Methods of forming hemispherical grained silicon on a template on a semiconductor work object
    171.
    发明申请
    Methods of forming hemispherical grained silicon on a template on a semiconductor work object 失效
    在半导体工件上的模板上形成半球形晶粒硅的方法

    公开(公告)号:US20050032326A1

    公开(公告)日:2005-02-10

    申请号:US10943337

    申请日:2004-09-17

    CPC classification number: H01L28/84 H01L28/90

    Abstract: The present invention provides a method of preparing a surface of a silicon wafer for formation of HSG structures. The method contemplates providing a wafer having at least one HSG template comprising polysilicon formed in BPSG, the HSG template being covered by silicon dioxide. The wafer is treated with a cleaning agent to clean the surface of the wafer. Next, the wafer is treated with a conditioning agent. The conditioning agent removes native oxide from the HSG template without excessively etching structural BPSG. Preferably, the conditioning agent also removes a thin layer of polysilicon on the HSG template. The wafer is then transferred to a process chamber for HSG formation.

    Abstract translation: 本发明提供一种制备用于形成HSG结构的硅晶片的表面的方法。 该方法考虑提供具有包含在BPSG中形成的多晶硅的至少一个HSG模板的晶片,HSG模板被二氧化硅覆盖。 用清洁剂处理晶片以清洁晶片的表面。 接下来,用调理剂处理晶片。 调理剂从HSG模板中除去天然氧化物,而不会过度蚀刻结构BPSG。 优选地,调理剂还在HSG模板上除去薄层的多晶硅。 然后将晶片转移到用于HSG形成的处理室。

    Methods of forming hemispherical grained silicon on a template on a semiconductor work object

    公开(公告)号:US06828193B2

    公开(公告)日:2004-12-07

    申请号:US10174696

    申请日:2002-06-18

    CPC classification number: H01L28/84 H01L28/90

    Abstract: The present invention provides a method of preparing a surface of a silicon wafer for formation of HSG structures. The method contemplates providing a wafer having at least one HSG template comprising polysilicon formed in BPSG, the HSG template being covered by silicon dioxide. The wafer is treated with a cleaning agent to clean the surface of the wafer. Next, the wafer is treated with a conditioning agent. The conditioning agent removes native oxide from the HSG template without excessively etching structural BPSG. Preferably, the conditioning agent also removes a thin layer of polysilicon on the HSG template. The wafer is then transferred to a process chamber for HSG formation.

    Method of forming hemisphere grained silicon on a template on a semiconductor work object
    176.
    发明授权
    Method of forming hemisphere grained silicon on a template on a semiconductor work object 失效
    在半导体工件上的模板上形成半球晶粒的方法

    公开(公告)号:US06544842B1

    公开(公告)日:2003-04-08

    申请号:US09303385

    申请日:1999-05-01

    CPC classification number: H01L28/84 H01L28/90

    Abstract: The present invention provides a method of preparing a surface of a silicon wafer for formation of HSG structures. The method contemplates providing a wafer having at least one HSG template comprising polysilicon formed in BPSG, the HSG template being covered by silicon dioxide. The wafer is treated with a cleaning agent to clean the surface of the wafer. Next, the wafer is treated with a conditioning agent. The conditioning agent removes native oxide from the HSG template without excessively etching structural BPSG. Preferably, the conditioning agent also removes a thin layer of polysilicon on the HSG template. The wafer is then transferred to a process chamber for HSG formation.

    Abstract translation: 本发明提供一种制备用于形成HSG结构的硅晶片的表面的方法。 该方法考虑提供具有包含在BPSG中形成的多晶硅的至少一个HSG模板的晶片,HSG模板被二氧化硅覆盖。 用清洁剂处理晶片以清洁晶片的表面。 接下来,用调理剂处理晶片。 调理剂从HSG模板中除去天然氧化物,而不会过度蚀刻结构BPSG。 优选地,调理剂还在HSG模板上除去薄层的多晶硅。 然后将晶片转移到用于HSG形成的处理室。

    Replacement metal gate transistors with reduced gate oxide leakage
    180.
    发明授权
    Replacement metal gate transistors with reduced gate oxide leakage 有权
    替代金属栅极晶体管,栅极氧化物泄漏减少

    公开(公告)号:US08445975B2

    公开(公告)日:2013-05-21

    申请号:US13290275

    申请日:2011-11-07

    Abstract: A semiconductor device has a substrate, a gate dielectric layer, and a metal gate electrode on the gate dielectric layer. The gate dielectric layer includes an oxide layer having a dielectric constant (k) greater than 4, and silicon concentrated at interfaces of the oxide layer with the substrate and with the metal gate electrode. A method of fabricating a semiconductor device includes forming a removable gate over a substrate with a gate dielectric layer between the removable gate and the substrate, forming a dielectric layer over the substrate and exposing an upper surface of the removable gate, removing the removable gate leaving an opening in the dielectric layer, forming a protective layer on the gate dielectric layer and lining the opening, and forming a metal gate electrode in the opening. The protective layer has a graded composition between the gate dielectric layer and the metal gate electrode.

    Abstract translation: 半导体器件在栅极电介质层上具有衬底,栅极电介质层和金属栅电极。 栅极电介质层包括介电常数(k)大于4的氧化物层,并且硅集中在氧化物层与衬底和金属栅电极的界面处。 一种制造半导体器件的方法包括在衬底上形成可移除栅极,在可移除栅极和衬底之间具有栅极电介质层,在衬底上形成电介质层并露出可移除栅极的上表面,去除可移除栅极离开 在电介质层中形成开口,在栅极电介质层上形成保护层并衬套开口,并在开口中形成金属栅电极。 保护层在栅极电介质层和金属栅电极之间具有渐变组成。

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