公开(公告)号：US06934606B1

公开(公告)日：2005-08-23

申请号：US10600667

申请日：2003-06-20

申请人： Damon Genetti ,  Wayne Tang ,  Mikhail Bojinov ,  Stephan Minard

发明人： Damon Genetti ,  Wayne Tang ,  Mikhail Bojinov ,  Stephan Minard

IPC分类号： G05B19/00 ,  G05B19/18 ,  H01L21/00 ,  H01L21/673 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67775 ,  G05B2219/37415 ,  G05B2219/39024 ,  G05B2219/39527 ,  G05B2219/40555 ,  H01L21/67201 ,  H01L21/67386 ,  H01L21/67781 ,  H01L21/681

摘要： In one embodiment, a wafer-handling robot in a wafer processing system is automatically calibrated by determining an orientation of the robot relative to a chassis of the wafer processing system, determining hand-off coordinates of a load port in the wafer processing system, and determining hand-off coordinates of a load lock in the wafer processing system. Also disclosed is a calibration fixture for automatically calibrating the wafer-handling robot to the load port.

摘要翻译： 在一个实施例中，晶片处理系统中的晶片处理机器人通过确定机器人相对于晶片处理系统的机架的取向，确定晶片处理系统中的负载端口的切换坐标以及 确定晶片处理系统中的负载锁定的切换坐标。 还公开了一种用于将晶片处理机器人自动校准到负载端口的校准夹具。

公开(公告)号：US4733049A

公开(公告)日：1988-03-22

申请号：US140867

申请日：1980-04-16

申请人： Jerome H. Lemelson

发明人： Jerome H. Lemelson

IPC分类号： B23B49/00 ,  B23Q17/09 ,  B25J9/00 ,  B25J19/02 ,  E04G21/00 ,  G01B7/004 ,  G01B7/02 ,  G01D5/347 ,  G05B19/18 ,  G05B19/401 ,  G05B19/404 ,  B23K26/00

CPC分类号： B23P25/006 ,  B23B49/001 ,  B23Q17/0957 ,  B25J19/021 ,  B25J9/0084 ,  E04G21/00 ,  G01B7/004 ,  G01B7/02 ,  G01D5/34792 ,  G05B19/18 ,  G05B19/401 ,  G05B19/4015 ,  G05B19/404 ,  G05B2219/35554 ,  G05B2219/36503 ,  G05B2219/36504 ,  G05B2219/37032 ,  G05B2219/37228 ,  G05B2219/37245 ,  G05B2219/37345 ,  G05B2219/37351 ,  G05B2219/37357 ,  G05B2219/37405 ,  G05B2219/37409 ,  G05B2219/37415 ,  G05B2219/37417 ,  G05B2219/37418 ,  G05B2219/37559 ,  G05B2219/39122 ,  G05B2219/40383 ,  G05B2219/49134 ,  G05B2219/49302 ,  G05B2219/50031 ,  G05B2219/50063 ,  G05B2219/50139 ,  G05B2219/50145 ,  G05B2219/50249 ,  G05B2219/50294 ,  G05B2219/50296 ,  G05B2219/50315 ,  G05B2219/50379

摘要： An apparatus and method for machining heat softenable materials such as metals, alloys and certain thermoplastic materials. In one form, radiation generated by a laser or electron gun is directed against a portion of a workpiece immediately adjacent that portion thereof which is being machined by a cutting tool such as a milling tool, lathe tool, drill, grinder or other means adapted to remove material by so called machining. The laser or other generating means for radiation is preferably supported by a mount supporting the cutting tool and is located to direct its beam immediately in advance of that portion of the work being machined so that the heat of the beam will soften that portion of the work about to be cut or otherwise machined. Other radiation generating means such as an electric arc or plasma arc generator may also be utilized.

摘要翻译： 用于加工可软化材料如金属，合金和某些热塑性材料的设备和方法。 在一种形式中，由激光或电子枪产生的辐射被定向在紧邻该部分的工件的一部分上，该部分正在被诸如铣削工具，车刀，钻头，研磨机或其他装置的切削工具加工而成 通过所谓的加工去除材料。 用于辐射的激光器或其它发生装置优选地由支撑切割工具的安装座支撑，并且被定位成在被加工的工件的那部分之前立即引导其梁，使得梁的热量将软化该部分工件 即将被切割或以其他方式加工。 也可以使用诸如电弧或等离子体电弧发生器的其它辐射产生装置。

公开(公告)号：US20180356788A1

公开(公告)日：2018-12-13

申请号：US16003181

申请日：2018-06-08

申请人： Blum-Novotest GmbH

发明人： Norbert MOERSCH ,  Bruno RIEDTER ,  Stefan HAEFELE ,  Gregor MAIER

IPC分类号： G05B19/402 ,  G01B11/04 ,  G01B11/27 ,  G05B19/406

CPC分类号： G05B19/402 ,  B23Q17/0952 ,  B23Q17/2466 ,  B23Q17/2485 ,  G01B11/043 ,  G01B11/272 ,  G05B19/406 ,  G05B19/4065 ,  G05B2219/37227 ,  G05B2219/37415 ,  G05B2219/50165

摘要： A processing unit for measuring and controlling a rotary-driven tool, wherein the processing unit is connectable to a light barrier arrangement, which comprises a light-transmitting unit and a light-receiving unit, wherein the processing unit is configured to receive from the light-receiving unit signals that are at least approximately proportional to shading generated by the rotary-driven tool and/or at least one cutting edge of the rotary-driven tool at a first measuring position. The processing unit is further configured to evaluate the signals received and to transmit control signals to the light barrier arrangement, wherein the evaluation of the signals received by the processing unit comprises the following steps: determination of an interference signal component and/or a useful signal component of the received signal; and provision of information about the useful signal component, the interference signal component and/or the received signal for forwarding to a numerical controller of a machine tool.

公开(公告)号：US3481042A

公开(公告)日：1969-12-02

申请号：US3481042D

申请日：1963-07-10

申请人： LEMELSON JEROME H

发明人： LEMELSON JEROME H

IPC分类号： B41J1/20 ,  B41J11/20 ,  G01B7/004 ,  G01D5/347 ,  G05B19/404 ,  B23Q17/04 ,  B23F23/08

CPC分类号： G05B19/404 ,  B41J1/20 ,  B41J11/20 ,  G01B7/004 ,  G01D5/34792 ,  G05B2219/35554 ,  G05B2219/36503 ,  G05B2219/36504 ,  G05B2219/37032 ,  G05B2219/37228 ,  G05B2219/37245 ,  G05B2219/37345 ,  G05B2219/37351 ,  G05B2219/37357 ,  G05B2219/37405 ,  G05B2219/37409 ,  G05B2219/37415 ,  G05B2219/37417 ,  G05B2219/37418 ,  G05B2219/37559 ,  G05B2219/40383 ,  G05B2219/49134 ,  G05B2219/49302 ,  G05B2219/50031 ,  G05B2219/50063 ,  G05B2219/50139 ,  G05B2219/50145 ,  G05B2219/50249 ,  G05B2219/50294 ,  G05B2219/50296 ,  G05B2219/50315 ,  G05B2219/50379 ,  Y10T409/300896

公开(公告)号：US12030152B2

公开(公告)日：2024-07-09

申请号：US17269904

申请日：2019-08-19

申请人： Blum-Novotest GmbH

发明人： Steffen Stauber ,  Bruno Riedter

IPC分类号： G05B19/4065 ,  B23Q17/24 ,  B23Q17/00 ,  B23Q17/22 ,  G01B11/02 ,  G01B11/08 ,  G01B11/24 ,  G05B19/18

CPC分类号： B23Q17/2485 ,  G05B19/4065 ,  B23Q17/00 ,  B23Q17/22 ,  B23Q17/24 ,  G01B11/02 ,  G01B11/08 ,  G01B11/2433 ,  G05B19/18 ,  G05B2219/37415

摘要： A method for checking a tool uses a device with a light emitter for beam emission for tool scanning and with a beam receiver for beam reception and for outputting a shadow signal; and an evaluation unit for processing the shadow signal; rotation of the tool; moving the tool until it reaches a starting position in which the blade dips into the beam and shades this such that a threshold of a range of the evaluation unit is reached or undershot; moving the tool, starting from the starting position, out of the beam and registering the shadow signal; ascertaining that the shadow signal for a cutting edge does not fall below the lower switching threshold or exceed the upper switching threshold such that a shadow signal lies above the lower and below the upper switching threshold; wherein the feed is determined in proportion to a measurement range.

公开(公告)号：US5628673A

公开(公告)日：1997-05-13

申请号：US341514

申请日：1994-11-17

申请人： Masaya Morooka

发明人： Masaya Morooka

IPC分类号： G05B19/401 ,  B24B49/10

CPC分类号： G05B19/4015 ,  G05B2219/37405 ,  G05B2219/37408 ,  G05B2219/37413 ,  G05B2219/37415 ,  G05B2219/45026 ,  G05B2219/50137

摘要： A dicing machine comprises a work table having a surface for supporting a workpiece and a processing element for processing the workpiece. A gap detection device detects a preselected gap between the processing element and the surface of the work table. A control device moves the processing element and the gap detection device and detects their positions. A non-contact detection device detects a non-contact condition of the gap detection device and a processing portion of the processing element. A calculating device calculates a processing position of the workpiece in accordance with the positions of the processing element and the gap detection device detected by the control device when the preselected gap between the processing element and the surface of the work table is detected by the gap detection device, and when the non-contact condition of the gap detection device and the processing portion of the processing element is detected by the non-contact detection device.

摘要翻译： 切割机包括具有用于支撑工件的表面的工作台和用于加工工件的处理元件。 间隙检测装置检测处理元件与工作台的表面之间的预选间隙。 控制装置移动处理元件和间隙检测装置并检测它们的位置。 非接触检测装置检测间隙检测装置的非接触状态和处理元件的处理部分。 计算装置根据处理元件和由控制装置检测到的间隙检测装置的位置，当通过间隙检测来检测处理元件和工作台表面之间的预选间隙时，计算工件的处理位置 并且当非接触检测装置检测到间隙检测装置和处理元件的处理部分的非接触状态时。

公开(公告)号：US3817647A

公开(公告)日：1974-06-18

申请号：US18250171

申请日：1971-09-21

申请人： LEMELSON J

发明人： LEMELSON J

IPC分类号： B23B49/00 ,  B23Q17/09 ,  G05B19/401 ,  G05B19/404 ,  B23B39/08

CPC分类号： B23P25/006 ,  B23B49/001 ,  B23Q17/0957 ,  G05B19/401 ,  G05B19/4015 ,  G05B19/404 ,  G05B2219/35554 ,  G05B2219/36503 ,  G05B2219/36504 ,  G05B2219/37032 ,  G05B2219/37228 ,  G05B2219/37245 ,  G05B2219/37345 ,  G05B2219/37351 ,  G05B2219/37357 ,  G05B2219/37405 ,  G05B2219/37409 ,  G05B2219/37415 ,  G05B2219/37417 ,  G05B2219/37418 ,  G05B2219/37559 ,  G05B2219/40383 ,  G05B2219/49134 ,  G05B2219/49302 ,  G05B2219/50031 ,  G05B2219/50063 ,  G05B2219/50139 ,  G05B2219/50145 ,  G05B2219/50249 ,  G05B2219/50294 ,  G05B2219/50296 ,  G05B2219/50315 ,  G05B2219/50379 ,  Y10S82/90 ,  Y10T408/14 ,  Y10T408/16

摘要： An apparatus and method are provided for controlling a machine tool to perform predetermined or programmed operations on a work piece wherein the tool may be subject to variations in its dimensions due to wear or may be variably located with respect to the tool holder depending on how it is mounted. The apparatus provided herein is operable to sense and measure or indicate the location of the end of the tool or cutting edge with respect to the work and, in certain intances, the diameter of the tool to determine the degree it is worn. In a particular form of the invention, a single probe is automatically controlled to indicate the location of the tool end and to measure or indicate its diameter. The same measuring device may also be utilized to detect a broken tool and prevent operation of the machine until the tool is replaced. In a further form, the detection means may be operable to initiate an action which results in the replacement of a broken or substantially worn tool by directly replacing same before the next operation is effected or by controlling a turret to indicate a second tool with respect to the work while the worn or broken tool is retracted away from the work.

摘要翻译： 提供了一种设备和方法，用于控制机床对工件执行预定或编程的操作，其中工具可能由于磨损而经受其尺寸变化，或者可以相对于工具架可变地定位，这取决于它如何 被安装。

公开(公告)号：US3605909A

公开(公告)日：1971-09-20

申请号：US3605909D

申请日：1968-11-13

申请人： LEMELSON JEROME H

发明人： LEMELSON JEROME H

IPC分类号： G05B19/401 ,  G05B19/404 ,  B23B39/08 ,  G06F15/46

CPC分类号： G05B19/404 ,  G05B19/401 ,  G05B19/4015 ,  G05B2219/35554 ,  G05B2219/36503 ,  G05B2219/36504 ,  G05B2219/37032 ,  G05B2219/37228 ,  G05B2219/37245 ,  G05B2219/37345 ,  G05B2219/37351 ,  G05B2219/37357 ,  G05B2219/37405 ,  G05B2219/37409 ,  G05B2219/37415 ,  G05B2219/37417 ,  G05B2219/37418 ,  G05B2219/37559 ,  G05B2219/40383 ,  G05B2219/49134 ,  G05B2219/49302 ,  G05B2219/50031 ,  G05B2219/50063 ,  G05B2219/50139 ,  G05B2219/50145 ,  G05B2219/50249 ,  G05B2219/50294 ,  G05B2219/50296 ,  G05B2219/50315 ,  G05B2219/50379 ,  Y10T408/08 ,  Y10T408/16

摘要： AN APPARATUS AND METHOD ARE PROVIDED FOR OPERATING ON MATERIAL BY MEANS OF AN AUTOMATICALLY CONTROLLED TOOL AND WORK REQUIRING PREPOSITIONING OF THE TOOL AND WORK SURFACE. IN ONE FORM SURFACE-SENSING MEANS IS MOUNTED ON OR ADJACENT THE TOOL FOR SENSING THE LOCATION OF THE WORK SURFACE WHICH, UPON BEING DETECTED THEREBY, EITHER INITIATES AN AUTOMATIC CYCLE OF OPERATION OR PROVIDES A FEEDBACK SIGNAL WHICH IS OPERATIVE TO CORRECT THE AUTOMATIC CONTROL MEANS OR COMPENSATE FOR VARIATIONS IN THE LOCATION OF THE SURFACE OF THE WORK PIECE AND THE TOOL FROM ONE WORK PIECE TO THE NEXT. LOCATING THE SURFACE OF THE WORK IS EFFECTED EITHER BY MEANS OF A MOVABLE PROBE MOUNTED ON THE TOOL HEAD OR TOOL MANIPULATOR AND OPERATIVE TO BE DRIVEN INTO ENGAGEMENT WITH OR SENSING RELATIONSHIP WITH THE WORK, OR BY MEANS OF LOCATING THE SENSING TRANSDUCER ON OR ADJACENT THE TOOL ITSELF WHICH IS MOVED TO PERMIT THE TRANSDUCER TO SENSE THE SURFACE OF THE WORK PRIOR TO INITIATING AN AUTOMATIC OPERATIONAL CYCLE. IN ANOTHER FORM, THE TOOL ITSELF IS ENERGIZED TO DEFINE THE SURFACE-SENSING TRANSDUCER AND RELATIVE MOVEMENT OF THE WORK AND TOOL IS EFFECTED TO PERMIT LOCATION OF THE WORK SURFACE BY THE TOOL.

公开(公告)号：US3188947A

公开(公告)日：1965-06-15

申请号：US25094563

申请日：1963-01-11

申请人： BURROUGHS CORP

发明人： GRIFFIN PAIGE WALTER

IPC分类号： B41J1/20 ,  B41J11/20 ,  G01B7/004 ,  G01D5/347 ,  G05B19/404

CPC分类号： G05B19/404 ,  B41J1/20 ,  B41J11/20 ,  G01B7/004 ,  G01D5/34792 ,  G05B2219/35554 ,  G05B2219/36503 ,  G05B2219/36504 ,  G05B2219/37032 ,  G05B2219/37228 ,  G05B2219/37245 ,  G05B2219/37345 ,  G05B2219/37351 ,  G05B2219/37357 ,  G05B2219/37405 ,  G05B2219/37409 ,  G05B2219/37415 ,  G05B2219/37417 ,  G05B2219/37418 ,  G05B2219/37559 ,  G05B2219/40383 ,  G05B2219/49134 ,  G05B2219/49302 ,  G05B2219/50031 ,  G05B2219/50063 ,  G05B2219/50139 ,  G05B2219/50145 ,  G05B2219/50249 ,  G05B2219/50294 ,  G05B2219/50296 ,  G05B2219/50315 ,  G05B2219/50379 ,  Y10T409/300896

公开(公告)号：US20170199512A1

公开(公告)日：2017-07-13

申请号：US15469132

申请日：2017-03-24

申请人： The Aerospace Corporation ,  Amendia Inc.

发明人： Frank Edward LIVINGSTON ,  Timothy GANEY

IPC分类号： G05B19/4093

CPC分类号： G05B19/40937 ,  A61F2/30771 ,  A61F2002/3097 ,  G05B15/02 ,  G05B2219/36032 ,  G05B2219/37415

摘要： A system includes a computing device that generates at least one process script for the modification to a material substrate and at least one pattern script that corresponds to the process script. The computing device also merges the process script with the pattern script and generates a plurality of command signals that are based on the merged process and pattern scripts. An energy source generates a plurality of light beams based on the generated command signal(s). At least one modulating component modulates the generated light beams based on generated command signal(s). A waveform apparatus generates at least one waveform signal to customize the generated light beams based on the generated command signal(s). A motion control apparatus controls at least one parameter of the light beams based on the generated command signal(s).