公开(公告)号：US09835641B2

公开(公告)日：2017-12-05

申请号：US14676330

申请日：2015-04-01

申请人： Panasonic Intellectual Property Management Co., Ltd.

发明人： Kensaku Yamamoto

IPC分类号： G01C19/56 ,  G01P3/02 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  G01P15/08

CPC分类号： G01P3/02 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0842

摘要： An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.

公开(公告)号：US20170299623A1

公开(公告)日：2017-10-19

申请号：US15512782

申请日：2016-07-05

申请人： Panasonic Intellectual Property Management Co., Ltd.

发明人： Hirotsugu SUZUKI ,  Yoichi NAKAYOSHI ,  Masaki NAKAMURA

IPC分类号： G01P15/03 ,  G01C19/5769 ,  G01C19/5747 ,  G01P3/02 ,  G01P15/08 ,  G01P15/18 ,  H03M1/12 ,  H03M1/08

CPC分类号： G01P15/034 ,  G01C19/5747 ,  G01C19/5769 ,  G01C19/5776 ,  G01P3/02 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/0842 ,  H03M1/089 ,  H03M1/12

摘要： An inertial force sensor includes: an acceleration detection element; a temperature sensor that detects an ambient temperature of the acceleration detection element; a bridge circuit that processes an output signal from the acceleration detection element; an AD converter that converts an analog signal output from the bridge circuit into a digital signal, and outputs the digital signal; a calculation circuit that performs calculation on the output signal from the AD converter; and a storage that stores correction data for correcting a variation in the output signal from the AD converter due to a temperature change. The correction data are coefficients of a formula expressed by a calibration curve that is a quadratic or higher-degree curve, and the storage stores, as the correction data, the coefficients of the calibration curve of each of a plurality of patterns that differ between a predetermined temperature or more and less than the predetermined temperature.

公开(公告)号：US20150355219A1

公开(公告)日：2015-12-10

申请号：US14589206

申请日：2015-01-05

申请人： SAMSUNG ELECTRO-MECHANICS CO., LTD.

发明人： Pil Joong KANG ,  Jung Won LEE ,  Hyun Kee LEE ,  Jong Hyeong SONG

IPC分类号： G01P15/12 ,  G01P15/093 ,  G01P15/125

CPC分类号： G01P15/123 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0292 ,  B81B2207/012 ,  B81C2201/019 ,  G01C19/5783 ,  G01P15/0802 ,  G01P15/093 ,  G01P15/125 ,  G01P2015/0842

摘要： Embodiments of the invention provide a multi-axis sensor, including a first sensor embedded in an embedded substrate to sense a position, and a second sensor formed on a lower cap substrate bonded on the embedded substrate by a wafer level package scheme to sense an inertial force.

摘要翻译： 本发明的实施例提供一种多轴传感器，其包括嵌入在嵌入式基板中以感测位置的第一传感器，以及通过晶片级封装方案形成在嵌入式基板上的下盖基板上的第二传感器，以感测惯性 力。

公开(公告)号：US09209319B2

公开(公告)日：2015-12-08

申请号：US13729311

申请日：2012-12-28

申请人： Dai Nippon Printing Co., Ltd.

发明人： Takamasa Takano

IPC分类号： H01L29/84 ,  H01L23/31 ,  H01L23/49 ,  H01L21/447 ,  G01P15/08 ,  G01P15/12 ,  H01L23/00 ,  H01L21/02 ,  B81B7/00

CPC分类号： H01L29/84 ,  B81B7/0025 ,  B81B7/0054 ,  B81B7/007 ,  B81B2201/0235 ,  B81B2207/096 ,  B81B2207/115 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0842 ,  H01L21/02 ,  H01L24/48 ,  H01L24/49 ,  H01L24/85 ,  H01L2224/04042 ,  H01L2224/05554 ,  H01L2224/05624 ,  H01L2224/48091 ,  H01L2224/48465 ,  H01L2224/48472 ,  H01L2224/48992 ,  H01L2224/48997 ,  H01L2224/49113 ,  H01L2224/49171 ,  H01L2224/8592 ,  H01L2224/92247 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01045 ,  H01L2924/01047 ,  H01L2924/0106 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/3511 ,  H01L2924/00 ,  H01L2224/45099

摘要： A method for manufacturing a sensor device is provided. The method prevents corrosion of metal electrodes of a sensor due to outside air with high humidity and preventing the occurrence of warpage of the sensor due to resin sealing of the sensor, thereby reducing the influence on sensor characteristics, and provides the sensor device. The method includes arranging a sensor on a substrate, the sensor having a fixed part, a movable part positioned inside the fixed part, a flexible part connecting the fixed part and the movable part, and a plurality of metal electrodes, electrically connecting the plurality of metal electrodes of the sensor and a plurality of terminals of the substrate with bonding wires, and covering portions of the plurality of metal electrodes of the sensor connected to the bonding wires with a resin so that a part of the bonding wires between the plurality of metal electrodes and the plurality of terminals is exposed.

摘要翻译： 提供一种用于制造传感器装置的方法。 该方法防止由于高湿度的外部空气导致的传感器的金属电极的腐蚀，并且防止由于传感器的树脂密封而导致传感器发生翘曲，从而减少对传感器特性的影响，并提供传感器装置。 该方法包括将传感器布置在基板上，传感器具有固定部分，位于固定部分内部的可移动部分，连接固定部分和可移动部分的柔性部分，以及多个金属电极，电连接多个 传感器的金属电极和具有接合线的基板的多个端子，并且用树脂覆盖连接到接合线的传感器的多个金属电极的部分，使得多个金属之间的接合线的一部分 电极和多个端子被暴露。

公开(公告)号：US09164119B2

公开(公告)日：2015-10-20

申请号：US13705459

申请日：2012-12-05

申请人： Panasonic Corporation

发明人： Kensaku Yamamoto

IPC分类号： G01C19/56 ,  G01P3/02 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  G01P15/08

CPC分类号： G01P3/02 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0842

摘要： An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.

摘要翻译： 角速度检测装置包括：外框，包括固定部分，连接到固定部分的外光束部分;由外框包围的感测部分，其间具有第一狭缝;以及连接外框和感测部分的接合部。 感测部分包括内梁部分，柔性部分和检测器。 内梁部分具有内部的中空区域，并且当从上方观察时为正方形。 柔性部分形成在内梁部分的中空区域中，并且连接到内梁部分的内边缘。 检测器设置在柔性部分中。 第一狭缝被形成为围绕除了接头之外的感测部分。

公开(公告)号：US08997570B2

公开(公告)日：2015-04-07

申请号：US13253398

申请日：2011-10-05

申请人： Shinji Maekawa

发明人： Shinji Maekawa

IPC分类号： G01P15/12 ,  G01P15/18 ,  B81B3/00 ,  G01P15/08

CPC分类号： G01P15/18 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2203/0109 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/0842

摘要： An acceleration sensor having a high impact resistance to prevent breakage under excessive acceleration, but can stably exert a sensing performance. The acceleration sensor is formed of an SOI substrate of a three-layered structure including a silicon layer (active layer silicon), a silicon oxide layer, and a silicon layer (substrate silicon). The acceleration sensor includes frame parts, a plurality of beam parts, the beam parts projecting inward from the frame part, and a weight part supported by the beam parts. A strain sensing part is provided on each of the beam parts. A width W of each of the beam parts, a length I of each of the beam parts, and an inner frame length L of the frame part satisfy the following relationships of Expressions (1) and (2). 2

摘要翻译： 具有高耐冲击性的加速度传感器，以防止在过度加速下的断裂，但可以稳定地施加感测性能。 加速度传感器由包括硅层（有源层硅），氧化硅层和硅层（衬底硅）的三层结构的SOI衬底形成。 加速度传感器包括框架部分，多个梁部分，从框架部分向内突出的梁部分和由梁部分支撑的重量部分。 在每个梁部分上设置应变传感部件。 每个光束部分的宽度W，每个光束部分的长度I和帧部分的内部帧长度L满足表达式（1）和（2）的以下关系。 2

公开(公告)号：US08739628B2

公开(公告)日：2014-06-03

申请号：US13165436

申请日：2011-06-21

申请人： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

发明人： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

IPC分类号： G01P15/08

CPC分类号： G01P15/125 ,  G01P15/09 ,  G01P15/123 ,  G01P2015/0842

摘要： An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.

摘要翻译： 惯性传感器包括板状基材层，质​​量体，支撑框架，从支撑框架沿质量体的中心方向延伸的限位挡块，以及检测位移部的位移的检测单元。 惯性传感器采用极限挡块限制质量体的向下位移，防止质量体的支撑部分损坏。

公开(公告)号：US20130139593A1

公开(公告)日：2013-06-06

申请号：US13480884

申请日：2012-05-25

申请人： Hsieh-Shen Hsieh ,  Wei-leun Fang

发明人： Hsieh-Shen Hsieh ,  Wei-leun Fang

IPC分类号： G01P15/00

CPC分类号： G01P15/09 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0842

摘要： An inertial sensor with stress isolation structure includes a substrate, a suspension bridge, a guard ring and an electromechanical conversion mechanism. The substrate has a housing trough and an annular wall surrounding the housing trough. The suspension bridge is located in the housing trough and connected to the annular wall. The guard ring is connected to the suspension bridge and suspended in the housing trough. The suspension bridge is located between the substrate and guard ring. The electromechanical conversion mechanism is connected to and surrounded by the guard ring. Through the guard ring, interferences of applied forces to the electromechanical conversion mechanism can be reduced, precision of the inertial sensor can be improved, and performance impact caused by succeeding element package process can also be reduced. Thus package, test and calibration processes can be simplified to lower production cost.

摘要翻译： 具有应力隔离结构的惯性传感器包括基板，吊桥，保护环和机电转换机构。 衬底具有壳体槽和围绕壳体槽的环形壁。 吊桥位于外壳槽中并与环形壁连接。 防护环连接到吊桥并悬挂在外壳槽中。 吊桥位于基板和防护环之间。 机电转换机构连接保护环并被保护环围绕。 通过防护环，可以降低对机电转换机构的施加力的干扰，可以提高惯性传感器的精度，并且还可以降低由元件封装过程引起的性能影响。 因此，可以简化封装，测试和校准过程，以降低生产成本。

公开(公告)号：US20130113056A1

公开(公告)日：2013-05-09

申请号：US13724586

申请日：2012-12-21

申请人： DAI NIPPON PRINTING CO., LTD.

发明人： Katsumi Hashimoto

IPC分类号： H01L29/84

CPC分类号： H01L29/84 ,  B81B7/0054 ,  B81B2201/0235 ,  B81C2203/0154 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0842

摘要： The present invention provides a dynamic quantity device which reduces stress received by a sensor due to resin packaging and reduces variation in sensor characteristics due to stress. The dynamic quantity sensor includes a semiconductor substrate including a fixing part and a flexible part and a movable part positioned on an interior side of the fixing part, and a cap component configured to cover the flexible part and the movable part, wherein the fixing part includes an interior frame configured to enclose the flexible part and the movable part and an exterior part positioned on a periphery of the interior frame, a slit configured to divide the interior frame and the exterior frame, and a linking part configured to link the interior frame and the exterior frame.

摘要翻译： 本发明提供了一种动态量装置，其减少由于树脂封装而导致的传感器所受的应​​力，并减少由于应力引起的传感器特性的变化。 动态量传感器包括：半导体衬底，包括固定部分和柔性部分;以及可移动部分，位于固定部分的内侧;以及帽部件，其构造成覆盖柔性部分和可移动部分，其中固定部分包括 内部框架，其构造成包围所述柔性部分和所述可动部分;以及外部部件，所述外部部件位于所述内部框架的周边上;狭缝，被配置为分隔所述内部框架和所述外部框架;以及连接部件，其构造成将所述内部框架和 外框。

公开(公告)号：US20120255358A1

公开(公告)日：2012-10-11

申请号：US13525635

申请日：2012-06-18

申请人： Takashi IMANAKA

发明人： Takashi IMANAKA

IPC分类号： G01P15/12

CPC分类号： G01P15/122 ,  B81B3/0086 ,  B81B2201/0235 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0842 ,  H01L29/84

摘要： An acceleration sensor includes a frame, a weight portion, an arm portion for connecting the frame and the weight portion, and a sensing portion for detecting a bend of the arm portion. The sensing portion includes a first electrode portion, a second electrode portion, and a strain resistor portion. The first electrode portion and the second electrode portion are provided on the weight portion. A first end of the strain resistor portion is connected to the first electrode portion, and a second end of the strain resistor portion is connected to the second electrode portion. The strain resistor portion is formed of a strain resistor film comprising a metal oxide. The strain resistor portion is formed in meander shape in the part which is nearer to the weight portion than the frame in the arm portion.

摘要翻译： 加速度传感器包括框架，配重部分，用于连接框架和配重部分的臂部分，以及用于检测臂部分的弯曲的感测部分。 感测部分包括第一电极部分，第二电极部分和应变电阻器部分。 第一电极部分和第二电极部分设置在重量部分上。 应变电阻部分的第一端连接到第一电极部分，并且应变电阻部分的第二端连接到第二电极部分。 应变电阻部由包含金属氧化物的应变电阻膜形成。 应变电阻部分在与臂部分中的框架相比更靠近配重部分的部分中以曲折形状形成。