MEMS TRIAXIAL MAGNETIC SENSOR WITH IMPROVED CONFIGURATION

    公开(公告)号:US20180188336A1

    公开(公告)日:2018-07-05

    申请号:US15638204

    申请日:2017-06-29

    CPC classification number: G01R33/0206 G01R33/0286 G01R33/038

    Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

    Inertial navigation sensor with reduced footprint

    公开(公告)号:US12146742B2

    公开(公告)日:2024-11-19

    申请号:US17806611

    申请日:2022-06-13

    Abstract: The invention relates to an inertial sensor (1) comprising a substrate extending along a drive excitation direction (x) and a detection direction (y) normal to each other, the device plane being perpendicular to a rotation direction (z), a first drive frame (110) and a second drive frame (120), a first sense frame (210), a second sense frame (220), a sense lever (1000) pivotably mounted around a rotation axis (1001), a sensing system comprising a strain gauge (1600) mechanically stressed by the sense lever it is rotating around the rotation axis. The sense lever includes a central portion (1500), a first arm (1100) and a second arm (1200), the central portion having a dimension along the detection direction called central width, the arms having a dimension along the detection direction called arm width, the central width being at least twice greater than the arm width.

    Microelectromechanical resonator system with improved stability with respect to temperature variations

    公开(公告)号:US10862449B2

    公开(公告)日:2020-12-08

    申请号:US16171885

    申请日:2018-10-26

    Abstract: A MEMS resonator system has a micromechanical resonant structure and an electronic processing circuit including a first resonant loop that excites a first vibrational mode of the structure and generates a first signal at a first resonance frequency. A compensation module compensates, as a function of a measurement of temperature variation, a first variation of the first resonance frequency caused by the temperature variation to generate a clock signal at a desired frequency that is stable relative to temperature. The electronic processing circuit further includes a second resonant loop, which excites a second vibrational mode of the structure and generates a second signal at a second resonance frequency. A temperature-sensing module receives the first and second signals and generates the measurement of temperature variation as a function of the first variation of the first resonance frequency and a second variation of the second resonance frequency caused by the temperature variation.

    Accelerometric sensor in MEMS technology having high accuracy and low sensitivity to temperature and ageing

    公开(公告)号:US10591505B2

    公开(公告)日:2020-03-17

    申请号:US15280720

    申请日:2016-09-29

    Abstract: The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assembly coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region is formed by a first region rotatably anchored to the supporting structure and by a second region coupled to the first region through elastic connection elements configured to allow a relative movement of the second region with respect to the first region. A driving assembly is coupled to the second region so as to control the relative movement of the latter with respect to the first region.

    MEMS triaxial magnetic sensor with improved configuration

    公开(公告)号:US10267869B2

    公开(公告)日:2019-04-23

    申请号:US15638204

    申请日:2017-06-29

    Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

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