Method of fabricating substrate structure

    公开(公告)号:US10199345B2

    公开(公告)日:2019-02-05

    申请号:US15867008

    申请日:2018-01-10

    Abstract: A substrate structure is provided, which includes: a substrate body having a plurality of conductive pads; an insulating layer formed on the substrate body and exposing the conductive pads; a plurality of conductive vias formed in the insulating layer and electrically connected to the conductive pads; a plurality of circuits formed on the conductive vias and in the insulating layer, wherein the circuits are greater in width than the conductive vias; and a plurality of conductive posts formed on the circuits and the insulating layer, wherein each of the conductive posts has a width greater than or equal to that of each of the circuits. The conductive vias, the circuits and the conductive posts are integrally formed. As such, micro-chips or fine-pitch conductive pads can be electrically connected to the substrate structure in a flip-chip manner.

    SUBSTRATE STRUCTURE, FABRICATION METHOD THEREOF AND CONDUCTIVE STRUCTURE
    5.
    发明申请
    SUBSTRATE STRUCTURE, FABRICATION METHOD THEREOF AND CONDUCTIVE STRUCTURE 有权
    基板结构,其制造方法及导电结构

    公开(公告)号:US20160358873A1

    公开(公告)日:2016-12-08

    申请号:US14981549

    申请日:2015-12-28

    Abstract: A substrate structure is provided, which includes: a substrate body having a plurality of conductive pads; an insulating layer formed on the substrate body and exposing the conductive pads; a plurality of conductive vias formed in the insulating layer and electrically connected to the conductive pads; a plurality of circuits formed on the conductive vias and in the insulating layer, wherein the circuits are greater in width than the conductive vias; and a plurality of conductive posts formed on the circuits and the insulating layer, wherein each of the conductive posts has a width greater than or equal to that of each of the circuits. The conductive vias, the circuits and the conductive posts are integrally formed. As such, micro-chips or fine-pitch conductive pads can be electrically connected to the substrate structure in a flip-chip manner.

    Abstract translation: 提供了一种衬底结构,其包括:具有多个导电焊盘的衬底本体; 绝缘层,形成在所述基板主体上并暴露所述导电焊盘; 形成在所述绝缘层中并电连接到所述导电焊盘的多个导电通孔; 形成在导电通孔和绝缘层中的多个电路,其中电路的宽度大于导电通孔的宽度; 以及形成在电路和绝缘层上的多个导电柱,其中每个导电柱具有大于或等于每个电路的宽度的宽度。 导电通孔,电路和导电柱一体形成。 因此,微芯片或细间距导电焊盘可以倒装芯片方式电连接到衬底结构。

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