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公开(公告)号：US07033916B1
公开(公告)日：2006-04-25
申请号：US10770990
申请日：2004-02-02
IPC分类号： H01L21/22 , H01L21/336 , H01L21/8234 , H01L21/44
CPC分类号： H01L29/665 , H01L21/26506 , H01L21/28518 , H01L21/823814 , H01L29/6656 , H01L29/6659
摘要： A method of forming an integrated circuit with a semiconductor substrate is provided. A gate dielectric is formed on the semiconductor substrate, and a gate is formed on the gate dielectric. A super-saturated doped source silicide metallic layer is formed on the semiconductor substrate adjacent the gate and the gate dielectric. The silicide metallic layer incorporates a substantially uniformly distributed dopant therein in a substantially uniform super-saturated concentration. The silicide metallic layer is reacted with the semiconductor substrate therebeneath to form a salicide layer and outdiffuse the dopant from the salicide layer into the semiconductor substrate therebeneath. The outdiffused dopant in the semiconductor substrate is then activated to form a shallow source/drain junction beneath the salicide layer. An interlayer dielectric is then deposited above the semiconductor substrate, and contacts are formed in the interlayer dielectric to the salicide layer.
摘要翻译： 提供一种形成具有半导体衬底的集成电路的方法。 在半导体衬底上形成栅极电介质，在栅极电介质上形成栅极。 在与栅极和栅极电介质相邻的半导体衬底上形成超饱和掺杂源极化硅金属层。 硅化金属层以基本均匀的超饱和浓度掺入其中基本上均匀分布的掺杂剂。 硅化物金属层与其下面的半导体衬底反应以形成自对准硅化物层，并将掺杂剂从硅化物层扩散到其内的半导体衬底中。 然后激活半导体衬底中的向外扩散的掺杂剂以在自对准硅化物层下面形成浅的源极/漏极结。 然后在半导体衬底上沉积层间电介质，并且在层间电介质中形成接触到硅化物层。
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公开(公告)号：US06812550B1
公开(公告)日：2004-11-02
申请号：US10700733
申请日：2003-11-03
IPC分类号： H01L2358
CPC分类号： H01L23/585 , H01L22/14 , H01L23/34 , H01L2924/0002 , H01L2924/3511 , H01L2924/00
摘要： A method for manufacturing an integrated circuit on a semiconductor wafer is provided. The semiconductor wafer has complete die and partial die areas thereon. Functional circuit patterns are formed in a plurality of the complete die areas. The thermal absorption properties of the semiconductor wafer are tuned by forming differing patterns in a plurality of the partial die areas.
摘要翻译： 提供了一种在半导体晶片上制造集成电路的方法。 半导体晶片在其上具有完整的模具和部分模具区域。 功能电路图案形成在多个完整的模具区域中。 通过在多个部分管芯区域中形成不同的图案来调整半导体晶片的热吸收性能。
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公开(公告)号：US07298012B2
公开(公告)日：2007-11-20
申请号：US11307537
申请日：2006-02-11
IPC分类号： H01L29/76
CPC分类号： H01L29/665 , H01L21/26506 , H01L21/28518 , H01L21/823814 , H01L29/6656 , H01L29/6659
摘要： An integrated circuit with a semiconductor substrate is provided. A gate dielectric is on the semiconductor substrate, and a gate is on the gate dielectric. A silicide layer is on the semiconductor substrate adjacent the gate and the gate dielectric. The silicide layer incorporates a substantially uniformly distributed and concentrated dopant therein. A shallow source/drain junction is beneath the salicide layer. An interlayer dielectric is above the semiconductor substrate, and contacts are in the interlayer dielectric to the salicide layer.
摘要翻译： 提供了具有半导体衬底的集成电路。 栅极电介质位于半导体衬底上，栅极位于栅极电介质上。 硅化物层位于与栅极和栅极电介质相邻的半导体衬底上。 硅化物层在其中包含基本均匀分布和浓缩的掺杂剂。 浅层源极/漏极结在自对准层下面。 层间电介质位于半导体衬底之上，并且触点位于硅化物层的层间电介质中。
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4.发明授权Semiconductor solid phase epitaxy damage control method and integrated circuit produced thereby 有权由此产生的半导体固相外延损伤控制方法和集成电路公开(公告)号：US06933579B1
公开(公告)日：2005-08-23
申请号：US10728001
申请日：2003-12-03
IPC分类号： H01L21/265 , H01L21/336 , H01L29/78
CPC分类号： H01L29/66628 , H01L21/26506 , H01L29/6656 , H01L29/66636 , H01L29/7834
摘要： A method of forming an integrated circuit with a semiconductor substrate is provided. A gate dielectric is formed on the semiconductor substrate, and a gate is formed on the gate dielectric. A raised source/drain layer is formed on the semiconductor substrate adjacent the gate and the gate dielectric. An amorphized shallow source/drain extension implanted region is formed in the raised source/drain layer and the semiconductor substrate therebeneath. The amorphized region is then recrystallized to form a shallow source/drain extension having residual recrystallization damage elevated into the raised source/drain layer.
摘要翻译： 提供一种形成具有半导体衬底的集成电路的方法。 在半导体衬底上形成栅极电介质，在栅极电介质上形成栅极。 凸起的源极/漏极层形成在与栅极和栅极电介质相邻的半导体衬底上。 在凸起的源极/漏极层和其下的半导体衬底上形成非晶化的浅源极/漏极延伸注入区。 然后将非晶化区域重结晶以形成具有升高到升高的源极/漏极层中的残余再结晶损伤的浅源/漏极延伸。
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公开(公告)号：US07211473B1
公开(公告)日：2007-05-01
申请号：US10756585
申请日：2004-01-12
IPC分类号： H01L21/00
CPC分类号： H01L29/78612 , H01L29/66772
摘要： A method for forming an integrated circuit with a semiconductor substrate is provided. A gate dielectric is formed on the semiconductor substrate, and a gate is formed on the gate dielectric. Source/drain junctions are formed in the semiconductor substrate adjacent the gate. A facet is formed in at least one of the source/drain junctions of the integrated circuit.
摘要翻译： 提供了一种用于形成具有半导体衬底的集成电路的方法。 在半导体衬底上形成栅极电介质，在栅极电介质上形成栅极。 源极/漏极结形成在与栅极相邻的半导体衬底中。 在集成电路的源极/漏极结中的至少一个上形成刻面。
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公开(公告)号：US07465639B1
公开(公告)日：2008-12-16
申请号：US11133969
申请日：2005-05-20
IPC分类号： H01L21/20
CPC分类号： H01L21/84
摘要： A method is provided for fabricating a silicon on insulator (SOI) device that includes a silicon substrate, a buried insulator layer overlying the silicon substrate, and a monocrystalline silicon layer overlying the buried insulator layer. The method comprises the steps of forming an MOS capacitor coupled between a first voltage bus and a second voltage bus. The MOS capacitor has a gate electrode material forming a first plate of the MOS capacitor and an impurity doped region in the monocrystalline silicon layer beneath the gate electrode material forming a second plate of the MOS capacitor. The first voltage bus is coupled to the first plate of the capacitor and the second voltage bus is coupled to the second plate of the capacitor. The method further includes forming an electrical discharge path coupling the second plate of the MOS capacitor to the silicon substrate.
摘要翻译： 提供了一种用于制造绝缘体上硅（SOI）器件的方法，该器件包括硅衬底，覆盖硅衬底的掩埋绝缘体层和覆盖在掩埋绝缘体层上的单晶硅层。 该方法包括以下步骤：形成耦合在第一电压总线和第二电压总线之间的MOS电容器。 MOS电容器具有形成MOS电容器的第一板的栅电极材料和形成MOS电容器的第二板的栅极电极材料下面的单晶硅层中的杂质掺杂区域。 第一电压总线耦合到电容器的第一板，第二电压总线耦合到电容器的第二板。 该方法还包括形成将MOS电容器的第二板耦合到硅衬底的放电路径。
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公开(公告)号：US20080124884A1
公开(公告)日：2008-05-29
申请号：US11467634
申请日：2006-08-28
申请人： Mario M. Pelella , Darin A. Chan
发明人： Mario M. Pelella , Darin A. Chan
IPC分类号： H01L21/84
CPC分类号： H01L21/84 , H01L21/823878 , H01L27/0629
摘要： Methods are provided for fabricating an SOI component on a semiconductor layer/insulator/substrate structure including a diode region formed in the substrate. The method comprises, in accordance with one embodiment, forming a shallow trench isolation (STI) region extending through the semiconductor layer to the insulator. A layer of polycrystalline silicon is deposited overlying the STI and the semiconductor layer and is patterned to form a polycrystalline silicon mask comprising at least a first mask region and a second mask region. First and second openings are etched through the STI and the insulator using the mask as an etch mask. N— and P-type ions are implanted into the diode region through the openings to form the anode and cathode of the diode. The anode and cathode are closely spaced and precisely aligned to each other by the polycrystalline silicon mask. Electrical contacts are made to the anode and cathode.
摘要翻译： 提供了用于在包括在衬底中形成的二极管区域的半导体层/绝缘体/衬底结构上制造SOI部件的方法。 该方法包括根据一个实施例，形成穿过半导体层延伸到绝缘体的浅沟槽隔离（STI）区域。 沉积覆盖STI和半导体层的多晶硅层，并且被图案化以形成至少包括第一掩模区域和第二掩模区域的多晶硅掩模。 使用掩模作为蚀刻掩模，通过STI和绝缘体蚀刻第一和第二开口。 N型和P型离子通过开口注入二极管区域，形成二极管的阳极和阴极。 阳极和阴极通过多晶硅掩模彼此紧密间隔并精确对准。 电触点被制成阳极和阴极。
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公开(公告)号：US07361534B2
公开(公告)日：2008-04-22
申请号：US11127329
申请日：2005-05-11
申请人： Mario M. Pelella
发明人： Mario M. Pelella
IPC分类号： H01L21/84
CPC分类号： H01L21/823481 , H01L21/28123 , H01L21/84 , H01L27/1203 , H01L27/1207 , H01L29/66128 , H01L29/8611
摘要： A method is provided for fabricating a semiconductor on insulator (SOI) device. The method includes, in one embodiment, providing a monocrystalline silicon substrate having a monocrystalline silicon layer overlying the substrate and separated therefrom by a dielectric layer. A gate electrode material is deposited and patterned to form a gate electrode and a spacer. Impurity determining dopant ions are implanted into the monocrystalline silicon layer using the gate electrode as an ion implant mask to form spaced apart source and drain regions in the monocrystalline silicon layer and into the monocrystalline silicon substrate using the spacer as an ion implant mask to form spaced apart device regions in the monocrystalline substrate. Electrical contacts are then formed that contact the spaced apart device regions.
摘要翻译： 提供了一种用于制造绝缘体上半导体（SOI）器件的方法。 在一个实施例中，该方法包括提供单晶硅衬底，其具有覆盖衬底的单晶硅层，并通过介电层与其分离。 沉积栅极电极材料并构图以形成栅电极和间隔物。 使用栅极作为离子注入掩模将杂质确定掺杂剂离子注入到单晶硅层中，以在单晶硅层中形成间隔开的源极和漏极区域，并使用间隔物作为离子注入掩模形成间隔开的单晶硅衬底，以形成间隔开的 在单晶衬底中分离器件区域。 然后形成接触间隔开的器件区域的电触头。
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公开(公告)号：US06828607B1
公开(公告)日：2004-12-07
申请号：US10315458
申请日：2002-12-09
申请人： Mario M. Pelella , Amy C. Tu , Richard K. Klein
发明人： Mario M. Pelella , Amy C. Tu , Richard K. Klein
IPC分类号： H01L29768
CPC分类号： H01L21/76897 , H01L21/76831 , H01L23/485 , H01L27/115 , H01L27/11521 , H01L2924/0002 , H01L2924/00
摘要： A multiple independent bit Flash memory cell has a gate that includes a first oxide layer, a discontinuous nitride layer on the first oxide layer, a second oxide layer on the discontinuous nitride layer and the first oxide layer, and a polysilicon layer on the second oxide layer. The discontinuous nitride layer has regions residing at different portions of the layer. These portions are separated by the second oxide layer. Thus, with a smaller channel length, charge that otherwise would migrate from one region to the other and/or strongly influence its neighboring it is blocked/impeded by the second oxide layer. In this manner, the potential for charge sharing between the regions is reduced, and a higher density chip multiple independent bit Flash memory cells may be provided.
摘要翻译： 多独立位闪存单元具有栅极，该栅极包括第一氧化物层，第一氧化物层上的不连续氮化物层，不连续氮化物层上的第二氧化物层和第一氧化物层，以及在第二氧化物层上的多晶硅层 层。 不连续的氮化物层具有位于该层的不同部分的区域。 这些部分被第二氧化物层分离。 因此，具有较小的通道长度，否则会从一个区域迁移到另一个区域的电荷和/或强烈影响其邻近的电荷被第二氧化物层阻挡/阻碍。 以这种方式，减小了区域之间的电荷共享的可能性，并且可以提供更高密度的芯片多个独立的位闪存单元。
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10.发明授权Method for forming a complementary bipolar transistor structure including a self-aligned vertical PNP transistor 失效用于形成包括自对准垂直PNP晶体管的互补双极晶体管结构的方法
公开(公告)号：US4997775A
公开(公告)日：1991-03-05
申请号：US487502
申请日：1990-02-26
IPC分类号： H01L21/331 , H01L21/8228 , H01L27/082 , H01L29/73 , H01L29/732
CPC分类号： H01L21/82285 , H01L27/0826 , Y10S148/011
摘要： A method of forming a complementary bipolar transistor device includes the steps of: providing a substrate of semiconductor material including at least two electrically isolated N-type device regions having a generally planar common surface; forming a P-type buried subcollar region in a first of the device regions; forming an N-type buried subcollector region in a second of the device regions; forming an N-type base region in the common surface of the first device region; forming a layer of P-doped polysilicon over the base region in the first device region and over the second device region; patterning the layer of P-doped polysilicon to form an emitter contact generally centered on the base region of the first device region and a generally annular base contact on the second device region; forming a layer of insulating material over the patterned layer of P-doped polysilicon; forming a layer of N-doped polysilicon generally conformally over the device; patterning the layer of N-doped polysilicon to form a base contact generally surrounding the emitter contact on the first device region and an emitter contact generally surrounded by the base contact on the second device region; and heating the device at least once to drive impurities from the base and emitter contacts on the first and second device regions into the device regions whereby to form a vertical PNP transistor in the first device region and a vertical NPN transistor in the second device region.
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