公开(公告)号：EP1376669A4

公开(公告)日：2006-01-04

申请号：EP02708711

申请日：2002-03-28

申请人： OHMI TADAHIRO ,  TOKYO ELECTRON LTD

发明人： OHMI TADAHIRO ,  HIRAYAMA MASAKI ,  SUGAWA SHIGETOSHI ,  GOTO TETSUYA

IPC分类号： H05H1/46 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31

CPC分类号： H01J37/3222 ,  H01J37/32192 ,  H01J37/32229 ,  H01J37/3244

摘要： A micro wave plasma processing device, wherein a tapered surface for relieving a variation in impedance and a member having an intermediate dielectric constant are installed between a micro wave feeding wave guide and a micro wave antenna, whereby the formation of reflected wave at the connection part between the micro wave feeding wave guide and the micro wave antenna can be suppressed to increase a power feeding efficiency and suppress discharge so as to stabilize the formation of plasma in the plasma processing device.

摘要翻译： 在微波等离子体处理装置中，通过在微波供应波导与微波天线之间设置锥面或具有介质介电常数的构件，微波提供波导与微波天线之间的接合单元的微波反射减小， 以缓和阻抗变化。 因此，提高供电效率，减少放电确保等离子体的稳定形成。

公开(公告)号：EP1347506A4

公开(公告)日：2005-04-20

申请号：EP01272543

申请日：2001-12-27

申请人： OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  SUGAWA S ,  HIRAYAMA M ,  SHIRAI Y

IPC分类号： H01L21/28 ,  H01L21/306 ,  H01L21/314 ,  H01L21/316 ,  H01L21/318 ,  H01L21/336 ,  H01L21/76 ,  H01L21/8234 ,  H01L21/8239 ,  H01L21/8246 ,  H01L21/8247 ,  H01L27/00 ,  H01L27/088 ,  H01L27/105 ,  H01L27/115 ,  H01L27/12 ,  H01L29/49 ,  H01L29/51 ,  H01L29/78 ,  H01L29/786 ,  H01L29/788 ,  H01L29/792

CPC分类号： H01L21/28202 ,  H01L21/0214 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/022 ,  H01L21/02238 ,  H01L21/02247 ,  H01L21/02252 ,  H01L21/02307 ,  H01L21/02315 ,  H01L21/30604 ,  H01L21/3144 ,  H01L21/3145 ,  H01L21/31612 ,  H01L21/31662 ,  H01L21/3185 ,  H01L21/823462 ,  H01L27/105 ,  H01L27/1052 ,  H01L27/11526 ,  H01L27/11546 ,  H01L27/11568 ,  H01L27/12 ,  H01L29/4908 ,  H01L29/513 ,  H01L29/518 ,  H01L29/66757 ,  H01L29/78603 ,  H01L29/78645

摘要： A method for manufacturing a semiconductor device including a transistor and capacitors formed over a silicon substrate, wherein hydrogen present at least on a part of the surface of the silicon substrate, hydrogen is removed by exposing the surface to a plasma produced from a first inert gas, a plasma is produced from a mixture gas of a second inert gas and one or more kinds of gas molecules, and thereby to form a silicon compound layer containing at least part of the elements constituting the gas molecules is formed on the surface of the silicon substrate.

摘要翻译： 一种用于制造半导体器件的方法，所述半导体器件包括形成在硅衬底上的晶体管和电容器，其中氢至少存在于所述硅衬底的一部分表面上，通过将所述表面暴露于由第一惰性气体产生的等离子体来除去氢 从第二惰性气体和一种或多种气体分子的混合气体产生等离子体，从而形成包含构成气体分子的元素的至少一部分的硅化合物层形成在硅的表面上 基质。

公开(公告)号：EP0889515A4

公开(公告)日：2004-10-20

申请号：EP97912528

申请日：1997-11-21

申请人： NIPPON OXYGEN CO LTD ,  TODA MASAYUKI ,  OHMI TADAHIRO

发明人： TODA MASAYUKI ,  OHMI TADAHIRO ,  ISHIHARA YOSHIO

IPC分类号： B65G49/00 ,  B65G49/07 ,  H01L21/677 ,  H01L21/68 ,  H01L21/00

CPC分类号： H01L21/67126 ,  H01L21/67724 ,  H01L21/67736

摘要： When a thin sheet-like substrate S is conveyed between conveying chambers (2) equipped with a processing apparatus (1) and kept in an inert gas atmosphere by using a conveying robot (30) equipped with an accommodation chamber (3) capable of accommodating the thin sheet-like substrate (S) in an inert gas atmosphere, a connection chamber (4) is interposed between the accommodation chamber (3) and the conveying chamber (2) when the thin sheet-like substrate (S) is transferred between the accommodation chamber (3) of the conveying robot (30) and the conveying chamber (2) on the side of the processing apparatus (1), and is vacuumized, and then an inert gas is introduced. Thereafter, gate valves (GV1 and GV2) of the accommodation chamber (3) and the conveying chamber (2) are opened and the thin sheet-like substrate (S) is carried in and out.

公开(公告)号：EP0969342A4

公开(公告)日：2004-05-19

申请号：EP99900168

申请日：1999-01-11

申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  KAGAZUME TETU ,  SUGIYAMA KAZUHIKO ,  DOHI RYOUSUKE ,  MINAMI YUKIO ,  NISHINO KOUJI ,  KAWATA KOUJI ,  IKEDA NOBUKAZU ,  YAMAJI MICHIO

IPC分类号： F16K31/06 ,  C01B5/00 ,  G05D7/06 ,  G05D11/13 ,  G05D21/00

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A fluid supply apparatus comprising a pressure flow controller for controlling the rate of flow of fluid, a fluid selector valve for opening/closing the fluid passage on the secondary side, and a fluid supply controller for controlling the operation of them, wherein the pressure flow controller is provided with an orifice (5), a control valve (1) provided on the upstream side of the orifice (5), a pressure sensor (3) provided between the control valve (1) and the orifice (5), and an operation controller (6) for outputting to a driver (2) of the control valve (1) a control signal (Qy) representing the difference between a rate-of-flow signal (Qc=KP1) generated by calculation based on the pressure (P1) measured by the pressure sensor (3) and a rate-of-flow command signal (Qs), and the pressure (P1) on the upstream side of the orifice (5) is adjusted by opening/closing the control valve (1) so as to regulate the rate of flow on the downstream side of the orifice (5).

摘要翻译： 1。一种流体供给装置，其特征在于，具有：控制流体的流量的压力流量控制器;开闭二次侧的流体通路的流体切换阀;以及控制它们的动作的流体供给控制器， （5），设置在节流孔（5）的上游侧的控制阀（1），设置在控制阀（1）和节流孔（5）之间的压力传感器（3），以及 （6），用于向控制阀（1）的驱动器（2）输出表示通过基于压力的计算产生的流量信号（Qc = KP1）之间的差值的控制信号（Qy） （3）测量的压力（P1）和流量指令信号（Qs），并且通过打开/关闭控制阀（5）来调节节流孔（5）上游侧的压力（P1） 1）以调节孔口（5）下游侧的流量。

公开(公告)号：EP1026566A4

公开(公告)日：2004-03-17

申请号：EP99935121

申请日：1999-08-09

申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  KAGATSUME SATOSHI ,  HIROSE JUN ,  NISHINO KOUJI

IPC分类号： F16K7/14 ,  C01B5/00 ,  F15D1/04 ,  F16K31/06 ,  G05B11/36 ,  G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A versatile flow rate controller comprises an orifice (8) exchangeable depending on the required opening for a different fluid and a different flow rate range, a control valve (2) on the upstream side, a pressure detector (6) between the control valve (2) and the orifice (8), an arithmetic circuit (14) for calculating a flow rate as Qc=KP1 (K is a constant) from an upstream pressure P1 detected by the detector (6); an output circuit (16) for providing a flow-setting signal Qe, a converter circuit (18) for producing a flow rate signal Qf (Qf=kQc) by multiplying the calculated flow rate signal Qc by a factor k to change the full-scale flow rate, and a control circuit (20) for supplying a driver section (4) of the control valve (2) with a control signal Qy corresponding to the difference between the Qf and Qe.

公开(公告)号：EP1126260A4

公开(公告)日：2003-07-09

申请号：EP00949991

申请日：2000-08-03

申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  HIROSE TAKASHI ,  IDETA EIJI ,  IKEDA NOBUKAZU ,  DOHI RYOUSUKE ,  NISHINO KOUJI ,  YOSHIKAWA KAZUHIRO ,  KAGATSUME SATOSHI ,  HIROSE JUN ,  FUKASAWA KAZUO ,  KOIZUMI HIROSHI ,  NAGAOKA HIDEKI

IPC分类号： G01L9/04 ,  G01L9/00 ,  G01L19/00 ,  G01L19/04 ,  G01L19/06 ,  G01L19/14 ,  G01L7/08

CPC分类号： G01L19/0023 ,  G01L19/0645 ,  G01L19/145 ,  G01L19/147

摘要： A pressure detector mounting structure capable of preventing a diaphragm from being deformed by a stress acting on a diaphragm type pressure detector and output characteristics and temperature characteristics from being varied when the pressure detector is incorporated in a fixture provided in a piping or equipment, wherein the pressure detector formed by fixedly combining a diaphragm base having a diaphragm with a sensor base incorporating a sensor element operating according to the displacement of the diaphragm is inserted into an inserting hole through a gasket and pressed air-tight fixedly from the upper side using a pressing member, the pressing member and the gasket are brought into contact with the upper and lower surfaces of a main body of the diaphragm base, respectively, and a shallow groove is formed in ring-shape in the lower surface of the main body on the inner side of a part in contact with the gasket so as to off set a deformation produced by a pressing force from the pressing member through the shallow groove.

公开(公告)号：EP0751301A3

公开(公告)日：1998-07-15

申请号：EP96110514

申请日：1996-06-28

申请人： OHMI TADAHIRO ,  FUJIKIN KK

发明人： OHMI TADAHIRO ,  HIRAO KEIJI ,  YAMAJI MICHIO ,  ITOI SHIGERU ,  SHINOHARA TSUTOMU ,  IKEDA NOBUKAZU ,  KOJIMA TETSUYA

IPC分类号： G05D7/06 ,  F15B13/00 ,  F15B13/08 ,  G05D16/20

CPC分类号： F15B13/0832 ,  F15B13/0817 ,  F15B13/0871 ,  Y10T137/5109 ,  Y10T137/5283 ,  Y10T137/87885

摘要： A fluid control apparatus (1) comprises a mass flow controller (2), two on-off valves (3,4) disposed at the inlet side of the controller and three on-off valves (5,6,7) disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve (4) is positioned on a purge fluid on-off valve (3), and at the outlet side, a vent on-off valve (6) is positioned on a vacuum suction on-off valve (5), with a main passage on-off valve (7) further positioned on the vent on-off valve (6).

公开(公告)号：EP0657934A4

公开(公告)日：1997-09-03

申请号：EP93919578

申请日：1993-08-26

申请人： SHIBATA TADASHI ,  OHMI TADAHIRO

发明人： SHIBATA TADASHI ,  OHMI TADAHIRO

IPC分类号： H01L21/82 ,  H01L21/822 ,  H01L27/04 ,  H01L27/10 ,  H01L27/118 ,  H03K19/173 ,  H01L29/78

CPC分类号： H03K19/1736 ,  H01L27/11803

摘要： A semiconductor integrated circuit adaptable to any logic circuits using a common mask with the exception of a mask of metallic wirings so as to drastically improve performance of custom LSIs. The semiconductor integrated circuit comprises a logic circuit having a plurality of input terminals and at least one output terminal. The logic circuit includes a plurality of circuit blocks of the same circuit construction. Each of the circuit blocks has at least two stages of inverter formed by MOS semiconductor devices and at least one layer of a wiring pattern having a different pattern. The output signal of each block is defined by a predetermined function of an input signal.

摘要翻译： 一种半导体集成电路，适用于使用除了金属布线掩模之外的共用掩模的任何逻辑电路，从而大大提高定制LSI的性能。 半导体集成电路包括具有多个输入端和至少一个输出端的逻辑电路。 逻辑电路包括具有相同电路结构的多个电路块。 每个电路块具有由MOS半导体器件形成的至少两级的反相器和至少一层具有不同图案的布线图案。 每个块的输出信号由输入信号的预定功能定义。

公开(公告)号：EP0671871A4

公开(公告)日：1997-05-21

申请号：EP94908129

申请日：1993-08-13

申请人： TAKASAGO THERMAL ENGINEERING ,  HAMAMATSU PHOTONICS KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  INABA HITOSHI ,  IKEDO TOMOYUKI

IPC分类号： H05F3/06 ,  A01G7/00 ,  E04H5/02 ,  H01L21/02 ,  H01L21/68

CPC分类号： H05F3/06

摘要： An apparatus and method for producing positive and negative ions and/or electrons in a gas of any atmosphere without producing dust, a method and structure for neutralizing a charged body in a short period of time and for completely preventing static electricity from being generated, and various apparatuses and structures, such as a conveyor, wet bench, and clean room, which use the neutralizing method and structure. The gaseous ion producing apparatus produces positive and negative ions and/or electrons in a gas by irradiating, with electromagnetic waves in a soft X-ray region, the gas under a high pressure, atmospheric pressure, or reduced pressure. In the neutralizing structure an X-ray unit is arranged at an appropriate place to apply the electromagnetic waves in a soft X-ray region to the atmospheric gas surrounding a charged body.

公开(公告)号：EP0685808A4

公开(公告)日：1997-05-14

申请号：EP94907085

申请日：1994-02-22

申请人： SHIBATA TADASHI ,  OHMI TADAHIRO

发明人： SHIBATA TADASHI ,  OHMI TADAHIRO ,  KOTANI KOJI

IPC分类号： G06F7/38 ,  G06F15/18 ,  G06N3/063 ,  G06N99/00 ,  H03K19/00 ,  H03K19/173 ,  G06G7/60

CPC分类号： G06F7/388 ,  G06N3/063 ,  G06N3/0635 ,  G06N99/005

摘要： A novel computing device capable of performing flexible information processing analogous to that of living things, such as learning, adaption, and self-multiplication, which are essential to implement advanced information processing of the future. The device comprises a plurality of first and second input terminals, and a plurality of operational units which execute a given operation of data signals to be inputted into the first input terminals, and each have at least one terminal for outputting the result of the operation. The output signal from one of the output terminals or the result of a given operational processing of this output signal is inputted into at least one of the second input terminals.