公开(公告)号：US20150170945A1

公开(公告)日：2015-06-18

申请号：US14569293

申请日：2014-12-12

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Mikio Segawa ,  Yasushi Taniyama ,  Mitsuo Natsume ,  Atsushi Suzuki ,  Toshihiro Kawai ,  Kunihiko Sato

IPC: H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67017 ,  H01L21/67115 ,  H01L21/67766 ,  H01L21/67772 ,  H01L21/67778

Abstract: An EFEM includes a housing 3 that constitutes a wafer transport chamber 9 that is substantially closed by connecting load ports 4 to an opening 31a provided on a wall 31, and connecting a processing apparatus 6; a wafer transport apparatus 2, and transports a wafer between the processing apparatus 6 and the FOUPs 7 mounted on the load ports 4; a gas delivery port 11; a gas suction port 12; a gas feedback path 10; and a FFU 13 that includes a filter 13b that is provided in the gas delivery port 11, and eliminates particles contained in the delivered gas, wherein the gas in the wafer transport chamber 9 is circulated by generating a downward gasflow in the wafer transport chamber 9 and feeding back the gas through the gas feedback path 10.

Abstract translation: EFEM包括壳体3，其构成通过将负载端口4连接到设置在壁31上的开口31a而基本上闭合的晶片运送室9，并且连接处理装置6; 晶片传送装置2，并且在处理装置6和安装在装载端口4上的FOUP 7之间传送晶片; 气体输送口11; 气体吸入口12; 气体反馈路径10; 以及FFU13，其包括设置在气体输送口11中的过滤器13b，并且消除了包含在输送气体中的颗粒，其中晶片输送室9中的气体通过在晶片输送室9中产生向下的气流而循环 并且通过气体反馈路径10反馈气体。

公开(公告)号：US20140354205A1

公开(公告)日：2014-12-04

申请号：US14289886

申请日：2014-05-29

Applicant: SINFONIA TECHNOLOGY CO., LTD. ,  KOBELCO CONSTRUCTION MACHINERY CO., LTD.

Inventor： Takeshi Tomizaki ,  Yuichi Hamaguchi ,  Takeo Ito ,  Akira Nakazumi ,  Yusuke Kamimura

IPC: H02P21/00

CPC classification number: H02P21/22 ,  H02J2007/0067 ,  H02P3/24

Abstract: There is provided a motor controller capable of suppressing the rotation of a motor at the time of discharging an electric accumulator, and a construction machine provided with the motor controller. A motor controller 10 is provided with a current controller 1 for controlling an electric current supplied from an electric accumulator E to a motor M, and a rotation detector 2 for detecting the rotation of the motor M. The current controller 1 supplies only a d-axis current to the motor M according to a discharge command. If the rotation of the motor M is detected by the rotation detector 2 at the time of discharging the electric accumulator E, the current controller 1 controls the d-axis current so as to suppress the rotation of the motor M.

Abstract translation: 提供一种电动机控制器，其能够抑制放电蓄电器时的电动机的旋转，以及设置有电动机控制器的施工机械。 电动机控制器10设置有用于控制从蓄电器E供给到电动机M的电流的电流控制器1和用于检测电动机M的旋转的旋转检测器2.电流控制器1仅提供d- 根据放电指令对电动机M的轴电流。 如果在放电蓄电池E时由旋转检测器2检测到电动机M的旋转，则电流控制器1控制d轴电流以抑制电动机M的旋转。

公开(公告)号：US20140338288A1

公开(公告)日：2014-11-20

申请号：US14199051

申请日：2014-03-06

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Manabu Funato ,  Mitsuo Natsume ,  Mitsutoshi Ochiai

IPC: H01L21/677

CPC classification number: H01L21/67706 ,  H01L21/67265 ,  H01L21/67379 ,  H01L21/67772 ,  H01L21/67775

Abstract: A load port device comprises a link mechanism that has a main moving link whose one end is connected with a door holding member in a rotatable manner, a guide that bends and extends from a horizontal direction to a vertical direction and that guides one end of the main moving link, a main moving block with which the other end of the main moving link is connected in a rotatable manner and a door hoisting shaft that extends in the vertical direction and that moves the main moving block in the extending direction. The link mechanism allows the end of the main moving link to move from the horizontal direction to the vertical direction or from the vertical direction to the horizontal direction along the guide in a state that the other end of the main moving link moves to the vertical direction.

Abstract translation: 一种装载口装置包括连杆机构，该连杆机构的一端以可旋转的方式与门保持部件连接的主移动连杆，从水平方向向垂直方向弯曲并延伸的导向件， 主移动连杆，主移动链节的另一端以可旋转方式连接的主移动块和沿垂直方向延伸并使主移动块沿延伸方向移动的门提升轴。 连杆机构允许主移动链节的端部在主移动链节的另一端移动到垂直方向的状态下沿着引导件从水平方向移动到垂直方向或者从竖直方向移动到水平方向 。

公开(公告)号：US20130326841A1

公开(公告)日：2013-12-12

申请号：US13762991

申请日：2013-02-08

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Mitsuo Natsume ,  Atsushi Suzuki

IPC: B08B9/093

CPC classification number: B08B9/093 ,  H01L21/67393 ,  H01L21/67775

Abstract: A purge nozzle unit 1 includes a nozzle main body 2 including a trunk 41 and a collar section 8 protruding outward from the trunk 41 and a holder 3 including a side wall 31 that is in slidable contact with an outward face of the collar section 8 and a bottom wall 33 having a through hole 32 with which an outward face of the trunk 41 is in slidable contact and is configured such that a vent 30 in communication with the outside is formed in the holder 3 and the nozzle main body 2 is vertically moved relative to the holder 3 by regulating a pressure in a pressure-regulated space S formed between the nozzle main body 2 and the holder 3 and in communication with the vent 30.

Abstract translation: 吹扫喷嘴单元1包括喷嘴主体2，喷嘴主体2包括行李箱41和从行李箱41向外突出的轴环部分8以及具有与轴环部分8的外表面可滑动接触的侧壁31的支架3，以及 具有贯通孔32的底壁33，其中躯干41的外表面可与滑动接触并且构造成使得在保持器3中形成与外部连通的通气口30，并且喷嘴主体2垂直移动 通过调节形成在喷嘴主体2和保持器3之间并与通气口30连通的压力调节空间S中的压力来相对于保持器3。

公开(公告)号：US20130308281A1

公开(公告)日：2013-11-21

申请号：US13732881

申请日：2013-01-02

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Takenori Motoori ,  Hideaki Moriya ,  Hidetoshi Katada

IPC: H05K5/00 ,  H05K13/00

CPC classification number: H05K5/0004 ,  H01L21/50 ,  H05K5/0247 ,  H05K7/1427 ,  H05K13/00 ,  Y10T29/49117

Abstract: The Electronic Module has a body case 2, including a plurality of case members 3, 4 and that has an internal space (S) where a first opening P1 is formed on one side surface of the internal space and a second opening P2 that opens in a direction different from that of the first opening P1 is in an exposed state when a plurality of the case members are separated each other, a substrate 5 on which a sensor IC 51 is mounted and that is housed in the internal space of the body case, and a resin body 6 that covers the substrate 5 by being filled in the internal space of the body case and solidified or hardened, and is characterized by that a plurality of the case members and the substrate 5 are integrated by the use of the resin body 6 as an accouplement.

Abstract translation: 电子模块具有主体壳体2，其包括多个壳体部件3,4，并且具有内部空间（S），其中第一开口P1形成在内部空间的一个侧表面上，第二开口P2打开 当多个壳体部件彼此分离时，与第一开口P1的方向不同的方向处于暴露状态;安装有传感器IC51的基板5，并且容纳在主体壳体的内部空间中 以及树脂体6，其通过填充在主体壳体的内部空间中并固化或硬化而覆盖基板5，其特征在于，多个壳体构件和基板5通过使用树脂 身体6作为附件。

公开(公告)号：US20130183122A1

公开(公告)日：2013-07-18

申请号：US13740721

申请日：2013-01-14

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Takumi Mizokawa ,  Yasuyoshi Kitazawa

IPC: H01L21/677

CPC classification number: H01L21/67739 ,  H01L21/67201

Abstract: The wafer transport apparatus prevents contaminant deposited on an unprocessed wafer from adhering to a processed wafer. Carrying-in load port 2A is loaded with a FOUP 1 storing an unprocessed wafer W1. Carrying-in chamber 3A has a transport robot 4A which takes out the unprocessed wafer W1 from the FOUP 1. Carrying-in load lock 5A is accessed by the transport robot 4A from the carrying-in chamber 3A side. Carrying-out load port 2B is loaded with the FOUP 1 that can store a processed wafer W2. Carrying-out chamber 3B has a transport robot 4B which passes the processed wafer W2 to the FOUP 1. Carrying-out load lock 5B is accessed by the transport robot 4B from the carrying-out chamber 3B side. The carrying-in chamber 3A and carrying-out chamber 3B are separated from each other. The carrying-in load lock 5A and carrying-out load lock 5B are arranged on different stages.

Abstract translation: 晶片输送装置防止沉积在未处理的晶片上的污染物粘附到经处理的晶片上。 载入装载口2A装载有存储未加工的晶片W1的FOUP1。 搬运室3A具有从FOUP1取出未处理的晶片W1的输送机器人4A。搬运机械手4A从搬运室3A侧接收搬运装载锁5A。 执行装载端口2B装载有可存储经处理的晶片W2的FOUP 1。 搬运室3B具有将处理后的晶片W2通过FOUP1的搬送机械手4B。搬运机械手4B从搬送室3B侧进入搬运装载锁5B。 搬入室3A和搬出室3B彼此分离。 承载加载锁5A和执行装载锁5B布置在不同的级上。

公开(公告)号：US12249868B2

公开(公告)日：2025-03-11

申请号：US17672017

申请日：2022-02-15

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Hiroki Wakabayashi ,  Tatsuya Nemoto ,  Toshiaki Kawabata ,  Takakuni Iitsuka

IPC: H02K1/16 ,  H02K1/20 ,  H02K3/24

Abstract: A rotating electric machine 100 having a rotor 1, a stator 2, and a coil 3 including a coil conductor 31 wound around teeth 21b provided on at least one of the rotor 1 and the stator 2 includes a spacer section 42 configured to extend along a slot S formed between the teeth 21b and to be inserted between turns of the coil conductor 31 to define a gap G between the turns, and a cooling medium supply section 6 configured to distribute a cooling medium in the gap G. A notched section 421 cut out in such a manner that a widthwise dimension of the spacer section 42 is relatively short is provided in a middle of an extension of the spacer section 42.

公开(公告)号：US20240420980A1

公开(公告)日：2024-12-19

申请号：US18816049

申请日：2024-08-27

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Masahiro Osawa ,  Toshihiro Kawai

IPC: H01L21/673

Abstract: An EFEM includes a housing having a substantially closed substrate transfer space in the housing and a control part configured to perform a control of supplying an inert gas into at least the housing. The control part includes an inert gas total supply amount setting part configured to set a total supply amount of the inert gas to be supplied into the housing; a door open/purge determination part configured to determine whether a container door of a substrate storage container is in an open state and whether a purge device is performing a purge process; and an in-housing inert gas supply amount calculation part configured to calculate a supply amount of the inert gas to be supplied into the housing. The supply amount of the inert gas to be supplied into the housing is determined according to an inert gas supply amount command value determined based on a calculation result.

公开(公告)号：US12131933B2

公开(公告)日：2024-10-29

申请号：US17880555

申请日：2022-08-03

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Tatsuru Ogawa ,  Yuki Ishihara ,  Toshiya Sugimoto

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67772 ,  H01L21/67265 ,  H01L21/67778

Abstract: There is provided a load port, including: a frame including an opening via which a transfer target object is capable of passing in a substantially horizontal posture; a load port door configured to engage with a container door capable of opening and closing a loading/unloading port of a storage container including slots capable of accommodating the transfer target object in a multi-stage manner, and to open and close the opening of the frame; and a mapping mechanism configured to map information on an accommodation state including presence or absence of the transfer target object in each of the slots in the storage container via the opening and the loading/unloading port.

公开(公告)号：US20240355652A1

公开(公告)日：2024-10-24

申请号：US18643387

申请日：2024-04-23

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Gengoro Ogura ,  Toshihiro Kawai

IPC: H01L21/67

CPC classification number: H01L21/67196

Abstract: An EFEM includes: a housing including a transfer chamber where a processing object is transferred; and a connection module provided between the transfer chamber and a front chamber of a processing apparatus configured to perform a predetermined process on the processing object, and connect the transfer chamber and the front chamber, wherein the housing includes a rear member formed with a housing side opening through which the processing object is capable of passing, wherein the connection module includes: a first connection member arranged around the housing side opening when viewed from a depth direction in which the housing and the front chamber are arranged, and attached to the rear member; and a second connection member arranged around a front chamber side opening formed in the front chamber so as to allow the processing object to pass therethrough when viewed from the depth direction, and attached to the front chamber.