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公开(公告)号:TWI532131B
公开(公告)日:2016-05-01
申请号:TW102148605
申请日:2013-12-27
发明人: 鄭世杰 , CHENG, SHIH JYE , 盧東寶 , LU, TUNG BAO
CPC分类号: H01L24/13 , H01L21/76898 , H01L23/3192 , H01L23/488 , H01L23/49541 , H01L23/49572 , H01L23/49816 , H01L23/525 , H01L24/02 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/16 , H01L24/17 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/742 , H01L24/81 , H01L25/0657 , H01L2224/02311 , H01L2224/02313 , H01L2224/02331 , H01L2224/02379 , H01L2224/0239 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03464 , H01L2224/0361 , H01L2224/03912 , H01L2224/0401 , H01L2224/04042 , H01L2224/05005 , H01L2224/05022 , H01L2224/05027 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05541 , H01L2224/05548 , H01L2224/05572 , H01L2224/05639 , H01L2224/1132 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11825 , H01L2224/11848 , H01L2224/11849 , H01L2224/11901 , H01L2224/13005 , H01L2224/13025 , H01L2224/13082 , H01L2224/131 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13562 , H01L2224/13564 , H01L2224/1357 , H01L2224/13644 , H01L2224/16225 , H01L2224/16227 , H01L2224/16235 , H01L2224/16238 , H01L2224/16245 , H01L2224/17181 , H01L2224/2919 , H01L2224/32225 , H01L2224/45144 , H01L2224/48639 , H01L2224/48839 , H01L2224/73204 , H01L2224/81191 , H01L2224/81193 , H01L2224/81203 , H01L2224/814 , H01L2224/8159 , H01L2224/8169 , H01L2224/81744 , H01L2224/81815 , H01L2224/8185 , H01L2224/81862 , H01L2224/81948 , H01L2224/83104 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2924/00011 , H01L2924/12042 , H01L2924/15311 , H01L2924/15788 , H01L2924/181 , H01L2924/381 , H01L2924/01079 , H01L2924/00012 , H01L2924/01046 , H01L2924/206 , H01L2924/00014 , H01L2924/01074 , H01L2924/014 , H01L2924/0665 , H01L2924/013 , H01L2924/01047 , H01L2924/00 , H01L2924/01033 , H01L2224/1146
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公开(公告)号:TWI462204B
公开(公告)日:2014-11-21
申请号:TW102142573
申请日:2013-11-22
发明人: 鄭世杰 , CHENG, SHIH JYE , 盧東寶 , LU, TUNG BAO
IPC分类号: H01L21/60 , H01L21/288
CPC分类号: H01L21/4853 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/742 , H01L24/81 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03464 , H01L2224/0361 , H01L2224/039 , H01L2224/03912 , H01L2224/0401 , H01L2224/05005 , H01L2224/05027 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05541 , H01L2224/05576 , H01L2224/05578 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11825 , H01L2224/11848 , H01L2224/119 , H01L2224/11901 , H01L2224/11906 , H01L2224/13005 , H01L2224/13082 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13562 , H01L2224/13564 , H01L2224/1357 , H01L2224/13644 , H01L2224/13647 , H01L2224/16225 , H01L2224/16227 , H01L2224/16238 , H01L2224/2919 , H01L2224/32225 , H01L2224/73204 , H01L2224/81191 , H01L2224/814 , H01L2224/8159 , H01L2224/8169 , H01L2224/81744 , H01L2224/81801 , H01L2224/81815 , H01L2224/8185 , H01L2224/81862 , H01L2224/83104 , H01L2924/01322 , H01L2924/15788 , H01L2924/351 , H01L2924/00014 , H01L2924/01074 , H01L2924/01079 , H01L2924/01046 , H01L2924/01082 , H01L2924/00012 , H01L2224/1182 , H01L2924/0665 , H01L2924/206 , H01L2924/014 , H01L2924/00 , H01L2224/1146
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公开(公告)号:TW201523819A
公开(公告)日:2015-06-16
申请号:TW102148605
申请日:2013-12-27
发明人: 鄭世杰 , CHENG, SHIH JYE , 盧東寶 , LU, TUNG BAO
CPC分类号: H01L24/13 , H01L21/76898 , H01L23/3192 , H01L23/488 , H01L23/49541 , H01L23/49572 , H01L23/49816 , H01L23/525 , H01L24/02 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/16 , H01L24/17 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/742 , H01L24/81 , H01L25/0657 , H01L2224/02311 , H01L2224/02313 , H01L2224/02331 , H01L2224/02379 , H01L2224/0239 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03464 , H01L2224/0361 , H01L2224/03912 , H01L2224/0401 , H01L2224/04042 , H01L2224/05005 , H01L2224/05022 , H01L2224/05027 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05541 , H01L2224/05548 , H01L2224/05572 , H01L2224/05639 , H01L2224/1132 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11825 , H01L2224/11848 , H01L2224/11849 , H01L2224/11901 , H01L2224/13005 , H01L2224/13025 , H01L2224/13082 , H01L2224/131 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13562 , H01L2224/13564 , H01L2224/1357 , H01L2224/13644 , H01L2224/16225 , H01L2224/16227 , H01L2224/16235 , H01L2224/16238 , H01L2224/16245 , H01L2224/17181 , H01L2224/2919 , H01L2224/32225 , H01L2224/45144 , H01L2224/48639 , H01L2224/48839 , H01L2224/73204 , H01L2224/81191 , H01L2224/81193 , H01L2224/81203 , H01L2224/814 , H01L2224/8159 , H01L2224/8169 , H01L2224/81744 , H01L2224/81815 , H01L2224/8185 , H01L2224/81862 , H01L2224/81948 , H01L2224/83104 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2924/00011 , H01L2924/12042 , H01L2924/15311 , H01L2924/15788 , H01L2924/181 , H01L2924/381 , H01L2924/01079 , H01L2924/00012 , H01L2924/01046 , H01L2924/206 , H01L2924/00014 , H01L2924/01074 , H01L2924/014 , H01L2924/0665 , H01L2924/013 , H01L2924/01047 , H01L2924/00 , H01L2924/01033 , H01L2224/1146
摘要: 一種半導體結構包括:一裝置;在該裝置上方之一導電襯墊;及安置在該導電襯墊上之一Ag1-xYx合金柱,其中該Ag1-xYx合金之Y包含以任意重量百分比與Ag形成完全固溶體之金屬,且其中該Ag1-xYx合金之X在約0.005至約0.25之範圍內。
简体摘要: 一种半导体结构包括:一设备;在该设备上方之一导电衬垫;及安置在该导电衬垫上之一Ag1-xYx合金柱,其中该Ag1-xYx合金之Y包含以任意重量百分比与Ag形成完全固溶体之金属,且其中该Ag1-xYx合金之X在约0.005至约0.25之范围内。
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公开(公告)号:TWI462243B
公开(公告)日:2014-11-21
申请号:TW102141593
申请日:2013-11-15
发明人: 鄭世杰 , CHENG, SHIH JYE , 盧東寶 , LU, TUNG BAO
CPC分类号: H01L21/4825 , H01L23/15 , H01L23/49816 , H01L23/4985 , H01L23/49866 , H01L23/49894 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03464 , H01L2224/0361 , H01L2224/03912 , H01L2224/0401 , H01L2224/05005 , H01L2224/05027 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05541 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11825 , H01L2224/11848 , H01L2224/11901 , H01L2224/13005 , H01L2224/13082 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13562 , H01L2224/13564 , H01L2224/1357 , H01L2224/13644 , H01L2224/13647 , H01L2224/16225 , H01L2224/16227 , H01L2224/16238 , H01L2224/2919 , H01L2224/32225 , H01L2224/73204 , H01L2224/81191 , H01L2224/814 , H01L2224/8159 , H01L2224/8169 , H01L2224/81744 , H01L2224/81815 , H01L2224/8185 , H01L2224/81862 , H01L2224/83104 , H01L2924/01322 , H01L2924/15788 , H01L2924/351 , H01L2924/01079 , H01L2924/01046 , H01L2924/00014 , H01L2924/01074 , H01L2924/01082 , H01L2924/00012 , H01L2924/0665 , H01L2924/0655 , H01L2924/206 , H01L2924/014 , H01L2924/00 , H01L2224/1146
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公开(公告)号:TW201444004A
公开(公告)日:2014-11-16
申请号:TW102142573
申请日:2013-11-22
发明人: 鄭世杰 , CHENG, SHIH JYE , 盧東寶 , LU, TUNG BAO
IPC分类号: H01L21/60 , H01L21/288
CPC分类号: H01L21/4853 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/742 , H01L24/81 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03464 , H01L2224/0361 , H01L2224/039 , H01L2224/03912 , H01L2224/0401 , H01L2224/05005 , H01L2224/05027 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05541 , H01L2224/05576 , H01L2224/05578 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11825 , H01L2224/11848 , H01L2224/119 , H01L2224/11901 , H01L2224/11906 , H01L2224/13005 , H01L2224/13082 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13562 , H01L2224/13564 , H01L2224/1357 , H01L2224/13644 , H01L2224/13647 , H01L2224/16225 , H01L2224/16227 , H01L2224/16238 , H01L2224/2919 , H01L2224/32225 , H01L2224/73204 , H01L2224/81191 , H01L2224/814 , H01L2224/8159 , H01L2224/8169 , H01L2224/81744 , H01L2224/81801 , H01L2224/81815 , H01L2224/8185 , H01L2224/81862 , H01L2224/83104 , H01L2924/01322 , H01L2924/15788 , H01L2924/351 , H01L2924/00014 , H01L2924/01074 , H01L2924/01079 , H01L2924/01046 , H01L2924/01082 , H01L2924/00012 , H01L2224/1182 , H01L2924/0665 , H01L2924/206 , H01L2924/014 , H01L2924/00 , H01L2224/1146
摘要: 本發明提供一種用於製造一半導體結構之方法。該方法包括:在一半導體晶粒上形成一導電襯墊;在該導電襯墊上方形成一晶種層;在該晶種層上方界定一第一遮罩層;及在該第一遮罩層中形成一銀合金凸塊本體。該在該第一遮罩層中形成一銀合金凸塊本體包括以下操作:製備一第一基於氰化物之電鍍浴;將該第一基於氰化物之電鍍浴之一pH值控制在約6至約8之一範圍內;將該半導體晶粒浸沒至該第一基於氰化物之電鍍浴中;及將約0.1 ASD至約0.5 ASD之一電鍍電流密度施加至該半導體晶粒。
简体摘要: 本发明提供一种用于制造一半导体结构之方法。该方法包括:在一半导体晶粒上形成一导电衬垫;在该导电衬垫上方形成一晶种层;在该晶种层上方界定一第一遮罩层;及在该第一遮罩层中形成一银合金凸块本体。该在该第一遮罩层中形成一银合金凸块本体包括以下操作:制备一第一基于氰化物之电镀浴;将该第一基于氰化物之电镀浴之一pH值控制在约6至约8之一范围内;将该半导体晶粒浸没至该第一基于氰化物之电镀浴中;及将约0.1 ASD至约0.5 ASD之一电镀电流密度施加至该半导体晶粒。
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公开(公告)号:TW201436136A
公开(公告)日:2014-09-16
申请号:TW102141593
申请日:2013-11-15
发明人: 鄭世杰 , CHENG, SHIH JYE , 盧東寶 , LU, TUNG BAO
CPC分类号: H01L21/4825 , H01L23/15 , H01L23/49816 , H01L23/4985 , H01L23/49866 , H01L23/49894 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03464 , H01L2224/0361 , H01L2224/03912 , H01L2224/0401 , H01L2224/05005 , H01L2224/05027 , H01L2224/05139 , H01L2224/05144 , H01L2224/05155 , H01L2224/05164 , H01L2224/05166 , H01L2224/05541 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/11462 , H01L2224/11464 , H01L2224/1147 , H01L2224/11825 , H01L2224/11848 , H01L2224/11901 , H01L2224/13005 , H01L2224/13082 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13562 , H01L2224/13564 , H01L2224/1357 , H01L2224/13644 , H01L2224/13647 , H01L2224/16225 , H01L2224/16227 , H01L2224/16238 , H01L2224/2919 , H01L2224/32225 , H01L2224/73204 , H01L2224/81191 , H01L2224/814 , H01L2224/8159 , H01L2224/8169 , H01L2224/81744 , H01L2224/81815 , H01L2224/8185 , H01L2224/81862 , H01L2224/83104 , H01L2924/01322 , H01L2924/15788 , H01L2924/351 , H01L2924/01079 , H01L2924/01046 , H01L2924/00014 , H01L2924/01074 , H01L2924/01082 , H01L2924/00012 , H01L2924/0665 , H01L2924/0655 , H01L2924/206 , H01L2924/014 , H01L2924/00 , H01L2224/1146
摘要: 一半導體結構包括:一裝置;在該裝置上之一導電襯墊;及在該導電襯墊上方之一Ag1-xYx合金凸塊。該Ag1-xYx凸塊之Y包含以任意權重百分比與Ag形成完全固溶體之金屬,且該Ag1-xYx合金凸塊之X在約0.005至約0.25之一範圍內。一個標準差與該Ag1-xYx合金凸塊之一粒徑分佈之一均值之間的一差異在約0.2 μm至約0.4 μm之一範圍內。該Ag1-xYx合金凸塊在一縱向橫截面平面上之一平均粒徑在約0.5 μm至約1.5 μm之一範圍內。
简体摘要: 一半导体结构包括:一设备;在该设备上之一导电衬垫;及在该导电衬垫上方之一Ag1-xYx合金凸块。该Ag1-xYx凸块之Y包含以任意权重百分比与Ag形成完全固溶体之金属,且该Ag1-xYx合金凸块之X在约0.005至约0.25之一范围内。一个标准差与该Ag1-xYx合金凸块之一粒径分布之一均值之间的一差异在约0.2 μm至约0.4 μm之一范围内。该Ag1-xYx合金凸块在一纵向横截面平面上之一平均粒径在约0.5 μm至约1.5 μm之一范围内。
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7.導電性接合材料、接合導體之方法、及製造半導體裝置之方法 ELECTROCONDUCTIVE BONDING MATERIAL, METHOD FOR BONDING CONDUCTOR, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 审中-公开
简体标题: 导电性接合材料、接合导体之方法、及制造半导体设备之方法 ELECTROCONDUCTIVE BONDING MATERIAL, METHOD FOR BONDING CONDUCTOR, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE公开(公告)号:TW201244867A
公开(公告)日:2012-11-16
申请号:TW101103537
申请日:2012-02-03
申请人: 富士通股份有限公司
CPC分类号: H01L24/13 , B22F1/0014 , B22F1/025 , B23K35/262 , B23K35/30 , B23K35/3006 , B23K35/3013 , B23K35/302 , C22C9/00 , C23C24/106 , H01L23/49811 , H01L23/49883 , H01L24/11 , H01L24/16 , H01L24/81 , H01L2224/0401 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05671 , H01L2224/0568 , H01L2224/05686 , H01L2224/1131 , H01L2224/1132 , H01L2224/11502 , H01L2224/13017 , H01L2224/13144 , H01L2224/13599 , H01L2224/13609 , H01L2224/13611 , H01L2224/13613 , H01L2224/13639 , H01L2224/13644 , H01L2224/13647 , H01L2224/13709 , H01L2224/13711 , H01L2224/13713 , H01L2224/13809 , H01L2224/13811 , H01L2224/13813 , H01L2224/13839 , H01L2224/13844 , H01L2224/13847 , H01L2224/13899 , H01L2224/13913 , H01L2224/13939 , H01L2224/13944 , H01L2224/13947 , H01L2224/16058 , H01L2224/16148 , H01L2224/16225 , H01L2224/16507 , H01L2224/32225 , H01L2224/73204 , H01L2224/81024 , H01L2224/81055 , H01L2224/81075 , H01L2224/81191 , H01L2224/81193 , H01L2224/812 , H01L2224/8121 , H01L2224/8123 , H01L2224/81509 , H01L2224/81511 , H01L2224/81513 , H01L2224/81639 , H01L2224/81644 , H01L2224/81647 , H01L2224/81699 , H01L2224/81711 , H01L2224/81713 , H01L2224/81739 , H01L2224/81744 , H01L2224/8181 , H01L2924/00013 , H01L2924/01006 , H01L2924/01013 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01079 , H01L2924/01327 , H01L2924/014 , H01L2924/10253 , H01L2924/12042 , H01L2924/13091 , H01L2924/15738 , H01L2924/15788 , H01L2924/1579 , H01L2924/01007 , H01L2924/01008 , H01L2924/01018 , H01L2924/01083 , H01L2924/01031 , H01L2924/0103 , H01L2924/053 , H01L2224/13099 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599 , H01L2924/00
摘要: 一種導電性接合材料包括:由高熔點金屬顆粒、中熔點金屬顆粒及低熔點金屬顆粒形成之金屬組份,高熔點金屬顆粒具有第一熔點或更高;中熔點金屬顆粒具有第一溫度或更高且第二溫度或更低之第二熔點,該第二溫度低於該第一熔點且高於該第一溫度;低熔點金屬顆粒具有第三熔點或更低,該第三熔點低於該第一溫度。
简体摘要: 一种导电性接合材料包括:由高熔点金属颗粒、中熔点金属颗粒及低熔点金属颗粒形成之金属组份,高熔点金属颗粒具有第一熔点或更高;中熔点金属颗粒具有第一温度或更高且第二温度或更低之第二熔点,该第二温度低于该第一熔点且高于该第一温度;低熔点金属颗粒具有第三熔点或更低,该第三熔点低于该第一温度。
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