公开(公告)号：US09312145B2

公开(公告)日：2016-04-12

申请号：US14200197

申请日：2014-03-07

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Wei Hua Tong ,  Tien-Ying Luo ,  Yan Ping Shen ,  Feng Zhou ,  Jun Lian ,  Haoran Shi ,  Min-hwa Chi ,  Jin Ping Liu ,  Haiting Wang ,  Seung Kim

IPC: H01L21/469 ,  H01L21/324 ,  H01L29/78 ,  H01L29/51 ,  H01L21/02 ,  H01L21/321

CPC classification number: H01L29/7851 ,  H01L21/02247 ,  H01L21/02252 ,  H01L21/02312 ,  H01L21/02332 ,  H01L21/0234 ,  H01L21/28185 ,  H01L21/28202 ,  H01L21/28211 ,  H01L21/321 ,  H01L21/324 ,  H01L29/511 ,  H01L29/512 ,  H01L29/513 ,  H01L29/518 ,  H01L29/66795 ,  H01L29/785

Abstract: Fin-type transistor fabrication methods and structures are provided having one or more nitrided conformal layers, to improve reliability of the semiconductor device. The method includes, for example, providing at least one material layer disposed, in part, conformally over a fin extending above a substrate, the material layer(s) including a gate dielectric layer; and performing a conformal nitridation process over an exposed surface of the material layer(s), the conformal nitridation process forming an exposed, conformal nitrided surface.

Abstract translation: 提供具有一个或多个氮化保形层的鳍式晶体管制造方法和结构，以提高半导体器件的可靠性。 该方法包括例如提供至少一个材料层，该材料层部分地保形地设置在衬底上延伸的翅片上，所述材料层包括栅极电介质层; 以及在所述材料层的暴露表面上进行保形氮化处理，所述共形氮化工艺形成暴露的共形氮化表面。

公开(公告)号：US09202697B2

公开(公告)日：2015-12-01

申请号：US13946485

申请日：2013-07-19

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Tien-Ying Luo ,  Feng Zhou ,  Yan Ping Shen ,  Haiting Wang ,  Haoran Shi ,  Wei Hua Tong ,  Seung Kim ,  Yong Meng Lee

IPC: H01L21/28 ,  H01L29/66

CPC classification number: H01L21/28088 ,  H01L21/28176 ,  H01L29/6659

Abstract: A method includes forming a gate structure by growing an interfacial layer on a substrate, depositing a High K layer on the interfacial layer, depositing a TiN Cap on the High K layer and forming a thin barrier layer on the TiN Cap. The gate structure is annealed.

Abstract translation: 一种方法包括通过在衬底上生长界面层来形成栅极结构，在界面层上沉积高K层，在高K层上沉积TiN帽并在TiN帽上形成薄的阻挡层。 栅极结构退火。

公开(公告)号：US09209258B2

公开(公告)日：2015-12-08

申请号：US14195330

申请日：2014-03-03

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Feng Zhou ,  Tien-Ying Luo ,  Haiting Wang ,  Padmaja Nagaiah ,  Jean-Baptiste Laloe ,  Isabelle Pauline Ferain ,  Yong Meng Lee

IPC: H01L21/28 ,  H01L29/78 ,  H01L29/40 ,  H01L29/51 ,  H01L21/311

CPC classification number: H01L29/401 ,  H01L21/28088 ,  H01L21/31111 ,  H01L21/3247 ,  H01L29/4966 ,  H01L29/51 ,  H01L29/518 ,  H01L29/66545

Abstract: An improved method for fabricating a semiconductor device is provided. The method includes: depositing a dielectric layer on a substrate; depositing a first cap layer on the dielectric layer; depositing an etch stop layer on the dielectric layer; and depositing a dummy cap layer on the etch stop layer to form a partial gate structure. Also provided is a partially formed semiconductor device. The partially formed semiconductor device includes: a substrate; a dielectric layer on the substrate; a first cap layer on the dielectric layer; an etch stop layer on the dielectric layer; and a dummy cap layer on the etch stop layer forming a partial gate structure.

Abstract translation: 提供了一种用于制造半导体器件的改进方法。 该方法包括：在基底上沉积电介质层; 在所述电介质层上沉积第一盖层; 在所述电介质层上沉积蚀刻停止层; 以及在所述蚀刻停止层上沉积虚拟盖层以形成部分栅极结构。 还提供了部分形成的半导体器件。 部分形成的半导体器件包括：衬底; 基底上的电介质层; 电介质层上的第一覆盖层; 介电层上的蚀刻停止层; 以及形成部分栅极结构的蚀刻停止层上的虚设盖层。

公开(公告)号：US09698269B2

公开(公告)日：2017-07-04

申请号：US15059793

申请日：2016-03-03

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Wei Hua Tong ,  Tien-Ying Luo ,  Yan Ping Shen ,  Feng Zhou ,  Jun Lian ,  Haoran Shi ,  Min-hwa Chi ,  Jin Ping Liu ,  Haiting Wang ,  Seung Kim

IPC: H01L29/78 ,  H01L29/51 ,  H01L21/324 ,  H01L21/02 ,  H01L21/321 ,  H01L21/28 ,  H01L29/66

CPC classification number: H01L29/7851 ,  H01L21/02247 ,  H01L21/02252 ,  H01L21/02312 ,  H01L21/02332 ,  H01L21/0234 ,  H01L21/28185 ,  H01L21/28202 ,  H01L21/28211 ,  H01L21/321 ,  H01L21/324 ,  H01L29/511 ,  H01L29/512 ,  H01L29/513 ,  H01L29/518 ,  H01L29/66795 ,  H01L29/785

Abstract: Fin-type transistor fabrication methods and structures are provided having one or more nitrided conformal layers, to improve reliability of the semiconductor device. The method includes, for example, providing at least one material layer disposed, in part, conformally over a fin extending above a substrate, the material layer(s) including a gate dielectric layer; and performing a conformal nitridation process over an exposed surface of the material layer(s), the conformal nitridation process forming an exposed, conformal nitrided surface.