Semiconductor structure, method for forming semiconductor structure and memory

    公开(公告)号:US12108591B2

    公开(公告)日:2024-10-01

    申请号:US17458992

    申请日:2021-08-27

    CPC classification number: H10B12/312 H01L29/0649 H10B12/482

    Abstract: A method for forming a semiconductor structure includes: providing a substrate, where a sacrificial layer and an active layer located on the sacrificial layer are formed on the substrate; patterning the active layer and the sacrificial layer to form a groove, where the active layer and the sacrificial layer are divided into a plurality of active regions by the groove; forming a first isolation layer surrounding the active regions in the groove; patterning the active layer in the active regions to form a plurality of separate active patterns, where at least one of side walls or ends of the active patterns is connected to the first isolation layer; removing the sacrificial layer along an opening located between two adjacent one of the active patterns to form a gap between a bottom of the active patterns and the semiconductor substrate; and forming a bit line in the gap.

    SEMICONDUCTOR DEVICE
    9.
    发明公开

    公开(公告)号:US20240074151A1

    公开(公告)日:2024-02-29

    申请号:US18456383

    申请日:2023-08-25

    Inventor: Takao KOSAKA

    CPC classification number: H10B12/33 H10B12/312 H10B12/482 H10B12/488

    Abstract: According to one embodiment, a semiconductor device includes a conductive layer, an oxide semiconductor layer provided penetrating the conductive layer in a first direction, and a first insulating film provided between the conductive layer and the oxide semiconductor layer in a second direction that intersects the first direction. The first insulating film comprises boron nitride.

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