二机构清洁衬底; 扫描基板以通过使用第一机构产生后清洗数据; 并且基于预清洗数据和后清洗数据之间的比较产生至少一个污染特征。 分析污染特征以获得污染物的证据,以验证清洁的有效性。 过程参数可以根据清洁效果的反馈进行调整。