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    SIMOX WAFER MANUFACTURING METHOD AND SIMOX WAFER
    2.
    发明申请
    SIMOX WAFER MANUFACTURING METHOD AND SIMOX WAFER 审中-公开
    SIMOX WAFER制造方法和SIMOX WAFER

    公开(公告)号：US20090057811A1

    公开(公告)日：2009-03-05

    申请号：US12199040

    申请日：2008-08-27

    申请人： Yoshio MURAKAMI ,  Kenji OKITA ,  Tomoyuki HORA

    发明人： Yoshio MURAKAMI ,  Kenji OKITA ,  Tomoyuki HORA

    IPC分类号： H01L29/00 ,  H01L21/762

    CPC分类号： H01L21/76243 ,  H01L21/02052 ,  H01L21/31111

    摘要： A SIMOX wafer manufacturing method which is capable of providing etching conditions to prevent surface defects (divots) from being spread. The method includes an oxygen implantation process and a high temperature annealing step for forming a BOX layer, a front surface oxide film etching process to treat a front surface of the wafer at an area in which oxygen is implanted, and a rear surface oxide film etching process to treat a rear surface of the wafer, and oxide film etching conditions in the front and rear oxide film etching processes are controlled differently.

    摘要翻译： 一种能够提供蚀刻条件以防止表面缺陷（纹理）扩散的SIMOX晶片制造方法。 该方法包括用于形成BOX层的氧注入工艺和高温退火步骤，用于在注入氧的区域处理晶片的前表面的前表面氧化膜蚀刻工艺和背面氧化膜蚀刻 处理晶片的后表面的处理以及前后氧化膜蚀刻工艺中的氧化膜蚀刻条件被不同地控制。

    Reusable ticket processing apparatus and ticket regenerating apparatus
    3.
    发明授权
    Reusable ticket processing apparatus and ticket regenerating apparatus 失效
    可重复使用的票据处理装置和票再生装置

    公开(公告)号：US5854477A

    公开(公告)日：1998-12-29

    申请号：US870595

    申请日：1997-06-06

    申请人： Masatoshi Kawaji ,  Yoshio Murakami ,  Toshihiro Ikeda

    发明人： Masatoshi Kawaji ,  Yoshio Murakami ,  Toshihiro Ikeda

    IPC分类号： G07B1/00 ,  G06K17/00 ,  G07B3/04 ,  G07B5/00 ,  G07B11/00 ,  G07B15/02

    CPC分类号： G07B11/00

    摘要： A ticket processing apparatus for reusable tickets, having a thermal print portion capable of repeatedly printing by heating at a predetermined write temperature and deleting the printed characters and the like by heating at a deletion temperature, and also capable of setting information about the number of printing times, wherein a control unit 23 causes a magnetic read head 10 to read reservation information and information about the number of printing done from a magnetic recording stripe 1b of a reservation airline ticket 1, and also causes a thermal head 8 to heat a thermal print portion 1a of the reservation airline ticket 1 at a deletion temperature to delete printed reservation information of the thermal print portion 1a, and when the number of times printing done of the reservation airline ticket 1 is less than a preset value, causes the thermal head 8 to print real-ticket information on the thermal print portion 1a and also causes information about the number of printing done added with "1" to be written on the magnetic stripe 1b, and if the reservation airline ticket 1 is not reusable, causes a stored boarding ticket 15 to be paid out from a ticket storage 3, and causes real-ticket information to be printed on the thermal print portion 1a and causes real-ticket information and information about the number of times of printing done added with "1" to be printed on the magnetic stripe 1b of the ticket 1.

    摘要翻译： 一种用于可重复使用的票的票据处理装置，具有能够以预定写入温度加热反复打印的热打印部分，并且通过在删除温度下加热来删除打印字符等，并且还能够设置关于打印数量的信息 次，其中控制单元23使磁读头10从预约机票1的磁记录条1b读取预约信息和关于打印数量的信息，并且还使热头8加热热打印 预约机票1的部分1a处于删除温度以删除热敏打印部分1a的打印预约信息，并且当预约机票1的打印次数小于预设值时，使热头8 在热打印部分1a上打印真实信息，并且还引起关于打印数量的信息 在磁条1b上加上“1”，如果预约机票1不能重复使用，则从票据存储器3中取出存储的登机票15，并且将真实票信息打印出来 在热打印部分1a上，并且将关于打印完成的打印次数的真实信息和信息打印在票1的磁条1b上。

    Method and apparatus for separating isotopes
    4.
    发明授权
    Method and apparatus for separating isotopes 失效
    分离同位素的方法和装置

    公开(公告)号：US5653854A

    公开(公告)日：1997-08-05

    申请号：US607467

    申请日：1996-02-27

    申请人： Goro Miyamoto ,  Yoshio Murakami ,  Seiji Hiroki ,  Kenji Katsuki

    发明人： Goro Miyamoto ,  Yoshio Murakami ,  Seiji Hiroki ,  Kenji Katsuki

    IPC分类号： B01D59/34 ,  B01D59/48 ,  H01J49/26 ,  C25B5/00

    CPC分类号： B01D59/34 ,  B01D59/48

    摘要： The improved isotope separator comprises a vacuum vessel, a plasma generator located substantially in the center of the vacuum vessel, an electrode bounded by a hyperboloid of one sheet and a pair of electrodes bounded by a hyperboloid of two sheets, said electrodes being located within the vacuum vessel in such a way as to surround the plasma generator, a power source for supplying said electrodes with a fixed voltage and a pulsating voltage, and magnetic field generating means located outside the vacuum vessel. The apparatus is implemented by a method for isotope separation that achieves high separation factor per stage (process), that enables the process throughput to be increased with ease and which yet is applicable to the isotopic separation of many elements.

    摘要翻译： 改进的同位素分离器包括真空容器，基本上位于真空容器中心的等离子体发生器，由一片双曲面界定的电极和由两片双曲面界定的一对电极，所述电极位于 真空容器，以围绕等离子体发生器的方式，用于向固定电压和脉动电压供应所述电极的电源，以及位于真空容器外部的磁场产生装置。 该装置通过一种同步分离方法来实现，该方法在每个阶段达到高的分离因子（工艺），这使得能够容易地提高工艺流程并且还适用于许多元素的同位素分离。

    Metal gasket, vacuum flange for the metal gasket, and vacuum seal structure using the metal gasket
    5.
    发明授权
    Metal gasket, vacuum flange for the metal gasket, and vacuum seal structure using the metal gasket 失效
    金属垫片，金属垫片的真空法兰，以及使用金属垫片的真空密封结构

    公开(公告)号：US5630592A

    公开(公告)日：1997-05-20

    申请号：US658307

    申请日：1996-06-05

    申请人： Kenjiro Obara ,  Yoshio Murakami ,  Mitsuyosi Saito

    发明人： Kenjiro Obara ,  Yoshio Murakami ,  Mitsuyosi Saito

    IPC分类号： F16J15/08 ,  F16L23/20

    CPC分类号： F16J15/0881 ,  F16L23/20

    摘要： A ring-shaped metal gasket with the cross-section thereof being substantially rectangular shaped, with the ratio (t/w) of the thickness t of the ring portion to the width w thereof being in the range of 0.5 to 4, having a Vickers hardness in the range of 50 to 120; a vacuum flange for a metal gasket, including a sealing groove for receiving a metal gasket at the surface of the flange, the width of a cross section of the groove gradually decreasing in the direction of the depth thereof, an outer side wall section of the sealing groove being substantially perpendicular to the flange surface, and an inner side wall section of the sealing groove being inclined with respect to the flange surface, with a difference in level being provided so that the flange surface positioned to the inside of the sealing groove is lower than the flange surface positioned to the outside of the sealing groove, and a vacuum seal structure including the above gasket and flange are disclosed.

    摘要翻译： 一种环形金属垫片，其横截面为大致矩形，环形部分的厚度t与其宽度w之比（t / w）在0.5至4的范围内，具有维氏 硬度在50〜120的范围内; 用于金属垫圈的真空凸缘，包括用于在凸缘的表面处接收金属垫圈的密封槽，槽的横截面的宽度在其深度方向上逐渐减小，外侧壁部分 所述密封槽基本上垂直于所述凸缘表面，并且所述密封槽的内侧壁部分相对于所述凸缘表面倾斜，其间设置有差异，使得位于所述密封槽内侧的凸缘表面是 低于位于密封槽外侧的凸缘表面，以及包括上述垫圈和凸缘的真空密封结构。

    Quadrupole electrode and process for producing the same
    6.
    发明授权
    Quadrupole electrode and process for producing the same 失效
    四极电极及其制造方法

    公开(公告)号：US5373157A

    公开(公告)日：1994-12-13

    申请号：US965258

    申请日：1993-01-05

    申请人： Seiji Hiroki ,  Tetsuya Abe ,  Yoshio Murakami ,  Yoshishige Takano ,  Akira Yamakawa ,  Masaya Miyake

    发明人： Seiji Hiroki ,  Tetsuya Abe ,  Yoshio Murakami ,  Yoshishige Takano ,  Akira Yamakawa ,  Masaya Miyake

    IPC分类号： H01J49/42 ,  H01J1/88

    CPC分类号： H01J49/4215 ,  H01J49/068

    摘要： The present invention relates to improvement of a quadrupole electrode for use in a mass spectrometer or the like, in which two pairs of electrode rods 1, 2, 3 and 4 formed in such a manner that the section of the opposed face of each rod is hyperbolic or circular, and each electrode rod is made of a ceramic and the surface of the electrode is coated with a coating layer 5 of a conductive metal. Further, the present invention relates to a production process, characterized by incorporating such four electrodes at predetermined intervals. Since the electrodes are mainly made of a ceramic which is easily formable with a high dimensional accuracy, the adjustment of the positional relationship between the electrodes during assembling can be made without much effort, which enables a quadrupole electrode having a high performance to be provided with a good reproducibility at a low cost.

    摘要翻译： PCT No.PCT / JP92 / 01141 Sec。 371日期：1993年1月5日 102（e）日期1993年1月5日PCT提交1992年9月7日PCT公布。 出版物WO93 / 05532 日本1993年3月18日。本发明涉及用于质谱仪等的四极电极的改进，其中两对电极棒1,2,3和4以这样的方式形成： 每个杆的相对面是双曲线或圆形，并且每个电极棒由陶瓷制成，并且电极的表面涂覆有导电金属的涂层5。 此外，本发明涉及一种制造方法，其特征在于以预定间隔并入这四个电极。 由于电极主要由能够以高尺寸精度容易地形成的陶瓷制成，因此可以在组装期间电极之间的位置关系的调整不需要太多的努力，这使得能够提供具有高性能的四极电极 以低成本实现良好的再现性。