公开(公告)号：US08829627B2

公开(公告)日：2014-09-09

申请号：US13479393

申请日：2012-05-24

申请人： Tetsuo Fujii ,  Keisuke Gotoh ,  Kenichi Ao

发明人： Tetsuo Fujii ,  Keisuke Gotoh ,  Kenichi Ao

IPC分类号： H01L29/84 ,  G01P1/02 ,  B60C23/04 ,  G01L9/00 ,  G01P15/08 ,  G01L19/00 ,  B81B7/02 ,  G01P15/125

CPC分类号： G01L9/0073 ,  B60C23/0488 ,  B81B7/02 ,  B81B2201/025 ,  B81B2207/015 ,  G01L9/0085 ,  G01L19/0092 ,  G01P1/023 ,  G01P15/08 ,  G01P15/125

摘要： A dynamic quantity sensor device includes: first and second dynamic quantity sensors having first and second dynamic quantity detecting units; and first and second substrates, which are bonded to each other to provide first and second spaces. The first and second units are air-tightly accommodated in the first and second spaces, respectively. A SOI layer of the first substrate is divided into multiple semiconductor regions by trenches. First and second parts of the semiconductor regions provide the first and second units, respectively. The second part includes: a second movable semiconductor region having a second movable electrode, which is provided by a sacrifice etching of the embedded oxide film; and a second fixed semiconductor region having a second fixed electrode. The second sensor detects the second dynamic quantity by measuring a capacitance between the second movable and fixed electrodes, which is changeable in accordance with the second dynamic quantity.

摘要翻译： 动态量传感器装置包括：具有第一和第二动态量检测单元的第一和第二动态量传感器; 以及彼此结合以提供第一和第二空间的第一和第二基板。 第一和第二单元分别气密地容纳在第一和第二空间中。 第一衬底的SOI层被沟槽分成多个半导体区域。 半导体区域的第一和第二部分分别提供第一和第二单元。 第二部分包括：具有第二可移动电极的第二可移动半导体区域，其通过对嵌入的氧化膜的牺牲蚀刻而提供; 以及具有第二固定电极的第二固定半导体区域。 第二传感器通过测量可根据第二动态量改变的第二可动电极和固定电极之间的电容来检测第二动态量。

公开(公告)号：US08749019B2

公开(公告)日：2014-06-10

申请号：US13410455

申请日：2012-03-02

申请人： Tetsuo Fujii ,  Keisuke Gotoh ,  Masaya Tanaka

发明人： Tetsuo Fujii ,  Keisuke Gotoh ,  Masaya Tanaka

IPC分类号： H01L21/70 ,  H01L21/8238

CPC分类号： H01L21/76898 ,  B81B2207/095 ,  B81C1/00301 ,  G01P15/125 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00 ,  H01L2924/00012

摘要： A region-divided substrate includes: a substrate having a first surface and a second surface opposite to the first surface and having a plurality of partial regions, which are divided by a plurality of trenches, wherein each trench penetrates the substrate from the first surface to the second surface; a conductive layer having an electrical conductivity higher than the substrate and disposed on a sidewall of one of the plurality of partial regions from the first surface to the second surface; and an insulator embedded in each trench.

摘要翻译： 区域划分的基板包括：具有第一表面和与第一表面相对的第二表面并具有由多个沟槽分隔的多个部分区域的基板，其中每个沟槽从第一表面穿透基板至 第二表面 导电层，其导电率高于所述衬底并且设置在所述多个部分区域中的所述第一表面到所述第二表面之一的侧壁上; 以及嵌入每个沟槽中的绝缘体。

公开(公告)号：US20110227174A1

公开(公告)日：2011-09-22

申请号：US13033941

申请日：2011-02-24

申请人： Tetsuo FUJII ,  Keisuke Gotoh

发明人： Tetsuo FUJII ,  Keisuke Gotoh

IPC分类号： H01L29/84 ,  H01L21/50

CPC分类号： G01P15/0802 ,  B81B7/0006 ,  B81B2201/0235 ,  B81B2203/0307 ,  B81B2207/095 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0877 ,  G01P2015/088 ,  H01L2224/48463

摘要： In a semiconductor physical quantity sensor, a pattern portion including a wiring pattern as a wiring is formed on a surface of a first semiconductor substrate. A support substrate having a surface made of an electrically insulating material is prepared. The first semiconductor substrate is joined to the support substrate by bonding the pattern portion to the surface of the support substrate. Further, a sensor structure is formed in the first semiconductor substrate. The sensor structure is electrically connected to the wiring pattern. A cap is bonded to the first semiconductor substrate such that the sensor structure is hermetically sealed.

摘要翻译： 在半导体物理量传感器中，在第一半导体衬底的表面上形成包括布线图案作为布线的图案部分。 准备具有由电绝缘材料制成的表面的支撑基板。 第一半导体衬底通过将图案部分结合到支撑衬底的表面而与支撑衬底接合。 此外，在第一半导体衬底中形成传感器结构。 传感器结构电连接到布线图案。 将盖接合到第一半导体基板，使得传感器结构被气密密封。

公开(公告)号：US08759926B2

公开(公告)日：2014-06-24

申请号：US13033941

申请日：2011-02-24

申请人： Tetsuo Fujii ,  Keisuke Gotoh

发明人： Tetsuo Fujii ,  Keisuke Gotoh

IPC分类号： G11C11/15

CPC分类号： G01P15/0802 ,  B81B7/0006 ,  B81B2201/0235 ,  B81B2203/0307 ,  B81B2207/095 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0877 ,  G01P2015/088 ,  H01L2224/48463

摘要： In a semiconductor physical quantity sensor, a pattern portion including a wiring pattern as a wiring is formed on a surface of a first semiconductor substrate. A support substrate having a surface made of an electrically insulating material is prepared. The first semiconductor substrate is joined to the support substrate by bonding the pattern portion to the surface of the support substrate. Further, a sensor structure is formed in the first semiconductor substrate. The sensor structure is electrically connected to the wiring pattern. A cap is bonded to the first semiconductor substrate such that the sensor structure is hermetically sealed.

摘要翻译： 在半导体物理量传感器中，在第一半导体衬底的表面上形成包括布线图案作为布线的图案部分。 准备具有由电绝缘材料制成的表面的支撑基板。 第一半导体衬底通过将图案部分结合到支撑衬底的表面而与支撑衬底接合。 此外，在第一半导体衬底中形成传感器结构。 传感器结构电连接到布线图案。 将盖接合到第一半导体基板，使得传感器结构被气密密封。

公开(公告)号：US08455973B2

公开(公告)日：2013-06-04

申请号：US12902696

申请日：2010-10-12

申请人： Tetsuo Fujii ,  Masaya Tanaka ,  Keisuke Gotoh

发明人： Tetsuo Fujii ,  Masaya Tanaka ,  Keisuke Gotoh

IPC分类号： H01L21/00

CPC分类号： H01L21/76898 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0877 ,  G01P2015/088 ,  H01L23/481 ,  H01L24/16 ,  H01L24/73 ,  H01L24/81 ,  H01L25/0655 ,  H01L25/16 ,  H01L2224/17181 ,  H01L2224/2929 ,  H01L2224/293 ,  H01L2224/73257 ,  H01L2224/80097 ,  H01L2224/80099 ,  H01L2224/80896 ,  H01L2224/81075 ,  H01L2224/81805 ,  H01L2224/81894 ,  H01L2224/83851 ,  H01L2924/00011 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01051 ,  H01L2924/01056 ,  H01L2924/01058 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/1461 ,  H01L2924/3025 ,  H01L2924/351 ,  H01L2224/29075 ,  H01L2924/00014 ,  H01L2924/00

摘要： A region divided substrate includes a substrate, a plurality of trenches, a conductive layer, and an insulating member. The substrate has a first surface and a second surface opposed to each other. The trenches penetrate the substrate from the first surface to the second surface and divide the substrate into a plurality of partial regions. The conductive layer is disposed on a sidewall of each of the trenches from a portion adjacent to the first surface to a portion adjacent to the second surface. The conductive layer has an electric conductivity higher than an electric conductivity of the substrate. The insulating member fills each of the trenches through the conductive layer.

摘要翻译： 区域分割衬底包括衬底，多个沟槽，导电层和绝缘构件。 基板具有彼此相对的第一表面和第二表面。 沟槽从第一表面穿过基板到第二表面，并将基板分成多个部分区域。 导电层设置在每个沟槽的侧壁上，从与第一表面相邻的部分到与第二表面相邻的部分。 导电层的导电率高于基板的电导率。 绝缘构件通过导电层填充每个沟槽。

公开(公告)号：US20120223410A1

公开(公告)日：2012-09-06

申请号：US13410455

申请日：2012-03-02

申请人： Tetsuo FUJII ,  Keisuke Gotoh ,  Masaya Tanaka

发明人： Tetsuo FUJII ,  Keisuke Gotoh ,  Masaya Tanaka

IPC分类号： H01L29/06 ,  H01L21/762

CPC分类号： H01L21/76898 ,  B81B2207/095 ,  B81C1/00301 ,  G01P15/125 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00 ,  H01L2924/00012

摘要： A region-divided substrate includes: a substrate having a first surface and a second surface opposite to the first surface and having a plurality of partial regions, which are divided by a plurality of trenches, wherein each trench penetrates the substrate from the first surface to the second surface; a conductive layer having an electrical conductivity higher than the substrate and disposed on a sidewall of one of the plurality of partial regions from the first surface to the second surface; and an insulator embedded in each trench.

摘要翻译： 区域划分的基板包括：具有第一表面和与第一表面相对的第二表面并具有由多个沟槽分隔的多个部分区域的基板，其中每个沟槽从第一表面穿透基板至 第二表面 导电层，其导电率高于所述衬底并且设置在所述多个部分区域中的所述第一表面到所述第二表面之一的侧壁上; 以及嵌入每个沟槽中的绝缘体。

公开(公告)号：US20110133295A1

公开(公告)日：2011-06-09

申请号：US12902696

申请日：2010-10-12

申请人： Tetsuo Fujii ,  Masaya Tanaka ,  Keisuke Gotoh

发明人： Tetsuo Fujii ,  Masaya Tanaka ,  Keisuke Gotoh

IPC分类号： H01L29/84 ,  H01L29/06 ,  H01L21/762 ,  H01L21/50

CPC分类号： H01L21/76898 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0877 ,  G01P2015/088 ,  H01L23/481 ,  H01L24/16 ,  H01L24/73 ,  H01L24/81 ,  H01L25/0655 ,  H01L25/16 ,  H01L2224/17181 ,  H01L2224/2929 ,  H01L2224/293 ,  H01L2224/73257 ,  H01L2224/80097 ,  H01L2224/80099 ,  H01L2224/80896 ,  H01L2224/81075 ,  H01L2224/81805 ,  H01L2224/81894 ,  H01L2224/83851 ,  H01L2924/00011 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01051 ,  H01L2924/01056 ,  H01L2924/01058 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/1461 ,  H01L2924/3025 ,  H01L2924/351 ,  H01L2224/29075 ,  H01L2924/00014 ,  H01L2924/00

摘要： A region divided substrate includes a substrate, a plurality of trenches, a conductive layer, and an insulating member. The substrate has a first surface and a second surface opposed to each other. The trenches penetrate the substrate from the first surface to the second surface and divide the substrate into a plurality of partial regions. The conductive layer is disposed on a sidewall of each of the trenches from a portion adjacent to the first surface to a portion adjacent to the second surface. The conductive layer has an electric conductivity higher than an electric conductivity of the substrate. The insulating member fills each of the trenches through the conductive layer.

摘要翻译： 区域分割衬底包括衬底，多个沟槽，导电层和绝缘构件。 基板具有彼此相对的第一表面和第二表面。 沟槽从第一表面穿过基板到第二表面，并将基板分成多个部分区域。 导电层设置在每个沟槽的侧壁上，从与第一表面相邻的部分到与第二表面相邻的部分。 导电层的导电率高于基板的电导率。 绝缘构件通过导电层填充每个沟槽。

公开(公告)号：US08567248B2

公开(公告)日：2013-10-29

申请号：US12781852

申请日：2010-05-18

申请人： Keisuke Gotoh

发明人： Keisuke Gotoh

IPC分类号： G01P15/125

CPC分类号： G01P3/44 ,  G01C19/5719 ,  G01P15/125 ,  G01P15/14

摘要： A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the moveable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the accelereation detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction.

摘要翻译： 传感器包括加速度检测器，角速度检测器，驱动器和第一至第四弹簧。 每个检测器包括一对固定电极，一对可移动电极和用于支撑可移动电极的一对支撑构件。 驾驶员使支撑构件在第一方向上以相反的相位振动。 第一弹簧联接加速度检测器的支撑构件，并且在垂直于第一方向的第二方向上具有弹性。 第二弹簧将加速度检测器的支撑构件联接到基座并且在两个方向上具有弹性。 第三弹簧将加速度检测器的支撑构件耦合到角速度检测器的支撑构件，并且在两个方向上具有弹性。 第四弹簧将支撑构件联接到角速度检测器的可动电极，并且在第二方向上具有弹性。

公开(公告)号：US08310248B2

公开(公告)日：2012-11-13

申请号：US12656542

申请日：2010-02-02

申请人： Keisuke Gotoh ,  Kentaro Mizuno ,  Norikazu Ohta

发明人： Keisuke Gotoh ,  Kentaro Mizuno ,  Norikazu Ohta

IPC分类号： G01R27/26

CPC分类号： G01L9/12 ,  G01D1/00 ,  G01D15/00 ,  G01D21/00 ,  G01H11/06 ,  G01P15/125

摘要： A capacitive sensor device includes first and second sensor capacitors coupled in series, a clock signal generating part, an operational amplifier, a feedback capacitor, a compensating capacitor, and a compensating signal generating part. The clock signal generating part generates a first clock signal and the second clock signal applied to the first and second sensor capacitors, respectively. The compensating signal generating part generates a compensating signal applied to the compensating capacitor. The first clock signal and the second clock signal have the same frequency and the same amplitude and have phases being opposite each other. The compensating signal has a frequency same as the first clock signal and the second clock signal, has a phase same as one of the first clock signal and the second clock signal, and has an amplitude that is adjustable.

摘要翻译： 电容传感器装置包括串联耦合的第一传感器电容器和第二传感器电容器，时钟信号产生部件，运算放大器，反馈电容器，补偿电容器和补偿信号产生部件。 时钟信号产生部分分别产生施加到第一和第二传感器电容器的第一时钟信号和第二时钟信号。 补偿信号生成部生成施加到补偿电容器的补偿信号。 第一时钟信号和第二时钟信号具有相同的频率和相同的幅度并且具有彼此相反的相位。 补偿信号具有与第一时钟信号和第二时钟信号相同的频率，具有与第一时钟信号和第二时钟信号中的一个相同的相位，并且具有可调整的幅度。

公开(公告)号：US20100219848A1

公开(公告)日：2010-09-02

申请号：US12656542

申请日：2010-02-02

申请人： Keisuke Gotoh ,  Kentaro Mizuno ,  Norikazu Ohta

发明人： Keisuke Gotoh ,  Kentaro Mizuno ,  Norikazu Ohta

IPC分类号： G01R27/26

CPC分类号： G01L9/12 ,  G01D1/00 ,  G01D15/00 ,  G01D21/00 ,  G01H11/06 ,  G01P15/125

摘要： A capacitive sensor device includes first and second sensor capacitors coupled in series, a clock signal generating part, an operational amplifier, a feedback capacitor, a compensating capacitor, and a compensating signal generating part. The clock signal generating part generates a first clock signal and the second clock signal applied to the first and second sensor capacitors, respectively. The compensating signal generating part generates a compensating signal applied to the compensating capacitor. The first clock signal and the second clock signal have the same frequency and the same amplitude and have phases being opposite each other. The compensating signal has a frequency same as the first clock signal and the second clock signal, has a phase same as one of the first clock signal and the second clock signal, and has an amplitude that is adjustable.

摘要翻译： 电容传感器装置包括串联耦合的第一传感器电容器和第二传感器电容器，时钟信号产生部件，运算放大器，反馈电容器，补偿电容器和补偿信号产生部件。 时钟信号产生部分分别产生施加到第一和第二传感器电容器的第一时钟信号和第二时钟信号。 补偿信号生成部生成施加到补偿电容器的补偿信号。 第一时钟信号和第二时钟信号具有相同的频率和相同的幅度并且具有彼此相对的相位。 补偿信号具有与第一时钟信号和第二时钟信号相同的频率，具有与第一时钟信号和第二时钟信号中的一个相同的相位，并且具有可调整的幅度。