Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method that is inexpensive and environmentally friendly in forming a copper layer on a substrate. SOLUTION: A method and an apparatus for producing a copper layer on a substrate in a flat panel display manufacturing process are provided, where the copper is electrodelessly deposited on a substrate to form a copper interconnection layer. A copper solution containing CuSO 4 5H 2 O as a copper source, potassium sodium tartrate 4H 2 O or trisodium citrate as a complexing agent, glyoxylate, glyoxylic acid or sodium phosphate as a reducing agent, a sulfur organic compound as a stabilizing agent, and a pH adjusting agent, is used to from the copper interconnection layer on the substrate. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a soft film facilitating hole formation and excellent in safety and reliability and to provide a display device including the soft film. SOLUTION: The soft film includes an insulating film having a hole, an inner peripheral surface surrounding the hole, a first surface and a second surface opposed to the first surface and a metal layer covering the inner peripheral surface and at least any one of the first surface and the second surface and having first and second layers. The metal layer has a first region situated on the inner peripheral surface and a second region situated on the first or second surface. The second region is thicker than the first region. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a metal coated laminate enabling an improvement in adhesion of a metal layer and a thermoplastic polymer film having flexibility, and in dimensional stability at the time of conductor etching, and a manufacturing method of the same. SOLUTION: This method for production of the metal coated laminate comprising the film and the metal layer consisting of a foundation layer and an upper layer includes (a) a process of forming the foundation layer by plating on at least a part of the surface of the film, (b) a process of forming the upper layer by plating on a first laminate formed by the process (a), and (c) a process of carrying out a heat treatment to a second laminate formed by the process (b). The film is a thermoplastic polymetric film having a flexibility, the foundation layer is a nickel alloy, and the upper layer is copper. The plated film formed by the processes (a) and (b) has a compression stress before the process (c), and the metal coated laminate contracts in the direction of the film plane by the process (c). COPYRIGHT: (C)2009,JPO&INPIT