公开(公告)号：US20150140687A1

公开(公告)日：2015-05-21

申请号：US14608841

申请日：2015-01-29

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： William J. Gallagher ,  Eugene J. O'Sullivan ,  Naigang Wang

IPC: B81C1/00 ,  H01L43/12 ,  H01L43/10

CPC classification number: B81C1/00373 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2203/0118 ,  B81C1/00142 ,  B81C1/00706 ,  B81C2201/0188 ,  H01F41/046 ,  H01L28/10 ,  H01L43/10 ,  H01L43/12 ,  H01L43/14

Abstract: A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.

Abstract translation: 公开了一种微机电装置及其制造方法。 在硅衬底上形成牺牲层。 在牺牲层的顶表面上形成金属层。 将软磁性材料无电沉积在金属层上以制造微机电装置。 除去牺牲层以产生与硅衬底分离的金属束。

公开(公告)号：US20140354085A1

公开(公告)日：2014-12-04

申请号：US14353746

申请日：2012-09-25

Applicant: Lemoptix SA

Inventor： Julien Gamet ,  Faouzi Khechana

IPC: H02K9/22 ,  H02K33/00 ,  G02B26/08

CPC classification number: H02K33/00 ,  B81B3/0072 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/08 ,  G02B26/085 ,  H02K9/22 ,  H02K33/02 ,  H02K33/16

Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

Abstract translation: 根据本发明，提供了一种致动器，其包括可动构件，所述可动构件包括支撑框架，所述支撑框架被构造成使得其可围绕第一摆动轴线摆动并且反射镜被固定到所述支撑框架， 支撑框架将影响镜子的振荡; 线圈，其与支撑框架配合; 一个或多个边界部分设置在所述支撑框架和所述反射镜之间，当所述支撑框架围绕所述第一振荡轴线摆动时，所述边界部分减小从所述支撑框架的边缘传递到所述反射镜的翘曲的影响; 其中所述支撑框架还包括一个或多个切除区域，其中所述一个或多个切除区域被配置为平行于所述线圈的至少一部分，以在所述支撑框架绕所述线圈摆动时减小所述线圈上的应力 第一振荡轴和/或降低致动器的性质的温度依赖性。

公开(公告)号：US08860283B2

公开(公告)日：2014-10-14

申请号：US13406026

申请日：2012-02-27

Applicant: Antoine Nowodzinski

Inventor： Antoine Nowodzinski

IPC: H02N11/00 ,  H02N1/00 ,  B81B3/00

CPC classification number: H02N1/006 ,  B81B3/0086 ,  B81B2201/038

Abstract: The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions.

Abstract translation: 该装置包括由具有第一接触表面的导电材料制成的第一致动凸块。 由导电材料制成的第二致动凸块面向第一致动凸块。 静电致动电路在第一位置和另一位置之间相对于彼此移动致动凸块。 致动电路包括用于在第二致动凸块上施加比在第一致动凸块上更高电位的装置。 电绝缘材料的膜在第一和第二凸块之间执行电绝缘。 电绝缘材料膜包括具有正离子源的界面，并且可渗透所述正离子。

公开(公告)号：US20140069232A1

公开(公告)日：2014-03-13

申请号：US13935589

申请日：2013-07-05

Applicant: Technion Research and Development Foundation Ltd.

Inventor： David ELATA ,  Arnon HIRSHBERG

IPC: F16H21/44

CPC classification number: F16H21/44 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2203/0118 ,  Y10T74/18888

Abstract: A mechanism and method for motion conversion is disclosed. This mechanism can be easily fabricated using standard bulk micromachining technology. Based on this method with appropriate design, a horizontal, in-plane motion can be converted to a vertical or angular displacement out-of-plane. This design has great advantages in micro devices, which are built from a single layer, i.e. wafer fabrication, where an in-plane force is easy to implement, such as by the use of comb drive mechanisms, but an out-of-plane motion may be hard to achieve. The mechanism comprises a pair of beams of different heights, rigidly connected together at a number of points along their length, such that application of an in-plane force to the double beam structure results in out-of-plane motion of the double beam structure at points distant from the point of application of the force.

Abstract translation: 公开了一种用于运动转换的机构和方法。 这种机制可以使用标准的体积微加工技术轻松制造。 基于这种适当设计的方法，可以将水平的平面内运动转换为平面外的垂直或角位移。 这种设计在微器件中具有巨大的优势，微器件由单层构成，即晶片制造，其中易于实现平面内的力，例如通过使用梳齿驱动机构，但是平面外运动 可能很难实现。 该机构包括一对不同高度的梁，沿着它们的长度在多个点处刚性地连接在一起，使得对双梁结构施加平面内的力导致双梁结构的平面外运动 在远离施加力的点处。

公开(公告)号：US08628677B2

公开(公告)日：2014-01-14

申请号：US13077531

申请日：2011-03-31

Applicant: Gregory De Brabander ,  Mark Nepomnishy

Inventor： Gregory De Brabander ,  Mark Nepomnishy

IPC: C03C15/00

CPC classification number: B81C1/00103 ,  B81B2201/0257 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/0353 ,  B81B2203/0376

Abstract: Processes for making a profile-transferring substrate surface and membranes having curved features are disclosed. A profile-transferring substrate surface having a curved feature is created by isotropic plasma etching through a shadow mask. The shadow mask has a through hole which has a lower portion adjacent to the bottom surface of the shadow mask and an upper portion that is above and narrower than the lower portion. The isotropic plasma etching through the shadow mask can create a curved dent in a planar substrate in a central portion of an area enclosed by the bottom opening. After the shadow mask is removed. A uniform layer of material deposited over the exposed surface of the substrate will include a curved feature at the location of the curved dent in the substrate surface.

Abstract translation: 公开了用于制造轮廓转印衬底表面的工艺和具有弯曲特征的膜。 通过荫罩的各向同性等离子体蚀刻产生具有弯曲特征的轮廓转印衬底表面。 荫罩具有通孔，该通孔具有与荫罩的底面相邻的下部，上部比下部窄。 通过荫罩的各向同性等离子体蚀刻可以在由底部开口包围的区域的中心部分中的平面基板中产生弯曲的凹陷。 阴影面具被删除后。 沉积在基板的暴露表面上的均匀的材料层将在基板表面中的弯曲凹陷的位置处包括弯曲特征。

公开(公告)号：US08571405B2

公开(公告)日：2013-10-29

申请号：US13247938

申请日：2011-09-28

Applicant: Roman C. Gutierrez

Inventor： Roman C. Gutierrez

IPC: G03B3/10 ,  G03B13/34

CPC classification number: H05K1/181 ,  B81B7/0054 ,  B81B2201/038 ,  B81B2201/047 ,  B81B2203/0163 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2207/07 ,  B81C3/008

Abstract: A silicon MEMS device can have at least one solder contact formed thereupon. The silicon MEMS device can be configured to be mounted to a circuit board via the solder contact(s). The silicon MEMS device can be configured to be electrically connected to the circuit board via the solder contact(s).

Abstract translation: 硅MEMS器件可以具有在其上形成的至少一个焊料接触。 硅MEMS器件可以被配置为经由焊料接触件安装到电路板。 硅MEMS器件可以被配置为经由焊料触点电连接到电路板。

公开(公告)号：US20130213164A1

公开(公告)日：2013-08-22

申请号：US13618788

申请日：2012-09-14

Applicant: Richard Lee Knipe

Inventor： Richard Lee Knipe

IPC: F16H21/44

CPC classification number: B81B5/00 ,  B81B3/0032 ,  B81B2201/038 ,  B81B2203/051 ,  B81B2203/058 ,  F16H21/16 ,  F16H21/44 ,  F16H21/50 ,  Y10T74/18056 ,  Y10T74/18568 ,  Y10T74/1892

Abstract: A motion conversion system is described. The motion conversion system comprises a first torsional member operative for rotating in a first direction. A second torsional member is offset a distance from the first torsional member, wherein the second torsional member is operative for rotating in a direction opposite from the first direction. And, a lateral member has a lower surface connected to the first and second torsional members. Wherein, translational movement of the lateral member results from rotational movement of the first and second torsional members.

公开(公告)号：US20130196463A1

公开(公告)日：2013-08-01

申请号：US13601199

申请日：2012-08-31

Applicant: Wenjuan Zhu

Inventor： Wenjuan Zhu

IPC: H01L21/336

CPC classification number: H01L29/78606 ,  B81B2201/038 ,  B81B2203/0127 ,  B81C1/00158 ,  B82Y30/00 ,  H01L29/1606 ,  H01L29/4908 ,  H01L29/66045 ,  H01L29/78603 ,  H01L29/78648 ,  H01L29/78684

Abstract: Semiconductor nano-devices, such as nano-probe and nano-knife devices, which are constructed using graphene films that are suspended between open cavities of a semiconductor structure. The suspended graphene films serve as electro-mechanical membranes that can be made very thin, from one or few atoms in thickness, to greatly improve the sensitivity and reliability of semiconductor nano-probe and nano-knife devices.

公开(公告)号：US08421305B2

公开(公告)日：2013-04-16

申请号：US12596091

申请日：2008-04-17

Applicant: Ian R. Harvey ,  Taylor M. Meacham ,  Ronald W. Boutte ,  Brian Baker ,  Iain E. Harvey

Inventor： Ian R. Harvey ,  Taylor M. Meacham ,  Ronald W. Boutte ,  Brian Baker ,  Iain E. Harvey

IPC: H02N1/00

CPC classification number: B81B3/0029 ,  B81B2201/038 ,  B81B2203/0118 ,  H01H59/0009

Abstract: A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with an energy field thereby actuating the MEMS through Coulombic interactions. An actuator for a MEMS device is configured to actuate the MEMS device through Coulombic interactions by pumping charges to the actuator when subject to an energy field. A method of actuating a MEMS device includes irradiating an actuator of the MEMS device with an energy field thereby building up electrical charges on the actuator, and actuating the MEMS device with Coulomb forces from the built up electrical charges.

Abstract translation: 微机电系统（MEMS）装置包括具有多个电荷收集元件的致动器。 电荷收集元件中的至少一个被配置为通过与能量场直接相互作用来建立电荷，从而通过库仑相互作用来致动MEMS。 用于MEMS器件的致动器被配置为当经受能量场时将电荷泵送到致动器，通过库仑相互作用来致动MEMS器件。 致动MEMS器件的方法包括用能量场照射MEMS器件的致动器，从而在致动器上建立电荷，并且利用来自建立的电荷的库仑力来致动MEMS器件。

公开(公告)号：US08409900B2

公开(公告)日：2013-04-02

申请号：US13089532

申请日：2011-04-19

Applicant: James D. Huffman ,  Maria J. Lehmann

Inventor： James D. Huffman ,  Maria J. Lehmann

IPC: H01L21/02

CPC classification number: B81C1/00182 ,  B81B2201/038 ,  B81B2203/053 ,  G01H11/06 ,  H02N1/002 ,  H04R1/222 ,  H04R17/02 ,  H04R31/00 ,  H04R2201/003

Abstract: A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.

Abstract translation: 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。