Semiconductor device and method for manufacturing the same
    66.
    发明专利
    Semiconductor device and method for manufacturing the same 审中-公开
    半导体器件及其制造方法

    公开(公告)号:JP2014093319A

    公开(公告)日:2014-05-19

    申请号:JP2012241137

    申请日:2012-10-31

    发明人: SAITO MASUMI

    摘要: PROBLEM TO BE SOLVED: To provide a semiconductor device capable of suppressing characteristic deterioration caused by miniaturization, and a method for manufacturing the same.SOLUTION: A semiconductor device according to an embodiment comprises a ground layer and a plurality of transistors arranged in a plane parallel to an upper surface of the ground layer on the ground layer. Each of the plurality of transistors includes a channel which passes current in a first direction crossing the plane. The ground layer includes a first region and a second region provided next to the first region in the plane. Channels of a plurality of the transistors provided on the first region among the plurality of transistors have a first crystal orientation. Channels of a plurality of the transistors provided on the second region among the plurality of transistors have a second crystal orientation different from the first crystal orientation.

    摘要翻译: 要解决的问题:提供能够抑制由小型化引起的特性劣化的半导体器件及其制造方法。根据实施例的半导体器件包括接地层和布置在平行平面中的多个晶体管 到地层上的接地层的上表面。 多个晶体管中的每一个包括沿与该平面交叉的第一方向通过电流的通道。 接地层包括设置在平面中的第一区域旁边的第一区域和第二区域。 设置在多个晶体管中的第一区域上的多个晶体管的沟道具有第一晶体取向。 设置在多个晶体管中的第二区域上的多个晶体管的沟道具有与第一晶体取向不同的第二晶体取向。

    Columnar structure manufacturing method
    70.
    发明专利
    Columnar structure manufacturing method 审中-公开
    柱结构制造方法

    公开(公告)号:JP2013219203A

    公开(公告)日:2013-10-24

    申请号:JP2012088821

    申请日:2012-04-09

    发明人: KOTO MAKOTO

    摘要: PROBLEM TO BE SOLVED: To provide a method of inhibiting surface diffusion of an eutectic catalyst over a base substance and aggregation of catalyst grains when an intended columnar structure is obtained by using a VLS method.SOLUTION: A semiconductor manufacturing method comprises: a process of preparing a base substance having a locking part; arranging a catalyst on the locking part; and a process of growing a semiconductor between the catalyst and the locking part. An eutectic temperature of the catalyst and the semiconductor is lower than an eutectic temperature of the locking part and the base substance.

    摘要翻译: 要解决的问题:提供当通过使用VLS方法获得期望的柱状结构时,抑制共晶催化剂在基体上的表面扩散和催化剂颗粒的凝集的方法。解决方案:半导体制造方法包括: 制备具有锁定部分的基础物质; 在催化剂上配置催化剂; 以及在催化剂和锁定部件之间生长半导体的工艺。 催化剂和半导体的共晶温度低于锁定部分和基体的共晶温度。