公开(公告)号：US20100054654A1

公开(公告)日：2010-03-04

申请号：US11884407

申请日：2006-02-16

申请人： Kenji Kawano ,  Masaya Nanami ,  Hiroaki Senda ,  Takeshi Hondo ,  Seiji Uchida ,  Yuji Sato ,  Toru Nakahira

发明人： Kenji Kawano ,  Masaya Nanami ,  Hiroaki Senda ,  Takeshi Hondo ,  Seiji Uchida ,  Yuji Sato ,  Toru Nakahira

IPC分类号： G02F1/035 ,  G02B6/12

CPC分类号： G02F1/2255 ,  G02F1/0356 ,  G02F2001/212 ,  G02F2202/07 ,  G02F2202/20

摘要： Herein disclosed is an optical modulation device, comprising: a substrate 1 having a polarization non-reversal region 17a and a polarization reversal region 17b; an optical waveguide 18 including first and second branched optical waveguide portions 18a, 18b; and a traveling waveguide including a center electrode 19a and a ground electrode 19b, 19c to have an electric signal applied thereto, said traveling waveguide and said first and second branched optical waveguide portions collectively forming an interaction portion to have said incident light interacted with said electric signal, said interaction portion being constituted by a first interaction sub-portion 20a and a second interaction sub-portion 20b, said first and second interaction sub-portions being respectively positioned in regions of said substrate having opposite polarization orientations with each other, in which said center electrode is positioned in face to face relationship with one of said first and second branched optical waveguide portions at said first and second interaction sub-portion to ensure that said incident light in said first and second branched optical waveguide portions are phase modulated, and in which said interaction portion includes an optical waveguide shift sub-portion sandwiched between said first and second interaction sub-portions to have positions of said first and second branched optical waveguide portions shifted therein in a transverse direction, ensuring that positions of said first and second optical waveguides relative to said center and ground electrodes are interchanged between said first and second interaction sub-portions.

摘要翻译： 这里公开了一种光调制装置，包括：具有极化非反转区域17a和极化反转区域17b的基板1; 包括第一和第二分支光波导部分18a，18b的光波导18; 以及具有施加电信号的中心电极19a和接地电极19b，19c的行进波导，所述行波导管和所述第一和第二分支光波导部分共同形成相互作用部分，以使所述入射光与所述电 信号，所述相互作用部分由第一相互作用子部分20a和第二相互作用子部分20b构成，所述第一相互作用子部分和第二相互作用子部分分别位于具有相反极化取向的所述基板的区域中，其中 所述中心电极在所述第一和第二相互作用子部分处于与所述第一和第二分支光波导部分中的一个相对面的关系，以确保所述第一和第二分支光波导部分中的所述入射光被相位调制，以及 其中所述相互作用部分包括光波导s 夹在所述第一相互作用子部分和第二相互作用子部分之间的折叠部分，以使所述第一和第二分支光波导部分在横向方向上移位的位置，确保所述第一和第二光波导相对于所述中心和接地电极的位置 在所述第一和第二相互作用子部分之间互换。

公开(公告)号：US07643708B2

公开(公告)日：2010-01-05

申请号：US11988199

申请日：2006-07-05

申请人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

发明人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

IPC分类号： G02F1/035

CPC分类号： G02F1/0121 ,  G02F1/2255 ,  G02F2201/127

摘要： Herein disclosed is an optical modulator, comprising: a substrate (1) having an electro-optic effect; an optical waveguide (3) formed in the substrate; a traveling wave electrode (4) including a center electrode (4a) and ground electrodes (4b, 4c) to have a high frequency electric signal applied thereto, the traveling wave electrode and the optical waveguide collectively forming a high frequency interaction portion (20) to have the incident light phase modulated under the condition that the high frequency electric signal is applied to the traveling wave electrode; and bias electrodes each including a center electrode (22a, 23a) and ground electrodes (22b, 22c, 23b, 23c) to have a bias voltage applied thereto, each of the bias electrodes and the optical waveguide collectively forming a bias voltage interaction portion (19, 21) to have the incident light phase modulated under the condition that the bias voltage is applied to the bias electrode, in which the traveling wave electrode and the bias electrodes are extended in a propagation direction of the incident light with the traveling wave electrode (20) positioned between the bias electrodes (19, 21).

摘要翻译： 这里公开了一种光调制器，包括：具有电光效应的基板（1） 形成在所述基板中的光波导（3） 包括中心电极（4a）和施加高频电信号的接地电极（4b，4c）的行波电极（4），行波电极和光波导共同形成高频相互作用部分（20） 在高频电信号施加到行波电极的条件下使入射光相位调制; 以及各自包括中心电极（22a，23a）和接地电极（22b，22c，23b，23c）的偏置电极以施加偏置电压，每个偏置电极和光波导共同形成偏置电压相互作用部分（ 在偏置电极施加偏置电极的条件下进行入射光相位调制，其中行波电极和偏置电极在入射光的传播方向上延伸有行波电极 （20）位于偏置电极（19,21）之间。

公开(公告)号：US20090301556A1

公开(公告)日：2009-12-10

申请号：US11817597

申请日：2006-03-03

申请人： Kenji Kawano ,  Norihiro Ito

发明人： Kenji Kawano ,  Norihiro Ito

IPC分类号： H01L31/00

CPC分类号： B82Y10/00 ,  H01G9/2072 ,  H01L27/302 ,  H01L51/0037 ,  H01L51/0038 ,  H01L51/0047 ,  H01L51/4253 ,  H01L51/442 ,  Y02E10/542

摘要： Disclosed is a multilayer organic solar cell having a structure wherein an inter-layer (3) is arranged between a first photoactive layer (1) and a second photoactive layer (2). This structure is obtained by forming the inter-layer (3) on the first photoactive layer (1) which is formed from an organic compound solution containing a donor material and an acceptor material, and then applying an organic compound solution containing a donor material and an acceptor material over the inter-layer (3) for forming the second photoactive layer (2). The inter-layer (3) is composed of at least either of a transparent oxide and a transparent nitride. By having such a structure, the inter-layer (3) prevents the solvent in the solution for the second photoactive layer (2) from permeating into the first photoactive layer (1) when the second photoactive layer (2) is formed over the first photoactive layer (1) by applying the solution. Consequently, the first photoactive layer (1) is prevented from destruction or deterioration in functions.

摘要翻译： 公开了一种具有结构的多层有机太阳能电池，其中层间（3）布置在第一光活性层（1）和第二光敏层（2）之间。 通过在由含有供体材料和受主材料的有机化合物溶液形成的第一光活性层（1）上形成层间（3），然后施加含有供体材料的有机化合物溶液和 在用于形成第二光敏层（2）的层间（3）上的受主材料。 层间（3）由透明氧化物和透明氮化物中的至少一种构成。 通过具有这样的结构，当第二光敏层（2）形成在第一光敏层（2）上时，层间（3）防止第二光敏层（2）的溶液中的溶剂渗入第一光活性层（1） 光活性层（1）。 因此，防止第一光活性层（1）的功能破坏或劣化。

公开(公告)号：US07582351B2

公开(公告)日：2009-09-01

申请号：US10492534

申请日：2002-10-24

申请人： Hiroshi Yokogawa ,  Masaru Yokoyama ,  Kenji Kawano ,  Norihiro Itou ,  Koichi Takahama ,  Takeyuki Yamaki ,  Akira Tsujimoto ,  Yasuhisa Kishigami ,  Nobuhiro Ide

发明人： Hiroshi Yokogawa ,  Masaru Yokoyama ,  Kenji Kawano ,  Norihiro Itou ,  Koichi Takahama ,  Takeyuki Yamaki ,  Akira Tsujimoto ,  Yasuhisa Kishigami ,  Nobuhiro Ide

IPC分类号： B32B7/02 ,  B32B5/16 ,  H05B33/12

CPC分类号： G02B1/10 ,  C08K3/36 ,  C08K7/22 ,  C08L2205/20 ,  C09D7/70 ,  G02B1/11 ,  G02B5/0236 ,  G02B5/0242 ,  G02B5/0247 ,  G02B5/0278 ,  H01J5/16 ,  H01J2211/44 ,  H01L51/0096 ,  H01L51/5268 ,  Y02E10/549 ,  Y10T428/24942 ,  Y10T428/25 ,  Y10T428/259 ,  Y10T428/265 ,  Y10T428/31663

摘要： There is provided a composite thin film-holding substrate in which a composite thin film (4) comprising a filler (2) having a refractive index lower than that of a substrate (1) and a binder (3) having a refractive index higher than that of the filler (2) is formed on a surface of the substrate (1). Light is efficiently scattered when passing through the composite thin film (3) which comprises the filler (2) and the binder (3) having different refractive indexes from each other. In addition, the refractive index of a composite thin film (4) comprising a filler (2) having a low refractive index is low. As a result, the discharge efficiency of light which passes through the composite thin film (4) from the substrate (1) to the external is improved.

摘要翻译： 提供一种复合薄膜保持基板，其中复合薄膜（4）包括折射率低于基板（1）的折射率的填料（2）和折射率高于 填料（2）的表面形成在基材（1）的表面上。 当通过包含彼此具有不同折射率的填料（2）和粘合剂（3）的复合薄膜（3）时，光被有效地分散。 此外，包含低折射率的填料（2）的复合薄膜（4）的折射率低。 结果，提高了通过复合薄膜（4）从基板（1）到外部的光的放电效率。

公开(公告)号：US07563561B2

公开(公告)日：2009-07-21

申请号：US11266197

申请日：2005-11-04

申请人： Kenji Kawano ,  Tsuyoshi Shibata ,  Kei Hayasaki

发明人： Kenji Kawano ,  Tsuyoshi Shibata ,  Kei Hayasaki

IPC分类号： G03F7/26

CPC分类号： G03F7/38 ,  G03F7/2004 ,  G03F7/2006 ,  G03F7/2008 ,  G03F7/3021 ,  G03F7/70425 ,  G03F7/70558 ,  G03F7/70783

摘要： A pattern forming method is disclosed, which comprises forming a photo resist film on a substrate, irradiating the photo resist film with an energy ray to form a desired latent image pattern, placing the substrate on a spacer provided on a hot plate, heating the photo resist film by using the hot plate, and developing the photo resist film to form a photo resist pattern, wherein an amount of irradiation of the energy ray is set such that the amount of irradiation of the energy ray in an exposure region in which a distance between a back surface of the substrate and an upper surface of the hot plate is long is larger than the amount of irradiation of the energy ray in an exposure region in which a distance between the back surface of the substrate and the upper surface of the hot plate is short.

摘要翻译： 公开了一种图案形成方法，其包括在基板上形成光致抗蚀剂膜，用能量射线照射光致抗蚀剂膜以形成期望的潜像图案，将基板放置在设置在热板上的间隔物上，加热照片 通过使用热板进行抗蚀剂膜的显影，并且显影光致抗蚀剂膜以形成光致抗蚀剂图案，其中能量射线的照射量被设定为使得在曝光区域中的能量射线的照射量 在基板的背面和加热板的上表面之间的距离大于在基板的背面与热的上表面之间的距离的曝光区域中的能量射线的照射量 盘子很短。

公开(公告)号：US20090142706A1

公开(公告)日：2009-06-04

申请号：US12257968

申请日：2008-10-24

申请人： Kazuyuki Masukawa ,  Koji Hashimoto ,  Kenji Kawano ,  Yasunobu Kai

发明人： Kazuyuki Masukawa ,  Koji Hashimoto ,  Kenji Kawano ,  Yasunobu Kai

IPC分类号： G03F7/20

CPC分类号： G03F7/70466 ,  G03F1/36 ,  G03F1/70 ,  G03F7/70425 ,  G03F7/70441

摘要： A method of manufacturing a semiconductor includes performing exposure using a first photomask having a pattern line in which hole patterns and assist patterns not transferred onto the semiconductor substrate are arrayed at an equal pitch on the mask, the pitch being converted a first pitch Phole on the substrate when the mask patterns are transferred on the substrate, and performing exposure using a second photomask having a pattern line in which wiring patterns are arrayed at an equal pitch on the mask, the pitch being converted a second pitch Pline on the substrate when the mask patterns are transferred on the substrate, wherein m×Pline=n×Phole and m,n(m>n) are integers.

摘要翻译： 制造半导体的方法包括使用具有图案线的第一光掩模进行曝光，其中未转印到半导体衬底上的孔图案和辅助图案以等间距排列在掩模上，该间距将第一节距P孔转换为 衬底，当掩模图案被转印到衬底上时，并且使用具有其中布线图案以等间距排列在掩模上的图案线的第二光掩模进行曝光，当掩模在衬底上时，间距被转换为衬底上的第二间距Pline 图案转移到基板上，其中mxPline = nxPhole，m，n（m> n）是整数。

公开(公告)号：US20090041403A1

公开(公告)日：2009-02-12

申请号：US11988199

申请日：2006-07-05

申请人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

发明人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

IPC分类号： G02F1/035

CPC分类号： G02F1/0121 ,  G02F1/2255 ,  G02F2201/127

摘要： Herein disclosed is an optical modulator, comprising: a substrate (1) having an electro-optic effect; an optical waveguide (3) formed in the substrate; a traveling wave electrode (4) including a center electrode (4a) and ground electrodes (4b, 4c) to have a high frequency electric signal applied thereto, the traveling wave electrode and the optical waveguide collectively forming a high frequency interaction portion (20) to have the incident light phase modulated under the condition that the high frequency electric signal is applied to the traveling wave electrode; and bias electrodes each including a center electrode (22a, 23a) and ground electrodes (22b, 22c, 23b, 23c) to have a bias voltage applied thereto, each of the bias electrodes and the optical waveguide collectively forming a bias voltage interaction portion (19, 21) to have the incident light phase modulated under the condition that the bias voltage is applied to the bias electrode, in which the traveling wave electrode and the bias electrodes are extended in a propagation direction of the incident light with the traveling wave electrode (20) positioned between the bias electrodes (19, 21).

摘要翻译： 这里公开了一种光调制器，包括：具有电光效应的基板（1） 形成在所述基板中的光波导（3） 包括中心电极（4a）和施加高频电信号的接地电极（4b，4c）的行波电极（4），行波电极和光波导共同形成高频相互作用部分（20） 在将高频电信号施加到行波电极的条件下使入射光相位调制; 以及各自包括中心电极（22a，23a）和接地电极（22b，22c，23b，23c）的偏置电极以施加偏置电压，每个偏置电极和光波导共同形成偏置电压相互作用部分（ 在偏置电极施加偏置电极的条件下进行入射光相位调制，其中行波电极和偏置电极在入射光的传播方向上延伸有行波电极 （20）位于偏置电极（19,21）之间。

公开(公告)号：US20090034898A1

公开(公告)日：2009-02-05

申请号：US12063789

申请日：2006-08-15

申请人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

发明人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

IPC分类号： G02F1/035 ,  G02F1/03

CPC分类号： G02F1/2255 ,  G02F1/0316 ,  G02F1/0356 ,  G02F2203/25

摘要： Herein disclosed is an optical modulator, comprising: a substrate 1 having an electro-optic effect; an optical waveguide 12 embedded in the substrate 1 to have a light wave guided therein; a traveling wave electrode 4 mounted on the substrate 1 to have a traveling wave applied thereon so that the light wave is modulated by the traveling wave with the electro-optic effect, the traveling wave electrode being constituted by a center electrode 4a and ground electrodes 4b, 4c; in which the optical waveguide has a plurality of interaction optical waveguides 12a, 12b to collectively form a Mach-Zehnder optical waveguide operative to modulate the light wave in a phase modulation manner under the condition that the traveling wave is applied to the traveling wave electrode, the interaction optical waveguides 12a, 12b collectively form a region where respective widths of said interaction optical waveguides are different from each other, and the center electrode 4a and the ground electrodes 4b, 4c are positioned such that interaction efficiencies between the high frequency electric signal and the light wave guided in the respective interaction optical waveguides 12a, 12b are substantially equal to each other.

摘要翻译： 这里公开了一种光调制器，包括：具有电光效应的基板1; 嵌入在基板1内的光波导路12，其中引导光波; 安装在基板1上的行波电极4，其上施加有行波，使得光波被电光效应的行波调制，行波电极由中心电极4a和接地电极4b构成 ，4c; 其中光波导具有多个相互作用的光波导12a，12b，以在将行波施加到行波电极的条件下共同形成用于以相位调制方式调制光波的马赫 - 曾德尔光波导， 相互作用的光波导12a，12b共同形成相互之间的相互作用的光波导的各自的宽度彼此不同的区域，中心电极4a和接地电极4b，4c被定位成使得高频电波信号与 在相互作用的光波导12a，12b中引导的光波基本相等。

公开(公告)号：US20080064226A1

公开(公告)日：2008-03-13

申请号：US11976499

申请日：2007-10-25

申请人： Kenji Kawano ,  Shinichi Ito ,  Eishi Shiobara

发明人： Kenji Kawano ,  Shinichi Ito ,  Eishi Shiobara

IPC分类号： H01L21/31

CPC分类号： H01L21/67115 ,  G03F7/0042 ,  G03F7/0392 ,  G03F7/38 ,  H01L21/0273 ,  H01L21/67109

摘要： A method of processing a substrate, comprising forming a chemically amplified resist film on a substrate, irradiating energy beams to the chemically amplified resist film to form a latent image therein, carrying out heat treatment with respect to the chemically amplified resist film, heating treatment being carried out in a manner of relatively moving a heating section for heating the chemically amplified resist film and the substrate forming a gas stream flowing reverse to the relatively moving direction of the heating section between the lower surface of the heating section and the chemically amplified resist film.

摘要翻译： 一种处理衬底的方法，包括在衬底上形成化学放大抗蚀剂膜，将能量束照射到化学放大抗蚀剂膜上以在其中形成潜像，对化学放大抗蚀剂膜进行热处理，加热处理为 以相对移动用于加热化学放大抗蚀剂膜的加热部分和形成在加热部分的下表面和化学放大抗蚀剂膜之间形成与加热部分的相对移动方向相反的方向流动的气流的加热部分的方式进行 。

公开(公告)号：US07330613B2

公开(公告)日：2008-02-12

申请号：US10565404

申请日：2005-06-08

申请人： Kenji Kawano ,  Masaya Nanami ,  Makoto Saito ,  Toru Nakahira ,  Yuji Sato ,  Seiji Uchida

发明人： Kenji Kawano ,  Masaya Nanami ,  Makoto Saito ,  Toru Nakahira ,  Yuji Sato ,  Seiji Uchida

IPC分类号： G02B6/12

CPC分类号： G02B6/4202 ,  G02B6/12004 ,  G02B6/262 ,  G02B6/30 ,  G02F1/2255

摘要： A waveguide type optical device has an optical waveguide formed on a substrate, functional optical waveguide an optical input end face and an optical output end face which are provided to respective substrate end faces an input optical waveguide connecting the optical input end face and the functional optical waveguides, an output optical waveguide connecting the optical output end face and the functional optical waveguides, and a signal light monomode optical fiber. The input optical waveguide and the output optical waveguide is formed so as to form angles other than 0° with the functional optical waveguides at the optical input end face and the optical output end face respectively, such that an angle between each of the input optical waveguide and the output optical waveguide with respect to a corresponding one of the substrate end faces is other than 90°.

摘要翻译： 波导型光学器件具有形成在基板上的光波导，功能光波导，光输入端面和光输出端面，其设置在各个基板端面上，连接光输入端面和功能光学 波导，连接光输出端面和功能光波导的输出光波导，以及信号光单模光纤。 输入光波导和输出光波导形成为在光输入端面和光输出端面分别与功能光波导形成0°以外的角度，使得每个输入光波导 并且输出光波导相对于基板端面中的相应一个不是90°。