Method of fabricating Cu interconnects with reduced Cu contamination
    99.
    发明授权
    Method of fabricating Cu interconnects with reduced Cu contamination 失效
    制造铜互连的方法,减少铜污染

    公开(公告)号:US06380082B2

    公开(公告)日:2002-04-30

    申请号:US09250631

    申请日:1999-02-16

    IPC分类号: H01L214763

    摘要: An improved method of preventing copper poisoning in the fabrication of metal interconnects on a semiconductor substrate comprises sequential formation of a copper layer, a first stop layer, a first inter-metal dielectric layer, a second stop layer, and a second inter-metal dielectric layer over the substrate. The second inter-metal dielectric layer and the second stop layer are defined to form an opening. A conformal first glue/barrier layer is formed over the substrate. The first glue/barrier layer and the first inter-metal dielectric layer are patterned to form a via hole below the opening until the first stop layer is exposed. Spacers are formed on sidewalls of the opening and the via hole below the opening. The first stop layer at bottom of the via hole is removed to expose the copper layer.

    摘要翻译: 在半导体衬底的金属互连制造中防止铜中毒的改进方法包括顺序地形成铜层,第一阻挡层,第一金属间介电层,第二阻挡层和第二金属间电介质 层。 第二金属间介电层和第二阻挡层被限定为形成开口。 在衬底上形成共形的第一胶/阻挡层。 将第一胶/阻挡层和第一金属间介电层图案化以在开口下方形成通孔,直到暴露第一​​停止层。 间隔件形成在开口的侧壁和开口下方的通孔中。 去除通孔底部的第一停止层以露出铜层。

    Electronic apparatus and cover mechanism
    100.
    发明授权
    Electronic apparatus and cover mechanism 失效
    电子仪器和盖机构

    公开(公告)号:US08367926B2

    公开(公告)日:2013-02-05

    申请号:US12944654

    申请日:2010-11-11

    CPC分类号: H01R13/5213 H01R2201/06

    摘要: An electronic apparatus includes an enclosure defining a connector port, and a cover mechanism. The cover mechanism includes a bracket mounted to the enclosure, a cover rotatably mounted to the bracket to cover or uncover the connector port. The cover includes an elastic lock. When the cover is rotated to cover the connector port, the elastic lock is engaged with a sidewall of the connector port.

    摘要翻译: 电子设备包括限定连接器端口的外壳和盖机构。 盖机构包括安装到外壳的支架,可旋转地安装到支架以覆盖或露出连接器端口的盖。 盖子包括弹性锁。 当盖旋转以覆盖连接器端口时,弹性锁与连接器端口的侧壁接合。