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公开(公告)号:US11817576B2
公开(公告)日:2023-11-14
申请号:US17183976
申请日:2021-02-24
Applicant: Applied Materials, Inc.
Inventor: Subramanya P. Herle , Dieter Haas
IPC: H01M4/36 , H01M4/38 , H01M4/587 , H01M4/62 , B32B27/08 , H01M4/13 , H01M4/139 , C23C14/56 , B32B27/28 , C23C14/14 , B32B15/08 , B32B7/04 , B32B27/34 , B32B15/09 , B32B27/30 , B32B15/082 , B32B27/36 , B32B7/06 , B32B15/04 , B32B27/40 , B32B15/085 , B32B27/32 , B32B15/088 , H01M4/04 , H01M4/133 , H01M4/134 , H01M4/1393 , H01M4/1395 , H01M10/0525 , H01M4/02
CPC classification number: H01M4/366 , B32B7/04 , B32B7/06 , B32B15/04 , B32B15/08 , B32B15/082 , B32B15/085 , B32B15/088 , B32B15/09 , B32B27/08 , B32B27/28 , B32B27/281 , B32B27/285 , B32B27/302 , B32B27/308 , B32B27/32 , B32B27/34 , B32B27/36 , B32B27/365 , B32B27/40 , C23C14/14 , C23C14/562 , H01M4/0404 , H01M4/13 , H01M4/133 , H01M4/134 , H01M4/139 , H01M4/1393 , H01M4/1395 , H01M4/364 , H01M4/382 , H01M4/386 , H01M4/587 , H01M4/628 , H01M10/0525 , B32B2270/00 , B32B2307/546 , B32B2307/732 , B32B2307/748 , B32B2457/00 , H01M2004/027
Abstract: In one implementation, an integrated processing tool for the deposition and processing of lithium metal in energy storage devices. The integrated processing tool may be a web tool. The integrated processing tool may comprises a reel-to-reel system for transporting a continuous sheet of material through the following chambers: a chamber for depositing a thin film of lithium metal on the continuous sheet of material and a chamber for depositing a protective film on the surface of the thin film of lithium metal. The chamber for depositing a thin film of lithium metal may include a PVD system, such as an electron-beam evaporator, a thin film transfer system, or a slot-die deposition system. The chamber for depositing a protective film on the lithium metal film may include a chamber for depositing an interleaf film or a chamber for depositing a lithium-ion conducting polymer on the lithium metal film.
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公开(公告)号:US11690255B2
公开(公告)日:2023-06-27
申请号:US18049868
申请日:2022-10-26
Applicant: Applied Materials, Inc.
Inventor: Ji-young Choung , Dieter Haas , Yu Hsin Lin , Jungmin Lee , Seong Ho Yoo , Si Kyoung Kim
IPC: H10K59/122 , H10K50/84 , H10K50/844 , H10K71/00 , H10K59/12
CPC classification number: H10K59/122 , H10K50/84 , H10K50/844 , H10K71/00 , H10K59/1201
Abstract: Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures with inorganic overhang structures disposed on the PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed on the OLED material. The device is made by a process including the steps of: depositing the OLED material and the cathode by evaporation deposition, and depositing an encapsulation layer disposed over the cathode.
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公开(公告)号:US11673170B2
公开(公告)日:2023-06-13
申请号:US16318052
申请日:2017-04-28
Applicant: Applied Materials, Inc.
Inventor: Jose Manuel Dieguez-Campo , Stefan Keller , Jae Won Lee , Takashi Anjiki , Dieter Haas
IPC: B08B7/04 , B08B3/08 , B08B7/00 , B08B9/08 , C23C14/12 , C23C14/24 , C23C14/56 , H01L51/00 , H01L51/56
CPC classification number: B08B7/04 , B08B3/08 , B08B7/0035 , B08B9/08 , C23C14/12 , C23C14/24 , C23C14/566 , H01L51/001 , H01L51/0011 , H01L51/56 , B08B2209/08
Abstract: The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.
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公开(公告)号:US20230180506A1
公开(公告)日:2023-06-08
申请号:US17653329
申请日:2022-03-03
Applicant: Applied Materials, Inc
Inventor: Jungmin LEE , Yu Hsin Lin , Chung-Chia Chen , Ji-young Choung , Dieter Haas , Si Kyoung Kim
CPC classification number: H01L51/5225 , H01L27/3246 , H01L51/5253 , H01L51/56
Abstract: Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The sub-pixel circuit includes a plurality of contact overhangs. The plurality of contact overhangs are disposed between adjacent sub-pixels of a sub-pixel circuit to be formed. The contact overhangs are formed over a metal grid exposed through a PDL structure. A cathode is deposited via evaporation deposition to be in contact with the contact overhang. The metal grid is perpendicular to a plurality of metal layers disposed on the substrate.
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公开(公告)号:US11665931B2
公开(公告)日:2023-05-30
申请号:US17881358
申请日:2022-08-04
Applicant: Applied Materials, Inc.
Inventor: Chung-Chia Chen , Ji Young Choung , Dieter Haas , Yu-Hsin Lin , Jungmin Lee , Wen-Hao Wu , Si Kyoung Kim
IPC: H01L27/32 , H01L51/56 , H01L51/52 , H10K59/122 , H10K50/844 , H10K71/00 , H10K102/00
CPC classification number: H10K59/122 , H10K50/844 , H10K71/00 , H10K2102/00
Abstract: Embodiments described herein relate to a device comprising a substrate, a pixel-defining layer (PDL) structures disposed over the substrate and defining sub-pixels of the device, and a plurality overhang structures. Each overhang structure is defined by a top structure extending laterally past a body structure. Each body structure is disposed over an upper surface of each PDL structure. Overhang structures define a plurality of sub-pixels including a first sub-pixel and a second sub-pixel. Each sub-pixel includes an anode, an organic light-emitting diode (OLED) material, a cathode, and an encapsulation layer. The OLED materials are disposed over the first anode and extends under the overhang structures. The cathodes are disposed over the OLED materials and under the overhang structures. The encapsulation layers are disposed over the first cathode. The first encapsulation layer has a first thickness and the second encapsulation layer has a second thickness different from the first thickness.
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公开(公告)号:US11552143B1
公开(公告)日:2023-01-10
申请号:US17661320
申请日:2022-04-29
Applicant: Applied Materials, Inc.
Inventor: Ji-young Choung , Jungmin Lee , Chung-Chia Chen , Yusin Lin , Dieter Haas , Si Kyoung Kim
Abstract: Embodiments described herein generally relate to sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes substrate, pixel-defining layer (PDL) structures disposed over the section of the substrate, inorganic or metal overhang structures disposed on an upper surface of the PDL structures, and a plurality of sub-pixels. The PDL structures include a trench disposed in the top surface of the PDL structure. Each sub-pixel includes an anode, an OLED material disposed over and in contact with the anode, and a cathode disposed over the OLED material. The inorganic or metal overhang structures have an overhang extension that extends laterally over the trench. An encapsulation layer is disposed over the cathode and extends under at least a portion of the inorganic or metal overhang structures and along a top surface of the PDL structures.
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公开(公告)号:US11348983B1
公开(公告)日:2022-05-31
申请号:US17647214
申请日:2022-01-06
Applicant: Applied Materials, Inc.
Inventor: Ji-Young Choung , Chung-Chia Chen , Yu Hsin Lin , Jungmin Lee , Dieter Haas , Si Kyoung Kim
Abstract: Sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in an organic light-emitting diode (OLED) display are described herein. The overhang structures are permanent to the sub-pixel circuit. The overhang structures include a conductive oxide. A first configuration of the overhang structures includes a base portion and a top portion with the top portion disposed on the base portion. In a first sub-configuration, the base portion includes the conductive oxide of at least one of a TCO material or a TMO material. In a second sub-configuration, the base portion includes a metal alloy material and the conductive oxide of a metal oxide surface. A second configuration of the overhang structures includes the base portion and the top portion with a body portion disposed between the base portion and the top portion. The body portion includes the metal alloy body and the metal oxide surface.
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公开(公告)号:US12120938B1
公开(公告)日:2024-10-15
申请号:US18390720
申请日:2023-12-20
Applicant: Applied Materials, Inc.
Inventor: Ji Young Choung , Dieter Haas , Yu-hsin Lin , Jungmin Lee , Seong Ho Yoo , Si Kyoung Kim
IPC: H10K59/80 , H10K59/122 , H10K59/173
CPC classification number: H10K59/873 , H10K59/122 , H10K59/173
Abstract: Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures with inorganic overhang structures disposed on the PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed on the OLED material. The device is made by a process including the steps of: depositing the OLED material and the cathode by evaporation deposition, and depositing an encapsulation layer disposed over the cathode.
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公开(公告)号:US12120925B2
公开(公告)日:2024-10-15
申请号:US18301805
申请日:2023-04-17
Applicant: Applied Materials, Inc.
Inventor: Chung-chia Chen , Ji Young Choung , Dieter Haas , Yu-hsin Lin , Jungmin Lee , Wen-Hao Wu , Si Kyoung Kim
IPC: H10K59/122 , H10K50/844 , H10K71/00 , H10K102/00
CPC classification number: H10K59/122 , H10K50/844 , H10K71/00 , H10K2102/00
Abstract: Embodiments described herein relate to a device comprising a substrate, a pixel-defining layer (PDL) structures disposed over the substrate and defining sub-pixels of the device, and a plurality overhang structures. Each overhang structure is defined by a top structure extending laterally past a body structure. Each body structure is disposed over an upper surface of each PDL structure. Overhang structures define a plurality of sub-pixels including a first sub-pixel and a second sub-pixel. Each sub-pixel includes an anode, an organic light-emitting diode (OLED) material, a cathode, and an encapsulation layer. The OLED materials are disposed over the first anode and extends under the overhang structures. The cathodes are disposed over the OLED materials and under the overhang structures. The encapsulation layers are disposed over the first cathode. The first encapsulation layer has a first thickness and the second encapsulation layer has a second thickness different from the first thickness.
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公开(公告)号:US11610952B2
公开(公告)日:2023-03-21
申请号:US17193347
申请日:2021-03-05
Applicant: Applied Materials, Inc.
Inventor: Ji-young Choung , Dieter Haas , Yu Hsin Lin , Jungmin Lee , Seong Ho Yoo , Si Kyoung Kim
Abstract: Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures with inorganic overhang structures disposed on the PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed on the OLED material. The device is made by a process including the steps of: depositing the OLED material and the cathode by evaporation deposition, and depositing an encapsulation layer disposed over the cathode.
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