公开(公告)号：US06548426B1

公开(公告)日：2003-04-15

申请号：US09625355

申请日：2000-07-25

申请人： Setsu Suzuki ,  Kazuo Maeda

发明人： Setsu Suzuki ,  Kazuo Maeda

IPC分类号： H02L2131

CPC分类号： H01L21/02164 ,  H01L21/02271 ,  H01L21/02337 ,  H01L21/3105 ,  H01L21/31612

摘要： There is provided a method for improving film quality of an insulating film, which includes the steps of forming a silicon oxide film on a substrate, and heating the silicon oxide film by contacting an exposed surface of the silicon oxide film with a steam-containing atmosphere after the silicon oxide film is formed.

公开(公告)号：US06504154B2

公开(公告)日：2003-01-07

申请号：US09783994

申请日：2001-02-16

申请人： Junji Iida ,  Akira Terashima ,  Kazuo Maeda ,  Shintaro Ishikawa ,  Shinji Yamauchi

发明人： Junji Iida ,  Akira Terashima ,  Kazuo Maeda ,  Shintaro Ishikawa ,  Shinji Yamauchi

IPC分类号： G01N2135

CPC分类号： G01N21/3563 ,  G01N33/025

摘要： A non-destructive sugar content measuring apparatus having a plurality of trays on which vegetables and fruits are to be placed, a transport device for successively delivering the trays at appropriate intervals, and first, second and third measuring sections provided in the course of a transport path and at which laser beams having wavelengths &lgr;1, &lgr;2 and &lgr;3 are respectively made incident on each vegetable or fruit and the amount of light of each laser beam emergent from the vegetable or fruit is measured with a detector provided at each measuring section and the absorbance of each laser beam is determined from the amount of incident light made incident on the vegetable or fruit and the amount of detected light which has been measured with the detector, to measure the sugar content of the vegetables and fruits on the basis of each absorbance.

摘要翻译： 一种无损糖测量装置，具有多个托盘，蔬菜和水果放置在其上，用于以适当的间隔连续输送托盘的运送装置以及在运输过程中设置的第一，第二和第三测量部分 路径，并且具有波长lambd1，lambd2和lambd3的激光束分别入射到每个蔬菜或水果上，并且用在每个测量部分提供的检测器测量从蔬菜或水果出射的每个激光束的光量，并且吸光度 根据入射到植物或果实上的入射光量和用检测器测量的检测光的量来确定每个激光束，以根据每个吸光度测量蔬菜和水果的糖含量。

公开(公告)号：US06472818B1

公开(公告)日：2002-10-29

申请号：US09615735

申请日：2000-07-13

申请人： Taku Ikeda ,  Kazuo Maeda

发明人： Taku Ikeda ,  Kazuo Maeda

IPC分类号： H01K154

CPC分类号： H01K1/54

摘要： Providing a light bulb having a long life by preventing filament coil breakage. A glass bulb (1) has a sealing portion (4) at one end thereof and contains a filament coil (5). The filament coil (5) is suspended between lead-in wires (7, 8) extended externally of the sealing portion (4), with its opposite ends connected to respective one ends of the wires. The lead-in wires (7, 8) are supported by a stem (6) disposed between the sealing portion (4) and the filament coil (5). A getter (9) is disposed between the sealing portion (4) and the stem (6).

摘要翻译： 通过防止灯丝线圈断裂，提供寿命长的灯泡。 玻璃灯泡（1）在其一端具有密封部分（4）并且包含灯丝线圈（5）。 灯丝线圈（5）悬挂在从密封部分（4）的外部延伸的引入线（7,8）之间，其相对端连接到电线的相应一端。 导线（7,8）由设置在密封部分（4）和灯丝线圈（5）之间的杆（6）支撑。 吸气剂（9）设置在密封部分（4）和杆（6）之间。

公开(公告)号：US06281113B1

公开(公告)日：2001-08-28

申请号：US09492528

申请日：2000-01-27

申请人： Kazuo Maeda

发明人： Kazuo Maeda

IPC分类号： H01L214763

CPC分类号： H01L21/02126 ,  H01L21/02129 ,  H01L21/02131 ,  H01L21/02203 ,  H01L21/02211 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/02304 ,  H01L21/0234 ,  H01L21/02362 ,  H01L21/31695 ,  H01L21/76801 ,  H01L21/7682 ,  H01L21/76825 ,  H01L21/76826 ,  H01L21/76831 ,  H01L2221/1047

摘要： A method for forming an interlayer insulating film is disclosed. This method includes the steps of: forming a first insulating film on a substrate, the film containing at least one of H2O, C and a hydrocarbon; forming pores in the first insulating film by heat treatment of the first insulating film to discharge the H2O, C or hydrocarbon therefrom; and forming a second insulating film on the porous first insulating film.

摘要翻译： 公开了一种用于形成层间绝缘膜的方法。 该方法包括以下步骤：在衬底上形成第一绝缘膜，所述膜含有H 2 O，C和烃中的至少一种; 通过第一绝缘膜的热处理在第一绝缘膜中形成孔，以从其中排出H 2 O，C或烃; 以及在所述多孔第一绝缘膜上形成第二绝缘膜。

公开(公告)号：US6133162A

公开(公告)日：2000-10-17

申请号：US897439

申请日：1997-07-21

申请人： Setsu Suzuki ,  Junichi Aoki ,  Kazuo Maeda

发明人： Setsu Suzuki ,  Junichi Aoki ,  Kazuo Maeda

IPC分类号： H01L21/302 ,  H01L21/306 ,  H01L21/316 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/02068 ,  H01L21/02164 ,  H01L21/02271 ,  H01L21/02301 ,  H01L21/02304 ,  H01L21/02315 ,  H01L21/31612

摘要： There is provided a film forming pre-treatment method used when silicon containing insulating film, etc. are to be formed by virtue of thermal CVD method on a substrate 101 on which interconnection layers, etc. are formed. Before an insulating film is deposited on the substrate 101, gaseous H.sub.2 O is plasmanized and then a surface of the substrate 101 is exposed to such plasmanized H.sub.2 O.

摘要翻译： 提供了在形成有互连层等的基板101上通过热CVD法形成含硅绝缘膜等时使用的成膜预处理方法。 在绝缘膜沉积在衬底101上之前，将气态H 2 O质子化，然后将衬底101的表面暴露于这种质子化的H 2 O.

公开(公告)号：US6110814A

公开(公告)日：2000-08-29

申请号：US330052

申请日：1999-06-11

申请人： Noboru Tokumasu ,  Kazuo Maeda

发明人： Noboru Tokumasu ,  Kazuo Maeda

IPC分类号： H01L21/31 ,  C23C16/40 ,  C23C16/56 ,  H01L21/3105 ,  H01L21/316 ,  H01L21/768 ,  H01L21/4763

CPC分类号： H01L21/76819 ,  C23C16/401 ,  C23C16/56 ,  H01L21/31051

摘要： The present invention relates to a film forming method for forming a planarized interlayer insulating film to cover wiring layers, etc. of a semiconductor integrated circuit device. The method includes the steps of forming on a substrate 206, a phosphorus-containing insulating film 45a containing P.sub.2 O.sub.3 by using a film forming gas in which an oxidizing. gas is added into a gas mixture including a phosphorus-containing compound, which has III valence phosphorus and in which oxygen is bonded to at least one bond of the III valence phosphorus, and silicon-containing compound, or by using the film forming gas from which the oxidizing gas removed, heating the phosphorus-containing insulating film 45a while applying acceleration to the insulating film 45a to fluidize the insulating film and thus planarize a surface of the insulating film 45b while the insulating film 45a has a predetermined viscosity, and heating further the insulating film 45b after the surface of the insulating film 45b has been planarized, to sublimate P.sub.2 O.sub.3 in the insulating film 45b and thus solidify the insulating film 45b.

摘要翻译： 本发明涉及一种用于形成半导体集成电路器件的布线层等的平坦化层间绝缘膜的成膜方法。 该方法包括以下步骤：通过使用其中进行氧化的成膜气体，在基板206上形成含有P 2 O 3的含磷绝缘膜45a。 将气体加入到含有III价态的磷的含磷化合物的气体混合物中，其中氧与III价态的磷的至少一个键结合，并且含硅化合物，或者通过使用成膜气体从 除去氧化气体，同时加热含磷绝缘膜45a，同时对绝缘膜45a施加加速度，使绝缘膜流化，从而使绝缘膜45b的表面平坦化，同时绝缘膜45a具有预定的粘度，并进一步加热 绝缘膜45b的表面之后的绝缘膜45b被平坦化，以使绝缘膜45b中的P2O3升华，从而固化绝缘膜45b。

公开(公告)号：US5915200A

公开(公告)日：1999-06-22

申请号：US842425

申请日：1997-04-24

申请人： Noboru Tokumasu ,  Kazuo Maeda

发明人： Noboru Tokumasu ,  Kazuo Maeda

IPC分类号： H01L21/768 ,  C23C16/40 ,  H01L21/316 ,  H01L23/522 ,  H01L21/443

CPC分类号： H01L21/02129 ,  C23C16/401 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/02337 ,  H01L21/31625

摘要： A film forming method is provided for forming a planarized interlayer insulating film for covering interconnection layers, etc. of a semiconductor integrated circuit device. While supplying a reaction gas including a phosphorus containing compound which has III valence phosphorus and at least one bond of phosphorus to oxygen, a silicon containing insulating film including P.sub.2 O.sub.3 is formed on a deposition substrate, thereby greatly reducing fluidization temperature for planarization.

摘要翻译： 提供一种成膜方法，用于形成用于覆盖半导体集成电路器件的互连层等的平面化层间绝缘膜。 在将含有III价磷和至少一个磷键的含磷化合物的反应气体供给到氧的同时，在沉积基板上形成包含P 2 O 3的含硅绝缘膜，从而大大降低了用于平坦化的流化温度。

公开(公告)号：US5844678A

公开(公告)日：1998-12-01

申请号：US942555

申请日：1997-10-01

申请人： Masahiro Ito ,  Junji Iida ,  Akira Terashima ,  Kazuo Maeda ,  Shuji Suzuki ,  Takeo Ide

发明人： Masahiro Ito ,  Junji Iida ,  Akira Terashima ,  Kazuo Maeda ,  Shuji Suzuki ,  Takeo Ide

IPC分类号： G01N21/01 ,  G01N21/35 ,  G01N33/02

CPC分类号： G01N33/025 ,  G01N21/01 ,  G01N21/3563 ,  G01N21/359 ,  G01N2021/151 ,  G01N2021/152 ,  Y10S209/912

摘要： A non-destructive taste characteristics measuring apparatus comprising trays and a measuring section provided in the course of a transport path and at which light is made incident on a vegetable or fruit to measure its taste characteristics, wherein the trays are each provided with at least two tray-side light passages one opening ends of which are so made as to come in contact with the vegetable or fruit and the other ends of which stand open outward at the bottom of the tray, and the measuring section has at least two measurement-side light passages one opening ends of which are positionally adjustable to the opening ends of the tray-side light passages at its part facing the bottom of said tray, and is provided with i) a means for making light incident on the vegetable or fruit through one of the measurement-side light passages and one of the tray-side light passages and ii) a detector which the light emergent from the vegetable or fruit enters through the other tray-side light passage and the other measurement-side light passage. The apparatus enables continuous measurement of taste characteristics such as sugar content and ripeness of vegetables and fruits at a high speed and a high precision without complicating the structure.

公开(公告)号：US5726750A

公开(公告)日：1998-03-10

申请号：US668337

申请日：1996-06-25

申请人： Masahiro Ito ,  Junji Iida ,  Akira Terashima ,  Kazuo Maeda ,  Shuji Suzuki ,  Takeo Ide ,  Toshiki Kishimoto

发明人： Masahiro Ito ,  Junji Iida ,  Akira Terashima ,  Kazuo Maeda ,  Shuji Suzuki ,  Takeo Ide ,  Toshiki Kishimoto

IPC分类号： G01N21/35 ,  G01N21/59 ,  G01N33/02 ,  G01N21/01

CPC分类号： G01N33/025 ,  G01N21/3563 ,  G01N21/359 ,  G01N21/59

摘要： A non-destructive taste characteristics measuring apparatus comprising trays and a measuring section provided in the course of a transport path and at which light is made incident on a vegetable or fruit to measure its taste characteristics, wherein the trays are each provided with at least two tray-side light passages one opening ends of which are so made as to come in contact with the vegetable or fruit and the other ends of which stand open outward at the bottom of the tray, and the measuring section has at least two measurement-side light passages one opening ends of which are positionally adjustable to the opening ends of the tray-side light passages at its part facing the bottom of said tray, and is provided with i) a means for making light incident on the vegetable or fruit through one of the measurement-side light passages and one of the tray-side light passages and ii) a detector which the light emergent from the vegetable or fruit enters through the other tray-side light passage and the other measurement-side light passage. The apparatus enables continuous measurement of taste characteristics such as sugar content and ripeness of vegetables and fruits at a high speed and a high precision without complicating the structure.

摘要翻译： 一种非破坏性的味道特征测量装置，包括托盘和设置在运输路径的过程中并且在其上入射到蔬菜或水果上的光以测量其味道特征的测量部分，其中托盘分别设置有至少两个 托盘侧光通道，其一端的开口端与植物或水果接触，其另一端在托盘的底部向外敞开，测量部分具有至少两个测量侧 光通道，其一个开口端在其面向所述托盘的底部的部分处位于可调节到托盘侧光通道的开口端，并且设置有i）用于通过一个入射到蔬菜或水果上的光 的测量侧光通道和托盘侧光通道中的一个，以及ii）来自蔬菜或水果的光从另一个托盘侧光通道进入的检测器 年龄和其他测量侧光通道。 该装置能够以高速和高精度连续测量蔬菜和水果的味道特征，如糖含量和成熟度，而不会使结构复杂化。

公开(公告)号：US5475873A

公开(公告)日：1995-12-12

申请号：US24304

申请日：1993-03-01

申请人： Yoshihiro Konishi ,  Masami Ohsaki ,  Kazuo Maeda

发明人： Yoshihiro Konishi ,  Masami Ohsaki ,  Kazuo Maeda

IPC分类号： H04B1/04 ,  H03G3/30 ,  H01Q11/12

CPC分类号： H03G3/3042

摘要： To prevent variation of a transmission band characteristic which is caused by variation of operational conditions (e.g., temperature in the rectification feedback amplification) in a system with large extraband attenuation for sharply cutting off the transmission band in each channel of the communication system including plural narrow band channels allotted close to each other, rectification feedback is effected through through an adaptive filter. A band characteristic of the adaptive filter is varied in response to the variation of operational conditions including temperature, while data processing is rapidly effected through digital signal processing. Consequently, even if the communications in each channels are intermittently repeated, each time the communication is reopened, the desired transmission band characteristic can be instantly fixed, so as to prevent the disturbance of stable operation by adjudicating the interference through data correlation.

摘要翻译： 为了防止在具有大的外部衰减的系统中的操作条件的变化（例如，整流反馈放大中的温度）引起的传输频带特性的变化，用于急剧地切断包括多个窄的通信系统的每个信道中的传输频带 频带信道彼此分配，通过自适应滤波器实现整流反馈。 响应于包括温度的操作条件的变化，自适应滤波器的频带特性变化，而通过数字信号处理快速实现数据处理。 因此，即使每个通道中的通信间歇地重复，每次重新通信时，期望的传输频带特性都可以立即固定，以便通过数据相关判断干扰来防止稳定运行的干扰。