公开(公告)号：US20170309507A1

公开(公告)日：2017-10-26

申请号：US15531962

申请日：2015-12-01

申请人： NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

发明人： Shiro HARA ,  Hitoshi MAEKAWA

IPC分类号： H01L21/677 ,  H01L21/687

CPC分类号： H01L21/67745 ,  H01L21/677 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68785

摘要： A compact manufacturing device to automatically transport a wafer transport container. The compact manufacturing device comprises a processing chamber and a device front chamber provided inside a housing, a container mounting table provided in the housing to mount a substrate transport container accommodating a processing substrate, and a container transport mechanism. The container transport mechanism delivers the substrate transport container to the adjacent compact manufacturing device along a container transport path and/or receives the substrate transport container from adjacent compact manufacturing device along the container transport path when a plurality of the compact manufacturing devices are provided in parallel.

公开(公告)号：US20170244070A1

公开(公告)日：2017-08-24

申请号：US15113752

申请日：2014-02-04

申请人： Applied Materials, Inc.

发明人： Stefan BANGERT ,  Uwe Schüßler ,  Jose Manuel DIEGUEZ-CAMPO ,  Dieter HAAS

IPC分类号： H01L51/56 ,  C23C14/12 ,  H01L51/00 ,  C23C14/50 ,  C23C14/56 ,  C23C14/04 ,  C23C14/24

CPC分类号： H01L51/56 ,  B05D1/60 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/505 ,  C23C14/56 ,  C23C14/562 ,  C23C14/564 ,  C23C14/566 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67271 ,  H01L21/67712 ,  H01L21/67718 ,  H01L21/67727 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/6776 ,  H01L51/001 ,  H01L51/0011

摘要： A system for depositing one or more layers, particularly layers including organic materials therein, is described. The system includes a load lock chamber for loading a substrate to be processed, a transfer chamber for transporting the substrate, a vacuum swing module provided between the load lock chamber and the transfer chamber, at least one deposition apparatus for depositing material in a vacuum chamber of the at least one deposition chamber, wherein the at least one deposition apparatus is connected to the transfer chamber; a further load lock chamber for unloading the substrate that has been processed, a further transfer chamber for transporting the substrate, a further vacuum swing module provided between the further load lock chamber and the further transfer chamber, and a carrier return track from the further vacuum swing module to the vacuum swing module, wherein the carrier return track is configured to transport the carrier under vacuum conditions and/or under a controlled inert atmosphere.

公开(公告)号：US20170229333A1

公开(公告)日：2017-08-10

申请号：US15428496

申请日：2017-02-09

申请人： Daifuku Co., Ltd.

发明人： Tomotaka Kinugawa ,  Hiroshi Otsuka

IPC分类号： H01L21/677 ,  B61L25/02 ,  B61L27/04

CPC分类号： H01L21/67715 ,  B61L25/025 ,  B61L27/04 ,  B61L2201/00 ,  H01L21/67706 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733

摘要： A controller performs a stop control if a first detector detects that an article transport vehicle traveling in a first path entered a managed area, and a second detector or a third detector detects that another article transport vehicle exists in a selected path. And the controller performs a travel control if the first detector detects that an article transport vehicle traveling in a first path entered the managed area, and presence of another article transport vehicle is not detected in the selected path by the second detector or the third detector.

公开(公告)号：US20170008700A1

公开(公告)日：2017-01-12

申请号：US15204240

申请日：2016-07-07

申请人： Daifuku Co., Ltd.

发明人： Yoshinari Wada

IPC分类号： B65G1/04 ,  B65G43/00

CPC分类号： B61B3/02 ,  B65G2201/0297 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733

摘要： When transporting an article between a transport target location that belongs to, located along, or associated with, a first travel path in which actuating electricity is supplied to transport vehicles and a transport target location that belongs to, located along, or associated with, a second travel path in which actuating electricity is not supplied to transport vehicles, a managing member manages traveling of a first transport vehicle to cause the first transport vehicle to travel only along a first travel path and manages traveling of a second transport vehicle to cause the second transport vehicle to travel along both a first travel path and a second travel path.

摘要翻译： 当在属于与之相关联的运输目标位置或与其相关联的第一行进路径（其中向其运送车辆提供致动电力）和运输目的地位置之间运输物品时 管理构件管理第一运送车辆的行驶以使第一运送车辆仅沿着第一行驶路径行驶，并且管理第二运送车辆的行驶，从而使第二运送车辆的行驶路径 运输车辆沿着第一行进路径和第二行驶路径行驶。

公开(公告)号：US20160358795A1

公开(公告)日：2016-12-08

申请号：US15241419

申请日：2016-08-19

申请人： Frederick A. Flitsch

发明人： Frederick A. Flitsch

IPC分类号： H01L21/67

CPC分类号： H01L21/67178 ,  B08B15/00 ,  G05B19/418 ,  G05B2219/45031 ,  H01L21/67017 ,  H01L21/67276 ,  H01L21/67727 ,  Y10T29/53096

摘要： The present invention provides various aspects for processing multiple types of substrates within cleanspace fabricators or for processing multiple or single types of substrates in multiple types of cleanspace environments. In some embodiments, a collocated composite cleanspace fabricator may be capable of processing semiconductor devices into integrated circuits and then performing assembly operations to result in product in packaged form.

摘要翻译： 本发明提供了在清洁空间制造者内处理多种类型的底物或者用于在多种类型的清洁空间环境中处理多种或单种类型的底物的各个方面。 在一些实施例中，并置复合清洁空间制造者可以能够将半导体器件处理成集成电路，然后执行组装操作以产生封装形式的产品。

公开(公告)号：US09285806B2

公开(公告)日：2016-03-15

申请号：US14372522

申请日：2012-12-05

申请人： MURATA MACHINERY, LTD.

发明人： Kazumi Harasaki

IPC分类号： B61L23/04 ,  G05D1/02 ,  H01L21/677 ,  H01L21/67

CPC分类号： G05D1/0289 ,  B61L23/042 ,  G05D1/0297 ,  G05D2201/0216 ,  H01L21/67288 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727

摘要： A traveling vehicle system includes a track network including tracks, a plurality of traveling vehicles, and a traveling vehicle controller. The controller is programmed and configured to include an abnormality detecting unit configured to detect an abnormality in a track on the downstream side of a diverging section including at least the track; and an entry determining unit configured to, in a case that a traveling vehicle that has just passed through the diverging section enters the track and a traveling vehicle that has immediately thereafter passed through the diverging section is about to consecutively enter the track, when the abnormality detecting unit has detected no abnormality, skip determination of whether the traveling vehicle is allowed to enter the track and, when the abnormality detecting unit has detected an abnormality, determine whether the traveling vehicle is allowed to enter the track.

摘要翻译： 一种行驶车辆系统包括轨道，包括轨道，多个行驶车辆和行驶车辆控制器。 控制器被编程并配置为包括：异常检测单元，被配置为检测至少包括轨道的发散部分的下游侧的轨道中的异常; 以及条目确定单元，其被配置为在刚刚通过所述发散部分的行驶车辆进入所述轨道的情况下，并且随后通过所述发散部分的行驶车辆将连续地进入所述轨道，当所述异常 检测单元没有检测到异常，跳过确定行驶车辆是否被允许进入轨道，并且当异常检测单元检测到异常时，确定行驶车辆是否被允许进入轨道。

公开(公告)号：US09245782B2

公开(公告)日：2016-01-26

申请号：US13850492

申请日：2013-03-26

申请人： Daifuku Co., Ltd.

发明人： Hideo Yoshioka ,  Takamichi Kanno

IPC分类号： H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC分类号： H01L21/677 ,  H01L21/67359 ,  H01L21/67379 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67769 ,  H01L21/68707

摘要： An article storage facility includes a storage rack configured to store a semiconductor wafer and a reticle, and a storage and retrieval transport apparatus. The storage rack includes a first accommodation unit configured to store a wafer container for containing the semiconductor wafer, and a second accommodation unit configured to store a reticle container for containing the reticle. The storage and retrieval transport apparatus includes a holding unit configured to hold a top flange formed at an upper portion of the wafer container to support the wafer container in a hanging state. A flange portion configured to allow the storage and retrieval transport apparatus to hold the reticle container using the holding unit to support the reticle container in a hanging state is formed at an upper portion of the reticle container.

摘要翻译： 物品存储设备包括：存储半导体晶片和掩模版的存储架，以及存储和取回传送装置。 存储架包括：第一容纳单元，被配置为存储用于容纳半导体晶片的晶片容器;以及第二容纳单元，被配置为存储用于容纳所述掩模版的掩模版容器。 存储和取回传送装置包括：保持单元，其构造成保持形成在晶片容器的上部的顶部凸缘，以将悬挂状态的晶片容器支撑。 在掩模版容器的上部形成凸缘部，该凸缘部被构造成允许存储和取回输送装置使用保持单元保持标线容器以支撑悬挂状态的标线容器。

公开(公告)号：US20150364353A1

公开(公告)日：2015-12-17

申请号：US14738122

申请日：2015-06-12

申请人： TOYOTA JIDOSHA KABUSHIKI KAISHA

发明人： Daisuke SUGIZAKI

IPC分类号： H01L21/677 ,  B65G47/52 ,  B65G43/08

CPC分类号： H01L21/67715 ,  B65G43/08 ,  B65G47/52 ,  B65G2811/0678 ,  H01L21/67276 ,  H01L21/67727 ,  H01L21/67736

摘要： A manufacturing line for a semiconductor device according to the invention is a manufacturing line for manufacturing a semiconductor device by circulating a workpiece along a conveyance route on which a plurality of treatment devices are arranged. The conveyance route includes a first route on which the treatment devices with a large number of times of treatment are arranged, and a second route on which the treatment devices with a small number of times of treatment are arranged. Besides, the conveyance route makes a changeover between the conveyance of the workpiece that has moved along the first route to the first route in a continuous manner, and the conveyance of the workpiece that has moved along the first route to the second route.

摘要翻译： 根据本发明的用于半导体器件的生产线是通过沿着其上布置有多个处理装置的输送路径循环工件来制造半导体器件的生产线。 输送路径包括布置有大量治疗次数的治疗装置的第一路线和配置有少量治疗次数的治疗装置的第二路径。 此外，输送路径在连续地沿着第一路线移动到第一路线的工件的输送和沿着第一路线移动到第二路径的工件的输送之间进行切换。

公开(公告)号：US08855805B2

公开(公告)日：2014-10-07

申请号：US13375488

申请日：2010-05-28

申请人： Kazunori Shimamura

发明人： Kazunori Shimamura

IPC分类号： G06F17/00 ,  H01L21/677 ,  H01L21/67

CPC分类号： H01L21/67276 ,  H01L21/67294 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67769

摘要： A conveyance vehicle system that achieves an increased efficiency of loading an article from a conveyance vehicle into a loading opening of an automated warehouse, includes a stocker, a conveyance vehicle, and a conveyance vehicle controller. The stocker includes racks, a loading port, and a stocker controller. The conveyance vehicle loads an article into the loading port of the stocker. The conveyance vehicle controller assigns the conveyance vehicle with an article conveyance command to convey the article to the stocker. The stocker controller receives a predicted conveyance command before the article is loaded from the conveyance vehicle into the stocker. The predicted conveyance command includes ID information of the article and information indicating whether or not the article is to be loaded into a rack.

摘要翻译： 一种输送车辆系统，其实现了将物品从输送车辆装载到自动化仓库的装载开口中的效率的提高，包括储料器，输送车辆和输送车辆控制器。 储料机包括货架，装货港和储料柜控制器。 运输工具将物品装载到储料器的装载口中。 输送车辆控制器为运输车辆分配物品输送命令以将物品传送到储料器。 储料器控制器在将物品从输送车辆装载到储料器之前接收预测的输送指令。 预测的输送指令包括物品的ID信息和指示物品是否被装载到货架中的信息。

公开(公告)号：US08807905B2

公开(公告)日：2014-08-19

申请号：US13158883

申请日：2011-06-13

申请人： Peter van der Meulen

发明人： Peter van der Meulen

IPC分类号： H01L21/677 ,  H01L21/67 ,  B25J9/04

CPC分类号： H01L21/67167 ,  B25J9/042 ,  H01L21/67126 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67184 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  H01L21/67754 ,  H01L21/67757 ,  H01L21/67781 ,  H01L21/68 ,  H01L21/68707 ,  H01L21/68735 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/139 ,  Y10T74/20305

摘要： Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.

摘要翻译： 提供了用于处理材料的方法和系统，包括在半导体制造系统中使用的材料。 该方法和系统包括用于基于真空的半导体处理和处理的线性半导体处理设备，以及可以灵活地配置以满足各种限制的可连接或可扩展的半导体处理设备。