Nanowire multispectral imaging array
    111.
    发明申请
    Nanowire multispectral imaging array 有权
    纳米线多光谱成像阵列

    公开(公告)号:US20090072145A1

    公开(公告)日:2009-03-19

    申请号:US11977767

    申请日:2007-10-26

    IPC分类号: G01J5/02

    摘要: A multispectral imaging array system and method of forming the same. A substrate and a group of antennas can be located with respect to one another on the substrate, such that respective gaps are formed between each antenna group and wherein different antenna sizes may be used for different spectral ranges. Additionally, one or more nanowires can be located within one or more gaps among the respective gaps, such that the nanowires in communication with the antennas and the substrate comprise a multispectral imaging system in which the use of the nanowire(s) decreases the thermal time constant and therefore the read out rate from the antennas while decreasing the ambient gas cooling speed relative to the read out rate to increase the manufacturability of the multispectral imaging array system.

    摘要翻译: 多光谱成像阵列系统及其形成方法。 衬底和一组天线可以在衬底上相对于彼此定位,使得在每个天线组之间形成相应的间隙,并且其中不同的天线尺寸可以用于不同的光谱范围。 另外,一个或多个纳米线可以位于相应间隙中的一个或多个间隙内,使得与天线和衬底连通的纳米线包括多光谱成像系统,其中使用纳米线降低热时间 并且因此相对于读出速率降低环境气体冷却速度,从而增加了多光谱成像阵列系统的可制造性,从天线读出速率。

    Groundwater monitoring system and method
    112.
    发明授权
    Groundwater monitoring system and method 有权
    地下水监测系统及方法

    公开(公告)号:US07486398B1

    公开(公告)日:2009-02-03

    申请号:US12026320

    申请日:2008-02-05

    申请人: Barrett E. Cole

    发明人: Barrett E. Cole

    IPC分类号: G01N21/00

    摘要: A system and method for monitoring toxic chemicals in groundwater includes the use of a groundwater vaporizer and a CRDS (Cavity Ring Down Spectroscopy) block. The CRDS block includes a three-mirror ring down cavity in which a fiber is coupled to a top prismatic mirror in order to permit vertical entry of a laser beam. One of the mirrors can be piezo-electrically tuned so that the ring down cavity is in resonance with the laser beam and a third mirror includes a read out detector to measure the laser beam intensity. Vapors from the groundwater vaporizer pass through vapor inlet channels, which include a permeable membrane in order to permit vapors to flow into the ring down cavity. The system monitors, for example, trichloroethylene (TCE) concentrations and other chemicals present in groundwater utilizing data transmitted from the read out detector.

    摘要翻译: 用于监测地下水中有毒化学物质的系统和方法包括使用地下水蒸发器和CRDS(腔下环光谱)模块。 CRDS块包括三镜下降腔,其中光纤耦合到顶部棱镜,以允许垂直进入激光束。 其中一个反射镜可以被压电电调谐,使得下降腔与激光束共振,并且第三反射镜包括用于测量激光束强度的读出检测器。 来自地下水蒸发器的蒸汽通过蒸汽入口通道,其包括可渗透膜,以允许蒸汽流入环形腔。 该系统使用从读出的检测器传输的数据来监测例如三氯乙烯(TCE)浓度和存在于地下水中的其他化学物质。

    Spectroscopy Method and Apparatus for Detecting Low Concentration Gases
    113.
    发明申请
    Spectroscopy Method and Apparatus for Detecting Low Concentration Gases 有权
    用于检测低浓度气体的光谱法和装置

    公开(公告)号:US20080151248A1

    公开(公告)日:2008-06-26

    申请号:US11615617

    申请日:2006-12-22

    IPC分类号: G01N21/00

    摘要: The invention is a method and apparatus capable of detecting constituents of a gas at extremely low concentrations comprising providing a medium that is absorbent of at least a first particular gas under a first environmental condition and desorbent of the particular gas under a second environmental condition, exposing the medium to a sample gas for a first period of time under the first environmental condition, during a second period of time after the first period of time, exposing the medium to the second environmental condition to cause the medium to desorb gas into an optical cavity of a cavity ring down spectrometer and introducing electromagnetic radiation into the cavity, during a third period of time after the second period of time, ceasing introduction of the electromagnetic radiation into the cavity and detecting the decay of the electromagnetic radiation in the cavity, and analyzing the decay of the light in the cavity to obtain a spectral analysis of the sample gas.

    摘要翻译: 本发明是能够以非常低的浓度检测气体的成分的方法和装置,其包括在第一环境条件下提供至少第一特定气体的吸收剂的介质和在第二环境条件下特定气体的解吸附剂 在第一环境条件下在第一时间段内的样品气体的介质,在第一时间段之后的第二时间段内,将介质暴露于第二环境条件,以使介质将气体解吸到光腔中 的腔环下光谱仪,并在第二时间段内的第三个时间段内将电磁辐射引入空腔,停止将电磁辐射引入空腔中,并检测腔内电磁辐射的衰减,并分析 在空腔中的光的衰减以获得样品气体的光谱分析。

    Planar ultra violet light detector
    114.
    发明授权
    Planar ultra violet light detector 有权
    平面紫外光检测器

    公开(公告)号:US07391147B2

    公开(公告)日:2008-06-24

    申请号:US10735531

    申请日:2003-12-12

    IPC分类号: H05H7/06

    CPC分类号: G01J1/429

    摘要: A light detector having a cathode wafer, a cavity wafer and an anode wafer. The cathode wafer may be bonded to one side of the cavity wafer and the anode wafer may be bonded to another side of the cavity wafer. The cathode wafer may have numerous cathodes, the anode wafer numerous anodes and the cavity wafer numerous cavities which may be aligned on a one-to-one basis to form a wafer structure of a plurality of detectors which may be diced into separable detector chips. When there is a voltage potential across a cathode and an anode, and a gas such as Ne or the like in the cavity, a reception of light such as ultra violet may result in an electronic discharge between the cathode and anode of the light detector.

    摘要翻译: 具有阴极晶片,空腔晶片和阳极晶片的光检测器。 阴极晶片可以结合到空腔晶片的一侧,并且阳极晶片可以结合到空腔晶片的另一侧。 阴极晶片可以具有许多阴极,阳极晶片许多阳极和空腔晶片可以在一对一的基础上对准多个空腔,以形成可以切成可分离的检测器芯片的多个检测器的晶片结构。 当在阴极和阳极之间存在电压电势,并且在空腔中存在诸如Ne等的气体时,诸如紫外线的光的接收可能导致光检测器的阴极和阳极之间的电子放电。

    Cavity ring-down spectrometer for semiconductor processing
    115.
    发明授权
    Cavity ring-down spectrometer for semiconductor processing 有权
    用于半导体加工的腔下降光谱仪

    公开(公告)号:US07369242B2

    公开(公告)日:2008-05-06

    申请号:US11384017

    申请日:2006-03-17

    IPC分类号: G01N21/00

    CPC分类号: G01N21/39 G01J3/42

    摘要: An apparatus is provided for measuring a gas within a semiconductor thin film process. The apparatus includes an optical resonator disposed within an environment of the thin-film process, a tunable laser that excites the optical resonator at a characteristic frequency of the gas and a detector that detects an energy within the resonator.

    摘要翻译: 提供了一种用于测量半导体薄膜工艺中的气体的装置。 该装置包括设置在薄膜处理环境中的光学谐振器,可激励激光器以特定频率的气体激发光学谐振器,以及检测谐振器内的能量的检测器。

    Dual wavelength detector
    116.
    发明授权
    Dual wavelength detector 有权
    双波长检测器

    公开(公告)号:US07329895B2

    公开(公告)日:2008-02-12

    申请号:US10081369

    申请日:2002-02-22

    摘要: A sensor comprises two photodiodes sensitive to different wavelengths. The photodiodes or detectors are stacked in a vertical relationship to each other. A bandpass filter is provided to limit the wavelengths of light reaching the detectors. The photodiodes are formed of various combinations of materials such as AlGaN or InGaN, or different compositions of the same material. Charge detectors are coupled to each detector to provide a signal representative of the amount of radiation detected in their corresponding bandwidths. A biological sample is provided proximate the filter. A laser is used to illuminate the biological sample to create biofluorescence corresponding to intrinsic tryptophan of bacteria.

    摘要翻译: 传感器包括对不同波长敏感的两个光电二极管。 光电二极管或检测器以彼此垂直的方式堆叠。 提供带通滤波器以限制到达检测器的光的波长。 光电二极管由诸如AlGaN或InGaN的材料的各种组合或相同材料的不同组成形成。 电荷检测器耦合到每个检测器以提供表示在其相应带宽中检测的辐射量的信号。 在过滤器附近提供生物样品。 使用激光照射生物样品以产生对应于细菌的固有色氨酸的生物荧光。

    Nanotube sensor
    117.
    发明授权
    Nanotube sensor 有权
    纳米管传感器

    公开(公告)号:US07230432B2

    公开(公告)日:2007-06-12

    申请号:US11151902

    申请日:2005-06-14

    IPC分类号: G01N27/62

    CPC分类号: G01N27/4146 Y10S977/953

    摘要: A sensor having a nanotube grown on and supported by thermal bimorph structures. The nanotube rests on a heat sink during sensing gas or a liquid and is moved from the heat sink when the nanotube is heated to desorb gas or liquid from it. The heatsink may function as a gate along with the bimorph structures as the other terminals of a transistor. Current-voltage and current-gate voltage characteristics may be obtained of the nanotube as a device like a transistor. These characteristics may provide information on a gas or liquid absorbed by the nanotube.

    摘要翻译: 具有生长在热双晶体结构上并由其支撑的纳米管的传感器。 在感测气体或液体期间,纳米管位于散热器上,并且当加热纳米管以从其中解吸气体或液体时,其从散热器移动。 作为晶体管的其他端子,散热器可以与双压电晶片结构一起作为栅极。 作为像晶体管的器件,可以获得电流 - 电压和电流 - 栅极电压特性。 这些特性可以提供关于纳米管吸收的气体或液体的信息。

    Tunable sensor
    118.
    发明授权
    Tunable sensor 失效
    可调谐传感器

    公开(公告)号:US07145143B2

    公开(公告)日:2006-12-05

    申请号:US10749710

    申请日:2003-12-31

    IPC分类号: G01B9/02 G01J3/45

    摘要: A tunable bolometer device for detecting infrared light (IR) from a target at specific frequencies and in a broadband mode. The device may have an array of pixels of which each is controllable to be sensitive to a particular wavelength of light that is selected and detected. The detection of particular frequencies on a pixel level may result in spectral analysis of the target. Further, each pixel of the bolometer via an associated etalon may be tuned to detect a different frequency of IR or be switched to broadband detection of IR. The device may be packaged in an integrated vacuum package where the etalon array becomes the topcap which is bonded to the wafer containing the bolometer array.

    摘要翻译: 一种用于在特定频率和宽带模式下从目标检测红外光(IR)的可调式辐射热量计装置。 该装置可以具有其每个可控制的像素阵列,以对被选择和检测的特定波长的光敏感。 像素级别上的特定频率的检测可能导致目标的频谱分析。 此外,测辐射热计的每个像素通过相关联的标准具可被调谐以检测IR的不同频率或被切换到IR的宽带检测。 该器件可以封装在集成的真空封装中,其中标准具阵列变成顶盖,其结合到包含测辐射热计阵列的晶片。

    High temperature pyrometer
    119.
    发明授权
    High temperature pyrometer 有权
    高温高温计

    公开(公告)号:US07075629B2

    公开(公告)日:2006-07-11

    申请号:US10436391

    申请日:2003-05-12

    IPC分类号: G01J5/48

    CPC分类号: G01J5/48 G01J5/60

    摘要: A pyrometer having at least two detectors and at least two band-pass filters near each to limit the detectable wavelength band emitted by an object, and a device to exchange their filters to eliminate detector output ratio errors. The detector output ratio is then used to derive the color temperature of the object, which may have fast changes in emission intensity output.

    摘要翻译: 具有至少两个检测器和每个附近的至少两个带通滤波器的高温计限制由对象发射的可检测波长带,以及用于交换其滤波器以消除检测器输出比误差的装置。 然后使用检测器输出比率来导出对象的色温,其可能具有发射强度输出的快速变化。

    Microcathode with integrated extractor

    公开(公告)号:US06495865B2

    公开(公告)日:2002-12-17

    申请号:US09775098

    申请日:2001-02-01

    IPC分类号: H01L2974

    CPC分类号: H01J3/022

    摘要: A microcathode which integrates both an electron emitter, or cathode, and an extractor electrode. The electron emitter is attached to the back side of a thin film microstructure on a first surface of a substrate. Electrons are emitted from the electron emitter and into a via extending through the substrate. An electron beam is formed which is pulled through the via and out of the microcathode by an extractor electrode on a second surface of the substrate. The extractor electrode modulates the electron beam current, defines the beam profile, and accelerates the electrons toward an anode located outside of the microcathode. Microcathode of this invention are particularly suitable as electron emitting devices useful for various types of electron beam utilizing equipment such as flat cathode ray tube displays, microelectronic vacuum tube amplifiers, electron beam exposure devices and the like.