INTEGRATED CIRCUIT INDUCTOR WITH DOPED SUBSTRATE
    2.
    发明公开
    INTEGRATED CIRCUIT INDUCTOR WITH DOPED SUBSTRATE 有权
    INDUKTOR对于一个掺杂衬底集成电路的

    公开(公告)号:EP2392028A2

    公开(公告)日:2011-12-07

    申请号:EP10736231.1

    申请日:2010-01-19

    IPC分类号: H01L27/02 H01L27/04

    摘要: An integrated circuit inductor and a substrate with doped regions are provided. The substrate may be a p-type substrate and the substrate may have n-type doped regions. The n-type doped regions may include n-type wells, deep n-type wells, and n+ regions. The n-type doped regions may be formed in a pattern of strips such as a triangular comb pattern of strips or a series of L-shaped strips. The strips may be oriented perpendicular to the spiral of the inductor. A positive bias voltage may be applied to the n-type doped regions to create a depleted region in the substrate between the n-type doped regions. The depleted region may increase the effective distance between the inductor and the substrate, minimizing undesired coupling effects between the inductor and the substrate and increasing the effectiveness of the inductor.

    Verfahren zur Herstellung integrierter Sensoren

    公开(公告)号:EP1079435A1

    公开(公告)日:2001-02-28

    申请号:EP00117997.7

    申请日:2000-08-22

    IPC分类号: H01L27/04 H01L27/20

    摘要: Aussparungen oder Vertiefungen (3) werden in der Oberseite eines Halbleiterkörpers (1) ausgeätzt und Sensorkomponenten (10) darin hergestellt, die etwa zur Hälfte versenkt sind. Elektronische Bauelemente (n,p + ,5,6,7) werden in dem restlichen Bereich der Oberseite des Halbleiterkörpers (1) hergestellt, wobei diese ggf. mit einer Schutzschicht (7) abgedeckt werden, falls die Aussparung oder Vertiefung erst nachträglich hergestellt wird.

    摘要翻译: 该制造方法具有形成在半导体本体(1)的表面中的至少一个电子部件(7),在通过选择性地去除半导体材料和形成层(10)之后,在其后表面形成凹部之前, 该凹部被构造成提供微机械传感器部件。 在形成凹部之前,电子部件可以被保护层(9)覆盖,其中所述层设置在由多晶硅形成的凹部中。

    MONOLITHICALLY INTEGRATED CASCODE SWITCHES
    6.
    发明公开
    MONOLITHICALLY INTEGRATED CASCODE SWITCHES 审中-公开
    单片集成的CASCODE开关

    公开(公告)号:EP3095129A1

    公开(公告)日:2016-11-23

    申请号:EP15701893.8

    申请日:2015-01-13

    摘要: Disclosed inventions are directed to advanced high-voltage switches with improved performance characteristics, increased reliability, and better compatibility with conventional gate drivers. The inventions disclosed herein implement a hybrid switch, comprising a high-voltage normally-on SiC VJFET, controlled via a low-voltage Si MOSFET in a cascode (Baliga-pair) configuration. The SiC VJFET and Si MOSFET are integrated monolithically at a wafer level, with the Si MOSFET fabricated on the Si layer that is directly adjacent to a dielectric layer on top of the SiC VJFET. Methods of making and operating these switches are also provided.

    摘要翻译: 所公开的发明涉及具有改进的性能特性,增加的可靠性以及与常规栅极驱动器的更好兼容性的先进高压开关。 这里公开的发明实现了一种混合开关,其包括通过共源共栅(Baliga对)配置中的低电压Si MOSFET控制的高压常开SiC VJFET。 SiC VJFET和Si MOSFET在晶圆级单片集成,Si MOSFET制造在Si层上,与SiC VJFET顶部的介质层直接相邻。 还提供了制造和操作这些开关的方法。