公开(公告)号：US07018683B2

公开(公告)日：2006-03-28

申请号：US10867865

申请日：2004-06-15

Applicant: Osamu Takaoka ,  Ryoji Hagiwara

Inventor： Osamu Takaoka ,  Ryoji Hagiwara

IPC: C23C16/00

CPC classification number: C23C16/486 ,  C23C16/52

Abstract: A microscopic projection or a characteristic pattern are formed in the vicinity of a region to be processed before processing using electron beam CVD, during processing an image of a region containing the projection or pattern formed by electron beam CVD is captured to obtain a current position of the projection or pattern, a difference between the position before staring and the current position is treated as a drift amount and processing is restarted at a region that has been subjected to microscopic adjustment of the electron irradiation region.

Abstract translation: 在使用电子束CVD处理之前，在要处理的区域附近形成微观投影或特征图案，在处理期间，捕获包含通过电子束CVD形成的突起或图案的区域的图像，以获得当前位置 将投影或图案之间的位置之间的差异与当前位置之间的差值作为漂移量进行处理，并且在经过电子照射区域的微观调整的区域重新开始处理。

公开(公告)号：US06948356B2

公开(公告)日：2005-09-27

申请号：US10913110

申请日：2004-08-06

Applicant: Nobuaki Okubo ,  Jun Nagasawa

Inventor： Nobuaki Okubo ,  Jun Nagasawa

IPC: G01N19/00 ,  G01N3/00 ,  G01N3/32 ,  G01N11/00

CPC classification number: G01N3/32 ,  G01N2203/0016 ,  G01N2203/0021 ,  G01N2203/0023 ,  G01N2203/0025 ,  G01N2203/0075 ,  G01N2203/0094 ,  G01N2203/0222 ,  G01N2203/0226

Abstract: A viscoelasticity measuring instrument for measuring a viscoelasticity of a sample has a temperature detection control unit for obtaining, prior to a practical measurement operation, a measurement executable temperature range for the sample by an experimental temperature control operation and application of AC power. A main measurement control unit carries out a viscoelasticity measurement operation within the temperature range obtained by the temperature detection control unit.

Abstract translation: 用于测量样品的粘弹性的粘弹性测量仪具有温度检测控制单元，用于在实际的测量操作之前，通过实验温度控制操作和AC功率的应用获得样品的测量可执行温度范围。 主要测量控制单元在由温度检测控制单元获得的温度范围内执行粘弹性测量操作。

公开(公告)号：US06941798B2

公开(公告)日：2005-09-13

申请号：US10663302

申请日：2003-09-16

Applicant: Takehiro Yamaoka ,  Kazutoshi Watanabe ,  Kazunori Ando ,  Yoshiharu Shirakawabe

Inventor： Takehiro Yamaoka ,  Kazutoshi Watanabe ,  Kazunori Ando ,  Yoshiharu Shirakawabe

IPC: G01Q10/02 ,  G01Q10/06 ,  G01Q60/24 ,  G01Q60/50 ,  G01Q90/00 ,  G01N13/10 ,  G01B5/28 ,  G01N13/16 ,  G12B21/24

CPC classification number: G01Q70/04 ,  G01Q10/065 ,  Y10S977/85

Abstract: A scanning probe is microscope has a cantilever having a probe at a disal end thereof and an oscillator for generating a resonance signal near a resonance of the cantilever. A vibrating device receives the resonance signal as a driving signal for vibrating the cantilever. A variable gain amplifier adjusts a gain of displacement signal corresponding to displacement of the vibrating cantilever so as to satisfy the equation G=(A/A0)*G0 to control a quality factor value of the cantilever resonance to an optimal quality factor value, where G represents a gain value of the variable gain amplifer, A represents a preselected oscillation amplitude of the oscillator, A0 represents an initial oscillation amplitude of the oscillator, and G0 represents a gain value of the variable gain amplifier when the initial oscillation amplitude of the oscillator is A0.

Abstract translation: 扫描探针是显微镜，具有在其末端具有探针的悬臂和用于在悬臂共振附近产生共振信号的振荡器。 振动装置接收谐振信号作为振动悬臂的驱动信号。 可变增益放大器调整与振动悬臂的位移相对应的位移信号的增益，以满足等式G =（A / A 0 ）* G 0 < 悬臂共振的质量因子值到最优质量因子值，其中G表示可变增益放大器的增益值，A表示振荡器的预选振荡幅度，A <0>表示初始振荡 当振荡器的初始振荡幅度为A <0> 0时，振荡器的振幅和G 0 <0>表示可变增益放大器的增益值。

公开(公告)号：US06901349B2

公开(公告)日：2005-05-31

申请号：US10644717

申请日：2003-08-20

Applicant: Jun Nagasawa

Inventor： Jun Nagasawa

IPC: G01N25/20 ,  G01N25/00 ,  G01V13/00 ,  G21C17/112 ,  G01N27/18 ,  G06F19/00

CPC classification number: G01V13/00

Abstract: An analysis apparatus has a measurement head for measuring characteristics of a sample, a calibration conditions file comprising at least one calibration condition obtained by carrying out device calibration for the measurement head in advance, and a measurement head controller for designating one of the calibration conditions within the calibration conditions file. Measurement sequence data comprised of a sequence of measurement steps has measurement conditions for carrying out measurements by the measurement head and the calibration conditions designated by the measurement head controller. A measurement device refers to each measurement step of the measurement sequence data and carries out measurement after inputting the measurement conditions and the calibration conditions for each measurement step to the measurement head.

Abstract translation: 分析装置具有用于测量样本特性的测量头，包括通过预先对测量头进行设备校准获得的至少一个校准条件的校准条件文件，以及用于指定校准条件之一的测量头控制器 校准条件文件。 由测量步骤序列组成的测量序列数据具有用于通过测量头进行测量的测量条件和由测量头控制器指定的校准条件。 测量装置是指测量序列数据的每个测量步骤，并且在将测量条件和每个测量步骤的校准条件输入到测量头之后进行测量。

公开(公告)号：US06897450B2

公开(公告)日：2005-05-24

申请号：US09978258

申请日：2001-10-15

Applicant: Akira Yonezawa

Inventor： Akira Yonezawa

IPC: H01J37/145 ,  H01J37/28 ,  H01J37/20

CPC classification number: H01J37/145 ,  H01J2237/28

Abstract: A magnetic pole of a magnetic field type lens is divided into a first magnetic pole section that is at ground potential, and a second magnetic pole section facing a sample and to which a negative high voltage is applied, the first magnetic pole section and the second magnetic pole section 212 being electrically insulated from each other, and an electric field type bi-potential lens is made up of an electrode attached to the first magnetic pole section so as to surround an electron beam path. High resolution observation with small chromatic aberration factor Cs, Cc is made possible without forming a positive high voltage section inside an electron beam path of a lens barrel.

Abstract translation: 磁场型透镜的磁极被分成位于地电位的第一磁极部分和面向样品的第二磁极部分，并且施加负的高电压，第一磁极部分和第二磁极部分 磁极部分212彼此电绝缘，并且电场型双电位透镜由附接到第一磁极部分的电极组成以包围电子束路径。 可以在镜筒的电子束路径内形成正高压部分的情况下，可以实现小色差因子Cs，Cc的高分辨率观察。

公开(公告)号：US06838685B1

公开(公告)日：2005-01-04

申请号：US10629217

申请日：2003-07-29

Applicant: Toshio Kodama ,  Masakatsu Hasuda ,  Toshiaki Fujii ,  Kouji Iwasaki ,  Yasuhiko Sugiyama ,  Yasuyuki Takagi

Inventor： Toshio Kodama ,  Masakatsu Hasuda ,  Toshiaki Fujii ,  Kouji Iwasaki ,  Yasuhiko Sugiyama ,  Yasuyuki Takagi

IPC: G01N1/28 ,  G01N1/32 ,  H01J37/26 ,  H01J37/305 ,  H01J37/31 ,  H01J37/317

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J2237/2007 ,  H01J2237/20214 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An ion beam processing device has a sample holder for fixing a sample on which a section has been formed by irradiation of a specified focused ion beam from a surface side, and gas ion beam irradiation device for irradiating a gas ion beam to a region of the sample fixing using the holder member that contains the section to remove a damage layer on the section. The gas ion beam from the gas ion beam irradiation device irradiates the section from a rear surface side of the sample at a specified incident angle.

公开(公告)号：US08912503B2

公开(公告)日：2014-12-16

申请号：US13564802

申请日：2012-08-02

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01J1/42 ,  G01T1/00 ,  G01N23/083

CPC classification number: G01N23/083 ,  G01N2223/3307

Abstract: A transmission X-ray analyzer for detecting a transmission X-ray image of a sample that moves relatively in a predetermined scanning direction includes; a time delay and integration (TDI) sensor including a plurality of stages of line sensors including the plurality of two-dimensionally arranged image pickup devices arranged in a direction perpendicular to the predetermined scanning direction, being configured to transfer charge accumulated in one line sensor to an adjacent subsequent line sensor; a shield unit for shielding a part of the image of light entering the TDI sensor by moving back and forth in the predetermined scanning direction, the shield unit being disposed between the TDI sensor and the sample; and a shield unit position control unit for controlling a position of the shield unit so as to shield a predetermined number of stages of line sensors among the plurality of stages of line sensors.

Abstract translation: 用于检测在预定扫描方向上相对移动的样品的透射X射线图像的透射X射线分析仪包括： 包括多个行传感器的时间延迟和积分（TDI）传感器，其包括沿垂直于预定扫描方向布置的多个二维布置的图像拾取装置，其被配置为将一行传感器中累积的电荷转移到 相邻的后续线传感器; 屏蔽单元，用于通过在预定扫描方向上前后移动来屏蔽进入TDI传感器的光的一部分图像，该屏蔽单元设置在TDI传感器和样本之间; 以及屏蔽单元位置控制单元，用于控制屏蔽单元的位置，以便屏蔽多级行传感器中的预定数量的行传感器级。

公开(公告)号：US08664598B2

公开(公告)日：2014-03-04

申请号：US12931411

申请日：2011-01-28

Applicant: Masakatsu Hasuda ,  Atsushi Uemoto ,  Toshiaki Fujii ,  Junichi Tashiro

Inventor： Masakatsu Hasuda ,  Atsushi Uemoto ,  Toshiaki Fujii ,  Junichi Tashiro

IPC: H01J37/29

CPC classification number: G01N23/225 ,  H01J37/28

Abstract: An electron microscope has a focused ion beam column positioned relative to an electron beam column so that the focused ion beam substantially perpendicularly intersects the electron beam. A backscattered electron detector is positioned relative to the focused ion beam column so that the direction normal to a detection plane of the backscattered electron detector is substantially perpendicular to the direction of the focused ion beam. The backscattered electron detector is configured and positioned to detect backscattered electrons released in a spread of at least about 70 degrees in width from the surface of the section by irradiation of the section with the electron beam 1a.

Abstract translation: 电子显微镜具有相对于电子束柱定位的聚焦离子束柱，使得聚焦离子束基本上垂直于电子束相交。 反向散射电子检测器相对于聚焦离子束柱定位，使得垂直于后向散射电子检测器的检测平面的方向基本上垂直于聚焦离子束的方向。 背散射电子检测器被配置和定位成通过照射具有电子束1a的部分来检测从该部分的表面以宽度至少约70度的扩散中释放的反向散射电子。

公开(公告)号：US08642958B2

公开(公告)日：2014-02-04

申请号：US13065237

申请日：2011-03-17

Applicant: Haruo Takahashi ,  Masakatsu Hasuda

Inventor： Haruo Takahashi ,  Masakatsu Hasuda

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/206 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: There is provided a composite charged particle beam apparatus, in which a first rotation axis of a rotatable stage intersects a beam irradiation axis of a FIB column and a beam irradiation axis of an SEM so as to be substantially perpendicular thereto, respectively, at a sample observing position, the rotatable stage is provided with a supporting member which can be rotated with respect to the first rotation axis, and the supporting member is connected to a movement mechanism which can dispose the sample at the sample observing position.

Abstract translation: 提供一种复合带电粒子束装置，其中可旋转台的第一旋转轴线与FIB柱的光束照射轴线和SEM的光束照射轴线分别在样品处大致垂直于其 观察位置时，可旋转台设置有能够相对于第一旋转轴线旋转的支撑构件，并且支撑构件连接到可将样品置于样品观察位置的移动机构。

公开(公告)号：US08601608B2

公开(公告)日：2013-12-03

申请号：US11887348

申请日：2006-03-30

Applicant: Kenichi Maruyama ,  Koji Suzuki ,  Masato Iyoki

Inventor： Kenichi Maruyama ,  Koji Suzuki ,  Masato Iyoki

IPC: G01Q60/22

CPC classification number: G01Q60/06 ,  G01Q60/60

Abstract: A microscope including both an atomic force microscope and a near-field optical microscope and capable of performing electrochemical measurements and a cantilever for the microscope are disclosed. A pointed light transmitting material employed as the probe of an atomic force microscope is coated with a metal layer; the metal layer is further coated with an insulating layer; the insulating layer is removed only at the distal end to expose the metal layer; the slightly exposed metal layer is employed as a working electrode; and the probe can be employed not only as the probe of the atomic force microscope and the near-field optical microscope but also as the electrode of an electrochemical microscope. Consequently, the microscope can have the functions of an atomic force microscope, a near-field optical microscope and an electrochemical microscope.

Abstract translation: 公开了包括原子力显微镜和近场光学显微镜并且能够进行电化学测量并且用于显微镜的悬臂的显微镜。 用作原子力显微镜的探针的尖锐透光材料涂覆有金属层; 金属层进一步涂覆有绝缘层; 绝缘层仅在远端被去除以暴露金属层; 使用轻微暴露的金属层作为工作电极; 该探针不仅可以用作原子力显微镜和近场光学显微镜的探针，而且可以用作电化学显微镜的电极。 因此，显微镜可以具有原子力显微镜，近场光学显微镜和电化学显微镜的功能。