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    ULTRA LOW POWER THERMALLY-ACTUATED OSCILLATOR AND DRIVING CIRCUIT THEREOF
    2.
    发明申请
    ULTRA LOW POWER THERMALLY-ACTUATED OSCILLATOR AND DRIVING CIRCUIT THEREOF 有权
    超低功耗激励振荡器及其驱动电路

    公开(公告)号：US20160336941A1

    公开(公告)日：2016-11-17

    申请号：US14961252

    申请日：2015-12-07

    申请人： NATIONAL TSING HUA UNIVERSITY

    发明人： Sheng-Shian LI ,  Kuan-Hsien LEE ,  Cheng-Chi CHEN

    IPC分类号： H03L1/02

    CPC分类号： H03B5/30 ,  B81B3/0081 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/0163 ,  H03B5/04 ,  H03H9/02259 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02307 ,  H03H2009/02322

    摘要： An ultra low power thermally-actuated oscillator and driving circuit thereof are provided. The ultra low power thermally-actuated oscillator includes proof masses, thermally-actuated element and a plurality of driving elements. The proof masses is symmetrically disposed and suspended from a substrate by spring structure. The thermally-actuated element is a line structure to effectively reduce the motional impedance and direct current power. Wherein, the thermally-actuated element is connected to the proof masses or the spring structure. The plurality of driving elements are respectively disposed on both sides of the thermally-actuated element to provide a driving current. When the driving current flows through the thermally-actuated element, the thermally-actuated element will be deformed and thus the proof masses will be driven to produce a harmonic oscillation.

    摘要翻译： 提供了一种超低功率热驱动振荡器及其驱动电路。 超低功率热致动振荡器包括检测质量块，热致动元件和多个驱动元件。 证明质量通过弹簧结构对称地设置和悬挂在基板上。 热致动元件是有效降低运动阻抗和直流电力的线结构。 其中，热致动元件连接到防弹块或弹簧结构。 多个驱动元件分别设置在热致动元件的两侧以提供驱动电流。 当驱动电流流过热致动元件时，热致动元件将变形，从而驱动检测质量产生谐波振荡。

    RECONFIGURABLE LITHOGRAPHIC STRUCTURES
    4.
    发明申请
    RECONFIGURABLE LITHOGRAPHIC STRUCTURES 有权
    可重构光刻结构

    公开(公告)号：US20140191524A1

    公开(公告)日：2014-07-10

    申请号：US14206585

    申请日：2014-03-12

    申请人： The Johns Hopkins University

    发明人： DAVID H. GRACIAS ,  Timothy G. Leong

    IPC分类号： B25J7/00

    CPC分类号： B25J7/00 ,  B81B3/0024 ,  B81B3/0032 ,  B81B2201/031 ,  B81C99/002 ,  Y10T436/11

    摘要： A lithographically structured device has an actuation layer and a control layer operatively connected to the actuation layer. The actuation layer includes a stress layer and a neutral layer that is constructed of materials and with a structure such that it stores torsional energy upon being constructed. The control layer is constructed to maintain the actuation layer substantially in a first configuration in a local environmental condition and is responsive to a change in the local environmental condition such that it permits a release of stored torsional energy to cause a change in a structural configuration of the lithographically structured device to a second configuration, the control layer thereby providing a trigger mechanism. The lithographically structured device has a maximum dimension that is less than about 10 mm when it is in the second configuration.

    摘要翻译： 光刻结构的器件具有可操作地连接到致动层的致动层和控制层。 致动层包括应力层和中性层，其由材料构成，并具有在构造时存储扭转能的结构。 控制层被构造成在局部环境条件下将致动层基本上保持在第一构型中并且响应于局部环境条件的改变，使得其允许释放存储的扭转能量以引起结构构造的变化 光刻结构的设备到第二配置，控制层由此提供触发机构。 光刻结构的装置在其处于第二构型时的最大尺寸小于约10mm。

    Reconfigurable lithographic structures
    5.
    发明授权
    Reconfigurable lithographic structures 有权
    可重构光刻结构

    公开(公告)号：US08703073B2

    公开(公告)日：2014-04-22

    申请号：US12864942

    申请日：2009-03-06

    申请人： David Hugo Gracias ,  Timothy Gar-Ming Leong

    发明人： David Hugo Gracias ,  Timothy Gar-Ming Leong

    IPC分类号： G01N15/06

    CPC分类号： B25J7/00 ,  B81B3/0024 ,  B81B3/0032 ,  B81B2201/031 ,  B81C99/002 ,  Y10T436/11

    摘要： A lithographically structured device has an actuation layer and a control layer operatively connected to the actuation layer. The actuation layer includes a stress layer and a neutral layer that is constructed of materials and with a structure such that it stores torsional energy upon being constructed. The control layer is constructed to maintain the actuation layer substantially in a first configuration in a local environmental condition and is responsive to a change in the local environmental condition such that it permits a release of stored torsional energy to cause a change in a structural configuration of the lithographically structured device to a second configuration, the control layer thereby providing a trigger mechanism. The lithographically structured device has a maximum dimension that is less than about 10 mm when it is in the second configuration.

    摘要翻译： 光刻结构的器件具有可操作地连接到致动层的致动层和控制层。 致动层包括应力层和中性层，其由材料构成，并具有在构造时存储扭转能的结构。 控制层被构造成在局部环境条件下将致动层基本上保持在第一构型中并且响应于局部环境条件的改变，使得其允许释放存储的扭转能量以引起结构构造的变化 光刻结构的设备到第二配置，控制层由此提供触发机构。 光刻结构的装置在其处于第二构型时的最大尺寸小于约10mm。

    Microelectromechanical (MEM) thermal actuator
    6.
    发明授权
    Microelectromechanical (MEM) thermal actuator 有权
    微机电（MEM）热致动器

    公开(公告)号：US08232858B1

    公开(公告)日：2012-07-31

    申请号：US12033995

    申请日：2008-02-20

    申请人： Ernest J. Garcia ,  Clay W. G. Fulcher

    发明人： Ernest J. Garcia ,  Clay W. G. Fulcher

    IPC分类号： H01H61/00 ,  H01H71/16 ,  H01H37/52 ,  H01L21/00

    CPC分类号： B81B3/0024 ,  B81B2201/031 ,  H01H2061/006 ,  H02N10/00

    摘要： Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

    摘要翻译： 公开了一种微机电（MEM）屈曲梁热致动器，其中梁的弯曲方向被约束到期望的致动方向，其可以相对于支撑基板在平面内或平面外。 致动器包括通过将梁刚性地附接到基板的支撑件支撑在基板上方的具有均匀横截面的制造的线性梁。 可以通过包括电流通过它们的方法来加热梁。 在加热和膨胀时初始直梁的屈曲方向通过结合一个或多个连接到基底并且靠近束的中点的方向约束来控制。 在光束最初以不期望的方向弯曲的情况下，通过与方向约束的接触而引起的光束的变形产生相反的力，以将屈曲光束重新引导到期望的方向。 可以利用由屈曲梁的运动产生的位移和力来执行有用的工作，例如在电气开关中闭合触点。

    MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO-AXIS FORCE SENSORS
    7.
    发明申请
    MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO-AXIS FORCE SENSORS 有权
    具有双轴力传感器的基于MEMS的微型和纳米拖板

    公开(公告)号：US20100207411A1

    公开(公告)日：2010-08-19

    申请号：US12305468

    申请日：2007-06-21

    申请人： Yu Sun ,  Keekyoung Kim

    发明人： Yu Sun ,  Keekyoung Kim

    IPC分类号： B81B7/02 ,  B25J7/00 ,  B81B3/00 ,  H01R43/00

    CPC分类号： B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

    摘要： The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

    摘要翻译： 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

    MEMS actuator
    8.
    发明授权
    MEMS actuator 有权
    MEMS致动器

    公开(公告)号：US07733200B2

    公开(公告)日：2010-06-08

    申请号：US11904949

    申请日：2007-09-29

    申请人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    发明人： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

    IPC分类号： H01H51/22

    CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    摘要翻译： 包括靠近推进器组件的基底，推动器组件和屈肌组件的装置。 推动器组件包括冷热推杆。 冷热推杆的第一端锚固在基板上。 冷热推杆的第二端连接在一起并悬挂在基板上横向移位。 弯曲组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚固在基底上。 推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。 方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。