Optical scanning device including a tilt tolerant objective system
    111.
    发明授权
    Optical scanning device including a tilt tolerant objective system 失效
    光学扫描装置包括倾斜容限客观系统

    公开(公告)号:US07034974B2

    公开(公告)日:2006-04-25

    申请号:US10518254

    申请日:2003-06-23

    IPC分类号: G02B26/08

    CPC分类号: G11B7/13922 G11B7/1374

    摘要: An optical scanning device (1) for scanning an information layer (4) of an optical record carrier (2), the device including a radiation source (11) for generating a radiation beam (12) and an objective system (18) for converging the radiation beam (12) on the information layer, the objective system (18) being characterized in that the ratio of the root mean square of the optical path difference's (OPD's) generated by the objective system at oblique beam entrance to the system satisfies the condition of formula (I) within the field of the objective system, where OPD(A31) is the contribution of the third order Zernike coma to the root mean square wavefront aberration and OPD(A51) is the contribution of the fifth order Zernike coma to the root mean square wavefront aberration.

    摘要翻译: 一种用于扫描光学记录载体(2)的信息层(4)的光学扫描装置(1),该装置包括用于产生辐射束(12)的辐射源(11)和用于会聚的物镜系统(18) 信息层上的辐射束(12),物镜系统(18)的特征在于,由物镜系统在系统的斜射入口处产生的光程差(OPD)的均方根的比值满足系统 OPD(A31)是第三阶Zernike彗差对均方根波前像差和OPD(A51)的贡献的公式(I)的条件,其中第五阶Zernike昏迷对 均方根波前像差。

    Scanning device including an objective system formed of a single material
    112.
    发明授权
    Scanning device including an objective system formed of a single material 失效
    扫描装置包括由单一材料形成的物镜系统

    公开(公告)号:US07009744B1

    公开(公告)日:2006-03-07

    申请号:US10523388

    申请日:2003-07-16

    IPC分类号: G02B26/08

    CPC分类号: G11B7/1374

    摘要: An optical scanning device (1) for scanning an information layer (4) of an optical record carrier (2), the device (1) comprising a radiation source (11) for generating a radiation beam (12, 15, 20) and an objective system (18) for converging the radiation beam on the information layer, the information layer being covered by a transparent layer (3) of thickness td and refractive index nd. The objective system comprises a lens formed of a single material. The lens satisfies the condition: Fomula (I), where t is the thickness of the lens, FWD is the free working distance between the lens (18) and the carrier (2), where t, td and FWD are expressed in millimeters, and where FWD+td/nd

    摘要翻译: 一种用于扫描光学记录载体(2)的信息层(4)的光学扫描装置(1),所述装置(1)包括用于产生辐射束(12,15,20)的辐射源(11)和 用于将辐射束会聚在信息层上的目标系统(18),该信息层由厚度为td的透明层(3)和折射率n 覆盖。 目标系统包括由单一材料形成的透镜。 透镜满足条件:Fomula(I),其中t是透镜的厚度,FWD是透镜(18)和载体(2)之间的自由工作距离,其中t,td和FWD以毫米表示, 并且其中FWD + t <0.51。

    Optical head for scanning a record carrier
    113.
    发明授权
    Optical head for scanning a record carrier 失效
    用于扫描记录载体的光头

    公开(公告)号:US06956807B2

    公开(公告)日:2005-10-18

    申请号:US09968994

    申请日:2001-10-02

    IPC分类号: G02B5/18 G11B7/00 G11B7/135

    摘要: A device for scanning a first and second type of optical record carriers (2; 40) generates a first and a second radiation beam for scanning the first and second type of record carriers, respectively, the first radiation beam having a first numerical aperture larger than the second numerical aperture of the second radiation beam. The device includes a non-periodic phase structure that does not affect the first radiation beam. The phase structure introduces an amount of spherical aberration in the second radiation beam for scanning the second type of record carriers for compensating the difference in spherical aberration required for scanning through the different thickness of the transparent layer (3; 41) of the first and second type of record carriers (2, 40). To reduce the amount of stray light on the detection system (25) from rays in the second radiation beam having a numerical aperture larger than the second numerical aperture, the phase grating introduces a discontinuity in the gradient of the wavefront deviation it introduces in the second radiation beam. The discontinuity allows spatial filtering in the plane of the detection system (25) of the desired and undesired rays of the second radiation beam.

    摘要翻译: 用于扫描第一和第二类型的光学记录载体(2; 40)的装置分别产生用于扫描第一和第二类型的记录载体的第一和第二辐射束,第一辐射束具有大于 第二辐射束的第二数值孔径。 该装置包括不影响第一辐射束的非周期相位结构。 相位结构在第二辐射束中引入一定量的球面像差,用于扫描第二类型的记录载体,用于补偿扫描通过第一和第二透明层(3; 41)的不同厚度所需的球面像差差 记录载体的类型(2,40)。 为了从具有大于第二数值孔径的数值孔径的第二辐射束中的射线减少检测系统(25)上的杂散光的量,相位光栅在其引入的波前偏差的梯度中引入不连续性 辐射束。 不连续性允许在第二辐射束的期望和不期望的光线的检测系统(25)的平面中进行空间滤波。

    Optical element
    114.
    发明授权
    Optical element 失效
    光学元件

    公开(公告)号:US06930973B2

    公开(公告)日:2005-08-16

    申请号:US09914091

    申请日:2000-12-19

    摘要: An optical element (16) introduces a first wavefront deviation when a first radiation beam having a first wavelength passes through it and a second wavefront deviation when a second radiation beam having a second wavelength different from the first wavelength passes through it. One surface of the optical element comprises a phase structure in the form of annular areas (52, 53, 54, 55), the areas forming a non-periodic pattern of optical paths of different length. The optical paths for the first wavelength form the first wavefront deviation and the optical paths for the second wavelength form the second wavefront deviation, the difference between the two deviations being proportional to the difference between the first and second wavelength.

    摘要翻译: 当具有第一波长的第一辐射束通过它时,光学元件(16)引入第一波前偏移,当具有不同于第一波长的第二波长的第二辐射束通过时,第二波前偏移通过第二波前偏移。 光学元件的一个表面包括环形区域(52,53,54,55)形式的相位结构,该区域形成不同长度的光路的非周期性图案。 用于第一波长的光路形成第一波前偏移,并且用于第二波长的光路形成第二波前偏移,两个偏差之间的差与第一和第二波长之间的差成比例。

    Optical scanning device
    115.
    发明授权
    Optical scanning device 失效
    光学扫描装置

    公开(公告)号:US06707607B2

    公开(公告)日:2004-03-16

    申请号:US09966411

    申请日:2001-09-28

    IPC分类号: G02B2744

    摘要: An optical scanning device for scanning optical record carriers with radiation of a selected wavelength, the device including an objective lens, having an axial direction and a radial direction, and a phase structure which is non-periodic with respect to the radial direction, the non-periodic phase structure being arranged to compensate for comatic aberrations generated in the objective lens when an optical record carrier is read in a direction which is non-axial with respect to said objective lens, whereby an improved field of view is provided for said objective lens.

    摘要翻译: 一种用于扫描具有所选波长的辐射的光学记录载体的光学扫描装置,该装置包括具有轴向和径向方向的物镜,以及相对于径向非周期性的相位结构, 所述非周期相位结构被配置为当在相对于所述物镜不是轴向的方向读取光学记录载体时补偿在所述物镜中产生的彗形像差,从而为所述物镜提供改进的视场 。

    Particle optical apparatus
    117.
    发明授权
    Particle optical apparatus 有权
    粒子光学仪器

    公开(公告)号:US06462332B1

    公开(公告)日:2002-10-08

    申请号:US09689059

    申请日:2000-10-12

    IPC分类号: H01S100

    摘要: A particle optical apparatus, such as an ion implantation apparatus, an Auger electron spectrometer, an XPS analysis apparatus, and the like, is provided with a radiation source by means of which a wafer or substrate brought into the apparatus can be bombarded by radiation providing for at least a positively charged surface layer of the wafer or substrate. The apparatus further comprises a charge neutralization device with means for providing secondary electron emission and transport means for transporting secondary electrons. This transport means device is provided with a hollow insulating structure for controlled electron transport based on secondary electron emission, particularly in the form of an electron fibre with electrodes at the entrance and exit. The exit of the electron fibre forms a clean secondary electron source.

    摘要翻译: 诸如离子注入装置,俄歇电子能谱仪,XPS分析装置等的粒子光学装置设置有辐射源,通过该辐射源,被带入设备中的晶片或衬底可以被辐射提供 用于晶片或衬底的至少带正电的表面层。 该装置还包括具有用于提供用于传输二次电子的二次电子发射和传输装置的装置的电荷中和装置。 该输送装置具有中空绝缘结构,用于基于二次电子发射的受控电子传输,特别是具有在入口和出口处具有电极的电子束的形式。 电子束的出口形成清洁的二次电子源。

    Examination apparatus
    120.
    发明授权
    Examination apparatus 有权
    检查仪器

    公开(公告)号:US09107694B2

    公开(公告)日:2015-08-18

    申请号:US13146223

    申请日:2010-01-25

    摘要: The present invention relates to an examination apparatus for providing information about an object and a method for providing information about an object of interest. In order to improve the visual reception of information relating to the object, an examination apparatus is provided that comprises an examination arrangement and a control unit with at least a first interface and a second interface. The examination arrangement is adapted to detect object data from at least one region of interest of an object and to provide the object data to the control unit. Further, the control unit is adapted to compute object data into object information and to transform at least a part of the object information into image data (32, 36). Further, the control unit is arranged to extract pre-determined indicative data from the object information and to transform the indicative data into graphical advisory data (40). The first interface is configured such to provide the image data to a display unit (20) in order to display the image data (32, 36) to the user. The second interface is configured such to provide a signal for an ambient advice display arrangement in order to provide the graphical advisory data (40) to the user.

    摘要翻译: 本发明涉及一种用于提供关于对象的信息的检查装置和用于提供关于感兴趣对象的信息的方法。 为了改善与对象有关的信息的视觉接收,提供一种检查装置,其包括检查装置和具有至少第一接口和第二接口的控制单元。 检查装置适于从对象的至少一个感兴趣区域检测对象数据,并将对象数据提供给控制单元。 此外,控制单元适于将对象数据计算为对象信息并将对象信息的至少一部分转换为图像数据(32,36)。 此外,控制单元被布置成从对象信息提取预定指示数据,并将指示性数据变换成图形咨询数据(40)。 第一接口被配置为将图像数据提供给显示单元(20),以便向用户显示图像数据(32,36)。 第二接口被配置为提供用于环境咨询显示装置的信号,以向用户提供图形咨询数据(40)。