公开(公告)号：US20160306177A1

公开(公告)日：2016-10-20

申请号：US15191941

申请日：2016-06-24

申请人： Ultratech, Inc.

发明人： Serguei Anikitchev

IPC分类号： G02B27/09 ,  G02B17/06 ,  H01L21/268 ,  B23K26/082 ,  H01L21/225 ,  B23K26/06 ,  B23K26/073 ,  B23K26/00 ,  G02B17/00 ,  H01L21/324

CPC分类号： G02B27/0927 ,  B23K26/0006 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/066 ,  B23K26/0738 ,  B23K26/082 ,  B23K26/0823 ,  B23K26/083 ,  B23K26/352 ,  B23K26/354 ,  B23K2101/40 ,  B23K2103/56 ,  G02B17/008 ,  G02B17/061 ,  G02B27/0983 ,  G02B27/0988 ,  H01L21/2253 ,  H01L21/268 ,  H01L21/322 ,  H01L21/324 ,  H01L21/428 ,  H01L21/477

摘要： A line-forming optical system and method are disclosed that form a line image with high-efficiency. A method includes forming a laser beam having a first intensity profile with a Gaussian distribution in at least a first direction and passing at least 50% of the laser beam in the first direction to form a first transmitted light. The method also includes: focusing the first transmitted light at an intermediate image plane to define a second intensity profile having a central peak and first side peaks immediately adjacent the central peak; then truncating the second intensity profile within each of first side peaks to define a second transmitted light; and then forming the line image at an image plane from the second transmitted light.

公开(公告)号：US20160274369A1

公开(公告)日：2016-09-22

申请号：US15033441

申请日：2014-10-06

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA

发明人： Toru NAGAI ,  Fumio WANI ,  Ryuji NAGAOKA

IPC分类号： G02B27/14 ,  G02B5/00 ,  H01S3/00 ,  G02B17/06

CPC分类号： G02B27/14 ,  G02B5/001 ,  G02B17/061 ,  G02B27/1006 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/2383

摘要： A laser beam combining device includes: a plurality of shaping optical units which emit circular laser beams which are different from each other in a change amount of an outer diameter per unit travel distance, wherein the plurality of shaping optical units are placed in such a manner that the circular laser beams emitted from the shaping optical units have a concentric shape.

摘要翻译： 激光束组合装置包括：多个成形光学单元，其以每单位行进距离的外径的变化量发射彼此不同的圆形激光束，其中，多个成形光学单元以这样的方式 从成形光学单元发射的圆形激光束具有同心形状。

公开(公告)号：US09442386B2

公开(公告)日：2016-09-13

申请号：US13006025

申请日：2011-01-13

申请人： Hans-Juergen Mann

发明人： Hans-Juergen Mann

IPC分类号： G03F7/20 ,  G02B17/06

CPC分类号： G03F7/70233 ,  G02B17/0663

摘要： An imaging optics has a plurality of mirrors to image an object field in an object plane into an image field in an image plane. At least one of the mirrors has a through opening for the passage of imaging light. An arrangement of the mirrors is such that principal rays run parallel or divergently in the beam path of the imaging light between the object plane and the first downstream mirror. The imaging optics can have an entrance pupil plane that lies in the beam path of the imaging light in the range of between 5 m and 2000 m in front of the object plane. The imaging optics can have an entrance pupil plane that lies in the beam path of the imaging light in the range of between 100 mm and 5000 mm in front of the object plane. Imaging optics with improved imaging quality are provided.

摘要翻译： 成像光学元件具有多个反射镜，用于将物平面中的物场映像成图像平面中的图像场。 至少一个反射镜具有用于成像光通过的通孔。 反射镜的布置使得主光线在物平面和第一下游反射镜之间的成像光束的光束路径中平行或分散地延伸。 成像光学器件可以具有入射光瞳平面，该入射光瞳平面位于物体平面前面的5m和2000m之间的成像光束的光束路径中。 成像光学器件可以具有入射光瞳平面，该入射光瞳平面位于物体平面前方的成像光束的光束路径中的介于100mm与5000mm之间的范围内。 提供了具有改善成像质量的成像光学元件。

公开(公告)号：US09411163B2

公开(公告)日：2016-08-09

申请号：US14744207

申请日：2015-06-19

申请人： Ultratech, Inc.

发明人： Serguei Anikitchev

IPC分类号： G02B27/09 ,  B23K26/06 ,  H01L21/477 ,  B23K26/00 ,  H01L21/324 ,  H01L21/322 ,  G02B17/06 ,  H01L21/428 ,  B23K26/073 ,  B23K26/08

CPC分类号： G02B27/0927 ,  B23K26/0006 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/066 ,  B23K26/0738 ,  B23K26/082 ,  B23K26/0823 ,  B23K26/083 ,  B23K26/352 ,  B23K26/354 ,  B23K2101/40 ,  B23K2103/56 ,  G02B17/008 ,  G02B17/061 ,  G02B27/0983 ,  G02B27/0988 ,  H01L21/2253 ,  H01L21/268 ,  H01L21/322 ,  H01L21/324 ,  H01L21/428 ,  H01L21/477

摘要： A line-forming optical system and method are disclosed that form a line image with high-efficiency. A method includes forming a laser beam having a first intensity profile with a Gaussian distribution in at least a first direction and passing at least 50% of the laser beam in the first direction to form a first transmitted light. The method also includes: focusing the first transmitted light at an intermediate image plane to define a second intensity profile having a central peak and first side peaks immediately adjacent the central peak; then truncating the second intensity profile within each of first side peaks to define a second transmitted light; and then forming the line image at an image plane from the second transmitted light.

摘要翻译： 公开了以高效率形成线图像的线形成光学系统和方法。 一种方法包括在至少第一方向上形成具有高斯分布的第一强度分布的激光束，并使激光束的至少50％沿第一方向通过以形成第一透射光。 该方法还包括：将第一透射光聚焦在中间像平面处，以限定具有中心峰的第二强度分布，并且紧邻中心峰的第一侧峰; 然后截断每个第一侧峰内的第二强度分布，以限定第二透射光; 然后从第二透射光在像平面处形成线图像。

公开(公告)号：US09405109B2

公开(公告)日：2016-08-02

申请号：US14726687

申请日：2015-06-01

申请人： Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

发明人： Tong Yang ,  Jun Zhu ,  Guo-Fan Jin ,  Shou-Shan Fan

IPC分类号： G02B5/10 ,  G02B17/06

CPC分类号： G02B17/0642

摘要： An off-axial three-mirror optical system with freeform surfaces includes an aperture, a primary mirror, a secondary mirror, a tertiary mirror, and a detector. The aperture is located on an incident light path. The primary mirror is located on an aperture transmitted light path. The secondary mirror is located on a primary mirror reflected light path. The tertiary mirror is located on a secondary mirror reflected light path. The detector located on a tertiary mirror reflected light path. A primary mirror surface and a tertiary mirror surface have a same freeform surface equation, and the freeform surface equation is a sixth order x′y′ polynomial. A secondary mirror surface is a tenth order aspherical surface.

摘要翻译： 具有自由曲面的离轴三镜光学系统包括孔，主镜，副镜，第三镜和检测器。 孔径位于入射光路上。 主镜位于孔径透射光路上。 副镜位于主镜反射光路上。 三级反射镜位于二次反射镜反射光路上。 位于三次反射镜上的检测器反射光路。 主镜面和第三镜面具有相同的自由曲面方程，而自由曲面方程是六阶x'y'多项式。 副镜面是十阶非球面。

公开(公告)号：US09377612B2

公开(公告)日：2016-06-28

申请号：US13743402

申请日：2013-01-17

申请人： Bruker Optik GmbH

发明人： Michael Juette ,  Axel Keens

IPC分类号： G02B21/36 ,  G02B21/00 ,  G02B21/04 ,  G02B13/14 ,  G02B17/06 ,  G02B17/08

CPC分类号： G02B21/361 ,  G02B13/14 ,  G02B17/061 ,  G02B17/0816 ,  G02B21/0004 ,  G02B21/0096 ,  G02B21/04

摘要： An IR microscope (1) is constituted such that, in an optical viewing mode in a beam path of visible light (VIS-R, VIS-T), a first intermediate focus (ZW1) is imaged onto a flat detector surface (15a) of a camera. The IR microscope (1) is constituted such that, in the beam path of the visible light (VIS-R, VIS-T), the first intermediate focus (ZW1) is imaged onto a second intermediate focus (ZW2), and, in the second intermediate focus (ZW2), a Mangin mirror (11) is disposed that corrects a field curvature of the Cassegrain objective (4). The invention provides an IR microscope in which the field curvature generated by the Cassegrain objective is corrected in a simple manner in the optical viewing mode when detection is performed using a flat detector and without restricting the spectral range of the IR microscope.

公开(公告)号：US09366630B2

公开(公告)日：2016-06-14

申请号：US14480258

申请日：2014-09-08

申请人： LI-COR, Inc.

发明人： Ahmed Bouzid ,  Chris Lesiak

IPC分类号： G01N21/64 ,  G02B17/06 ,  G02B13/22 ,  G02B21/16 ,  G02B21/36

CPC分类号： G01N21/6458 ,  G01B11/0608 ,  G01N21/6456 ,  G01N2021/6463 ,  G01N2201/06113 ,  G01N2201/1053 ,  G02B13/22 ,  G02B17/0605 ,  G02B21/082 ,  G02B21/16 ,  G02B21/244 ,  G02B21/26 ,  G02B21/361 ,  G02B21/367

摘要： Quantitative fluorescence imaging systems and methods using angular illumination to obtain automatic focus information. Laser scanning (e.g., point or line scanning) with angular illumination in combination with an area imaging sensor, such as with a bi-telcentric scanner, is used to determine sample height (relative to a detection axis orthogonal to a platform holding the sample) and also correct for sample height in subsequent scans.

摘要翻译： 使用角度照明的定量荧光成像系统和方法获得自动聚焦信息。 使用具有角照明的激光扫描（例如，点或线扫描）与区域成像传感器（例如使用双远心扫描器）结合来确定样品高度（相对于与保持样品的平台垂直的检测轴） 并在随后的扫描中校正样品高度。

公开(公告)号：US20160147158A1

公开(公告)日：2016-05-26

申请号：US14945837

申请日：2015-11-19

申请人： Carl Zeiss SMT GmbH

发明人： Johannes Ruoff ,  Josef Rapp

IPC分类号： G03F7/20 ,  G02B26/02 ,  G02B17/06 ,  G21K1/06 ,  G02B5/08 ,  G02B5/00 ,  G21K1/02

CPC分类号： G03F7/702 ,  G02B5/005 ,  G02B5/0891 ,  G02B13/22 ,  G02B17/0652 ,  G02B17/0663 ,  G02B26/02 ,  G03F7/70091 ,  G03F7/701 ,  G03F7/7025 ,  G21K1/02 ,  G21K1/067

摘要： An imaging optical unit for EUV projection lithography serves to image an object field into an image field. Mirrors guide imaging light from the object field to the image field. An aperture stop is tilted by at least 1° in relation to a normal plane which is perpendicular to an optical axis. The aperture stop has a circular stop contour. In mutually perpendicular planes, a deviation of a numerical aperture NAx measured in one plane from a numerical aperture NAy measured in the other plane is less than 0.003, averaged over the field points of the image field. What emerges is an imaging optical unit, in which homogenization of an image-side numerical aperture is ensured so that an unchanging high structure resolution in the image plane is made possible, independently of an orientation of a plane of incidence of the imaging light in the image field.

摘要翻译： 用于EUV投影光刻的成像光学单元用于将物场映像成图像场。 镜像引导成像光从物场到图像场。 孔径光阑相对于垂直于光轴的法向平面倾斜至少1°。 孔径光阑具有圆形止动轮廓。 在相互垂直的平面中，在一个平面中测量的数值孔径NAx与在另一平面中测量的数值孔径NAy的偏差小于0.003，在图像场的场点上平均。 出现的是成像光学单元，其中确保了图像侧数值孔径的均匀化，使得在平面中不变的高结构分辨率成为可能，独立于成像光的入射平面的取向 图像字段。

公开(公告)号：US09323158B2

公开(公告)日：2016-04-26

申请号：US14363334

申请日：2012-02-28

申请人： Yanqiu Li ,  Fei Liu

发明人： Yanqiu Li ,  Fei Liu

IPC分类号： G03B27/32 ,  G03F7/20 ,  G02B17/06

CPC分类号： G03F7/7015 ,  G02B17/0657 ,  G03F7/70216 ,  G03F7/705

摘要： A design method of extreme ultraviolet lithography projection objective comprises: determining the optical design parameters of the lithography projection objective, setting the projection objective to include six lenses and an aperture diaphragm, and dividing the six lenses into the three groups according to the beam propagation direction; determining the radii and the intervals of the first and third groups, respectively; and determining the radii and the intervals of the second group of lenses according to the parameters of the foregoing two groups of lenses. The design method has the advantage of avoiding the blindness in revising and error testing of the existing structure of the conventional optical design method by calculating lens structures that meet the parameter conditions, so that light rays can be selected conveniently according to the special requirements of optical processing detection, and a mass of searches and judgments can be avoided.

摘要翻译： 极紫外光刻投影物镜的设计方法包括：确定光刻投影物镜的光学设计参数，将投影物镜设置为包括六个透镜和孔径光阑，并根据光束传播方向将六个透镜分成三组 ; 分别确定第一组和第三组的半径和间隔; 以及根据前述两组透镜的参数确定第二组透镜的半径和间隔。 该设计方法的优点是通过计算符合参数条件的透镜结构，避免了传统光学设计方法的现有结构的修正和误差测试的盲目性，从而可以根据光学特殊要求方便地选择光线 处理检测，以及大量的搜索和判断可以避免。

公开(公告)号：US09316929B2

公开(公告)日：2016-04-19

申请号：US13754720

申请日：2013-01-30

申请人： Carl Zeiss SMT GmbH ,  ASML Netherlands B.V.

发明人： Norman Baer ,  Ulrich Loering ,  Oliver Natt ,  Gero Wittich ,  Timo Laufer ,  Peter Kuerz ,  Guido Limbach ,  Stefan Hembacher ,  Holger Walter ,  Yim-Bun-Patrick Kwan ,  Markus Hauf ,  Franz-Josef Stickel ,  Jan Van Schoot

IPC分类号： G03F7/20 ,  B82Y10/00 ,  G02B5/08 ,  G02B7/18 ,  G02B17/06 ,  G02B27/00 ,  G21K1/06 ,  G02B3/00 ,  G02B5/00 ,  G03B27/54

CPC分类号： G03F7/7015 ,  B82Y10/00 ,  G02B3/00 ,  G02B5/08 ,  G02B5/0816 ,  G02B5/0891 ,  G02B7/1815 ,  G02B17/0647 ,  G02B27/0043 ,  G03B27/542 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70316 ,  G03F7/70825 ,  G03F7/70891 ,  G03F7/70958 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/064

摘要： A projection lens of an EUV-lithographic projection exposure system with at least two reflective optical elements each comprising a body and a reflective surface for projecting an object field on a reticle onto an image field on a substrate if the projection lens is exposed with an exposure power of EUV light, wherein the bodies of at least two reflective optical elements comprise a material with a temperature dependent coefficient of thermal expansion which is zero at respective zero cross temperatures, and wherein the absolute value of the difference between the zero cross temperatures is more than 6K.

摘要翻译： 具有至少两个反射光学元件的EUV光刻投影曝光系统的投影透镜，每个反射光学元件均包括主体和反射表面，用于在掩模版上投影到基板上的图像场上，如果投影透镜曝光 EUV光的功率，其中至少两个反射光学元件的主体包括具有温度依赖的热膨胀系数的材料，其在相应的零交叉温度下为零，并且其中零交叉温度之间的差的绝对值更多 超过6K。