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公开(公告)号:JP2011240481A
公开(公告)日:2011-12-01
申请号:JP2011110054
申请日:2011-05-17
申请人: Commissariat A L'energie Atomique Et Aux Energies Alternatives , コミサリア ア レネルジー アトミック エ オ ゼネルジー アルテルナティブCommissariat A L’Energie Atomique Et Aux Energies Alternatives
发明人: BRUN JEAN , VICARD DOMINIQUE
IPC分类号: B81C1/00
CPC分类号: H01L21/568 , H01L23/3157 , H01L24/48 , H01L24/72 , H01L25/0655 , H01L25/50 , H01L2224/48991 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01014 , H01L2924/01033 , H01L2924/01058 , H01L2924/01061 , H01L2924/10253 , H01L2924/12041 , H01L2924/181 , H01L2924/00 , H01L2224/45099
摘要: PROBLEM TO BE SOLVED: To provide a method of precisely and reproductively forming a distance between grooves in regard to the grooves that fix two conductive wires for supplying power to a micro-electronic chip.SOLUTION: The method of manufacturing a chip element for manufacturing a plurality of chip elements having grooves 14 from a plurality of devices 22 formed on a wafer 20 comprises: a depositing step of depositing a sacrificial film 26 on the wafer 20 with such a height that the grooves are formed so as to cover the edge of the device while exposing the central part of each device 22; an application step of applying a mold 28 on the sacrificial film; an injection step of injecting a curable material 30 into the mold; a curing step of curing the curable material; a dicing step of dicing the wafer between the devices; and a removing step of removing the sacrificial film.
摘要翻译: 要解决的问题:提供一种精确地和再生地形成槽之间的距离的方法,该沟槽固定用于向微电子芯片供电的两根导线的槽。 解决方案:制造具有形成在晶片20上的多个器件22的具有沟槽14的多个芯片元件的芯片元件的方法包括:沉积步骤,用这样的方法在晶片20上沉积牺牲膜26 形成凹槽的高度,以便在暴露每个装置22的中心部分的同时覆盖装置的边缘; 将模具28施加在牺牲膜上的施加步骤; 将可固化材料30注入模具的注射步骤; 固化可固化材料的固化步骤; 在所述器件之间切割所述晶片的切割步骤; 以及去除牺牲膜的去除步骤。 版权所有(C)2012,JPO&INPIT
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公开(公告)号:JPWO2015053356A1
公开(公告)日:2017-03-09
申请号:JP2015541631
申请日:2014-10-09
申请人: 学校法人早稲田大学
CPC分类号: H01L24/10 , H01L23/49816 , H01L23/49827 , H01L23/49838 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/24 , H01L24/29 , H01L24/32 , H01L24/37 , H01L24/40 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/75 , H01L24/76 , H01L24/81 , H01L24/82 , H01L24/83 , H01L24/84 , H01L24/85 , H01L2224/0345 , H01L2224/03464 , H01L2224/04 , H01L2224/0401 , H01L2224/04026 , H01L2224/04042 , H01L2224/05124 , H01L2224/05139 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05173 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05673 , H01L2224/11334 , H01L2224/1134 , H01L2224/13012 , H01L2224/13017 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13294 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13355 , H01L2224/13411 , H01L2224/136 , H01L2224/13611 , H01L2224/16225 , H01L2224/16227 , H01L2224/16245 , H01L2224/24225 , H01L2224/24245 , H01L2224/245 , H01L2224/2499 , H01L2224/29012 , H01L2224/29017 , H01L2224/29147 , H01L2224/32227 , H01L2224/32245 , H01L2224/37147 , H01L2224/3716 , H01L2224/40095 , H01L2224/40227 , H01L2224/40991 , H01L2224/40996 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48472 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/48864 , H01L2224/48873 , H01L2224/48991 , H01L2224/48996 , H01L2224/73255 , H01L2224/73265 , H01L2224/73273 , H01L2224/73277 , H01L2224/75754 , H01L2224/76754 , H01L2224/81002 , H01L2224/81205 , H01L2224/81439 , H01L2224/81444 , H01L2224/81447 , H01L2224/81455 , H01L2224/81464 , H01L2224/81473 , H01L2224/81815 , H01L2224/8184 , H01L2224/81901 , H01L2224/8192 , H01L2224/82002 , H01L2224/82101 , H01L2224/82399 , H01L2224/83002 , H01L2224/83439 , H01L2224/83444 , H01L2224/83447 , H01L2224/83455 , H01L2224/83464 , H01L2224/83473 , H01L2224/83815 , H01L2224/8384 , H01L2224/83901 , H01L2224/8392 , H01L2224/8492 , H01L2224/85205 , H01L2224/85447 , H01L2224/8592 , H01L2224/9201 , H01L2924/00011 , H01L2924/3656 , H01L2924/00014 , H01L2924/00 , H01L2924/00012 , H01L2924/01028 , H01L2924/01074 , H01L2924/01023 , H01L2924/014 , H01L2924/01029 , H01L2924/01047 , H01L2924/01079 , H01L2924/01046 , H01L2924/01045 , H01L2224/18 , H01L2224/24 , H01L2224/82 , H01L2224/83205
摘要: 電気回路の電極間を点状又は線状に接触させた状態でメッキにより接続することで、隙間のない密着した接続を可能とする電極接続方法等を提供する。電気的に接続される電気回路の複数の電極間の少なくとも一部を直接又は間接的に接触させ、当該接触部分の周辺にメッキ液が流通した状態で前記電極間をメッキして接続するものである。また、前記接触部分は線状又は点状に保持されているものである。さらに、メッキを行う材料として、ニッケル若しくはニッケル合金、又は、銅もしくは銅合金を用い、接続される電極の表面の材料が、ニッケル若しくはニッケル合金、銅若しくは銅合金、金若しくは金合金、銀若しくは銀合金、又は、パラジウム若しくはパラジウム合金とするものである。
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公开(公告)号:JP5829047B2
公开(公告)日:2015-12-09
申请号:JP2011110054
申请日:2011-05-17
申请人: コミサリア ア レネルジー アトミック エ オ ゼネルジー アルテルナティブ , COMMISSARIAT A L’ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
IPC分类号: B81C1/00
CPC分类号: H01L21/568 , H01L23/3157 , H01L24/48 , H01L24/72 , H01L2224/48991 , H01L25/0655 , H01L25/50 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01014 , H01L2924/01033 , H01L2924/01058 , H01L2924/01061 , H01L2924/10253 , H01L2924/12041 , H01L2924/181
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公开(公告)号:JP2006269747A
公开(公告)日:2006-10-05
申请号:JP2005085806
申请日:2005-03-24
申请人: Seiko Epson Corp , セイコーエプソン株式会社
发明人: KIKUHARA KAZUMICHI
IPC分类号: H01L21/60 , H01L21/3205 , H01L23/52
CPC分类号: H01L24/05 , H01L2224/04042 , H01L2224/05553 , H01L2224/48991 , H01L2224/49175 , H01L2924/14 , H01L2924/00
摘要: PROBLEM TO BE SOLVED: To provide an IC chip capable of preventing electric short-circuiting between wiring lines while securing the relaxation of stress accompanied by the cutting of a semiconductor wafer when electric connection between a pad of the IC chip and an outer side is wired by using a conductive ink.
SOLUTION: The IC chip has a groove 12 formed along an inner periphery on the IC chip 11, and the pad 14 which is arranged more inside of the groove 12, and electrically connected to the outer side by ink jet wiring lines 15 using ink containing a conductive material. Short-circuit preventive parts 16 are arranged for preventing the ink jet wiring lines from being short-circuited when the ink-jet wiring lines 15 are wired in the vicinity of an intersection where the ink jet wiring lines 15 intersect the groove 12.
COPYRIGHT: (C)2007,JPO&INPIT摘要翻译: 解决的问题:提供一种能够防止布线之间的电气短路的IC芯片,同时在IC芯片的焊盘和外部的电极之间的电连接时确保伴随着半导体晶片的切割的应力的松弛 通过使用导电油墨进行接线。 解决方案:IC芯片具有沿着IC芯片11的内周形成的槽12,并且衬垫14布置在槽12的内侧,并且通过喷墨布线15与外侧电连接 使用含有导电材料的油墨。 布置短路防止部件16,用于防止当喷墨布线15布线在喷墨布线15与凹槽12相交的交点附近时喷墨布线短路。
版权所有(C)2007,JPO&INPIT
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