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公开(公告)号：WO2021032448A1
公开(公告)日：2021-02-25
申请号：PCT/EP2020/071742
申请日：2020-08-01
Applicant: ASML NETHERLANDS B.V.
Inventor： ZHENG, Yunan , FAN, Yongfa , FENG, Mu , ZHENG, Leiwu , WANG, Jen-Shiang , LUO, Ya , ZHANG, Chenji , CHEN, Jun , HOU, Zhenyu , WANG, Jinze , CHEN, Feng , MA, Ziyang , GUO, Xin , CHENG, Jin
IPC: G03F7/20
Abstract: Described herein are method generating modified simulated contours and/or generate metrology gauges based on the modified contours. A method of generating metrology gauges for measuring a physical characteristic of a structure on a substrate includes obtaining (i) measured data associated with the physical characteristic of the structure printed on the substrate, and (ii) at least portion of a simulated contour of the structure, the portion of the simulated contour being associated with the measured data; modifying, based on the measured data, the portion of the simulated contour of the structure; and generating the metrology gauges on or adjacent to the modified portion of the simulated contour, the metrology gauges being placed to measure the physical characteristic of the simulated contour of the structure.
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132.发明申请
公开(公告)号：WO2020260000A1
公开(公告)日：2020-12-30
申请号：PCT/EP2020/065871
申请日：2020-06-08
Applicant: ASML NETHERLANDS B.V.
Abstract: The invention provides a multilayer superconductive article (600) extending in a longitudinal direction (LD), the article comprising: • - a substrate layer (610) extending in the longitudinal direction; • - a superconductive layer (620) extending in the longitudinal direction; • - a further layer (630) extending in the longitudinal direction; wherein the substrate layer or the further layer comprises one or more cooling tabs extending in the longitudinal direction and in a transverse direction.
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公开(公告)号：WO2020254041A1
公开(公告)日：2020-12-24
申请号：PCT/EP2020/063426
申请日：2020-05-14
Applicant: ASML NETHERLANDS B.V.
Abstract: Disclosed is a method of determining a complex-valued field relating to a sample measured using an imaging system. The method comprises obtaining image data relating to a series of images of the sample, imaged at an image plane of the imaging system, and for which at least two different modulation functions are imposed in a Fourier plane of the imaging system; and determining the complex-valued field from the imaging data based on the imposed modulation functions.
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公开(公告)号：WO2020249339A1
公开(公告)日：2020-12-17
申请号：PCT/EP2020/063100
申请日：2020-05-11
Applicant: ASML NETHERLANDS B.V.
Inventor： JANSEN, Maarten, Jozef , MRIDHA, Manoj Kumar , VAN DER PASCH, Engelbertus, Antonius, Fransiscus
Abstract: The invention provides an interferometer system to determine a position of a movable object, comprising: a laser source to provide a radiation beam, an optical system arranged to split the radiation beam into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.
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公开(公告)号：WO2020249332A1
公开(公告)日：2020-12-17
申请号：PCT/EP2020/062803
申请日：2020-05-08
Applicant: STICHTING VU , ASML NETHERLANDS B.V. , STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN , UNIVERSITEIT VAN AMSTERDAM
IPC: G03F1/84 , G01N21/956 , G03F7/20 , G06T7/00 , G03H1/04
Abstract: Disclosed is a method of determining a complex-valued field relating to a structure, comprising: obtaining image data relating to a series of images of the structure, for which at least one measurement parameter is varied over the series and obtaining a trained network operable to map a series of images to a corresponding complex-valued field. The method comprises inputting the image data into said trained network and non-iteratively determining the complex-valued field relating to the structure as the output of the trained network. A method of training the trained network is also disclosed.
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Patent Agency Ranking
公开(公告)号：WO2020239426A1
公开(公告)日：2020-12-03
申请号：PCT/EP2020/063148
申请日：2020-05-12
Applicant: ASML NETHERLANDS B.V.
Inventor： VAN GERVEN, Mark, Henricus, Wilhelmus, , VAN DE RIJDT, Johannes, Hubertus, Antonius , RONDE, Michaël, Johannes, Christiaan , BOSCH, Niels, Johannes, Maria
Abstract: Disclosed is a stage apparatus, comprising: a short stroke stage; a long stroke stage; a first sensor configured to measure a position of the short stroke stage with respect to a reference arranged not on the short stroke stage and not on the long stroke stage; one or more roller bearings configured to support the long stroke stage; and a controller for controlling a motion of the long stroke stage and a motion of the short stroke stage for following movement of the reference at least partly based on measurement from the first sensor, wherein said controller is operable such that control of the long stroke stage is decoupled from said movement of the reference in at least part of operation of the stage apparatus for reducing debris generation of the one or more roller bearings
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公开(公告)号：WO2020239373A1
公开(公告)日：2020-12-03
申请号：PCT/EP2020/062463
申请日：2020-05-05
Applicant: ASML HOLDING N.V. , ASML NETHERLANDS B.V.
Inventor： LIPSON, Matthew , ACHANTA, Satish , DAWSON, Benjamin, David , SORNA, Matthew, Anthony , SIGAL, Iliya , UITTERDIJK, Tammo
IPC: G03F7/20 , H01L21/687
Abstract: A substrate table for supporting a substrate includes a surface and coarse burls. Each of the coarse burls includes a burl-top surface and fine burls. The coarse burls are disposed on the surface of the substrate table. The fine burls are disposed on the burl-top surface. The fine burls contact the substrate when the substrate table supports the substrate.
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公开(公告)号：WO2020234043A1
公开(公告)日：2020-11-26
申请号：PCT/EP2020/063164
申请日：2020-05-12
Applicant: ASML NETHERLANDS B.V.
Inventor： MOORS, Johannes, Hubertus, Josephina , BANINE, Vadim, Yevgenyevich , NIKIPELOV, Andrey , VAN DE KERKHOF, Marcus, Adrianus , YAGHOOBI, Parham
Abstract: A mirror comprises a body and a surface defined by the body. The body comprises a plurality of layers. The plurality of layers are arranged to act as a multilayer Bragg reflector for radiation having a first wavelength when radiation having said first wavelength is incident on the surface. A local tangent plane of the surface is inclined at a non-zero angle relative to a local tangent plane of the plurality of layers.
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139.发明申请
公开(公告)号：WO2020234028A1
公开(公告)日：2020-11-26
申请号：PCT/EP2020/063077
申请日：2020-05-11
Applicant: ASML NETHERLANDS B.V.
Inventor： SMORENBERG, Pieter, Gerardus, Jacobus , SAPUTRA, Putra , ELBATTAY, Khalid , DERWIN, Paul , WERKMAN, Roy , JENSEN, Erik , YU, Hyun-Woo , SARMA, Gautam
IPC: G03F7/20
Abstract: The invention provides a method for determining a sampling scheme, which method comprises: - obtaining a first fingerprint model relating to a first spatial distribution of a performance parameter over a first portion of a semiconductor substrate and a second fingerprint model relating to a second spatial distribution of said performance parameter over a second portion of the semiconductor substrate; and - determining a sampling point corresponding to a measuring location on the semiconductor substrate for generating measurement data based on an expected reduction of a first uncertainty metric associated with evaluation of the first fingerprint model over the first portion and an expected reduction of a second uncertainty metric associated with evaluation of the second fingerprint model over the second portion.
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公开(公告)号：WO2020193259A1
公开(公告)日：2020-10-01
申请号：PCT/EP2020/057151
申请日：2020-03-16
Applicant: ASML NETHERLANDS B.V.
Abstract: An object positioning device, comprising: an object support configured to support an object, an actuator, in use configured to move the object support in a substantially horizontal plane, arranged to apply a force to the object support in a force direction, wherein the force direction is pointing out of the horizontal plane.
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