公开(公告)号：US20240361708A1

公开(公告)日：2024-10-31

申请号：US18766165

申请日：2024-07-08

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chieh HSIEH ,  Tai-Yu CHEN ,  Cho-Ying LIN ,  Heng-Hsin LIU ,  Li-Jui CHEN ,  Shang-Chieh CHIEN

IPC分类号： G03F7/00 ,  G02B17/06 ,  H05G2/00

CPC分类号： G03F7/70925 ,  G02B17/0663 ,  G03F7/70033 ,  G03F7/70491 ,  G03F7/70808 ,  G03F7/70916 ,  H05G2/008

摘要： A lithography system is provided capable of deterring contaminants, such as tin debris from entering into the scanner. The lithography system in accordance with various embodiments of the present disclosure includes a processor, an extreme ultraviolet light source, a scanner, and a hollow connection member. The light source includes a droplet generator for generating a droplet, a collector for reflecting extreme ultraviolet light into an intermediate focus point, and a light generator for generating pre-pulse light and main pulse light. The droplet generates the extreme ultraviolet light in response to the droplet being illuminated with the pre-pulse light and the main pulse light. The scanner includes a wafer stage. The hollow connection member includes an inlet that is in fluid communication with an exhaust pump. The hollow connection member provides a hollow space in which the intermediate focus point is disposed. The hollow connection member is disposed between the extreme ultraviolet light source and the scanner.

公开(公告)号：US12085727B2

公开(公告)日：2024-09-10

申请号：US17813997

申请日：2022-07-21

申请人： DISCO CORPORATION

发明人： Nobuyuki Kimura

IPC分类号： G02B17/00 ,  G02B17/06 ,  G02B27/10 ,  G02B27/42

CPC分类号： G02B27/1086 ,  G02B17/0621 ,  G02B17/0636 ,  G02B17/0673 ,  G02B27/4244

摘要： A light irradiation apparatus that splits white light into light rays of a plurality of wavelengths to apply the light ray includes a white light source, a diffraction grating that splits white light emitted by the white light source into light rays of a plurality of wavelengths, and a light selector that selects a light ray of a specified wavelength from the light rays of the plurality of wavelengths split by the diffraction grating.

公开(公告)号：US20240291219A1

公开(公告)日：2024-08-29

申请号：US18656729

申请日：2024-05-07

申请人： Gigaphoton Inc. ,  Inter-University Research Institute Corporation, National Institutes of Natural Sciences

发明人： Yuki TAMARU ,  Taisuke MIURA ,  Ryo YASUHARA

IPC分类号： H01S3/00 ,  G02B17/02 ,  G02B17/06 ,  G02B27/28 ,  G02F1/01 ,  G02F1/09 ,  G03F7/00 ,  G03F7/20 ,  H01S3/225

CPC分类号： H01S3/0057 ,  G02B17/023 ,  G02B17/0663 ,  G02B27/288 ,  G02F1/0136 ,  G02F1/092 ,  G03F7/2008 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70566 ,  H01S3/225

摘要： An optical pulse stretcher that stretches a pulse width of a pulse laser beam includes a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered, a delay optical system including a plurality of mirrors through which the pulse laser beam reflected by or transmitted through the polarizer is propagated; and a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on an optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.

公开(公告)号：US12066609B2

公开(公告)日：2024-08-20

申请号：US16454988

申请日：2019-06-27

申请人： The Charles Stark Draper Laboratory, Inc.

发明人： Matthew A. Sinclair ,  Juha-Pekka Laine

IPC分类号： G02B17/08 ,  G02B17/06 ,  G02B27/14

CPC分类号： G02B17/0888 ,  G02B17/061 ,  G02B17/0808 ,  G02B17/0856 ,  G02B27/141 ,  G02B27/142

摘要： A multi-band/multi-polarization reflective or catadioptric optical system yields differing effective focal lengths (EFLs) per band/polarization. This approach could be used to create an imaging system, for example. In such case, a sensor (imager, spectrometer, diode, etc.) is located at the one or more focal planes. On the other hand, it could also be used to create a projecting system or hybrid projecting and imaging system by locating an emitter such as an LED, laser, etc.) at the image or focal plane. The system employs polarizers and/or dichroic coatings nano patterns to create different focal lengths and/or fields of view using the same mirrors and/or lenses by, for example, including at least one dichroic coating optically in front of at least one additional mirror to separately reflect the different bands or polarizations.

公开(公告)号：US12035453B1

公开(公告)日：2024-07-09

申请号：US18382646

申请日：2023-10-23

申请人： L2X-LABS LTD

发明人： Evgeny Papeer ,  Yechiel Refael Frank ,  Noa Kliss ,  Yotam Mazuz-Harpaz

IPC分类号： H05G2/00 ,  G02B17/06

CPC分类号： H05G2/008 ,  G02B17/061

摘要： A Short-Wave Radiation (SWR) system comprising: (i) a light assembly, comprising at least one light source and being configured to: (a) illuminate a front side of an ionization target with first illumination; and (b) illuminate a back side of the ionization target with second illumination; (ii) a controller, configured to control the light assembly for illuminating the ionization target from the front side of the ionization target using the first illumination and at least partly concurrently illuminating the ionization target from the back side of the ionization target using the second illumination; and (iii) an optical assembly configured to collect SWR emitted from the front side of the ionization target and to direct the collected SWR toward a designated beam direction of the SWR system, wherein the SWR emitted from the front side results from a target illumination scheme that comprises at least the first illumination and the second illumination.

公开(公告)号：US20240210681A1

公开(公告)日：2024-06-27

申请号：US18393384

申请日：2023-12-21

申请人： Nippon Seiki Co.,Ltd.

发明人： Takeru Kawai

IPC分类号： G02B27/01 ,  G02B17/06

CPC分类号： G02B27/0101 ,  G02B17/06

摘要： A head-up display device includes: a light emission surface that displays an image and emits display light corresponding to the displayed image; and a concave mirror that reflects the display light toward the windshield, and has an index S, represented in expression S=10.7×Mh+(−8.32)×Mv+(−0.0187)×Wh+(−0.000995)×Wv+0.345×Wi+(−3.52)×Ci+3.90×Dv, which is set to 90 or greater, where Mh and Mv respectively are magnifications in the horizontal and vertical directions of the virtual image with respect to the image in the optical axis position, Wh and Wv respectively are curvature radiuses in the horizontal and vertical direction of the position in which the optical axis reaches in the windshield, Wi is an incident angle of the optical axis into the windshield, Ci is an incident angle of the optical axis into the concave mirror, and Dv is an angle formed between a normal line of the light emission surface and the optical axis of the display light.

公开(公告)号：US20240184022A1

公开(公告)日：2024-06-06

申请号：US18497851

申请日：2023-10-30

申请人： Cognex Corporation

发明人： Thomas Ruhnau ,  Khaled Aljasem ,  Esther Oteo Lozano ,  John F. Filhaber

IPC分类号： G02B5/02 ,  G01N15/075 ,  G01N21/31 ,  G01N21/64 ,  G01N21/95 ,  G01N33/00 ,  G02B17/06

CPC分类号： G02B5/0215 ,  G01N15/075 ,  G01N21/31 ,  G01N21/6489 ,  G01N21/95 ,  G01N33/0027 ,  G02B17/0668

摘要： An optical system includes a light source operable to produce input light, a linear diffuser, and a reflector. The light source, linear diffuser, and reflector are arranged and configured to direct the input light from the light source to the linear diffuser, project diffused light from the linear diffuser to the reflector, reflect the diffused light from the reflector to the linear diffuser as reflected light, and modify the reflected light at the linear diffuser to output a planar fan of diffused light, so that an illumination line forms at an intersection of the planar fan and an object. A system includes an optical sub-system configured to generate a planar fan of diffused light by passing input light through a single linear diffuser twice, and a control sub-system configured to operate the optical sub-system to control use of the planar fan of diffused light.

公开(公告)号：US20240163405A1

公开(公告)日：2024-05-16

申请号：US18419117

申请日：2024-01-22

申请人： Ecolink Intelligent Technology, Inc.

发明人： Brandon Gruber

IPC分类号： H04N7/18 ,  G02B17/06 ,  G06F3/16 ,  G06N3/008 ,  G06N5/02

CPC分类号： H04N7/183 ,  G02B17/06 ,  G06F3/167 ,  G06N3/008 ,  G06N5/02

摘要： Aspects of the present invention are directed towards a more natural way to interact with an intelligent personal assistant. An intelligent personal assistant comprises a camera that provides images of an area surrounding the assistant. The assistant monitors images provided by the camera to determine when a user is addressing the assistant. When voice input is received after determining that a user is addressing the assistant, the assistant understands that the voice input is intended for the assistant, and acts on the voice input to respond to the user.

公开(公告)号：US20240159988A1

公开(公告)日：2024-05-16

申请号：US18418734

申请日：2024-01-22

申请人： Carl Zeiss SMT GmbH

发明人： Rodolfo Guglielmi Rabe

IPC分类号： G02B7/18 ,  G02B17/06 ,  G02B26/08 ,  G02B26/10 ,  G03F7/00

CPC分类号： G02B7/181 ,  G03F7/70033 ,  G03F7/70141 ,  G03F7/7015 ,  G03F7/702 ,  G03F7/70258 ,  G03F7/70316 ,  G03F7/70833 ,  G03F7/7095 ,  G02B17/06 ,  G02B26/0833 ,  G02B26/101

摘要： A connection arrangement for connecting a first component and a second component of an imaging device for micro lithography, such as for using light in the extreme UV range (EUV), includes a connection unit having a first contact portion, a second contact portion and a coupling portion.

公开(公告)号：US20240151955A1

公开(公告)日：2024-05-09

申请号：US18279507

申请日：2022-03-25

申请人： KOITO MANUFACTURING CO., LTD.

发明人： Kazuomi MURAKAMI ,  Takuo SUGIYAMA

IPC分类号： G02B17/06 ,  B60K35/23 ,  G02B27/01

CPC分类号： G02B17/0621 ,  B60K35/23 ,  G02B27/0101

摘要： An image projection device that can effectively use a space to achieve space saving even when projection light from an image projecting unit is reflected by a plurality of freeform curved mirrors to reach a viewpoint is provided. The image projection device includes: an image projecting unit emitting projection light including an image; a first freeform curved mirror reflecting the projection light incident from the image projecting unit; and a second freeform curved mirror reflecting the projection light incident from the first freeform curved mirror and causing the projection light to reach a viewpoint. Only one of an x-axis component and a y-axis component of the projection light reflected by the first freeform curved mirror forms an image between the first freeform curved mirror and the second freeform curved mirror.