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公开(公告)号:CN101116382A
公开(公告)日:2008-01-30
申请号:CN200680004096.2
申请日:2006-03-03
Applicant: 株式会社村田制作所
CPC classification number: H01L24/81 , H01L21/4807 , H01L21/481 , H01L23/15 , H01L23/24 , H01L23/3135 , H01L23/315 , H01L23/3185 , H01L23/49894 , H01L24/48 , H01L2224/05568 , H01L2224/05573 , H01L2224/16225 , H01L2224/48227 , H01L2224/48472 , H01L2224/81011 , H01L2224/81191 , H01L2224/81192 , H01L2224/8121 , H01L2224/81355 , H01L2224/81395 , H01L2224/81815 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/15153 , H01L2924/15165 , H01L2924/15174 , H01L2924/181 , H01L2924/19105 , H05K1/0306 , H05K3/282 , H05K3/284 , H05K2201/0162 , H05K2201/0179 , H05K2203/1316 , H05K2203/1322 , H01L2924/00 , H01L2224/05599 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 提供了具有极好的抗迁移性以及在树脂密封材料与陶瓷多层基板主体之间的高接合强度的陶瓷多层基板,及这种陶瓷多层基板的制造方法。用通过PVD方法形成的硅氧烷膜完全覆盖包括焊区(16,17)和外部电极(24,25)的多层基板主体(2)。将硅氧烷膜的厚度设置为低于100nm。然后,安装组件(11)的外部电极(13,14)通过焊料(19)电连接到多层板主体(2)的焊区(16,17)并固定。然后,在多层基板主体(2)上形成用于密封安装组件(11)的树脂密封材料(4)。