公开(公告)号：US12029044B2

公开(公告)日：2024-07-02

申请号：US18127651

申请日：2023-03-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Yu-Ping Wang ,  Chen-Yi Weng ,  Chin-Yang Hsieh ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-An Shih ,  I-Ming Tseng ,  Jing-Yin Jhang ,  Chien-Ting Lin

IPC: H10B61/00 ,  G11C11/16 ,  H10N50/01 ,  H10N50/80

CPC classification number: H10B61/00 ,  G11C11/161 ,  H10B61/10 ,  H10N50/01 ,  H10N50/80

Abstract: A semiconductor structure includes a substrate having a memory device region and a logic device region, a first dielectric layer on the substrate, a plurality of memory stack structures on the first dielectric layer on the memory device region, an insulating layer conformally covering the memory stack structures and the first dielectric layer, a second dielectric layer on the insulating layer and completely filling the spaces between the memory stack structures, and a first interconnecting structure formed in the second dielectric layer on the logic device region. A top surface of the first interconnecting structure is flush with a top surface of the second dielectric layer and higher than top surfaces of the memory stack structures.

公开(公告)号：US11968911B2

公开(公告)日：2024-04-23

申请号：US17518571

申请日：2021-11-03

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hung-Chan Lin ,  Yu-Ping Wang ,  Chien-Ting Lin

IPC: H10N52/01 ,  H10B61/00 ,  H10N52/00 ,  H10N52/80

CPC classification number: H10N52/01 ,  H10B61/00 ,  H10N52/00 ,  H10N52/80

Abstract: A method for fabricating a semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) stack on a substrate; forming a first spin orbit torque (SOT) layer on the MTJ stack; forming a first hard mask on the first SOT layer; and using a second hard mask to pattern the first hard mask, the first SOT layer, and the MTJ stack to form a MTJ.

公开(公告)号：US20230326882A1

公开(公告)日：2023-10-12

申请号：US17735099

申请日：2022-05-02

Applicant: United Microelectronics Corp.

Inventor： Hui-Lung Chou ,  Ching-Li Yang ,  Chih-Sheng Chang ,  Chien-Ting Lin

IPC: H01L23/00 ,  H01L23/58

CPC classification number: H01L23/564 ,  H01L23/562 ,  H01L23/585

Abstract: A semiconductor structure and its manufacturing method are provided. The semiconductor structure includes a substrate, a first dielectric layer on the substrate, a second dielectric layer on the first dielectric layer, a seal ring structure including first and second interconnect structures, and a passivation layer on the seal ring structure and the second dielectric layer. The first interconnect structure is located in the first dielectric layer. The second interconnect structure is located in the second dielectric layer and connected to the first interconnect structure. The passivation layer has a spacer portion covering a sidewall of the second dielectric layer and a portion of the first dielectric layer. A ditch exists in the passivation layer and the first dielectric layer. The spacer portion is located between the ditch and the seal ring structure. The semiconductor structure is able to reduce time and power of an etching process for forming the ditch.

公开(公告)号：US20230238043A1

公开(公告)日：2023-07-27

申请号：US18127651

申请日：2023-03-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Yu-Ping Wang ,  Chen-Yi Weng ,  Chin-Yang Hsieh ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-An Shih ,  I-Ming Tseng ,  Jing-Yin Jhang ,  Chien-Ting Lin

IPC: G11C11/16 ,  H10B61/00 ,  H10N50/01 ,  H10N50/80

CPC classification number: G11C11/161 ,  H10B61/00 ,  H10B61/10 ,  H10N50/01 ,  H10N50/80

Abstract: A semiconductor structure includes a substrate having a memory device region and a logic device region, a first dielectric layer on the substrate, a plurality of memory stack structures on the first dielectric layer on the memory device region, an insulating layer conformally covering the memory stack structures and the first dielectric layer, a second dielectric layer on the insulating layer and completely filling the spaces between the memory stack structures, and a first interconnecting structure formed in the second dielectric layer on the logic device region. A top surface of the first interconnecting structure is flush with a top surface of the second dielectric layer and higher than top surfaces of the memory stack structures.

公开(公告)号：US20230197523A1

公开(公告)日：2023-06-22

申请号：US17586699

申请日：2022-01-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Hsu ,  Ssu-I Fu ,  Yu-Hsiang Lin ,  Chien-Ting Lin ,  Chun-Ya Chiu ,  Chia-Jung Hsu ,  Chin-Hung Chen

IPC: H01L21/8234 ,  H01L27/088 ,  H01L23/60

CPC classification number: H01L21/823456 ,  H01L27/0886 ,  H01L23/60 ,  H01L21/823431

Abstract: A method for fabricating a semiconductor device includes first providing a substrate having a high-voltage (HV) region, a medium-voltage (MV) region, and a low-voltage (LV) region, forming a HV device on the HV region, and forming a LV device on the LV region. Preferably, the HV device includes a first base on the substrate, a first gate dielectric layer on the first base, and a first gate electrode on the first gate dielectric layer. The LV device includes a fin-shaped structure on the substrate, and a second gate electrode on the fin-shaped structure, in which a top surface of the first gate dielectric layer is even with a top surface of the fin-shaped structure.

公开(公告)号：US11646069B2

公开(公告)日：2023-05-09

申请号：US17460348

申请日：2021-08-30

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Yu-Ping Wang ,  Chen-Yi Weng ,  Chin-Yang Hsieh ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-An Shih ,  I-Ming Tseng ,  Jing-Yin Jhang ,  Chien-Ting Lin

IPC: H10B61/00 ,  G11C11/16 ,  H01L27/22 ,  H01L43/02 ,  H01L43/12

CPC classification number: G11C11/161 ,  H01L27/222 ,  H01L27/224 ,  H01L43/02 ,  H01L43/12

Abstract: A method for forming a semiconductor structure is disclosed. A substrate having a logic device region and a memory device region is provided. A first dielectric layer is formed on the substrate. Plural memory stack structures are formed on the first dielectric layer on the memory device region. An insulating layer is formed and conformally covers the memory stack structures and the first dielectric layer. An etching back process is performed to remove a portion of the insulating layer without exposing any portion of the memory stack structures. After the etching back process, a second dielectric layer is formed on the insulating layer and completely fills the spaces between the memory stack structures.

公开(公告)号：US11139011B2

公开(公告)日：2021-10-05

申请号：US16556170

申请日：2019-08-29

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Yu-Ping Wang ,  Chen-Yi Weng ,  Chin-Yang Hsieh ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-An Shih ,  I-Ming Tseng ,  Jing-Yin Jhang ,  Chien-Ting Lin

IPC: G11C11/16 ,  H01L27/22 ,  H01L43/02 ,  H01L43/12

Abstract: A method for forming a semiconductor structure is disclosed. A substrate having a logic device region and a memory device region is provided. A first dielectric layer is formed on the substrate. Plural memory stack structures are formed on the first dielectric layer on the memory device region. An insulating layer is formed and conformally covers the memory stack structures and the first dielectric layer. An etching back process is performed to remove a portion of the insulating layer without exposing any portion of the memory stack structures. After the etching back process, a second dielectric layer is formed on the insulating layer and completely fills the spaces between the memory stack structures.

公开(公告)号：US10910553B1

公开(公告)日：2021-02-02

申请号：US16531129

申请日：2019-08-05

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Chen-Yi Weng ,  Chin-Yang Hsieh ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-An Shih ,  Jing-Yin Jhang ,  I-Ming Tseng ,  Yu-Ping Wang ,  Chien-Ting Lin ,  Kun-Chen Ho ,  Yi-Syun Chou ,  Chang-Min Li ,  Yi-Wei Tseng ,  Yu-Tsung Lai ,  Jun Xie

IPC: H01L43/00 ,  H01L43/02 ,  H01L43/12 ,  H01L27/22

Abstract: A magnetoresistive random access memory (MRAM), including a bottom electrode layer on a substrate, a magnetic tunnel junction stack on the bottom electrode layer, and a top electrode layer on the magnetic tunnel junction stack, wherein the material of top electrode layer is titanium nitride, and the percentage of nitrogen in the titanium nitride gradually decreases from the top surface of top electrode layer to the bottom surface of top electrode layer.

公开(公告)号：US10178309B2

公开(公告)日：2019-01-08

申请号：US16001367

申请日：2018-06-06

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chien-Ting Lin

IPC: H01L29/66 ,  H01L29/49 ,  H04N5/232 ,  H04N5/225 ,  H01L29/06 ,  H01L21/02 ,  H01L21/283 ,  H01L21/3213 ,  H01L21/764 ,  H01L29/78 ,  H01L29/423 ,  G02B26/10

Abstract: A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises a substrate, a gate structure, a first dielectric layer and two air gaps. The gate structure is disposed on the substrate. The gate structure has two opposite side walls. The gate structure comprises a U-shaped structure and a metal gate electrode. The U-shaped structure defines an opening toward upside, and comprises a work function layer. The metal gate electrode is disposed in the opening defined by the U-shaped structure. A level of a top surface of the U-shaped structure is lower than a level of a top surface of the metal gate electrode. The first dielectric layer is disposed on the substrate adjacent to the gate structure. Each of the two air gaps is formed between the first dielectric layer and one of the two opposite side walls of the gate structure.

公开(公告)号：US09831133B2

公开(公告)日：2017-11-28

申请号：US15352605

申请日：2016-11-16

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chao-Hung Lin ,  Chih-Kai Hsu ,  Li-Wei Feng ,  Shih-Hung Tsai ,  Chien-Ting Lin ,  Jyh-Shyang Jenq ,  Ching-Wen Hung ,  Jia-Rong Wu ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-Kuan Wu ,  Chih-Sen Huang ,  Yi-Wei Chen

IPC: H01L21/00 ,  H01L21/8238 ,  H01L27/092 ,  H01L29/51 ,  H01L21/28

CPC classification number: H01L21/823842 ,  H01L21/28088 ,  H01L27/092 ,  H01L27/0922 ,  H01L29/511 ,  H01L29/517

Abstract: A method for manufacturing semiconductor devices having metal gate includes follow steps. A substrate including a plurality of isolation structures is provided. A first nFET device and a second nFET device are formed on the substrate. The first nFET device includes a first gate trench and the second nFET includes a second gate trench. A third bottom barrier layer is formed in the first gate trench and a third p-work function metal layer is formed in the second gate trench, simultaneously. The third bottom barrier layer and the third p-work function metal layer include a same material. An n-work function metal layer is formed in the first gate trench and the second gate trench. The n-work function metal layer in the first gate trench directly contacts the third bottom barrier layer, and the n-work function metal layer in the second gate trench directly contacts the third p-work function metal layer.