公开(公告)号：US07086139B2

公开(公告)日：2006-08-08

申请号：US10836136

申请日：2004-04-30

申请人： Kim Y. Lee ,  Jyh-Shuey Jerry Lo

发明人： Kim Y. Lee ,  Jyh-Shuey Jerry Lo

IPC分类号： G11B5/127 ,  G11B5/187

CPC分类号： G11B5/1878 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49052

摘要： A pedestal is formed over a first pole piece layer and insulator materials are formed to surround it. A gap layer made of a non-magnetic insulator or metal is then formed over the pedestal and the insulator, followed by the optional formation of a seed layer. A second pole piece is formed over the gap layer with or without the seed layer by forming a patterned resist using E-beam lithography and electroplating second pole piece materials within the patterned resist. After milling to remove side portions of the gap layer and the optional seed layer, a chemical etch is performed to remove a top portion of the insulator materials. The pedestal is then notched and trimmed by ion milling using the second pole piece as a mask to form a central notched structure. Since the second pole piece is precisely centered over the pedestal prior to notching, the pedestal is notched symmetrically to form a notched structure having side walls with angled slopes.

摘要翻译： 在第一极片层上形成基座，并且形成绝缘体材料以围绕它。 然后在基座和绝缘体上形成由非磁性绝缘体或金属制成的间隙层，随后可选地形成种子层。 通过在图案化的抗蚀剂内使用电子束光刻和电镀第二极片材料形成图案化的抗蚀剂，形成具有或不具有种子层的间隙层上的第二极片。 在研磨以除去间隙层和任选种子层的侧面部分之后，进行化学蚀刻以去除绝缘体材料的顶部。 然后通过使用第二极片作为掩模的离子铣削将基座切口并修整以形成中心的切口结构。 由于第二极靴在开槽之前精确地位于基座上方，因此基座被对称地切口以形成具有斜边的侧壁的凹口结构。

公开(公告)号：US06220914B1

公开(公告)日：2001-04-24

申请号：US09449201

申请日：1999-11-24

申请人： Kim Y. Lee ,  Tai-Hon Philip Chang ,  Marian Mankos ,  C. Neil Berglund

发明人： Kim Y. Lee ,  Tai-Hon Philip Chang ,  Marian Mankos ,  C. Neil Berglund

IPC分类号： H01J902

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70375 ,  H01J1/34 ,  H01J37/073 ,  H01J2237/31779

摘要： A photocathode having a gate electrode so that modulation of the resulting electron beam is accomplished independently of the laser beam. The photocathode includes a transparent substrate, a photoemitter, and an electrically separate gate electrode surrounding an emission region of the photoemitter. The electron beam emission from the emission region is modulated by voltages supplied to the gate electrode. In addition, the gate electrode may have multiple segments that are capable of shaping the electron beam in response to voltages supplied individually to each of the multiple segments.

摘要翻译： 具有栅极的光电阴极，使得所得电子束的调制独立于激光束而实现。 光电阴极包括透明基板，光电发射器和围绕发光体的发射区域的电分离的栅电极。 来自发射区域的电子束发射由供给栅电极的电压调制。 此外，栅电极可以具有多个段，其能够响应于单独提供给多个段中的每一个的电压而使电子束成形。

公开(公告)号：US08900655B2

公开(公告)日：2014-12-02

申请号：US11542129

申请日：2006-10-04

申请人： Bing K. Yen ,  David S. Kuo ,  Dieter K. Weller ,  Kim Y. Lee ,  Koichi Wago

发明人： Bing K. Yen ,  David S. Kuo ,  Dieter K. Weller ,  Kim Y. Lee ,  Koichi Wago

IPC分类号： B05D5/12 ,  G11B5/73 ,  G11B5/65 ,  G11B5/855

CPC分类号： G11B5/732 ,  G11B5/656 ,  G11B5/7325 ,  G11B5/855

摘要： A method of fabricating a patterned perpendicular magnetic recording medium comprises steps of: (a) providing a layer stack including a magnetically soft underlayer (“SUL”) and an overlying non-magnetic interlayer; (b) forming a masking layer on the non-magnetic interlayer; (c) forming a resist layer on the masking layer; (d) forming a pattern of recesses extending through the resist layer and exposing spaced apart surface portions of the masking layer; (e) extending the pattern of recesses through the masking layer to expose spaced apart surface portions of the interlayer; and (f) at least partially filling the pattern of recesses with a magnetically hard material to form a perpendicular magnetic recording layer.

摘要翻译： 制造图案化的垂直磁记录介质的方法包括以下步骤：（a）提供包括磁软底层（“SUL”）和上覆非磁性中间层的层堆叠; （b）在非磁性中间层上形成掩模层; （c）在掩模层上形成抗蚀剂层; （d）形成延伸穿过抗蚀剂层并露出掩模层的间隔开的表面部分的凹陷图案; （e）将凹槽的图案延伸穿过掩模层以暴露中间层的间隔开的表面部分; 和（f）至少部分地用磁性硬的材料填充凹槽的图案以形成垂直的磁记录层。

公开(公告)号：US07986493B2

公开(公告)日：2011-07-26

申请号：US11946535

申请日：2007-11-28

申请人： Dieter Weller ,  Timothy J. Klemmer ,  Kim Y. Lee

发明人： Dieter Weller ,  Timothy J. Klemmer ,  Kim Y. Lee

IPC分类号： G11B5/82

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/012 ,  G11B5/743 ,  G11B5/855 ,  G11B5/865 ,  G11B2005/0029

摘要： A magnetic recording medium with domain wall pinning sites including a substrate, a soft magnetic underlayer, and a magnetic recording layer overlying the soft magnetic underlayer. In one embodiment the magnetic recording layer has at least two grooves providing a track having first and second sidewalls formed by the grooves. The sidewalls provide a plurality of pinning sites formed between the sidewalls for pinning magnetic domain walls in the track. At least one of the pinning sites includes a first indentation in the first sidewall and a paired second indentation in the second sidewall. In one embodiment data can be stored within the magnetic recording layer by positioning a write head adjacent the track and inducing at least two magnetic domains defining a domain wall. The domain wall migrates to one of the pinning sites in the track.

摘要翻译： 具有域壁钉扎位置的磁记录介质，包括衬底，软磁性底层和覆盖软磁性底层的磁记录层。 在一个实施例中，磁记录层具有至少两个沟槽，提供具有由凹槽形成的第一和第二侧壁的轨道。 侧壁提供在侧壁之间形成的多个钉扎位置，用于钉住轨道中的磁畴壁。 钉扎位置中的至少一个包括第一侧壁中的第一凹陷和第二侧壁中的成对的第二凹陷。 在一个实施例中，数据可以通过将写头定位在轨道附近并且诱导限定域壁的至少两个磁畴来存储在磁记录层内。 域墙迁移到轨道中的一个钉扎位置。

公开(公告)号：US20100107402A1

公开(公告)日：2010-05-06

申请号：US12685455

申请日：2010-01-11

申请人： Christian Rene Bonhote ,  Jila Tabib ,  Dennis Richard Mckean ,  Daniel Wayne Bedell ,  Jyh-Shuey Lo ,  Hieu Lam ,  Kim Y. Lee

发明人： Christian Rene Bonhote ,  Jila Tabib ,  Dennis Richard Mckean ,  Daniel Wayne Bedell ,  Jyh-Shuey Lo ,  Hieu Lam ,  Kim Y. Lee

IPC分类号： G11B5/127 ,  B05D3/02

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49048 ,  Y10T29/49052

摘要： One preferred method for use in making a device structure with use of the resist channel shrinking solution includes the steps of forming a first pedestal portion within a channel of a patterned resist; applying a resist channel shrinking solution comprising a resist channel shrinking film and corrosion inhibitors within the channel of the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel of the patterned resist; removing the resist channel shrinking solution; and forming a second pedestal portion within the reduced-width channel of the patterned resist. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pedestal during the act of baking the resist channel shrinking solution.

摘要翻译： 用于制造使用抗蚀剂通道收缩溶液的器件结构的一种优选方法包括在图案化抗蚀剂的通道内形成第一基座部分的步骤; 在图案化的抗蚀剂的通道内施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液，从而减小图案化抗蚀剂的通道的宽度; 去除抗蚀剂通道收缩溶液; 以及在所述图案化抗蚀剂的所述减小宽度的通道内形成第二基座部分。 有利地，抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用下降低了基座中的腐蚀。

公开(公告)号：US07652855B2

公开(公告)日：2010-01-26

申请号：US11595186

申请日：2006-11-09

申请人： James Mac Freitag ,  David Eugene Heim ,  Kuok San Ho ,  Wipul Pemsiri Jayasekara ,  Kim Y. Lee ,  Tsann Lin ,  Jyh-Shuey Lo ,  Mustafa Michael Pinarbasi ,  Ching Hwa Tsang

发明人： James Mac Freitag ,  David Eugene Heim ,  Kuok San Ho ,  Wipul Pemsiri Jayasekara ,  Kim Y. Lee ,  Tsann Lin ,  Jyh-Shuey Lo ,  Mustafa Michael Pinarbasi ,  Ching Hwa Tsang

IPC分类号： G11B5/39

CPC分类号： G11B5/3932 ,  B82Y10/00 ,  B82Y25/00 ,  G11B2005/3996

摘要： A lead overlay design of a magnetic sensor is described with sensor and free layer dimensions such that the free layer is stabilized by the large demagnetization field due to the shape anisotropy. In one embodiment the giant magnetoresistive (GMR) effect under the leads is destroyed by removing the antiferromagnetic (AFM) and pinned layers above the free layer. The overlaid lead pads are deposited on the exposed spacer layer at the sides of the mask that defines the active region. In other embodiment a layer of electrically insulating material is deposited over the sensor to encapsulate it and thereby insulate it from contact with the hardbias structures. Various embodiments with self-aligned leads are also described. In a variation of the encapsulation embodiment, the insulating material is also deposited under the lead pads so the electrical current is channeled through the active region of the sensor and sidewall deposited lead pads.

摘要翻译： 用传感器和自由层尺寸描述磁传感器的引线覆盖设计，使得由于形状各向异性，自由层由大的退磁场稳定。 在一个实施例中，引线下的巨磁阻（GMR）效应通过去除自由层上方的反铁磁（AFM）和固定层而被破坏。 覆盖的引线焊盘沉积在限定有源区的掩模侧面上的暴露间隔层上。 在另一个实施例中，电绝缘材料层沉积在传感器上以将其封装并由此使其与硬质合金结构的接触绝缘。 还描述了具有自对准引线的各种实施例。 在封装实施例的变型中，绝缘材料也沉积在引线焊盘下方，使得电流通过传感器的有源区域和侧壁沉积的引线焊盘。

公开(公告)号：US07497008B2

公开(公告)日：2009-03-03

申请号：US11211877

申请日：2005-08-24

申请人： Tsung Yuan Chen ,  Frederick Hayes Dill ,  James Mac Freitag ,  Kuok San Ho ,  Wipul Pemsiri Jayasekara ,  Kim Y. Lee ,  Mustafa Michael Pinarbasi ,  Ching Hwa Tsang ,  Patrick Rush Webb

发明人： Tsung Yuan Chen ,  Frederick Hayes Dill ,  James Mac Freitag ,  Kuok San Ho ,  Wipul Pemsiri Jayasekara ,  Kim Y. Lee ,  Mustafa Michael Pinarbasi ,  Ching Hwa Tsang ,  Patrick Rush Webb

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3932 ,  G11B5/3929 ,  G11B5/398 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： An embodiment of the invention is a magnetic head with overlaid lead pads that contact the top surface of the sensor between the hardbias structures and do not contact the hardbias structures which are electrically insulated from direct contact with the sensor. The lead pad contact area on the top of the sensor is defined by sidewall deposition of a conductive material to form leads pads on a photoresist prior to formation of the remainder of the leads. The conductive material for the lead pads is deposited at a shallow angle to maximize the sidewall deposition on the photoresist, then ion-milled at a high angle to remove the conductive material from the field while leaving the sidewall material. An insulation layer is deposited on the lead material at a high angle, then milled at a shallow angle to remove insulation from the sidewall.

摘要翻译： 本发明的一个实施例是具有覆盖的引线焊盘的磁头，该焊盘在硬质合金结构之间接触传感器的顶表面，并且不接触与传感器直接接触的电绝缘的硬质合金结构。 传感器顶部的引线焊盘接触区域由导电材料的侧壁沉积限定，以在形成其余引线之前在光致抗蚀剂上形成引线焊盘。 用于引线焊盘的导电材料以浅角度沉积，以使光致抗蚀剂上的侧壁沉积最大化，然后以高角度离子研磨，以从外界移除导电材料同时留下侧壁材料。 绝缘层以高角度沉积在引线材料上，然后以浅角度铣削以除去与侧壁的绝缘。

公开(公告)号：US07324311B2

公开(公告)日：2008-01-29

申请号：US10857095

申请日：2004-05-28

申请人： Kim Y. Lee ,  Tsann Lin

发明人： Kim Y. Lee ,  Tsann Lin

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/39

摘要： A magnetoresistive sensor having a trackwidth defined by AFM biasing layers disposed beneath a free layer of the sensor. The present invention provides a current in plane magnetoresistive sensor that includes a non-magnetic, electrically conductive layer in a trackwidth region. The non-magnetic, electrically conductive layer can be for example Ta, but could be some other material. This non-magnetic, electrically conductive layer has first and second laterally opposed sides and a planar upper surface. First and second insulating layers are formed at each of the sides of the non-magnetic, electrically conductive layer, and bias layers extend laterally outward from the insulation layers. The bias layers can be constructed of either an antiferromagnetic (AFM) material or could be constructed of a hard magnetic material such as CoPtCr. The bias layers have planar upper surfaces that are coplanar with the upper surface of the non-magnetic, electrically conductive layer.

摘要翻译： 具有由设置在传感器的自由层下方的AFM偏置层限定的轨道宽度的磁阻传感器。 本发明提供一种电流平面磁阻传感器，其包括轨道宽度区域中的非磁性导电层。 非磁性导电层可以是例如Ta，但可以是一些其它材料。 该非磁性导电层具有第一和第二横向相对的侧面和平坦的上表面。 第一和第二绝缘层形成在非磁性导电层的每个侧面，并且偏压层从绝缘层横向向外延伸。 偏置层可以由反铁磁（AFM）材料构成，或者可以由诸如CoPtCr的硬磁材料构成。 偏置层具有与非磁性导电层的上表面共面的平面上表面。

公开(公告)号：US07191508B2

公开(公告)日：2007-03-20

申请号：US10917591

申请日：2004-08-13

申请人： Cherngye Hwang ,  Kim Y. Lee ,  Gary McClelland ,  Dennis Richard McKean ,  Timothy Clark Reiley

发明人： Cherngye Hwang ,  Kim Y. Lee ,  Gary McClelland ,  Dennis Richard McKean ,  Timothy Clark Reiley

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3173 ,  G11B5/102 ,  G11B5/105 ,  G11B5/3106 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49041

摘要： A method for manufacturing thin-film magnetic head sliders is disclosed. Initially, an elastic layer, which may be made of poly-dimethyl siloxane (PDMS), is spun on a wafer and is thermally cured. Then, a resist layer is spun on the elastic layer. Both the resist layer and the elastic layer are subsequently peeled off together from the wafer. Next, the peeled resist layer/elastic layer is applied onto a group of magnetic heads with the resist layer in direct contact with the magnetic heads. Finally, the elastic layer is peeled off from the resist layer such that the resist layer remains attaching to the magnetic heads.

摘要翻译： 公开了一种制造薄膜磁头滑块的方法。 最初，可以由聚二甲基硅氧烷（PDMS）制成的弹性层在晶片上旋转并被热固化。 然后，在弹性层上旋转抗蚀剂层。 抗蚀剂层和弹性层随后从晶片一起剥离。 接下来，将剥离的抗蚀剂层/弹性层施加到一组磁头上，其中抗蚀剂层与磁头直接接触。 最后，弹性层从抗蚀剂层剥离，使得抗蚀剂层保持附着在磁头上。

公开(公告)号：US07172786B2

公开(公告)日：2007-02-06

申请号：US10845956

申请日：2004-05-14

申请人： Alexander Adrian Girling Driskill-Smith ,  Hieu Lam ,  Kim Y. Lee

发明人： Alexander Adrian Girling Driskill-Smith ,  Hieu Lam ,  Kim Y. Lee

IPC分类号： B05D5/12

CPC分类号： G11B5/855 ,  C25D3/562 ,  C25D5/022 ,  G11B5/858

摘要： The present invention discloses a method for the production of sub-micron structures on magnetic materials using electron beam lithography. A subtractive process is disclosed wherein a portion of a magnetic material layer is removed from the substrate using conventional lithography, and the remaining portion of the magnetic material layer is patterned by e-beam lithography. A additive process is also disclosed wherein a thin magnetic seed layer is deposited on the substrate, a portion of which is removed by conventional lithography and replaced with a non-magnetic conducting layer. The remaining portion of magnetic seed layer is patterned by e-beam lithography and the final magnetic structure produced by electroplating.

摘要翻译： 本发明公开了一种使用电子束光刻在磁性材料上生产亚微米结构的方法。 公开了一种消减方法，其中使用常规光刻将磁性材料层的一部分从衬底上除去，并且通过电子束光刻将磁性材料层的剩余部分图案化。 还公开了一种添加方法，其中将薄的磁性种子​​层沉积在基底上，其一部分通过常规的光刻法被去除并被非磁性导电层代替。 通过电子束光刻和通过电镀产生的最终磁性结构对磁性种子层的剩余部分进行构图。