METAL SHEET PROCESSING METHOD AND LEAD FRAME PROCESSING METHOD, AND LEAD FRAME AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
    8.
    发明公开
    METAL SHEET PROCESSING METHOD AND LEAD FRAME PROCESSING METHOD, AND LEAD FRAME AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE 失效
    METALLFOLIENVERARBEITUNGSVERFAHREN UND LEI​​TERRAHMENVERARBEITUNGSVERFAHREN,UND HALBLEITERANORDNUNGHERSTELLUNGSVERFAHREN。

    公开(公告)号:EP0646962A1

    公开(公告)日:1995-04-05

    申请号:EP94910594.4

    申请日:1994-04-04

    摘要: An object of this invention is to provide a metal sheet processing method and a lead frame processing method which are capable of processing a work to an excellent shape finely with a high dimensional accuracy without being influenced by heat input due to the irradiation of a laser beam. According to the present invention, a metal sheet (101) is coated at both surfaces thereof with photoresist films (1) first, and a laser beam (202) is then applied to the metal sheet (101) through the outer surface of the photoresist film (1) so as to form a plurality of discontinuous through bores (3) in rows with joint portions (6) as unprocessed portions left among the through bores (3). The opened portions (2) formed by the laser beam processing of the photoresist film (1) extend continuously to serve as an etching pattern. The surrounding wall portions (6) are then subjected to etching to remove the same and connect together the through bores (3) formed in rows, whereby clearances (303a) of a predetermined shape are formed. Instead of forming the through bores (3) and joint portions (6) in the metal sheet (101), the steps of forming non-through bores (51) in the metal sheet (101) with joint portions (52) left as unprocessed portions in their bottoms, and then subjecting the resultant product to etching may be taken.

    摘要翻译: 本发明的目的是提供一种能够以高尺寸精度细微处理工件,而不受激光束照射引起的热输入的影响的金属片处理方法和引线框处理方法 。 根据本发明,首先在金属片(101)的两个表面上涂覆有光致抗蚀剂膜(1),然后通过光致抗蚀剂的外表面将激光束(202)施加到金属片(101) 膜(1),以便形成多个具有接合部分(6)的不连续贯通孔(3),作为未加工部分留在通孔(3)中。 通过光致抗蚀剂膜(1)的激光束处理形成的开口部分(2)连续延伸以用作蚀刻图案。 然后对周围的壁部(6)进行蚀刻以除去它们,并且将形成的通孔(3)连接在一起,由此形成预定形状的间隙(303a)。 代替在金属板(101)中形成通孔(3)和接合部分(6),在金属板(101)中形成具有未加工的接合部分(52)的非贯通孔(51)的步骤 可以采用其底部的部分,然后对所得产物进行蚀刻。