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    WIRELESS TECHNIQUE FOR MICROACTIVATION
    161.
    发明申请
    WIRELESS TECHNIQUE FOR MICROACTIVATION 失效
    微波无线技术

    公开(公告)号：US20080072593A1

    公开(公告)日：2008-03-27

    申请号：US10449351

    申请日：2003-05-30

    Applicant: Ken Clements

    Inventor： Ken Clements

    IPC: F01B29/10 ,  F02G1/04

    CPC classification number: F03G7/065 ,  B81B3/0029 ,  B81B2201/038 ,  B82Y15/00 ,  C21D2201/01 ,  C22C13/00 ,  C22F1/006 ,  F05B2250/84 ,  Y10S977/725 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/89

    Abstract: The present invention is a method and apparatus for achieving high work output per unit volume in micro-robotic actuators, and in particular TiNi actuators. Such actuators are attractive as a means of powering nano-robotic movement, and are being developed for manipulation of structures at near the molecular scale. In these very small devices (one micron scale), one means of delivery of energy is by electron beams. Movement of mechanical structures a few microns in extent has been demonstrated in a scanning electron microscope. Results of these and subsequent experiments will be described, with a description of potential structures for fabricating moving a microscopic x-y stage.

    Abstract translation: 本发明是一种用于在微型机器人致动器，特别是TiNi致动器中实现每单位体积的高工作输出的方法和装置。 这样的致动器作为对纳米机器人运动的供电的手段是有吸引力的，并且正在开发用于在分子规模附近的结构的操纵。 在这些非常小的器件（一微米级）中，一种能量传递方式是电子束。 已经在扫描电子显微镜中证明了在几微米范围内的机械结构的移动。 将描述这些和随后的实验的结果，并描述了用于制造移动微观x-y阶段的潜在结构。

    Piezoelectric actuator array and manufacturing method
    162.
    发明授权
    Piezoelectric actuator array and manufacturing method 失效
    压电致动器阵列及制造方法

    公开(公告)号：US07342349B2

    公开(公告)日：2008-03-11

    申请号：US10635408

    申请日：2003-08-06

    Applicant: Tatsuo Kawaguchi ,  Koji Kimura

    Inventor： Tatsuo Kawaguchi ,  Koji Kimura

    IPC: H01L41/08

    CPC classification number: H01L27/20 ,  B81B7/04 ,  B81B2201/038 ,  B81C3/002 ,  G02B6/3502 ,  G02B6/3514 ,  G02B6/3544 ,  G02B6/3578 ,  G02B26/0858 ,  H01L41/053

    Abstract: There is disclosed a one-dimensional piezoelectric actuator array 1 houses a piezoelectric device 35 including a plate or pillar-shaped piezoelectric member 4 and electrodes 18, 19, and having a planar form; the device 35 being driven by a piezoelectric effect of the piezoelectric member 4. The piezoelectric device 35 is formed as a whole in a planar comb shape wherein comb teeth 26 are connected to one another in one end, and portions of the comb teeth 26 work as a plurality of driving portions 31. The guide substrate 2 and piezoelectric device substrate 3 are integrally unified in such a manner that the resultant is readily usable for the formation of a multiply stuck structural body. In case of need, the array may be further provided with a guide substrate 2 having a concave portion 9 for housing at least a part of the piezoelectric device substrate 3.

    Abstract translation: 公开了一维压电致动器阵列1，其容纳包括板状或柱状的压电部件4的压电器件35和具有平面形状的电极18,19。 装置35由压电构件4的压电效应驱动。压电装置35整体形成为平面梳形，其中梳齿26在一端彼此连接，梳齿26的一部分工作 作为多个驱动部31.引导基板2和压电装置基板3以能够容易地形成多重卡住结构体的方式一体地一体化。 在需要的情况下，阵列还可以设置有具有用于容纳压电器件基板3的至少一部分的凹部9的引导基板2。

    Method of Manufacturing an Electronic Device and Electronic Device
    163.
    发明申请
    Method of Manufacturing an Electronic Device and Electronic Device 有权
    电子设备和电子设备的制造方法

    公开(公告)号：US20070222007A1

    公开(公告)日：2007-09-27

    申请号：US10578026

    申请日：2004-10-26

    Applicant: Jozef Van Beek ,  Mathieu Joseph Ulenaers

    Inventor： Jozef Van Beek ,  Mathieu Joseph Ulenaers

    IPC: H01L29/84 ,  H01L21/00

    CPC classification number: H01G5/18 ,  B81B3/0078 ,  B81B2201/016 ,  B81B2201/038 ,  B81B2203/04 ,  B81B2203/053 ,  H01H59/0009 ,  H01H2057/006 ,  H01H2239/01

    Abstract: A method for manufacturing a micro-electromechanical systems (MEMS) device, comprising providing a base layer (10) and a mechanical layer (12) on a substrate (14), providing a sacrificial layer (16) between the base layer (10) and the mechanical layer (12), providing an etch stop layer (18) between the sacrificial layer (16) and the substrate (14), and removing the sacrificial layer (16) by means of dry chemical etching, wherein the dry chemical etching is performed using a fluorine-containing plasma, and the etch stop layer (18) comprises a substantially non-conducting, fluorine chemistry inert material, such as HfO2, ZrO2, Al2O3 or TiO2.

    Abstract translation: 一种用于制造微机电系统（MEMS）装置的方法，包括在基底（14）上提供基底层（10）和机械层（12），在基底层（10）之间提供牺牲层（16） 和所述机械层（12），在所述牺牲层（16）和所述衬底（14）之间提供蚀刻停止层（18），以及通过干法化学蚀刻去除所述牺牲层（16），其中所述干化学蚀刻 使用含氟等离子体进行，并且蚀刻停止层（18）包括基本上不导电的氟化学惰性材料，例如HfO 2，ZrO 2， ，Al 2 O 3 3或TiO 2。

    Electrostatic bimorph actuator
    164.
    发明授权
    Electrostatic bimorph actuator 有权
    静电双压电晶片致动器

    公开(公告)号：US07249856B2

    公开(公告)日：2007-07-31

    申请号：US10868603

    申请日：2004-06-14

    Applicant: Michael J. Sinclair

    Inventor： Michael J. Sinclair

    IPC: G03B21/28 ,  G03B21/00 ,  G02F1/00 ,  G02B26/00

    CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

    Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

    Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

    Double-electret mems actuator
    166.
    发明申请
    Double-electret mems actuator 失效
    双驻极体元件执行器

    公开(公告)号：US20060066934A1

    公开(公告)日：2006-03-30

    申请号：US10506653

    申请日：2003-03-11

    Applicant: Martin Selbrede

    Inventor： Martin Selbrede

    IPC: G02B26/00

    CPC classification number: B81B3/0018 ,  B81B3/0035 ,  B81B2201/038 ,  H01H59/0009 ,  H01H2059/009 ,  H02N1/006 ,  H04R19/01

    Abstract: An actuator (100) taking advantage of ponderomotive forces to enhance its electromechanical performance as a function of input energy. An actuator (100) may include a first conductive layer (102) residing on a first electret layer (101). The actuator (100) may further include a moveable second electret layer (103) which is spaced apart in relation to the first conductive layer (102) when the second electret layer (103) is in a quiescent state. The actuator (100) may further include a second conductive layer (104) in a spaced apart relation to the second electret layer (103) when the second electret layer (103) is in the quiescent state. The actuator (100) may further include a voltage source (105) configured to selectively apply a voltage between the first (102) and second (104) conductive layers thereby propelling the second electret layer (103) to either the first (102) or second (104) conductive layer.

    Abstract translation: 利用运动力的致动器（100）作为输入能量的函数增强其机电性能。 致动器（100）可以包括驻留在第一驻极体层（101）上的第一导电层（102）。 致动器（100）还可以包括可移动的第二驻极体层（103），当第二驻极体层（103）处于静止状态时，其相对于第一导电层（102）间隔开。 当第二驻极体层（103）处于静止状态时，致动器（100）还可以包括与第二驻极体层（103）间隔开的第二导电层（104）。 致动器（100）还可以包括被配置为在第一（102）和第二（104）导电层之间选择性地施加电压的电压源（105），从而将第二驻极体层（103）推进到第一（102）或 第二（104）导电层。

    Electro-thermal scratch drive actuator
    167.
    发明授权
    Electro-thermal scratch drive actuator 失效
    电热刮刀驱动执行器

    公开(公告)号：US06877316B1

    公开(公告)日：2005-04-12

    申请号：US10719266

    申请日：2003-11-21

    Applicant: Niladri Sarkar ,  Aaron Geisberger ,  Matthew Ellis

    Inventor： Niladri Sarkar ,  Aaron Geisberger ,  Matthew Ellis

    IPC: B81B3/00 ,  F01B29/10

    CPC classification number: B81B3/0024 ,  B81B2201/031 ,  B81B2201/038 ,  B81B2203/051

    Abstract: A scratch drive actuator (SDA) device comprising a drive shoe and an actuator. The drive shoe has a first drive shoe position and a second drive shoe position and is configured to urge a shuttle from a first shuttle position to a second shuttle position. The actuator is coupled to the drive shoe and is configured to expand and contract in response to exposure to thermal energy, wherein the expansion and contraction of the actuator each urge the drive shoe towards a corresponding one of the first and second drive shoe positions.

    Abstract translation: 包括驱动靴和致动器的刮擦驱动致动器（SDA）装置。 驱动靴具有第一驱动靴位置和第二驱动靴位置，并且构造成将穿梭从第一穿梭位置推动到第二穿梭位置。 致动器联接到驱动靴并且被配置为响应于暴露于热能而膨胀和收缩，其中致动器的膨胀和收缩将每个驱动靴推向第一和第二驱动靴位置中相应的一个。

    MEMS based motor
    169.
    发明申请
    MEMS based motor 失效
    基于MEMS的电机

    公开(公告)号：US20040119354A1

    公开(公告)日：2004-06-24

    申请号：US10730472

    申请日：2003-12-08

    Inventor： Akio Takada ,  Ching Biing Yeo ,  Cheow Tong Cheng ,  Shun Kayama

    IPC: H02K005/16 ,  H02K007/08 ,  F16C032/06

    CPC classification number: H02K21/24 ,  B81B5/00 ,  B81B2201/0242 ,  B81B2201/038 ,  F16C17/045 ,  F16C17/10 ,  F16C33/107 ,  H02K7/088

    Abstract: A MEMS (micro-electromechanical system) device having a rotor 44, a stator 43 and a shaft 27 connected to the stator 43 and around which the rotor 44 rotates. Grooves 47 are formed in a portion of the rotor 44, such that when the rotor 44 rotates an air bearing is formed for supporting the rotor 44 and maintaining its distance from the shaft 27 and stator 43. The rotor 44 is formed from joining two substrates 13, 23. One of the substrates 13 includes a surface having openings 7 including frustoconical walls, and one of the substrates 23 includes a surface having openings 15 including walls perpendicular to the surface of the substrate. The openings in the two substrates are in register with each other so that pairs of the openings form chambers 24. Each chamber 24 is provided with a shaft 27, which is positioned with a wide section of the shaft trapped in the chamber 24. The wide section of the shaft has a frustoconical surface facing the frustoconical walls of the chamber 24.

    Abstract translation: 具有转子44，定子43和连接到定子43并且转子44旋转的轴27的MEMS（微机电系统）装置。 凹槽47形成在转子44的一部分中，使得当转子44旋转时，形成用于支撑转子44并保持其与轴27和定子43的距离的空气轴承。转子44由接合两个基板 基板13中的一个包括具有包括截头圆锥形壁的开口7的表面，并且其中一个基板23包括具有垂直于基板表面的壁的开口15的表面。 两个基板中的开口彼此对准，使得成对的开口形成室24.每个室24设置有轴27，轴27被定位成具有被截留在室24中的轴的宽部分。宽 轴的截面具有面向腔室24的截头圆锥形壁的截头圆锥体表面。

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