Cantilever Microprobes for Contacting Electronic Components and Methods for Making Such Probes
    18.
    发明申请
    Cantilever Microprobes for Contacting Electronic Components and Methods for Making Such Probes 审中-公开
    用于接触电子元件的悬臂式微孔和制造这种探头的方法

    公开(公告)号:US20140231264A1

    公开(公告)日:2014-08-21

    申请号:US14260072

    申请日:2014-04-23

    Abstract: Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments are directed to methods for fabricating such cantilever structures. In some embodiments, for example, cantilever probes have extended base structures, slide in mounting structures, multi-beam configurations, offset bonding locations to allow closer positioning of adjacent probes, compliant elements with tensional configurations, improved over travel, improved compliance, improved scrubbing capability, and/or the like.

    Abstract translation: 本文公开的实施例涉及用于与电子电路等进行临时或永久接触的柔性探针结构。 具体地,实施例涉及悬臂式探针结构的各种设计。 一些实施例涉及制造这种悬臂结构的方法。 在一些实施例中,例如,悬臂探头具有延伸的基部结构,在安装结构中滑动,多光束配置,偏移粘合位置,以允许相邻探针,具有张力构型的柔顺元件,改善的行程,改善的顺应性,改进的擦洗 能力和/或类似物。

    Electrochemically Fabricated Structures Having Dielectric or Active Bases and Methods of and Apparatus for Producing Such Structures
    19.
    发明申请
    Electrochemically Fabricated Structures Having Dielectric or Active Bases and Methods of and Apparatus for Producing Such Structures 审中-公开
    具有电介质或活性碱的电化学结构和用于生产这种结构的方法和装置

    公开(公告)号:US20140209470A1

    公开(公告)日:2014-07-31

    申请号:US14184362

    申请日:2014-02-19

    CPC classification number: C25D1/003 B81C1/00373 B81C2201/0181 B81C2201/019

    Abstract: Multilayer structures are electrochemically fabricated on a temporary (e.g. conductive) substrate and are thereafter bonded to a permanent (e.g. dielectric, patterned, multi-material, or otherwise functional) substrate and removed from the temporary substrate. In some embodiments, the structures are formed from top layer to bottom layer, such that the bottom layer of the structure becomes adhered to the permanent substrate, while in other embodiments the structures are formed from bottom layer to top layer and then a double substrate swap occurs. The permanent substrate may be a solid that is bonded (e.g. by an adhesive) to the layered structure or it may start out as a flowable material that is solidified adjacent to or partially surrounding a portion of the structure with bonding occurring during solidification. The multilayer structure may be released from a sacrificial material prior to attaching the permanent substrate or it may be released after attachment.

    Abstract translation: 多层结构在临时的(例如导电的)衬底上电化学地制造,然后在永久(例如电介质,图案化,多材料或其他功能)的衬底上结合并从临时衬底去除。 在一些实施例中,结构由顶层到底层形成,使得结构的底层变得粘附到永久性基底上,而在其它实施例中,结构由底层到顶层形成,然后是双层衬底交换 发生。 永久性基材可以是与层状结构结合的固体(例如通过粘合剂),或者可以作为在凝固期间发生结合而邻近或部分地围绕结构的一部分固化的可流动材料开始。 多层结构可以在附着永久性基底之前从牺牲材料上释放,或者在附着后可以释放多层结构。

    Methods of and Apparatus for Electrochemically Fabricating Structures Interlaced Layers or Via Selective Etching and Filling of Voids
    20.
    发明申请
    Methods of and Apparatus for Electrochemically Fabricating Structures Interlaced Layers or Via Selective Etching and Filling of Voids 有权
    电化学结构的方法和装置隔行层或通过选择性蚀刻和填充空隙

    公开(公告)号:US20140151237A1

    公开(公告)日:2014-06-05

    申请号:US14065720

    申请日:2013-10-29

    Abstract: Multi-layer structures are electrochemically fabricated by depositing a first material, selectively etching the first material (e.g. via a mask), depositing a second material to fill in the voids created by the etching, and then planarizing the depositions so as to bound the layer being created and thereafter adding additional layers to previously formed layers. The first and second depositions may be of the blanket or selective type. The repetition of the formation process for forming successive layers may be repeated with or without variations (e.g. variations in: patterns; numbers or existence of or parameters associated with depositions, etchings, and or planarization operations; the order of operations, or the materials deposited). Other embodiments form multi-layer structures using operations that interlace material deposited in association with some layers with material deposited in association with other layers.

    Abstract translation: 通过沉积第一材料,选择性地蚀刻第一材料(例如经由掩模),沉积第二材料以填充由蚀刻产生的空隙,然后平坦化沉积物以便结合层,电化学地制造多层结构 被创建并且之后向之前形成的层添加附加层。 第一和第二沉积可以是毯子或选择类型。 用于形成连续层的形成过程的重复可以在有或没有变化(例如:在图案上的变化;与沉积,蚀刻和/或平面化操作相关联的数量或存在或参数的变化)中重复,操作顺序或沉积的材料 )。 其他实施例使用使用与其它层相关联地沉积的材料与一些层相关联地沉积材料的操作形成多层结构。

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