公开(公告)号：US07680248B2

公开(公告)日：2010-03-16

申请号：US11972352

申请日：2008-01-10

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: H01J5/18

CPC classification number: H05G1/04 ,  H01J35/08 ,  H01J35/18 ,  H01J2235/087 ,  H01J2235/18

Abstract: To be able to achieve further small-sized formation and light-weighted formation and to promote a sensitivity by further efficiently detecting a fluorescent X-ray or the like in an X-ray tube and an X-ray analyzing apparatus, there are provided a vacuum cabinet 2 inside of which is brought into a vacuum state and which includes a window portion 1 formed by an X-ray transmitting film through which an X-ray can be transmitted, an electron beam source 3 installed at inside of the vacuum cabinet 2 for emitting an electron beam e, a target T generating a primary X-ray X1 by being irradiated with the electron beam e and installed at inside of the vacuum cabinet 2 to be able to emit the primary X-ray X1 to an outside sample S by way of the window portion 1, and an X-ray detecting element 4 arranged at inside of the vacuum cabinet 2 to be able to detect a fluorescent X-ray and a scattered X-ray X2 emitted from the sample S and incident from the window portion 1 for outputting a signal including energy information of the fluorescent X-ray and the scattered X-ray X2.

Abstract translation: 为了能够进一步小型化和轻量化形成，并且通过进一步有效地检测X射线管和X射线分析装置中的荧光X射线等来提高灵敏度， 其内部的真空柜2处于真空状态，并且包括由透射X射线的X射线透过膜形成的窗口部分1，安装在真空室2内部的电子束源3 用于发射电子束e，靶T通过照射电子束e并且安装在真空容器2的内部以能够将初级X射线X1发射到外部样品S产生主X射线X1 通过窗口部分1和布置在真空室2内部的X射线检测元件4，以便能够检测从样品S发射的荧光X射线和散射X射线X2，并从 窗口部分1用于输出包括的信号 g荧光X射线和散射X射线X的能量信息。

公开(公告)号：US07634054B2

公开(公告)日：2009-12-15

申请号：US12175768

申请日：2008-07-18

Applicant: Yoshiki Matoba ,  Yutaka Ikku

Inventor： Yoshiki Matoba ,  Yutaka Ikku

IPC: G01N23/223 ,  H01J35/18

CPC classification number: H01J35/18 ,  G01N23/223 ,  G01N2223/076 ,  H01J2235/087

Abstract: Provided are an X-ray tube and an X-ray analysis apparatus, which can be further reduced in size as well as in weight and more efficiently detect a fluorescent X-ray and the like to increase sensitivity. The X-ray tube includes: a vacuum casing (2) having an interior in a vacuum state and a window section (1) formed of an X-ray transmission film through which an X-ray can be transmitted; an electron beam source (3) provided in the vacuum casing (2), to emit an electron beam (e); a target (T) provided in the vacuum casing (2) to be irradiated with the electron beam (e) to generate a primary X-ray and to be able to emit the generated primary X-ray through the window section (1) to an exterior sample (S); an X-ray detection element (4) provided in the vacuum casing (2) to be able to detect a fluorescent X-ray and a scattered X-ray, which are emitted from the sample (S) to be incident through the window section (1), to output a signal containing energy information of the fluorescent X-ray and the scattered X-ray; and a metal guard member (10) provided between the X-ray detection element (4) and an irradiated area of the target (T) with the electron beam (e).

Abstract translation: 提供一种X射线管和X射线分析装置，能够进一步减小尺寸和重量，并且更有效地检测荧光X射线等以提高灵敏度。 X射线管包括：具有真空状态的真空壳体（2）和由能够透射X射线的X射线透射膜形成的窗口部分（1）; 设置在真空壳体（2）中的电子束源（3），以发射电子束（e）; 设置在所述真空壳体（2）中以照射所述电子束（e）以产生主X射线并能够通过所述窗口部分（1）发射所产生的初级X射线的目标（T）至 外部样品（S）; 设置在所述真空壳体（2）中的X射线检测元件（4），以能够检测从所述样品（S）射出的通过所述窗口部分入射的荧光X射线和散射X射线 （1），输出包含荧光X射线和散射X射线的能量信息的信号; 以及设置在所述X射线检测元件（4）与所述靶（T）的照射区域之间的电子束（e）的金属保护部件（10）。

公开(公告)号：US07634053B2

公开(公告)日：2009-12-15

申请号：US11708789

申请日：2007-02-20

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G01N2223/30

Abstract: There is provided a fluorescent X-ray analysis apparatus in which a detection lower limit is improved, and it is possible to quantify a trace aimed element having been contained not only in a sample whose main component is a heavy element but also in a sample whose main component is a light element. The fluorescent X-ray analysis apparatus possesses a sample base supporting the sample, an X-ray source irradiating a primary X-ray with a predetermined irradiation position being made a center, and a detector disposed toward the irradiation position and detecting a fluorescent X-ray generated from the sample. The sample base has a detachable sample holding tool fixing the sample while being approached to the X-ray source and the detector, and a measurement is possible by selectively disposing the sample in any one of a 1st inspection position in which an irradiated face is coincided with the irradiation position, or a 2nd inspection position in which the sample is fixed to the sample holding tool, an irradiated face is approached to the X-ray source, and an inspected face is approached to the detector.

Abstract translation: 提供了一种荧光X射线分析装置，其中检测下限得到改善，并且可以对不仅在主要成分是重元素的样品中含有的痕量目标元素进行定量，而且还可以定量 主要组件是轻元素。 荧光X射线分析装置具有支撑样品的样品基底，以预定照射位置为中心照射初级X射线的X射线源和朝向照射位置设置的检测器， 从样品中产生的光线。 样品基底具有可拆卸的样品保持工具，其在接近X射线源和检测器的同时固定样品，并且可以通过选择性地将样品放置在照射的面一致的第一检查位置中的任一个中来进行测量 或者将样品固定在样品保持工具上的第二检查位置，将照射面接近X射线源，将检查面靠近检测器。

公开(公告)号：US07614287B2

公开(公告)日：2009-11-10

申请号：US11842722

申请日：2007-08-21

Applicant: Masato Iyoki ,  Hiroyoshi Yamamoto

Inventor： Masato Iyoki ,  Hiroyoshi Yamamoto

IPC: G01B5/28

CPC classification number: G01Q20/00 ,  G01Q10/04 ,  G01Q30/18 ,  G01Q70/02

Abstract: A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it. The displacement detection mechanism (112) for a scanning probe microscope comprising a supporting section (22) for supporting a cantilever (20), a light source (114) for irradiating a reflective surface (14) with light, and a light receiving section (121) for receiving light reflected off the reflective surface (14), and detecting displacement of the cantilever (20) based on the light receiving position of the light receiving section (121), wherein the rear end of the cantilever (20) is secured to the supporting section (22), and the above light is allowed to impinge on the reflective surface (14), while inclining toward the X axis and Y axis, from above regions B and C on the distal end side of the cantilever (20) out of regions A, B, C and D sectioned, when viewed from the above, by the Y axis extending in the longitudinal direction of the cantilever (20) and the X axis passing through the reflective surface (14) and extending in the direction intersecting the Y axis perpendicularly.

Abstract translation: 即使将物镜或照明系统配置在样本或悬臂的上方或下方，也可以以高精度快速进行测量的扫描探针显微镜以及包括该扫描探针显微镜的扫描探针显微镜。 一种用于扫描探针显微镜的位移检测机构（112），包括用于支撑悬臂（20）的支撑部分（22），用于用光照射反射表面（14）的光源（114）和光接收部分 121），用于接收从所述反射表面（14）反射的光，以及基于所述光接收部分（121）的光接收位置检测所述悬臂（20）的位移，其中所述悬臂（20）的后端被固定 到所述支撑部分（22），并且当所述悬臂（20）的远端侧上方的区域B和C向X轴和Y轴倾斜时，允许上述光照射在所述反射表面（14）上 ）在从上方观察的区域A，B，C和D中，通过沿悬臂（20）的纵向方向延伸的Y轴和穿过反射表面（14）的X轴延伸并在 方向垂直于Y轴 。

公开(公告)号：US07511289B2

公开(公告)日：2009-03-31

申请号：US11799973

申请日：2007-05-03

Applicant: Takashi Kaito

Inventor： Takashi Kaito

IPC: H01J37/08 ,  H01L21/306

CPC classification number: H01J37/3056 ,  H01J2237/31744

Abstract: A working method of performing beam assist deposition or beam assist etching of a sample comprises irradiating a focused charged particle beam onto a region of the sample, and blowing a predetermined gas through a gas blowing nozzle toward the sample region while the focused charged particle beam passes through a passage in a side portion of the gas blowing nozzle and irradiates the sample region. The passage may be a slot provided in the side portion of the gas blowing nozzle such that the focused charged particle beam passes through an inside of the slot. The slot terminates at one end near a tip of the gas blowing nozzle, and the one end of the slot terminates at and opens into the interior of the gas blowing nozzle.

Abstract translation: 对样品进行光束辅助沉积或光束辅助蚀刻的工作方法包括将聚焦的带电粒子束照射到样品的区域上，并且在聚焦的带电粒子束通过时将预定气体通过气体吹送喷嘴吹向样品区域 通过气体吹入喷嘴的侧部的通道并照射样品区域。 通道可以是设置在气体吹出喷嘴的侧部中的狭缝，使得聚焦的带电粒子束穿过槽的内部。 该槽在气体喷嘴的尖端附近的一端处终止，并且槽的一端终止于并且通向气体吹出喷嘴的内部。

公开(公告)号：US07507957B2

公开(公告)日：2009-03-24

申请号：US11216389

申请日：2005-08-31

Applicant: Masamichi Fujihira ,  Masatoshi Yasutake ,  Tatsuaki Ataka

Inventor： Masamichi Fujihira ,  Masatoshi Yasutake ,  Tatsuaki Ataka

IPC: G01N23/00

CPC classification number: G01Q30/14 ,  G01Q10/06 ,  Y10S977/853 ,  Y10S977/86 ,  Y10S977/862 ,  Y10S977/869 ,  Y10S977/871

Abstract: A problem to be resolved by the invention resides in providing a multifunction analyzing apparatus for detecting a shape with high resolution and physical property information capable of not only successively reading a base arrangement from end to end but also specifying a position hybridized by known RNA with regard to a single piece of DNA elongated in one direction on a board. A microscope system of the invention is provided with a fluorescence microscope, a scanning near field microscope and a scanning probe microscope as a detecting system, the microscopes are fixed to a switching mechanism and can be moved to a position at which the various microscopes can observe the same portion of a sample by switching operation of the mechanism. The microscope system of the invention is provided with a function capable of directly detecting a shape and physical property information of one piece of DNA by the scanning probe microscope by multifunction scanning.

Abstract translation: 本发明要解决的问题在于提供一种用于检测具有高分辨率和物理属性信息的形状的多功能分析装置，其不仅能够从一端到另一端连续读取基本排列，而且还指定与已知RNA杂交的位置 到在板上沿一个方向伸长的单个DNA。 本发明的显微镜系统设置有荧光显微镜，扫描型近场显微镜和扫描探针显微镜作为检测系统，将显微镜固定在切换机构上，并可移动到各种显微镜可以观察到的位置 通过切换机构的操作来获取样品的相同部分。 本发明的显微镜系统具有能够通过扫描探针显微镜通过多功能扫描直接检测一片DNA的形状和物理性质信息的功能。

公开(公告)号：US07495215B2

公开(公告)日：2009-02-24

申请号：US11322180

申请日：2005-12-28

Applicant: Hiroyuki Akinaga ,  Yasuyuki Semba ,  Hiroshi Yokoyama ,  Masatoshi Yasutake ,  Hiromi Kuramochi

Inventor： Hiroyuki Akinaga ,  Yasuyuki Semba ,  Hiroshi Yokoyama ,  Masatoshi Yasutake ,  Hiromi Kuramochi

IPC: G01N23/00

CPC classification number: G01Q60/56 ,  G01Q70/12 ,  Y10S977/84 ,  Y10S977/842 ,  Y10T428/30

Abstract: The present invention provides a probe for a scanning magnetic force microscope having a resolution sufficient to allow observation of a magnetic storage medium with 1200 kFCI or higher recording densities, a method for producing the probe, and a method for forming a ferromagnetic alloy film on a carbon nanotube. In the context of the present invention, the probe for a scanning magnetic force microscope comprises a carbon nanotube whose surface is at least in part coated with a ferromagnetic alloy film consisting of any one of a Co—Fe alloy and a Co—Ni alloy, wherein the arithmetic mean roughness (Ra 10 μm) of the surface of the ferromagnetic alloy film is controlled to 1.15 nm or less. A method for producing such probes for a scanning magnetic force microscope and a method for forming such a ferromagnetic alloy film on a carbon nanotube, so as to achieve such mean surface roughness by controlling the growth rate of the ferromagnetic alloy film within the range of 1.0 to 2.5 nm/min, is also disclosed.

Abstract translation: 本发明提供了一种扫描磁力显微镜的探针，其具有足以允许观察具有1200kFCI或更高记录密度的磁存储介质的分辨率的扫描磁力显微镜，该探针的制造方法以及用于形成铁磁性合金膜的方法 碳纳米管。 在本发明的上下文中，用于扫描磁力显微镜的探针包括其表面至少部分地涂覆有由Co-Fe合金和Co-Ni合金中的任一种构成的铁磁性合金膜的碳纳米管， 其中铁磁性合金膜的表面的算术平均粗糙度（Ra 10 mum）被控制在1.15nm以下。 一种用于扫描磁力显微镜的这种探针的制造方法以及在碳纳米管上形成这种铁磁性合金膜的方法，以便通过将铁磁性合金膜的生长速度控制在1.0的范围内来实现这种平均表面粗糙度 至2.5nm / min。

公开(公告)号：US07442942B2

公开(公告)日：2008-10-28

申请号：US11509520

申请日：2006-08-24

Applicant: Haruo Takahashi ,  Toshiaki Fujii ,  Yutaka Ikku ,  Kouji Iwasaki ,  Yo Yamamoto

Inventor： Haruo Takahashi ,  Toshiaki Fujii ,  Yutaka Ikku ,  Kouji Iwasaki ,  Yo Yamamoto

IPC: H01J37/20

CPC classification number: H01J37/304 ,  G01N1/32 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing by irradiating a gas-ion beam onto a surface of the sliced specimen, a specimen stage on which the sliced specimen is fixed and having at least one or more rotation axis, a specimen posture recognition means recognizing positional relation of the sliced specimen with respect to the specimen stage and a specimen stage control means controlling the specimen stage based on a specimen posture recognized by the posture recognition means and an installation angle of the gas-ion beam irradiation apparatus in order to allow an incident angle of the gas-ion beam with respect to the obverse or the reverse of the sliced specimen to be a desired value.

Abstract translation: 为了包括聚焦离子束装置，通过加工试样和观察切片试样来制造切片样品，观察切片试样的扫描电子显微镜，气相离子束照射装置，通过将气体离子束照射到 切片试样的表面，切片试样固定并具有至少一个以上的旋转轴的试样台，识别切片试样相对于试样台的位置关系的试样姿势识别装置和试样台控制 意味着基于由姿势识别装置识别的样本姿势和气体离子束照射装置的安装角度来控制样本台，以便允许气体离子束相对于正面或反向的入射角 切片样品为期望值。

公开(公告)号：US07442925B2

公开(公告)日：2008-10-28

申请号：US11370006

申请日：2006-03-04

Applicant: Masatoshi Yasutake ,  Takuya Nakaue ,  Kazutoshi Watanabe ,  Osamu Takaoka ,  Atsushi Uemoto ,  Naoya Watanabe ,  Yoshiteru Shikakura

Inventor： Masatoshi Yasutake ,  Takuya Nakaue ,  Kazutoshi Watanabe ,  Osamu Takaoka ,  Atsushi Uemoto ,  Naoya Watanabe ,  Yoshiteru Shikakura

IPC: G01N13/16

CPC classification number: G01N23/225 ,  G01Q60/34

Abstract: The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.

Abstract translation: 本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。 本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。 该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。

公开(公告)号：US07398678B2

公开(公告)日：2008-07-15

申请号：US11145869

申请日：2005-06-06

Applicant: Yoshikazu Nakayama ,  Takashi Okawa ,  Shigenobu Yamanaka ,  Akio Harada ,  Masatoshi Yasutake ,  Yoshiharu Shirakawabe

Inventor： Yoshikazu Nakayama ,  Takashi Okawa ,  Shigenobu Yamanaka ,  Akio Harada ,  Masatoshi Yasutake ,  Yoshiharu Shirakawabe

IPC: G01B5/28

CPC classification number: G01Q60/04 ,  G01Q60/08 ,  G01Q60/16 ,  G01Q60/38 ,  G01Q60/54 ,  G01Q60/56 ,  G01Q70/12

Abstract: A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the outside, thus allowing the tip end to be used as a probe needle end for detecting signals. A coating film is formed to cover all or part of the surface of this base end portion, and the nanotube is thus firmly fastened to the cantilever. Since the base end portion adheres tightly to the palladium covering film, both of them are electrically continuous. This palladium covering film allows, as an electrode film, the application of a voltage to the nanotube or the passage of an electric current through the nanotube, showing also good adhesion to the nanotube and cantilever.

Abstract translation: 扫描显微镜探针，其中在悬臂的突出部分的表面上形成钯覆盖膜，并且纳米管的基端部设置成与钯覆盖膜接触，其中纳米管的末端部突出到 从而允许尖端用作检测信号的探针针端。 形成涂膜以覆盖该基端部的全部或部分表面，并且因此将纳米管牢固地固定在悬臂上。 由于基端部紧密地附着在钯覆盖膜上，所以两者都是电连续的。 这种钯覆膜可以作为电极膜，对纳米管施加电压或使电流通过纳米管，对纳米管和悬臂也表现出良好的粘附性。