公开(公告)号：EP1041036B1

公开(公告)日：2007-05-09

申请号：EP99947884.5

申请日：1999-10-13

Applicant: SEIKO EPSON CORPORATION

Inventor： KAMIJIMA, Shunji Seiko Epson Corporation ,  YONEKUBO, Masatoshi Seiko Epson Corporation ,  TAKEDA, Takashi Seiko Epson Corporation ,  NISHIKAWA, Takao Seiko Epson Corporation

IPC: B81B1/00 ,  B81B3/00

CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81C2201/034 ,  G02B26/02

Abstract: A micromachine and a method of manufacturing the same which are suitable as or for a micromachine having a first dynamic fine structural portion constituting a driving portion, and a second static fine structural portion performing a switching function or a function of an optical element, the method comprising forming the second static fine structural portion on the first dynamic fine structural portion, or superposing the second static fine structural portion thereon and die transferring the same thereto, whereby the method enables the second fine structure to be formed without using at least a complicated step, such as a silicon process in an intermediate stage of the method, and into a complicated shape easily with a high reproducibility, and contributes to the improvement of the productivity. Especially, when a plurality of elements are arranged in an arrayed state as in a spatial light modulator, the die transfer techniques enable the second fine structure to be reproduced stably as compared with the techniques using a silicon process for forming all parts of a micromachine, whereby the subject method reduces the probability of occurrence of defects to a remarkably low level and contributes to the improvement of the yield.

公开(公告)号：EP1193530B1

公开(公告)日：2006-02-01

申请号：EP01307643.5

申请日：2001-09-07

Applicant: Xerox Corporation

Inventor： Rosa, Michel A. ,  Fork, David K. ,  Peeters, Eric

IPC: G02B26/08 ,  B81B3/00 ,  G02B6/35

CPC classification number: G02B6/3518 ,  B81B2201/045 ,  B81B2203/04 ,  B81C1/00666 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841

公开(公告)号：EP1509946A1

公开(公告)日：2005-03-02

申请号：EP03756181.8

申请日：2003-05-14

Applicant: Silicon Light Machines Corporation

Inventor： HUNTER, James, A.

IPC: H01L21/00 ,  H01L21/82 ,  H01L21/302

CPC classification number: G02B26/0808 ,  B81B2201/045 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2201/016 ,  B81C2203/0735 ,  B81C2203/0778 ,  H01L27/0611

Abstract: An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front-end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.

公开(公告)号：EP1350758A3

公开(公告)日：2004-12-15

申请号：EP03002122.4

申请日：2003-01-30

Applicant: MICROSOFT CORPORATION

Inventor： Sinclair, Michael J.

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

公开(公告)号：EP1460035A1

公开(公告)日：2004-09-22

申请号：EP02805882.4

申请日：2002-12-16

Applicant: Sony Corporation

Inventor： IKEDA, Koichi, Sony Corporation

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/02 ,  G02B5/18

CPC classification number: B81C1/0015 ,  B81B2201/045 ,  B81B2203/04 ,  B81C2201/0109 ,  B81C2201/0173 ,  B81C2203/0109 ,  G02B26/0841

Abstract: The present invention provides an electrostatic drive type MEMS device and a manufacturing method thereof, in which flattening the surface of a driving side electrode, improving performance, and further the improvements of the degree of freedom of designing in the manufacturing process are implemented. In addition, the present invention provides a GLV device using this MEMS device, and further a laser display using this GLV device.
In the present invention an electrostatic drive type MEMS device includes a substrate side electrode and a beam having a driving side electrode driven by electrostatic attraction force or electrostatic repulsion force that acts between the substrate side electrode and driving side electrode, in which the substrate side electrode is formed of an impurities-doped conductive semiconductor region in a semiconductor substrate.

Abstract translation: 本发明提供了对静电驱动型MEMS器件及其制造方法，其中，展平的驱动侧电极的表面上，提高性能，并进一步在制造过程的设计来实现的自由度的改进。 此外，本发明提供使用此MEMS器件的GLV装置，以及使用该GLV装置还激光显示器。 在本发明中，以静电驱动型MEMS器件包括基板侧电极和具有由静电引力或静电斥力驱动的驱动侧电极的光束做了基板侧电极和驱动侧电极，在它们之间作用 基板侧电极中的半导体的导电性基板上形成杂质掺杂的半导体区域构成。

公开(公告)号：EP1437325A1

公开(公告)日：2004-07-14

申请号：EP02767894.5

申请日：2002-09-05

Applicant: Nikon Corporation

Inventor： AKAGAWA, Keiichi ,  SUZUKI, Junji ,  ISHIZUYA, Tohru ,  SUZUKI, Yoshihiko

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08

CPC classification number: G02B6/358 ,  B81B3/0037 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B2006/12104

Abstract: The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

Abstract translation: 相对于基板（11）可垂直移动的板（21）通过挠曲单元（27a，27b）固定到基板上。 板的电极（23a，23b）通过施加电压而在板和衬底之间产生静电力。 该板设置有能够从光路移入或向后移动的反射镜（12）。 还包括以下独立权利要求：（1）微执行器装置; （2）光开关; 和（3）光开关阵列。

公开(公告)号：EP1317397A2

公开(公告)日：2003-06-11

申请号：EP01968332.5

申请日：2001-08-30

Applicant: 3M Innovative Properties Company

Inventor： WEAVER, Billy, L. ,  GOETZ, Douglas, P. ,  HAGEN, Kathy, L. ,  HAMERLY, Michael, E. ,  SMITH, Robert, G. ,  THEISS, Silva, K.

IPC: B81B3/00 ,  H01H61/04 ,  F03G7/06

CPC classification number: B81B3/0024 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/058 ,  B82Y15/00 ,  H01H2061/006 ,  H01H2061/008

Abstract: A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator bends generally at the flexure so that the member moves away from the substrate when current is applied to at least the hot arm.

公开(公告)号：EP1180848A1

公开(公告)日：2002-02-20

申请号：EP00830570.8

申请日：2000-08-09

Applicant: STMicroelectronics S.r.l.

Inventor： Mastromatteo, Ubaldo ,  Murari, Bruno

IPC: H02N1/00 ,  F16H21/44 ,  G02B26/08

CPC classification number: H02N1/004 ,  B81B3/0051 ,  B81B2201/045 ,  B81B2203/051 ,  B81B2203/058 ,  F16H21/02 ,  G02B26/0841 ,  G02B26/0866

Abstract: A microelectromechanical structure, usable in an optical switch for directing a light beam towards one of two light guide elements, including: a mirror element (53), rotatably movable; an actuator (65), which can translate; and a motion conversion assembly (77), arranged between the mirror element (53) and the actuator (65). The motion conversion assembly (77) includes a projection (54) integral with the mirror element (53) and elastic engagement elements (73) integral with the actuator (65) and elastically loaded towards the projection. The elastic engagement elements (73) are formed by metal plates fixed to the actuator (65) at one of their ends and engaging the projection (54) with an abutting edge (73b) countershaped with respect to the projection (54).

Abstract translation: 一种微机电结构的，可用在用于引导光束朝向两个导光元件中的一个，其中包括光开关：一个反射镜元件（53）可旋转地运动; 致动器（65），其可平移的; 和运动转换组件（77）中，反射镜元件（53）和致动器（65）之间设置。 运动转换组件（77）包括突起（54）与所述反射镜元件（53）和弹性接合元件（73）与致动器（65）并弹性朝向投影加载积分积分。 弹性接合元件（73）由固定到所述致动器（65）的金属板在其端部中的一个形成，并且卡合突起（54），在邻接的边缘（73B）计数器形相对于所述突出部（54）。

公开(公告)号：EP1139141A2

公开(公告)日：2001-10-04

申请号：EP01301375.0

申请日：2001-02-16

Applicant: Cronos Integrated Microsystems, Inc.

Inventor： Dhuler, Vijayakumar Rudrappa ,  Hill, Edward Arthur

IPC: G02B26/02 ,  B81B3/00

CPC classification number: G02B6/3564 ,  B81B3/0054 ,  B81B2201/045 ,  B81B2203/0118 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/357

Abstract: Microelectromechanical devices may include a substrate having first and second optical fibers thereon. An optical shutter may also be provided. This optical shutter is mechanically coupled to a first plurality of arched beams that are supported at opposing ends by support structures which may be mounted on the substrate. A second plurality of arched beams are also provided on a first side of the optical shutter. These arched beams are also supported at opposing ends by support structures. A first brake member is provided that is coupled to the second plurality of arched beams. This first brake member contacts and restricts the optical shutter from moving in the ±y-direction when the second plurality of arched beams are relaxed, but releases the optical shutter when the second plurality of arched beams move in the -x direction. This ability to restrict movement of the optical shutter when the second plurality of arched beams are relaxed provides a degree of nonvolatile position retention. A third plurality of arched beams are also preferably provided on a second side of the optical shutter. A second brake member, which is coupled to the third plurality of arched beams, also contacts and restricts the shutter member from moving in the ±y direction when the third plurality of arched beams are relaxed, but releases the optical shutter when the third plurality of arched beams move in the +x direction.

Abstract translation: 微电子机械装置可以包括在其上具有第一和第二光学纤维的基材。 因此可以提供一种光学快门。 这种光学快门以机械耦合到拱形梁的第一多个并在通过其可以安装在基板上的支撑结构相对的端部支撑。 因此设置在光学快门的第一侧的弓形梁的第二多个。 这些拱形梁从而在由支撑结构相对的端部支撑。 本发明提供一种第一制动构件都被连接到弓形梁的所述第二多个。 该第一制动部件接触，并限制从+/- y方向时的弓形梁的所述第二多个被放松移动光学快门，但释放所述光学快门。当弓形梁的所述第二多个在-x方向上移动。 该功能限制光学快门移动。当弓形梁的所述第二多个被放松能力提供一定程度的非易失性位置保持的。 因此弓形梁的第三多个被优选地设置在光学快门的第二侧。 第二制动器构件所有这一切都耦合到拱形梁的第三多个，因此接触和从移动的方向+/-ÿ当弓形梁的所述第三多个被放宽限制快门构件，但释放所述光学快门。当第三 的弓形梁的多个沿+ x方向移动。

公开(公告)号：EP1093005A2

公开(公告)日：2001-04-18

申请号：EP00308683.2

申请日：2000-10-03

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bishop, David John ,  Bolle, Cristian A. ,  Giles, Randy Clinton ,  Pardo, Flavio

IPC: G02B26/08

CPC classification number: B81B7/0003 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0866

Abstract: A micro-electro-mechanical (MEM) optical device having a reduced footprint for increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and second pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second beam ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device for reducing the contact area between the optic device edge and the substrate.

Abstract translation: 微电子机械（MEM）光学器件具有减小的占地面积以增加衬底上的产量。 MEM装置包括具有外边缘并由设置在基板上的支撑结构支撑的光学元件。 该支撑结构通过第一和第二对梁机械地连接到基板，该第一和第二对梁将该结构移动到激活位置，以将光学装置升高到基板上方。 当处于升高的位置时，光学装置可以选择性地倾斜以偏转光学信号。 梁的一端连接到支撑结构，另一端连接到衬底并且被设置为使得第一和第二梁端位于光学装置外边缘附近。 在优选实施例中，在光学装置的外边缘上包括粘滞力减小元件，用于减小光学装置边缘与基底之间的接触面积。