公开(公告)号：US06392221B1

公开(公告)日：2002-05-21

申请号：US09390158

申请日：1999-09-03

Applicant: Vladimir Anatolyevich Aksyuk ,  David John Bishop

Inventor： Vladimir Anatolyevich Aksyuk ,  David John Bishop

IPC: G02B2600

CPC classification number: G02B26/0841 ,  B81B3/004 ,  B81B3/0062 ,  B81B5/00 ,  B81B7/0003 ,  B81B2201/042 ,  B81B2201/045 ,  G02B26/0866

Abstract: A micro-electro-mechanical optical device is disclosed. The micro-electro-mechanical optical device includes a micro-electro-mechanical structure coupled with an optical device. Both the micro-electro-mechanical structure and the optical device are disposed on a substrate surface. The micro-electro-mechanical structure lifts the optical device a predetermined distance above the plane of the substrate surface. Thereafter, the lifted optical device is moveable relative to the plane of the substrate surface in response to an electrostatic field generated between the optical device and the substrate.

Abstract translation: 公开了一种微机电光学装置。 微机电光学器件包括与光学器件耦合的微电子机械结构。 微电子机械结构和光学装置均设置在基板表面上。 微电子机械结构将光学装置提升到衬底表面平面上方一预定的距离。 此后，响应于在光学器件和衬底之间产生的静电场，提升的光学器件可相对于衬底表面的平面移动。

公开(公告)号：US06388789B1

公开(公告)日：2002-05-14

申请号：US09666018

申请日：2000-09-19

Applicant: Jonathan Bernstein

Inventor： Jonathan Bernstein

IPC: G02B2608

CPC classification number: G02B6/3572 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/085 ,  G02B26/101 ,  Y10S359/90

Abstract: A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within an outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The inner torsional flexures define an inner axis of rotation while the outer torsional flexures define an outer axis of rotation. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. Bulk micromachining techniques enable the members to be formed from a monolithic silicon wafer and can produce a member with a smooth surface. The smooth surface of a member may function as a reflector. In one embodiment, the inner rotational member functions as a reflector.

Abstract translation: 公开了一种多轴磁致动装置，多轴磁致动装置的阵列以及制造多轴磁致动装置的方法。 此外，公开了一种光开关，其由多轴磁致动装置的阵列和适于接收诸如光纤的光波导的端口阵列组成。 本发明的多轴磁力驱动装置能够沿两个正交方向旋转运动。 在一个实施例中，多轴磁致动装置包括两个嵌套旋转构件，嵌套在外旋转构件内的内旋转构件，其又嵌套在基构件内。 内部旋转构件通过两个内部扭转挠曲件安装到外部旋转构件，外部旋转构件又通过两个外部扭转挠曲件安装到基座构件。 内部扭转弯曲限定了内部旋转轴线，而外部扭转挠曲限定了外部旋转轴线。 每个旋转构件的旋转运动响应于磁力影响和由通过与内旋转构件的表面相邻布置的线圈的电流产生的磁矩之间的相互作用而产生。 散装微加工技术使得部件能够由单片硅晶片形成，并且可以产生具有光滑表面的部件。 构件的光滑表面可以用作反射器。 在一个实施例中，内旋转构件用作反射器。

公开(公告)号：US20020047172A1

公开(公告)日：2002-04-25

申请号：US09910537

申请日：2001-07-20

Inventor： Jason S. Reid

IPC: H01L029/82

CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118 ,  H01G5/18 ,  H01G5/40

Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of a nitride of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a group 3A to 6A element. The target can have other major constituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a nitrogen ambient so as to result in a sputtered hinge. It is possible to form both stiff and/or flexible portions of the micromechanical device in this way.

Abstract translation: 提供能够由于柔性部分而移动的微机械装置。 微机械装置可以具有柔性部分，该柔性部分由优选来自元素周期表3A至6A的元素的氮化物（优选地来自这些基团的前两行）和后过渡金属（优选地来自该组的第8B或1B族） 周期表）。 微机械装置可以是任何装置，特别是优选地具有诸如加速度计，DC继电器或RF开关，光交叉连接或光开关的柔性部分的MEMS传感器或致动器，或用于直视和投影显示器的阵列的微镜部分。 柔性部分优选通过溅射具有组8B或1B元素和组3A至6A元素的靶来形成。 靶可以具有其它主要成分或杂质（例如另外的3A至6A族元素）。 靶在氮气环境中反应溅射，从而产生溅射的铰链。 以这种方式可以形成微机械装置的刚性和/或柔性部分。

公开(公告)号：US20010048265A1

公开(公告)日：2001-12-06

申请号：US09827858

申请日：2001-04-05

Inventor： Samuel Lee Miller ,  Paul Jackson McWhorter ,  Murray Steven Rodgers ,  Jeffry J. Sniegowski ,  Stephen M. Barnes

IPC: H02N001/00

CPC classification number: B81B3/004 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81B2203/053 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841 ,  G02B2006/12104 ,  G11B7/0927 ,  H02N1/006 ,  H02N1/008

Abstract: A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Abstract translation: 公开了一种微机电（MEM）装置，其具有能够在基板上升高并以任意角度倾斜的平台，该平台使用支撑平台并控制其运动的多个柔性构件。 每个柔性构件由一个或多个用于弯曲柔性构件的MEM致动器进一步控制。 MEM致动器可以是静电梳状致动器或垂直拉链致动器，或其组合。 MEM装置可以包括镜面涂层以形成用于重定向或切换用于投影显示器的一个或多个光束的可编程镜子。 具有镜面涂层的MEM装置还具有用于在用于局域光纤网络的光纤之间切换光束或用于光纤电信或数据通信系统的应用。

公开(公告)号：US20010028756A1

公开(公告)日：2001-10-11

申请号：US09799901

申请日：2001-03-05

Inventor： Dale C. Flanders ,  Peter S. Whitney

IPC: G02B006/35

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：US20240327201A1

公开(公告)日：2024-10-03

申请号：US18192576

申请日：2023-03-29

Applicant: Intel Corporation

Inventor： Numair Ahmed ,  Mohammad Mamunur Rahman ,  Suddhasattwa Nad ,  Sashi Kandanur ,  Darko Grujicic ,  Benjamin Duong ,  Srinivas Pietambaram ,  Tarek Ibrahim ,  Whitney Bryks

IPC: B81B7/00 ,  B81C1/00 ,  G02B6/12

CPC classification number: B81B7/0048 ,  B81C1/00325 ,  G02B6/12004 ,  B81B2201/0228 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2201/0278 ,  B81B2201/03 ,  B81B2201/045 ,  B81B2207/07 ,  B81B2207/096 ,  B81B2207/097

Abstract: MEMS dies embedded in glass cores of integrated circuit (IC) package substrates are disclosed. An example integrated circuit (IC) package includes a package substrate including a glass core, the example integrated circuit (IC) package also includes a micro electromechanical system (MEMS) die positioned in a cavity of the glass core.

公开(公告)号：US12055705B2

公开(公告)日：2024-08-06

申请号：US17283835

申请日：2019-10-07

Applicant: Valeo Schalter und Sensoren GmbH

Inventor： Jochen Schenk ,  Michael Kleiser ,  Jürgen Nies ,  Frank Selbmann ,  Felix Müller

IPC: G02B26/08 ,  B81B3/00 ,  G01S7/481 ,  G01S17/931

CPC classification number: G02B26/0841 ,  B81B3/0018 ,  B81B2201/045 ,  G01S7/4817 ,  G01S17/931

Abstract: A method for controlling a drive apparatus (20) of a micro-oscillation mirror (16), a control device (28) and a deflector mirror apparatus (14) are described. The drive apparatus (20) has at least two comb drives (22a, 22b) which are arranged on different radial sides of a pivoting axis (18) of the micro-oscillation mirror (16). In the method, at least two actuation signals AS1, AS2) are generated, and the at least two comb drives (22a, 22b) are therefore actuated at least temporarily in such a way that they drive the micro-oscillation mirror (16) in an oscillating fashion. At least one elongation signal (P1, P2), which characterizes the elongation (26) of the micro-oscillation mirror (16) is generated using at least one comb drive (22a, 22b). At least one of the actuation signals (AS1, AS2) is adapted to the oscillation of the micro-oscillation mirror (16) on the basis of at least one of the elongation signals (P1, P2), At least one of the comb drives (22a, 22b) is connected, by means of at least one switching apparatus (34), alternately to an actuation apparatus (32) for receiving at least one actuation signal (AS1, AS2) or to an elongation-detection apparatus (24) for generating at least one elongation signal (P1, P2).

公开(公告)号：US12038680B2

公开(公告)日：2024-07-16

申请号：US17309342

申请日：2019-11-14

Applicant: SONY GROUP CORPORATION

Inventor： Yusuke Ogawa

IPC: G03B21/28 ,  G02B26/10 ,  G03B21/00 ,  B81B3/00

CPC classification number: G03B21/28 ,  G02B26/105 ,  G03B21/008 ,  B81B3/0018 ,  B81B2201/045

Abstract: Provided is a technology for improving the resolution and the angle of view of an image projection device. The image projection device includes an optical waveguide element including at least one incident port on which a laser beam is incident and a plurality of emission ports from which the laser beam is emitted, and a scanning mirror that performs scanning with the laser beam emitted from the optical waveguide element, in which the laser beam with which the scanning mirror performs the scanning reaches a projection target. The image projection device further includes a hologram element that condenses the laser beam with which the scanning mirror performs the scanning on a vicinity of a pupil to allow the laser beam to reach a retina.

公开(公告)号：US11952265B2

公开(公告)日：2024-04-09

申请号：US17725804

申请日：2022-04-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Sadaharu Takimoto ,  Yuki Morinaga ,  Daiki Suzuki ,  Yoshihisa Warashina

IPC: B81B7/00 ,  B81B3/00 ,  G02B26/08

CPC classification number: B81B7/0006 ,  B81B3/0075 ,  G02B26/08 ,  G02B26/085 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0154 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

公开(公告)号：US20230393243A1

公开(公告)日：2023-12-07

申请号：US18328659

申请日：2023-06-02

Applicant: nEYE Systems, Inc.

Inventor： Ming Chiang A. WU ,  Tae Joon SEOK ,  Kyungmok KWON ,  Noriaki KANEDA ,  Xiaosheng ZHANG

IPC: G01S7/481 ,  B81B3/00

CPC classification number: G01S7/4811 ,  B81B2201/045 ,  B81B3/0083 ,  G01S7/4817

Abstract: The present disclosure is directed to imaging LiDARs monolithic integration of focal plane switch array LiDARS with CMOS electronics. The CMOS wafer contains electronic circuits needed to control the focal plane array, e.g., digital addressing circuits and MEMS drivers, as well as circuits to amplify and process the detected signals, e.g., trans-impedance amplifiers (TIA), multi-stage amplifiers, analog-to-digital converters (ADC), digital signal processing (DSP), and circuits to communicate with external systems. Methods of use are also provided.