摘要:
Disclosed is an appearance inspection apparatus for inspecting whether an appearance state of a main actuator element is adequate or defective by applying an appearance-inspecting voltage to the main actuator element including an upper electrode formed on an upper surface of a shape-retaining layer and a lower electrode formed on a lower surface of the shape-retaining layer. The appearance inspection apparatus comprises an optical detecting unit for electrically detecting the appearance state of the main actuator element on the basis of light emission caused by the main actuator element, and a judging unit for judging whether the appearance state of the main actuator element is adequate or defective on the basis of a level of a detection signal supplied from the optical detecting unit. Accordingly, it is possible to realize high inspection accuracy, reduce inspection time, and simplify the inspection apparatus. Further, the present invention is also applicable to integrated electronic parts.
摘要:
An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.
摘要:
An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.
摘要:
A piezoelectric/electrostrictive actuator includes a plurality of piezoelectric/electrostrictive elements arranged in comb teeth-like alignment on a base plate. The actuator is driven by means of dislocation of the piezoelectric/electrostrictive elements. The cell driving type actuator is characterized in that each of the cells is formed independently from adjacent cells by positioning cover plates between two adjacent piezoelectric/electrostrictive elements. Thus, there is provided a piezoelectric/electrostrictive actuator wherein a heating process at a high temperature can be applied and mass production at low cost is possible. The actuator includes cells with slit portions having a width of 60 μm or less and a high aspect ratio and can be activated with high electric field strength, and great displacement can be obtained with small electric field strength.
摘要:
A punch apparatus for punching and laminating simultaneously a plural number of thin sheets is disclosed. This punch apparatus includes a punch provided on an upper portion of the punch apparatus, a die provided on a lower portion of the punch apparatus and used for punching a material to be processed, a stripper for guiding the punch during punching operation, a device for laminating punched materials using the punch as a laminating axis, a device for adjusting a relative position between the punch and the stripper when the upper and the lower portions of the punch apparatus are separated, and a device for adjusting a clearance between the die and the stripper during punching operation. The punch apparatus can open precisely almost straight very fine through-holes of a diameter of 100 μm or less even in a sheet of thin, soft and deformable material.
摘要:
A micro pump having at least one pump member for conveying a fluid by action of pressure includes a pump unit formed by at least one actuator member for generating a pressure fluctuation and a fluid channel in which the fluid flows. The actuator member provided with a cell formed by disposing two side walls made of piezoelectric/electrostrictive elements or antiferrodielectric elements on a connecting plate, and covering a surface facing the connecting plate between the side walls with a cover plate. The actuator member selectively forms the fluid channel and generates pressure fluctuation in the fluid channel member due to displacement of the cell caused by expansion/contraction of the side walls. The micro pump is small and thin in size, while attaining increasing fluid ejection amounts, and a thigh speed in response.
摘要:
A method for producing a nozzle having a projecting tip part, including the steps of disposing a ceramic green sheet between a first die and a stripper containing a first punch, moving the first punch through a first surface of the ceramic green sheet to form a hole therethrough, inverting the ceramic green sheet, disposing the inverted ceramic green sheet between a second die and a stripper containing a second punch, the second die having a cavity in the shape of a negative configuration of the projecting tip part, moving the second punch through the hole formed in the ceramic green sheet to force a portion of the ceramic green sheet into the cavity of the second die and form the projecting tip part, and baking the ceramic green sheet to form the nozzle.
摘要:
A multislit type actuator including a plurality of piezoelectric actuators aligned and allocated like teeth of a comb formed on a substrate, wherein a condition of crystal grains in side surfaces of the piezoelectric actuators forming wall surfaces of a slit between the comb teeth is that the crystal grains under transgranular fracture are 1% or below.
摘要:
A micro pump member is provided, in which a plurality of cells formed in a base part are used as pressurizing chambers, and side walls forming the pressurizing chambers are constructed by piezoelectric/electrostrictive elements. The volume of the pressurizing chambers is changed by the displacement of the piezoelectric/electrostrictive elements to produce a pressure in the pressurizing chambers. The pressurizing chambers are formed independent of adjacent pressurizing chambers. Activation can be carried out by applying a driving electric field having a high field strength to the pressurizing chambers, so that a greater displacement and a higher response can be obtained with a smaller field strength.
摘要:
A liquid injection nozzle including a substantially planar substrate having first and second opposed surfaces. A communicating portion, which has an inner circumferential surface, extends through the substrate from the first surface to the second surface of the substrate. The inner circumferential surface is tapered from the first surface toward the second surface such that a lateral dimension of the inner circumferential surface is narrowest at a tip portion. A projected part extends from the second surface of the substrate and defines the tip portion which terminates the communicating portion.